User manual

4
Agilent 41501B SMU and Pulse Generator Expander
HPSMU (High Power SMU) Specifi cations
Voltage Range, Resolution, and Accuracy (HPSMU)
Voltage
Range
Set.
Reso.
Set. Accuracy Meas.
Reso.
Meas. Accuracy Max.
Current
±2 V 100 μV ±(0.03%+900 μV) 2 μV ±(0.02%+700 μV) 1 A
±20 V 1 mV ±(0.03%+4 mV) 20 μV ±(0.02%+2 mV) 1 A
±40 V 2 mV ±(0.03%+7 mV) 40 μV ±(0.02%+3 mV) 500 mA
±100 V 5 mV ±(0.04%+15 mV) 100 μV ±(0.03%+5 mV) 125 mA
±200 V 10mV ±(0.045%+30 mV) 200 μV ±(0.035%+10 mV) 50 mA
Current Range, Resolution, and Accuracy (HPSMU)
Current
Range
Set.
Reso.
Set.Accuracy Meas.
Reso.
Meas. Accuracy Max. V
±1 nA 100 fA ±(0.5%+3 pA+2 fA×Vout) 10 fA ±(0.5%+3 pA+2 fA×Vout) 200 V
±10 nA 1 pA ±(0.5%+7 pA+20 fA×Vout) 10 fA ±(0.5%+5 pA+20 fA×Vout) 200 V
±100 nA 10 pA ±(0.12%+50 pA+200 fA×Vout) 100 fA ±(0.1%+30 pA+200 fA×Vout) 200 V
±1 μA 100 pA ±(0.12%+400 pA+2 pA×Vout) 1 pA ±(0.1%+200 pA+2 pA×Vout) 200 V
±10 μA 1 nA ±(0.12%+5 nA+20 pA×Vout) 10 pA ±(0.1%+3 nA+20 pA×Vout) 200 V
±100 μA 10 nA ±(0.12%+40 nA+200 pA×Vout) 100 pA ±(0.1%+20 nA+200 pA×Vout 200 V
±1 mA 100 nA ±(0.12%+500 nA+2 nA×Vout) 1 nA ±(0.1%+300 nA+2 nA×Vout) 200 V
±10 mA 1 μA ±(0.12%+4 μA+20 nA×Vout) 10 nA ±(0.1%+2 μA+20 nA×Vout) 200 V
±100 mA 10 μA ±(0.12%+50 μA+200 nA×Vout) 100 nA ±(0.1%+30 μA+200 nA×Vout)
1
±1 A 100 μA ±(0.5%+500 μA+2 μA×Vout) 1 μA ±(0.5%+300 μA+2 μA×Vout)
2
1 200 V (Iout ≤50 mA), 100 V (50 mA<Iout≤100 mA)
2 200 V (Iout ≤50 mA), 100 V (50 mA<Iout≤125 mA), 40 V (125 mA<Iout≤500 mA), 20 V (500 mA<Iout≤1 mA)
Vout is the output voltage in volts. Iout is the output current in amps. For example, accuracy specifi cations
are given as ±% of set/measured value (0.1%) plus offset value (30 pA+200 fA×Vout) for the 100 nA range.
The offset value consists of a fi xed part determined by the set/measurement range and a proportional part
that is multiplied by Vout.
Output Terminal/Connection:
Dual triaxial connectors, Kelvin (remote
sensing)
Voltage/Current Compliance
(Limiting):
Voltage: 0 V to ±200 V
Current: ±1 pA to ±1 A
Compliance Accuracy: Same as the current
(voltage) settling accuracy.
HPSMU Supplemental Information:
Maximum allowable cable resistance when
using Kelvin connection:
Force: 0.7 Ω (100 mA to 1 A)
Force: 10 Ω (≤100 mA)
Sense: 10 Ω
Typical voltage source output resistance
(Force line/non-Kelvin connection): 0.2 Ω
Voltage measurement input resistance/
current source output resistance:
≥10
13
Ω (1 nA range)
Current compliance setting accuracy for
opposite polarity:
1 nA to 10 nA range: V/I setting
accuracy ±12% of range
100 nA to 1 A range: V/I setting
accuracy ±2.5% of range
1000
500
50
125
-50
-125
-500
-1000
-200 -100 -40 -20 20 40 100 200
Current (mA)
Voltage (V)
HPSMU measurement
and output range