MDP 5011 Molecular Pump User’s Manual
Alcatel Vacuum Technology, as part of the Alcatel Group, has been supplying vacuum pumps, leak detection systems, vacuum measurement and micro machining systems for several years. Thanks to its complete range of products, the company has become an essential player in multiple applications : instrumentation, Research & Developement, industry and semiconductors. Alcatel Vacuum Technology has launched Adixen, its new brand name, in recognition of the company’s international standing in vacuum position.
MDP 5011 Molecular pumps WELCOME Dear customer, You have just purchased an Adixen Molecular pump . We would like to thank you and are proud to count you as one of our customers. This product has benefited from Alcatel’s many years of experience in the field of molecular pump design. To guarantee high performances and full satisfaction from this equipment, we suggest that you study this manual before any intervention on your pump, particularly the chapter on installation and start-up.
MDP 5011 Molecular pumps Specifications and information are subject to change without notice by from Alcatel Vacuum Technology France. 2/ 2 Alcatel Vacuum Technology France - MDP 5011 User’s Manual GB 02594 Copyright/Intellectual property: The use of Adixen products are subject to copyright and intellectual property rights in force in any jurisdiction. All rights reserved, including copying this document in whole or any part without prior written authorization from Alcatel Vacuum Technology France.
User’s manual Molecular pumps Contents INTRODUCTION MDP 5011 molecular pump overview . . . . . . . . . . . A 200 The different version operating principle . . . . . A 210 MDP 5011 technical characteristics . . . . . . . . . . . . A 400 Pump dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . A 401 MDP 5011 accessories . . . . . . . . . . . . . . . . . . . . . . . A 510 Safety instructions . . . . . . . . . . . . . . . . . . . . . . . . . . B 100 Pump connection to an installation .
Contents User’s manual Molecular pumps MAINTENANCE COMPONENTS Spare parts - Instruction of use . . . . . . . . . . . . . . F 000 MDP 5011 first level of maintenance . . . . . . . . . . F 100 MDP 5011 pumping curves . . . . . . . . . . . . . . . . G 010 Safety questionnaire . . . . . . . . . . . . . . . . . . . . . . . . G 200 APPENDIX CAUTION Indicates a potentially hazardous situation which, if not avoided, could result in property damage.
Chapter A User’s manual of MDP 5011 molecular pumps INTRODUCTION MDP 5011 molecular pump overview . . . . . . . A 100 The different version operating principle . . . . . A 210 MDP 5011 technical characteristics . . . . . . . . . . A 400 Pump dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . A4 01 MDP 5011 accessories . . . . . . . . . . . . . . . . . . . . .
A 200 MDP 5011 molecular pump overview TWO PUMP VERSIONS The standard version : MDP 5011 pump. The version for corrosif gases: MDP 5011CP pump. MAIN CHARACTERISTICS The MDP 5011 offers high pumping performances between 10 mbar and 10-5 mbar and a maximum flowrate fo 400 sccm. With a simple construction but robust rotor and low rotational speed (27000 rpm), the MDP is robust against accidental air in-rush, shock venting and gyroscopic effects.
A 210 The different version operating principle MDP 5011 MOLECULAR PUMP The rotor, a smooth drum with a row of blades at the top, is mounted at the end of a shaft turning in two high-precision ball bearings lubricated with grease, and located in the low-vacuum area. All pumping elements are aluminium. The pump is rotated by a single-phase electronically controlled electric motor. The rotor is mounted directly on the shaft, while the stator is attached to the pump body.
A 210 The different version operating principle MPD 5011CP VERSION FOR CORROSIVE GASES The MDP 5011 CP is specially designed for aggressive environments. Ball bearings and motor are isolated from process gases by a dynamic inert gas purge system. MDP 5011 CP can operate with the same electronic frequency converter than the MDP 5011 standard.
A 400 MDP 5011 technical characteristics Characteristics Inlet flange Units DN Rotation speed Pumping speed N2 He H2 Compression rate N2 He H2 Ultimate pressure (CP with purge 50 SCCM) * rpm 27 000 l/s 7.5 4 3 mbar Natural convection Air cooling Water cooling mbar Maximum pressure at exhaust in continuous operation** Natural convection Air cooling Water cooling mbar Weight Natural convection Air cooling Water cooling kg Recommanded primary pump 1.106 250 50 1.10-6 1.10-5 1.
