User`s guide

Agilent EasyEXPERT User’s Guide Vol. 2, Edition 1 8-17
Application Library
QSCV Maximum Measurement Value and Accuracy
Figure 8-3 Maximum Measurement Value Using 10 nA Range: HPSMU, MPSMU,
HRSMU, ASU+SMU
Figure 8-4 Maximum Measurement Value Using 100 nA Range: HPSMU, MPSMU,
HRSMU, ASU+SMU
1.00E-11
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
1.00E-04
0.001 0.01 0.1 1
QSCV Measurement Voltage (V)
Capacitance (F)
2s
1s
500ms
300ms
100ms
50ms
30ms
Integration
Time
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
1.00E-04
1.00E-03
0.001 0.01 0.1 1
QSCV Mea surement Voltage (V)
Capa citance (F)
2s
1s
500ms
300ms
100ms
50ms
30ms
Integration
Time