Instruction manual

4.1 Standard operation
4.1.1 Start-up
CD Check that blank flange of outlet is removed.
(g) Close isolation valve in order to prevent the drawback of debris attached to the
inside of vacuum pump into vacuum chamber due to pressure differential,
resulting
in vacuum break and pollution.
(Open leak valve if you use leak valve).
® Turn on vacuum pump.
@) Check start-up of vacuum pump and open isolation valve (close leak valve soon
after start-up if you use
leak valve) and evacuate vacuum chamber.
Important
When continuously operating pump at around ultimate pressure (for example, using as fore
line pump of turbo molecular pump) ,
It can cause for eig n matter or moisture to deposit inside pump, resulting in failure .
In that case, do air-flush operation or close isolation valve and open inlet to atmosphere for 3-5 seconds , 3- 5
times daily.
Be
careful not to damage air-flush port (especially air-muffler section) .
If not , it can cause failure.
When doing air-flush operation ,
Noise level will increase (by 7-SdB).
Install pump in an area which is not exposed to debris such as iron powder, stone powder,
polish powder or wood dust.
Debris can clo air-muffler, undercutt in air-fl ush effect.
4.1.2 Shut-down
CD Be sure to close isolation valve in order to prevent the drawback of debris
attached to inside of vacuum pump into vacuum chamber during operation due to
pressure differential (open
leak valve if you use leak valve).
(g) Turn off vacuum pump.
® Check shut-down of vacuum pump.
Important
Be sure to close isolation valve between vacuum pump and vacuum chamber during pump
shut-{jown.
If vacuum pump stops during air-flush operation, atmospheric air is dr aw n back from air-f lu sh port to inside of
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