User guide

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Technical Data for Alicat MCD and MCRD Dual Valve Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale
Standard Operating Specications (Contact Alicat for available options)
Performance MCD Mass Flow Controller MCRD Mass Flow Controller
Accuracy for Bidirectional Controllers
at calibration conditions after tare
± (0.8% of reading + 0.2% of total span from positive full scale to negative full scale)
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Communications / Power MCD Mass Flow Controller MCRD Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Input/Output Signal
1
Options RS-232 Serial / RS-485 Serial / PROFIBUS
3
Analog Input/Output Signal
2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) 24 to 30 Vdc
Supply Current 0.250 Amp 0.750 Amp
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
3. If selecting PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS
specications for PROFIBUS supply voltages and currents. (www.alicat.com/probus)
Operating Conditions MCD Mass Flow Controller MCRD Mass Flow Controller
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +50 ºCelsius
Humidity Range
(Non–Condensing)
0 to 100%
Maximum Pressure 145 psig
Mounting Attitude Sensitivity None Mount with valve cylinder vertical & upright
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials
MCD: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass.
MCRD: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, 416 Stainless Steel, Nickel, Silicon, Glass.
If your application demands a different material, please contact Alicat.
Range Specic Specications
Full Scale Flow Mass
Controller
Pressure Drop
1
at FS Flow
(psid) venting to atmosphere
Mechanical
Dimensions
Process Connections
2
MCD 0.5 sccm to 50 sccm 1.0
Dimensions will vary
with valve choice.
M-5 (10-32) Female Thread
3
MCD 100 sccm to 500 sccm 1.0
1/8” NPT Female
MCD 1 slpm 1.5
MCD 2 slpm 3.0
MCD 5 slpm 2.0
MCD 10 slpm 5.5
MCD 20 slpm 20.0
MCRD 50 slpm 2.0
1/4” NPT Female
MCRD 100 slpm 3.2
MCRD 250 slpm 2.4 1/2” NPT Female
MCRD 500 slpm 6.5
3/4” NPT Female
(A 1-1/4” NPT Female process
connection is available for
2000 slpm controllers.)
MCRD 1000 slpm 14.0
MCRD 1500 slpm 17.0
MCRD 2000 slpm 28.6
MCRD 3000 slpm 16.8 1-1/4” NPT Female
1. Lower Pressure Drops Available, please see our WHISPER-Series mass ow controllers at www.alicat.com/whisper.
2. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter ttings. VCR and
SAE connections upon request.
3. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT ttings.