A 401 Pump dimensions DIMENSIONS MDP 5011 DN 63 ISO-K cooled by natural convection 1.18 (30) 1.18 (30) Screwing by 4 threaded holes diam. 0.16 (4) on diam.3.46 (88) 5.63 (143) 1.07 (27.3) DN 63 Ø 95 h 11 ISO-KF 0.47 (12) 1.09 (27.7) Exhaust DN 16 ISO-KF Edition 01 - Sep 2004 2.05 (52) 0.67 (17) 3.39 (86.2) + (0.47) 12 mm for disassembling 3.
A 401 Pump dimensions DIMENSIONS MDP 5011 DN 63 ISO-K water cooled 4.3 (109.1) Screwing by 4 threaded holes diam. 0.16 (4) on diam. 3.46 (88) Orientable 360 ° 0.79 (20) 1.09 (27.7) F AB E DC 1.07 (27.3) DN 63 Ø 95 h 11 ISO-KF 0.47 (12) 1.18 (30) 1.18 (30) Exhaust DN 16 ISO-KF 3.98 (101) +0.47 (12) for disassembling 3.74 (95) 4.19 (106.5) GB 02560 Power supply - Connector Edition 01 - Sep 2004 Water cooling connections for 0.23 x 0.31 (6 x 8 mm) plastic tubing or copper tubing 2.05 (52) 0.
A 401 Pump dimensions DIMENSIONS MDP 5011 DN 63 ISO-K air cooled 3.05 (80) Screwing by 3 screws diam. 0.16 (4) on diam. 3.46 (88) 1.09 (27.7) F AB EDC Exhaust DN 16 ISO-KF DN 63 Ø 95 h 11 ISO-KF 1.07 (27.3) 1.18 (30) 0.47 (12) 1.18 (30) Fan 5.63 (143) 0.67 (17) 3.15 (80) 2.05 (52) + 0.47 (12) for disassembling 3.86 (98) 3.74 (95) Power supply - Connector GB 02560 Edition 01 - - Sep 2004 3.33 (84.5) 3.39 (86.
MDP 5011 accessories A 510 SCREEN FILTER: 2,5 MM This filter protects the pump against solid particles ≥2.5 mm. Inlet flange P/N DN 63 ISO-K 063117 (2.5 mm) COMPACT FILTER: 25 MICRONS The filter stops particles ≥ 25 microns and is used in the event of high densities of dust or risk of implosion when pumping tubes or lamps. Inlet flange P/N DN 63 ISO-K 062912 (25 microns) ELECTRICAL VENTING VALVE This valve is used to refill the pump with air after pump stopping or after a power failure.
Chapter B User’s manual of MDP 5011 molecular pumps START-UP B 100 Pump connection to an installation . . . . . . . . . . B 300 Nitrogen purge connection (MDP5011CP) . . . B 320 Venting valve connection . . . . . . . . . . . . . . . . . . . B 330 Water cooling connection . . . . . . . . . . . . . . . . . . . B 340 Air cooling kit connection . . . . . . . . . . . . . . . . . . . B 350 GB02625 Edition 02 - March 06 Safety instructions . . . . . . . . . . . . . . . . . . . . . . . . . .
B 100 Safety instructions CAUTION Indicates a potentially hazardous situation which, if not avoided, could result in property damage. CAUTION Indicates a potentially hazardous situation which, if not avoided, could result in moderate or minor injury. It may also be used to alert against unsafe practices. WARNING Indicates a potentially hazardous situation which, if not avoided, could result in death or severe injury.
B 100 Safety instructions 2/3 The controllers are designed to guarantee safety under normal operating conditions (use in rack). In specific cases of use on tables, make sure that no objects enter the ventilation openings or block the openings when handling the units. CAUTION Our products are designed to comply with current EEC regulations.
B 100 Safety instructions INSTALLATION - START UP (CTD) WARNING The vacuum pump is also a compressor: incorrect use may be dangerous. Study the user manual before starting up the pump. DANGER The access to the rotor of a turbomolecular pump with an unconnected intake is dangerous. Similarly, if the pump is not switched on, its rotor may be rotate by a primary pump which is in operation. CAUTION The air tightness of the products is guaranteed when they leave the factory for normal operating conditions.
