Instruction manual
~
CAUTION
Danger
of
exhaust
disrupti
on
0
Remove blank flange
from
inlet and outlet.
Operation with
blank flange being fitt
ed
can disrupt exhaust or cause blank flange
to
fly
by exhaust impetus, resulting
in
accident, failure, or bodily injury from contact with flying
Remove
blank
obiects.
flange
Danger
of
vacuum
break
and
pollution
0
Be sure
to
close isolation valve between vacuum
pump
and vacuum system
(chamber)
during
start-up and
stop
.
5tart"1Jp
or stop with isolation
va
l
ve
in
the open position can draw back
ga
s
and
debris
Start
or
stop after
attached
to
inside of pump
to
vacuum chamber due
to
pressure differential, resulting
in
closing
isolation
vacuum break and Dollution on vacuum chamber side.
valve
Danger
of
abnormal
sound
and
failure
0
Open
inlet
to
atmosphere
for
about
5 seconds before restarting vacuum pump.
If not,
it
can unbalance temperature inside vacuum pump, resulting in failure.
Open
air
inlet
Danger
of
exceeding
permissible
temperature
of
intake
gas
0
If intake gas temperature is over
SO'C
. be sure
to
install a chiller
or
trap
between
vacuum
pump
and
vacuum
chamber
so that
gas
intake temperature
of
Beware
vacuum
pump
keeps bet
ow
SO'C .
If not, vacuum p
ump
temperature can increase, resulting in failur
e.
te
mperature
of
intake
gas
Danger
of
remaining
moisture
0
When evacuating
moisture
. be sure
to
open air-flush
port
(air-flush operation).
If you evacuate vapor while air-flush port is closed, condensed water will remain inside
Operate while
vacuum pump and cause failure.
opening
air-flush
port
Danger
of
insufficient
vapor
exhaust
0
After
evacuating
vapor
,
do
air-flush
operation
for
at
least
one
hour
.
If you close air-flush port
or
stop vacuum pump soon after evacuating vapor, condensed
Caution after
water will remain inside vacuum pump which will cause failure.
exhausting vapor
Danger
of
exceeding
permissible
intake
gas
volume
0
When
sending
N, gas
or
dry
air
into
air-flush port. pressure should be the same
as atmospheric pressure and
flow
rate
should
be
less
than 10NL/min.
Beware
of
intake
If not, it can increase pressure inside vacuum pump, resulting in failure.
gas volume
Important
If
it
take
s
tim
e
to
reach
ultimate
pressur
e
of
pum
p d
uri
ng
in
i
tial
operation
(also
operation
after
pump
ha
s not
be
en
u
se
d fo r a
long
time).
Close
in
let, and continue operation for
6-8
hours while opening i
nl
et for
3-5
seconds
to
atmosphe
re
2
-3
times per hour. During pump
sto
ppage, moisture might have entered inside of pump and deteriorated
performance to reach ultimate pressure.
If
pump
has
evacuated
liquid
such
as
water
or
high
humid
air
(over
60%RH).
Moisture
can
deposit inside pump and cause pump failure.
In
that case, close isolation valve,
and
open inl
et
to
atmosphere for
3-5
seconds several times and exhaust moisture inside pump
to
outside.
If
pump
has
continued
operation
around
ultimate
pressure
or
continuously
evacuated
high
humid
ga
s
Moisture can be condensed and remains inside pump, causing insufficient ultimate pressure and failure.
In
th
at case,
do
air-flush 0 eration
in
accordance with 4.2 a e
22
.
-20-