User`s guide

Agilent EasyEXPERT User’s Guide Vol. 1, Edition 1 4- 19

Function Details

C-V Sweep Measurement

For the C-V sweep measurements, the multi frequency capacitance measurement

unit (MFCMU) forces AC signal, performs staircase sweep output of DC bias

voltage, and measures impedance for each sweep step.

Available Measurement Resources

MFCMU can be used for the C-V sweep measurements. For the DC bias output over



25 V, use the SMU CMU Unify Unit (SCUU) and SMUs. This expands the

voltage range up to 

100 V. Or use the high voltage bias-T and HVSMU to expand

the voltage range up to 

3000 V.

Setup Parameters

The following setup is required to perform the C-V sweep measurements.See “C-V

Sweep” on page 2-26 for the GUI.

1. Set the following on the Channel Setup tab screen.

• Set V Name of the CMU.

• If you use a constant current or voltage source, set Mode (I, V, or

COMMON) and V Name or I Name of the SMU.

2. Specify the following parameters for the CMU on the Measurement Setup tab

screen.

Model, x Name Measurement parameters. See Table 4-2.

Direction Single or double sweep.

Linear/Log Linear or logarithmic sweep. For logarithmic sweep, the

number steps in one decade is 10, 25, or 50.

Start, Stop Start is the DC bias sweep start value. Stop is the stop value

of single sweep or turning back value of double sweep. The

CMU can force up to 

25 V.

If the SCUU (SMU CMU Unify Unit) is used, up to  100

V output is available.

If the high voltage bias-T and HVSMU are used, up to



3000 V output is available.