Instruction manual

ISP-500C
Fit air-muffler ~
_ / Remove plug
Air-ilush
port
4.2.2 Start-up and shut-down
CD Start vacuum pump according to 4.1.1 Operation [page 21].
® Stop vacuum pump according to 4.1.2 Shut-down[page 21].
Important
Continuous evacuating of humid gas
When evacuating vacuum chamber while humidity in chamber is high, moisture volume drawn into pump
differs according to temperatu re and pressure in chamber.
When pumping vacuum chamber containing humid gas, be sure to open air-flush port and operate pump
(air-ilush operation).
Be careful not to damage air-flush port (especially air-muffler section) .
Damage to air-ilush port can cause failure.
When doing air-flush operation
Noise level will increase (by 7-8dB).
Install pump in an area which is not exposed to debris such as iron powder, stone powder ,
polish powder or wood dust.
Debris can clog air-muffler, undercutting air-ilush effect.
Be sure to close isolation valve between vacuum pump and vacuum chamber during pump
shut-<lown.
If vacuum pump stops during air-ilush operation, atmospheric air is drawn back from air-ilush port to inside of
vacuum pump, and vacuum on chamber side cannot be maintained. Be sure to close
isolation valve between
vacuum pump and vacuum chamber to prevent the drawback of debris from vacuum pump into vacuum chamber
before stopping vacuum pump.
When
0 eratin with air-ilush OFF closed , 0 erate as er 4.2.3 a e 23 .
4.2.3 When returning to standard operation
Before starting air-flush operation, first stop vacuum pump and proceed in
accordance with the following procedure. Never perform this procedure during
operation.
IRemove air-muffle~
CD Stop vacuum pump.
® Remove air-muffler from air-flush port.
@ Lightly fit plug to air-flush port with a spanner (nominal dia. 13mm).
* When restarting air-flush operation, refer to 4.2.1-4.2.2[page 22 - 23] and
prepare and start.
* Store removed air-muffler and pay attention not to misplace it.
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