User manual

3
Agilent 4156C Semiconductor Parameter Analyzer
MPSMU (Medium Power SMU) Specifi cations
Voltage Range, Resolution, and Accuracy (MPSMU)
Voltage
Range
Set
Reso.
Set Accuracy Meas.
Reso.
Meas. Accuracy Max.
Current
±2 V 100 μV ±(0.03%+900 μV+0.3×Iout) 2 μV ±(0.02%+700 μV+0.3×Iout) 100 mA
±20 V 1 mV ±(0.03%+4 mV+0.3×Iout) 20 μV ±(0.02%+2 mV+0.3×Iout) 100 mA
±40 V 2 mV ±(0.03%+7 mV+0.3×Iout) 40 μV ±(0.02%+3 mV+0.3×Iout)
1
±100 V 5 mV ±(0.04%+15 mV+0.3×Iout) 100 μV ±(0.03%+5 mV+0.3×Iout)
2
1 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V)
2 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V), 20 mA (40 V<Vout≤100 V)
Current Range, Resolution, and Accuracy (MPSMU)
Current
Range
Set
Reso.
Set Accuracy Meas.
Reso.
Meas. Accuracy Max. V
±1 nA 100 fA ±(0.5%+3 pA+2 fA×Vout) 10 fA ±(0.5%+3 pA+2 fA×Vout) 100 V
±10 nA 1 pA ±(0.5%+7 pA+20 fA×Vout) 10 fA ±(0.5%+5 pA+20 fA×Vout) 100 V
±100 nA 10 pA ±(0.12%+50 pA+200 fA×Vout) 100 fA ±(0.1%+30 pA+200 fA×Vout) 100 V
±1 μA 100 pA ±(0.12%+400 pA+2 pA×Vout) 1 pA ±(0.1%+200 pA+2 pA×Vout) 100 V
±10 μA 1 nA ±(0.12%+5 nA+20 pA×Vout) 10 pA ±(0.1%+3 nA+20 pA×Vout) 100 V
±100 μA 10 nA ±(0.12%+40 nA+200 pA×Vout) 100 pA ±(0.1%+20 nA+200 pA×Vout 100 V
±1 mA 100 nA ±(0.12%+500 nA+2 nA×Vout) 1 nA ±(0.1%+300 nA+2 nA×Vout) 100 V
±10 mA 1 μA ±(0.12%+4 μA+20 nA×Vout) 10 nA ±(0.1%+2 μA+20 nA×Vout) 100 V
±100 mA 10 μA ±(0.12%+50 μA+200 nA×Vout) 100 nA ±(0.1%+30 μA+200 nA×Vout)
1
1 100 V (Iout ≤20 V), 40 V (20 mA<Iout≤50 mA), 20 V (50 mA<Iout≤100 mA)
Vout is the output voltage in volts. Iout is the output current in amps.
For example, accuracy specifi cations are given as ±% of set/measured
value (0.1%) plus offset value (30 pA+200 fA×Vout) for the 100 nA range.
The offset value consists of a fi xed part determined by the set/
measurement range and a proportional part that is multiplied by Vout.
Output Terminal/Connection:
Single triaxial connector, non-Kelvin
(no remote sensing)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0 V to ±100 V
Current: ±1 pA to ±100 mA
Compliance Accuracy: Same as the current
(voltage) settling accuracy.
MPSMU Supplemental Information:
Typical voltage source output
resistance: 0.3 Ω
Voltage measurement input
resistance/current source output resis-
tance: ≥10
13
Ω (1 nA range)
Current compliance setting accuracy for
opposite polarity:
1 nA to 10 nA range: V/I setting accuracy
±12% of range
100 nA to 100 mA range: V/I setting
accuracy ±2.5% of range
100
50
20
-20
-50
-100
-100 -40 -20 20 40 100
Current (mA)
Voltage (V)
MPSMU measurement
and output range
VSU (Voltage Source Unit)
Specifi cations
VSU Output Range:
Voltage
Range
Meas.
Reso.
Meas. Accuracy
±20 V 1 mV ±(0.05% of setting +10 mV)
1
1 Specifi cation is applicable under no load current.
Max. Output Current: 100mA
VSU Supplemental Information:
Output resistance: 0.2 Ω (typical)
Maximum load capacitance: 10 μF
Maximum slew rate: 0.2 V/μs
Current limit: 120 mA (typical)
Output Noise: 1 mV rms (typical)
VMU (Voltage Monitor Unit)
Specifi cations
VMU Differential Mode Range,
Resolution, and Accuracy:
Diff V
Range
Meas.
Reso.
Meas.
Accuracy
±0.2 V 0.2 μV ±(0.03%+10 μV+0.3 μV×Vi)
±2 V 2 μV ±(0.02%+100 μV+3 μV×Vi)
Max. Common Mode Voltage: ± 20 V
Note: Vi is the input voltage of VMU2 in volts.
For example, accuracy specifi cations are given as ±%
of set/measured value (0.02%) plus offset value (100
μV+3 μV×Vi) for the 2 V range. The differential mode
offset value consists of a fi xed part determined by the
measurement range and a proportional part that is
multiplied by Vi.
VMU Measurement Range,
Resolution, and Accuracy:
Voltage
Range
Meas.
Reso.
Meas.
Accuracy
±2 V 2 μV ±(0.02%+200 μV)
±20 V 20 μV ±(0.02%+1 mV)
VMU Supplemental Information:
Input Impedance: ≥1 GΩ
Input leakage current (@0 V): ≤500 pA
Measurement noise: 0.01% of range (p-p)
(typical) when integration time is 10 PLC
Differential mode measurement noise:
0.005% of range (p-p) (typical) when
integration time is short.
VSU and VMU specifi cations are common to both the 4155C and 4156C