Specifications

50
Page 99
安捷倫科技高頻元件量測研討會
Feb.23, 2006
How Do I Get My Probe De-Embedding Data?
Perform an SOLT or TRL cal using wafer probes
Measure thru device and save data in .s2p file for de-
embedding in later step
Probe
Measure thru after
2-port calibration
Probe
2-port calibration
planes
Thru
Page 100
安捷倫科技高頻元件量測研討會
Feb.23, 2006
How Do I Get My Probe De-Embedding Data?
Perform an adapter removal calibration using coaxial and on-
wafer standards
Probe Probe
Final 2-port
calibration planes
Probe Probe
2-port
cal
“Adapter”
coaxial cal
Probe Probe
2-port
cal
wafer cal