User`s guide

4- 48 Agilent EasyEXPERT User’s Guide Vol. 1, Edition 1
Function Details
Atto Sense and Switch Unit
The ASU has output connectors, two triaxial, that must be connected to the DUT
interface such as manipulators and probe card. When the measurement resource is
the SMU, they are the Force/Sense connectors for the Kelvin connection. And when
the resource is not SMU, the CMU/AUX is connected to the Force, and the Sense is
not used.
If you connect the MFCMU or the LCR meter with the four-terminal pair
configuration, two ASUs are required. Then the CMU-pot/CMU-cur connectors of a
ASU must be connected to the Hpot/Hcur of the instrument. And the other one must
be connected to the Lpot/Lcur in like manner.
To realize accurate impedance measurements using the four-terminal pair
measurement method, connect the CMU Return terminals of ASUs together. See
“Four-Terminal Pair Configuration” on page 4-24 and Figure 4-14 on page 4-26.
NOTE To use 1 pA range
The measurement channel connected to the ASU (Atto Sense and Switch Unit)
supports the 1 pA range. To use the 1 pA range, set the 1 pA fixed range or the 1 pA
limited auto ranging.
The B1500A automatically performs the compensation of the data measured by the
1 pA range and returns the compensated data. You can use either the pre-stored
offset data or the pre-measured offset data.
To measure the offset data, perform the self-calibration before starting the
measurement for a DUT. This offset data is temporarily memorized until the
B1500A is turned off.
NOTE Before using ASU
ASU connection must be done before the B1500A is turned on.
The combination of ASU and SMU is important. The B1500A can work with wrong
combination, but it cannot satisfy its specifications. The specifications are
guaranteed for the correct combination which the performance verification was
performed. See
“ASU” on page 1-66 and check if the combination is correct.
The CMU-pot connector is for the MFCMU or the LCR meter that uses the
four-terminal pair. For the other instrument, connect a BNC open connector or
nothing to there. The line will be internally connected to the CMU-cur/AUX-in line.
It is unavailable to use the series resistor in the SMU connected to the ASU.