Instruction manual

4.2 Air41ush operation
This pump is equipped with air-flush port. Before evacuating vapor, read
precautions below completely and be sure
to understand the contents.
iPurpose of air-flushi
Evacuating moisture or humid gas by vacuum pump can cause condensed water to
rema
in in pump. This remaining water can cause failure of ultimate pressure or
pump. Air-flush operation is necessary to exhaust the remaining water inside.
Air-flush operation does not only exhaust moisture but also restores ultimate
pressure.
* Vapor disposal vo lume is ma x. 25g/day, when doing air41ush operation(ambient temperature25°C,
humidity
60 % RH) .
Important
Maintenance interval of this pump is based on clean gas applications The standard differs
when evacuating vapor.
You must shorten maintenance interval (5.2[page 26]) when evacuating vapor since vapor temperature, disposal
vo lum e, disposal fr equency and substances in vapor have an influ ence on pump operation. When evacuating
vapor, pay attention to ali WARNING, CAUTION a nd Im portant notes (4 [page 19]).
4.2.1 Preparation
Before starting air-flush operation, first stop vacuum pump and proceed in
accordance with the following procedure. Never try to do air-flush operation during
operation.
IFit air-mufflerl
CD Stop vacuum pump.
~ Remove plug from air-flush port with a spanner (nominal dia. 13mm).
® Lightly fit the attached air-muffler to air-flush port.
?,:( Store the removed plug and do not misplace it.
ISP-250C
air-iTluffler
Remove plug
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