User manual

10
PGU port signal transfer characteristics
Overshoot: <5% of pulse amplitude (@20
ns leading and trailing time,
50 Ω pulse generator source impedance, 50
pF and 1 MΩ in parallel load).
General Specifi cations
Dimensions:
50 mm H × 250 mm W × 275 mm D
Approximate weight: 1.1 kg
16441A R-BOX
The 16441A R-BOX adds a selectable
series resistor to the SMU output. You can
select the resistor from the setup page,
and the voltage drop due to the series
resistor is automatically compensated for
in the measurement result.
Measurement limitations with the 4155C
and 4156C and R-BOX:
If you measure device characteristics
including negative resistance over 1
MΩ with the 4155C/4156C and R-BOX,
there is a possibility that they cannot
be measured. There is a possibility that
the 4155C and 4156C cannot perform
measurements because of DUT oscil-
lations even with the R-BOX. Whether
oscillation occurs or not depends upon
the DUT and measurement conditions.
Number of SMU channels that can add a
resistor: 2
Resistor values:
1 MΩ, 100 kΩ, 10 kΩ, 0 Ω (each channel)
Resistance accuracy:
0.3% (at 23 °C ±5 °C, between input/
output terminal)
Maximum voltage: 200 V
Maximum current: 1 A (0 Ω selected)
Kelvin connection: Kelvin connection is
effective only when 0 Ω is selected.
Supplemental Information (at 23 °C ±
5 °C, 50%RH)
Leakage current: <100 fA @ 100 V
General Specifi cations
Dimensions:
72 mm H × 250 mm W × 270 mm D
Approximate weight: 1.6 kg
16442A Test Fixture
Channel Information
SMU:
6 channels (1 triaxial connector per
channel)
3 channels (1 Kelvin triaxial connector
per channel)
VSU:
2 channels (1 BNC connector per
channel)
VMU:
2 channels (1 BNC connector per
channel)
PGU:
2 channels (1 BNC connector per
channel)
GNDU:
1 channel (1 triaxial connector)
INTLK: 6-pin connector
Supplemental Information
(at 23°C ± 5°C, 50% RH)
SMU channel:
Leakage current: 10 pA max @200 V
(Force or Sense , Common)
Stray capacitance: 15 pF max
(Force or Sense , Common)
Stray capacitance: 3 pF typical
(Force or Sense , Other SMU)
Residual resistance: 60 mΩ typical
(Force, Sense)
Guard capacitance: 70 pF max
(Force or Sense , Guard)
VSU channel residual resistance:
60 mΩ typical
VMU channel residual resistance:
60 mΩ typical
PGU channel characteristic impedance:
50 mΩ typical
GNDU channel residual resistance:
40 mΩ typical (Force, Sense)
General Specifi cations
Temperature range:
Operating: +5 °C to +40 °C
Storage: -40 °C to +70 °C
Humidity range:
Operating: 5% to 80% RH
(no condensation)
Storage: 5% to 90% RH at 65 °C
(no condensation)
Dimensions:
140 mm H × 260 mm W × 260 mm D
Weight (approx.): 2.5 kg
Specifi cation Condition
The “supplemental information”
and “typical” entries in the following speci-
fi cations are not warranted, but provide
useful information about the functions and
performance of the instruments (23 °C ±5
°, 50% RH).
16440A SMU/Pulse Generator
Selector
The 16440A switches either an SMU or
PGU to the associated output port. You
can expand to 4 channels by adding an
additional 16440A. The channel 1 PGU port
provides a “PGU OPEN” function, which
can disconnect the PGU by opening a
semiconductor relay. The 16440A cannot
work without two pulse generator units of
the 41501A/B (SMU and Pulse Generator
Expander).
Channel confi gurations:
Two channels (CH1, CH2)
CH1: INPUT ports: 2 (SMU and PGU, PGU
port has additional series semiconductor
relay)
OUTPUT port: 1
CH2: INPUT ports: 2 (SMU and PGU)
OUTPUT port: 1
Voltage and Current Range
Input port Max. V Max. I
SMU 200 V 1.0 A
PGU 40 V 0.2 A (AC Peak)
Supplemental Information
(at 23 °C ± 5 °C, 50%RH)
SMU port leakage current:
< 100 fA @100 V
SMU port residual resistance (typical):
0.2 Ω
SMU port stray capacitance (typical
@1 MHz):
Force , Common: 0.3 pF
Force , Guard: 15 pF
Guard , Common: 130 pF
PGU port residual resistance: 3.4 Ω
PGU port OFF capacitance (typical): 5 pF
PGU port OPEN capacitance (typical):
700 pF (@ 1 MHz, Vin - Vout = 0V)
Accessory Specifi cations