Manual

39
Specication Mass Controller Volumetric Controller Description
Accuracy ± (0.8% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 100 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Not Applicable Mass Reference Conditions
Operating Temperature −10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Controllable Flow Rate 102.4% Full Scale
Maximum Pressure 145 145
1
PSIG
Input /Output Signal Digital
Mass, Volume, Pressure
& Temperature
Volumetric Flow RS-232 Serial
Input / Output Signal Analog Mass Flow Volumetric Flow 0-5Vdc
Optional Input / Output
Signal Secondary Analog
Mass, Volume, Pressure
or Temperature
Volumetric Flow
0-5 Vdc or 0-10Vdc or
4-20mA
Electrical Connections 8 Pin Mini-DIN
Supply Voltage 24 to 30 Vdc
Supply Current 0.750Amp
Mounting Attitude Sensitivity
Control response somewhat sensitive to inverted
operation.
Warm-up Time < 1 Second
Wetted Materials
2
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, 410 & 416 Stainless Steel, Nickel, Silcon, Glass.
1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
2. If your application demands a different material, please contact the manufacturer for available options.
Technical Data for High Flow Mass & Volumetric Flow Controllers
0 to 250SLPM Full Scale through 0 to 1500SLPM Full Scale
Mechanical Specications
Full Scale Flow
Mass Controller
Full Scale Flow
Volumetric
Controller
Mechanical
Dimensions
Process
Connections
1
Pressure Drop
2
(PSID)
250SLPM 250LPM 5.5”H x 7.9”W x 2.3”D
1/2” NPT Female
4.6
500SLPM 500LPM
5.5”H x 7.4”W x 2.3”D 3/4” NPT Female
6.5
1000SLPM 1000LPM 14.0
1500SLPM 1500LPM 17.0
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression
adapter ttings.
2. Venting to atmosphere. Lower Pressure Drops Available, Please contact the manufacturer.
Dimensional Drawings: page 41, 42