B 300 Pump connection to an installation The pump can operate in any position In. In. In. In. The connection of the pump to the installation must be sufficiently rigid The dimensions of the connection parts should be study carefully: reduce the following as much as possible: - dimensions a and b the flexibility of the connection plate - the overhang c between the pump and its anchor point.
B 300 Pump connection to an installation COOLING RECOMMENDATIONS AND TEMPERATURE LIMITS Ambient operating temperature T< 95 °F T< 122 °F Natural convection or air cooled Water cooled PUMPING CONDITIONS In cases of high pressure pumping or frequent cycling, the pump temperature is higher, so water or air cooling are recommended.
B 320 Nitrogen purge connection (MDP 5011CP) For proper protection from reactive gases and particles the inert gas purge system must be used continuously. We recommend a nitrogen source that is dry (dew point of 22 °C at atmospheric pressure), and properly filtered (particles < 1 µm and oil < 0,1 ppm). D The cleanliness of the gas line must be correct. D The purge gas line must have an DN16 ISO-KF fitting to connect it directly to the MDP with a centering ring and quick connect clamp.
B 330 Venting valve connection CAUTION Check the solenoid valve voltage : it must be compatible with line voltage (see section A510). It consists of : A solenoïd valve normally open (NO) mounted on a DN 16 ISO-KF flanged fitting. The fitting is installed between the outlet flange of the MDP and the foreline of the primary pump. Connect the solenoïd valve cable to the J connector of the ACT 100 controller.
B 340 Water cooling connection CHARACTERISTICS OF WATER COOLING In order to limit the corrosion and clogging of the cooling pipes, it is recommended to use cooling water with the following characteristics: - Treated soft water or non-corrosive industrial water. - pH between 7.5 and 11. - Hardness <7 milli-equivalent/dm 3 (28 mg CaO or 50 mg CaCo3 per liter water) = 3.5 mmol/l (100mg Ca Co3 per liter water) - Resistivity >1500 Ω.cm. - Solid pollution <100 mg/dm 3 . - Max.pressure: 7 bars.
B 340 Water cooling connection Connection to the water line - Use a flexible or a rigid 6 x 8 mm hose to connect one of the water fittings to the water line. The user must provide some method of controlling water flow. - Use a flexible or a rigid 6 x 8 mm hose to connect the other fitting to the drain. - Control the flow of water depending on ambient temperature, and water temperature using the following graph.
B 350 Air cooling kit connection Air cooling kit: When the water cooling kit must be replaced by an air cooling device, proceed as follows : D Install the fan on the pump housing by a bracket. This last is assembled on the pump rear tape with 3 screws M4 (refer section A401 - 3/3). D Connect the contact plug of the minus wire to a fan assembling screw. Electrical connection D Connect the fan cable to the K connector of the controller. The fan provides sufficient cooling for ambient temperature up to 95 °F.
Chapter C User’s manual of MDP 5011 molecular pumps OPERATION C100 Molecular pump operation in a pumping application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C 150 GB 02626 Edition 02 - march 06 Safety instructions for product use . . . . . . . . . . .
C 100 Safety instructions for product use WARNING Before to use the controller, make sure that the mechanical and electrical connections have been made (see chapters from pump and controller’s manuals).
C 150 Molecular pump operation in a pumping application FIRST PUMP START-UP CAUTION When the pump is new, or after a prolonged shut-down of 3 months or more (under normal storage conditions), it is recommended to operate the pump at atmospheric pressure for 10 minutes (inlet and exhaust open to atmosphere) in order to ensure a slow rotation and grease re-distribution in the pump ball-bearings. DANGER The access to the rotor of a molecular pump with an unconnected inlet is dangerous.
C 150 Molecular pump operation in a pumping application EXAMPLE OF A 3 VALVE ASSEMBLY (EXAMPLE 1) The chamber and pipes are at atmospheric pressure, the pumps are off, the valves are closed. Pre-evacuation of the chamber: - start up the primary pump - start up the MDP cooling system - open the E2 valve. When the pressure in the chamber is ≤1mbar, the secondary pumping can be started up: - close E2 - start up the MDP pump - open E1 and E3.
