User manual

2
Hardware
Specifi cation Condition
The “supplemental” information and
“typical” entries in the following speci-
fi cations are not warranted, but provide
useful information about the functions and
performance of the instruments.
The measurement and output accuracy are
specifi ed at the rear panel connector termi-
nals when referenced to the Zero Check
terminal under the following conditions:
1. 23 °C ±5 °C (double between 5 °C to
18 °C, and 28 °C to 40 °C if not noted
otherwise)
2. After 40 minutes warm-up
3. Ambient temperature change less than
±1 °C after auto calibration execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU, HPSMU,
and GNDU)
7. Calibration period: 1 year
Agilent 4156C Precision Semiconductor Parameter Analyzer
HRSMU (High Resolution SMU) Specifi cations
Voltage Range, Resolution, and Accuracy (HRSMU)
Voltage
Range
Set Reso. Set Accuracy Meas.
Reso.
Meas. Accuracy Max.
Current
±2 V 100 μV ±(0.02%+400 μV) 2 μV ±(0.01%+200 μV) 100 mA
±20 V 1 mV ±(0.02%+3 mV) 20 μV ±(0.01%+1 mV) 100 mA
±40 V 2 mV ±(0.025 %+6 mV) 40 μV ±(0.015%+2 mV)
1
±100 V 5 mV ±(0.03%+15 mV) 100 μV ±(0.02%+5 mV)
2
1 100 mA (Vout ≤20 V), 50 mA (20 V<Vout≤40 V)
2 100 mA (Vout ≤20 V), 50 mA (20 V<Vout≤40 V), 20 mA (40 V<Vout≤100 V)
Current Range, Resolution, and Accuracy (HRSMU)
Current
Range
Set
Reso.
Set Accuracy Meas.
Reso.
Meas. Accuracy Max. V
±10 pA 10 fA ±(4%+400 fA)
1, 2
1 fA ±(4%+20 fA+1 fA×Vout/100)
1, 2
100 V
±100 pA 10 fA ±(4%+400 fA)
1, 2
1 fA ±(4%+40 fA+10 fA×Vout/100)
1, 2
100 V
±1 nA 100 fA ±(0.5%+0.7 pA+1 fA×Vout)
2
10 fA ±(0.5%+0.4 pA+1 fA×Vout)
2
100V
±10 nA 1 pA ±(0.5%+4 pA+10 fA×Vout) 10 fA ±(0.5%+2 pA+10 fA×Vout) 100V
±100 nA 10 pA ±(0.12%+40 pA+100 fA×Vout) 100 fA ±(0.1%+20 pA+100 fA×Vout) 100V
±1 μA 100 pA ±(0.12%+400 pA+1 pA×Vout) 1 pA ±(0.1%+200 pA+1 pA×Vout) 100V
±10 μA 1 nA ±(0.07%+4 nA+10 pA×Vout) 10 pA ±(0.05%+2 nA+10 pA×Vout) 100V
±100 μA 10 nA ±(0.07%+40 nA+100 pA×Vout) 100 pA ±(0.05%+20 nA+100 pA×Vout) 100V
±1 mA 100 nA ±(0.06%+400 nA+1 nA×Vout) 1 nA ±(0.04%+200 nA+1 nA×Vout) 100V
±10 mA 1 μA ±(0.06%+4 μA+10 nA×Vout) 10 nA ±(0.04%+2 μA+10 nA×Vout) 100V
±100 mA 10 μA ±(0.12%+40 μA+100 nA×Vout) 100 nA ±(0.1%+20 μA+100 nA×Vout)
3
1 The accuracy is applicable when offset cancellation has been performed.
2 The offset current specifi cation is multiplied by one of the following factors
depending upon the ambient temperature and humidity (RH = Relative Humidity):
Humidity % RH
Temperature 5 - 60 60 - 80
5 °C to 18 °C ×2 ×2
18 °C to 28 °C ×1 ×2
28 °C to 40 °C ×2 ×5
3 100 V (Iout≤20 mA), 40 V (20 mA<Iout≤50 mA), 20 V (50 mA<Iout≤100 mA)
Vout is the output voltage in volts. Iout is the output current in amps.
For example, accuracy specifi cations are given as ±% of set/measured
value (0.04%) plus offset value (200 nA+1 nA×Vout) for the 1 mA range.
The offset value consists of a fi xed part determined by the set/measure-
ment range and a proportional part that is multiplied by Vout or Vout/100.
Output Terminal/Connection:
Dual triaxial connectors, Kelvin (remote
sensing)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0 V to ±100 V
Current: ±100 fA to ±100 mA
Compliance Accuracy: Same as the current
(voltage) settling accuracy.
HRSMU Supplemental Information:
Maximum allowable cable resistance when
using Kelvin connection
(Force, Sense): 10 Ω
Typical voltage source output resistance
(Force line/non-Kelvin connection): 0.2 Ω
Voltage measurement input resistance/
current source output resistance:
≥10
15
Ω (10 pA range)
Current compliance setting accuracy for
opposite polarity:
10 pA to 10 nA range: V/I setting
accuracy ±12% of range
100 nA to 100 mA range: V/I setting
accuracy ±2.5% of range