Instruction manual
4.
Operation
Be
sure to use the procedure below to start up or shut down the pump .
. When
you
do not use air-flush device,
proceed
4.1
Standard
operation
[page 21] .
. When you use air-flush device,
roceed 4.2 Air-flush
0 eration
Danger
of
explosion
and
ignition
WARNING
Do
not evacuate gas which is hazardous
to
humans
or
explosive, flammable,
or
corrosive.
Do
not evacuate with substances containing chemicals, solvents, and
powders.
If
do
n
e,
it can cau
se
failure or bodil in-u lesion or i
ni
lion .
.
<S)
Do not pump
· T
oxic
gas
· Expl
osive
gas
· Fla
mm
able
gas
·
Co
rr
os
i
ve
g
as
· Chem
ica
ls
· Solv
ent
· Po w
der
·
Water
.
liqui
d
* When evacuating vapor, operate in accordance with 4.2 lpage
221
.
Danger
of
entanglement
and
foreign
matter
dispersal
Never
put
fi
nger
or
foreign matter
into
air hole
of
fan cove
r,
air hole
of
motor
or
clearance between
FS(l)
and FS(2)
cooling
fins
.
If
done,
it
can cause bodily injury from entanglement wi
th tu
rn
ing section, or foreign
mane
r~
a
l.
0
\Y
Finger
,
foreign
matt
er
Finger, fore
ign
ma
tt
er
Cl
ea
ranc
e between F
S(
1)
and
F
S(2)
cool
ing
fins
Never evacuate
hazardous gas
Avoid foreign matter
Air
hole
of
fan
cover
Air
ho
le of motor
Danger
of
electric
shock
and
entanglement
00
not remove
or
alter
sa
feguards
or
insulation
parts.
If
do
ne, it can
ca
u
se
bodily injury from electric shock or tu
rn
ing section and it
ca
n cause
deteriorated erfo
rm
ance and 0 eratin lifetime. and invalidate uarantee.
Danger
of
failure
and
bodily
injury
Change
air~lush
port
only
after vacuum
pump
is
slopped
.
If you change it during
vacuum
pump operation, it can
cause
vacuum p
ump
failure and
bod
i
ly
injury.
-
19
-
Never alter
o
Change after
vacuum
pump
is
slo
ed