Chapter D User’s manual of MDP 5011 molecular pumps MAINTENANCE D 300 GB 02626 Edition 02 - March 06 MDP 5011 pump maintenance frequency . . . . .
D 300 MDP 5011 pump maintenance frequency Example : for use at 20 °C housing temperature, in continuous operation, at ultimate pressure : - 16000 h : 1st lubrication - 32000 h : 2nd lubrication - 48000 h : disassemble the MDP, replace the ball bearings.
WARNING Standard precautions before any maintenance operation: before performing a maintenance operation, switch off the product by setting the main switch to “0”, disconnect the main cable. WARNING Before any intervention on a corrosive pump model (C, CP or Ci), we advise to prolonge the N2 flow for 30 min.
E 200 MDP 5011 pump lubrication The first lubrication required for the correct operation of MDP pumps is performed in the factory. Subsequent lubrications should be performed according to the procedure below and according to a frequency defined as a function of processes used (see section D300). Only use the grease recommended by the manufacturer and contained in the lubrication syringe (see section F100). CAUTION Avoid introducing foreign matter into the pump during these operations.
E 200 MDP 5011 pump lubrication RELUBRICATION PROCESS Bearing near the ”pumping cell” Bearing opposite the ”pumping cell” 4 C 12 K 8 F 1 M4 5 F 6 7 Black Edition 02 - March 06 2 Red 3 GB 02611 4 2/3 Alcatel Vacuum Technology France - MDP 5011 User’s Manual
E 200 MDP 5011 pump lubrication BEARING LUBRICATION - Stop the MDP pump and the primary pump. - Vent the MDP pump to atmospheric pressure. - Remove the lock pin (F). - Tighten a screw M4 in the thread of the end cap (12) and remove it. Bearing opposite the pumping cell - Introduce the syringe equipped with its needle into a hole of the ring (4) and remove the red jumper. - Distribute the dose of grease in 2 diametrically opposed points, until the syringe plunger comes to a stop against the black jumper.
E 300 MPD 5011 running-in using ACT 100 controller Start the MDP to atmospheric pressure for 6 min. as follows . Disconnect the primary pump from MDP (vacuum connection).
F 000 Spare parts - Instructions of use REPLACEMENT OF PARTS AND USE OF NON GENUINE PARTS Our products are designed to comply with current EC regulations and guarantee optimal operating conditions with maximum safety conditions for the user. Any modification of the product made by the user is liable to lead to non-compliance with the regulations, or even to put into doubt the performance of the product and the user’s safety.
F 100 MDP 5011 first level of maintenance LUBRICATION SYRINGE Ready-to-use, it contains the grease load required for a regreasing operation on the 2 bearings.
Alcatel Vacuum Technology France - MDP 5011 User’s Manual Pumping speed (l/s) 1,00E--04 0 1 2 3 4 5 6 7 8 GB 02623 1,00E--03 Edition 01 - - Sep 2004 1,00E--02 Inlet pressure (mbar) 1,00E--01 1,00E+00 Pumping speed 1,00E+01 1,00E+02 He N2 MDP 5011 with RVP 2m3/h Pumping curves G 010
2/2 Alcatel Vacuum Technology France - MDP 5011 User’s Manual GB 02623 1,00E--04 1,00E--02 1,00E--01 1,00E+00 1,00E+01 1,00E+02 1,00E+03 Edition 01 - Sep 2004 1,00E--03 1,00E--02 Inlet pressure (mbar) 1,00E--01 Flow 1,00E+00 1,00E+01 1,00E+02 He N2 MDP 5011 with RVP 2m3 /h Pumping curves G 010 Flow (scm)
Safety questionnaire G 200 Procedure for returning ADIXEN vacuum pumps and helium leak detectors You wish to return an Alcatel vacuum pump or helium leak detector for maintenance. The equipment will be dismantled and possibly cleaned by a technician from our Service Centre.
Safety questionnaire G 200 Ce questionnaire est téléchargeable sur le site : www.adixen.com / This questionnaire can be downloaded from: www.adixen.
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