User guide
Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers
Air Air
1 Argon Ar
2 Methane
3 CO
CO2
5 Ethane
Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane
Acetylene C2H2
15 Ethylene
iso-Butane
17 Krypton Kr
18
19
C-25
21
22 C-8
23 C-2
C-75
25 A-75
A-25
27
2.5% CO2
28
2% O2
Star29
29 P-5
Nitric Oxide NO
31 NF3
32 Ammonia NH3
H2S
Propylene
in an inert carrier
NO2
carrier