User`s guide

Agilent EasyEXPERT User’s Guide Vol. 2, Edition 1 8-25
Application Library
QSCV Maximum Measurement Value and Accuracy
Table 8-5 Conditions for Calculating Measurement Accuracy
Calculation example data shown in Figure 8-6 through Figure 8-30 is applied to the
measurement data when the QSCV integration time Tinteg is equal to the LEAK
integration time Tleak.
Conditions
Measurement
accuracy
calculation
result
Measurement
range
QSCV
operating mode
Output
range
Equivalent
parallel
resistance of
DUT
Guard
capacitance of
measurement
path
10 pA Normal 20 V 10 T 200 pF Figure 8-6
100 pA Normal 20 V 10 T 200 pF Figure 8-7
Normal 20 V 10 T 1 nF Figure 8-8
Normal 20 V 100 G 200 pF Figure 8-9
1 nA Normal 20 V 10 T 200 pF Figure 8-10
Normal 20 V 10 T 1 nF Figure 8-11
Normal 20 V 10 G 200 pF Figure 8-12
Normal 20 V 1 G 200 pF Figure 8-13
10 nA Normal 20 V 10 T 200 pF Figure 8-14
Normal 20 V 10 G 200 pF Figure 8-15
Normal 20 V 1 G 200 pF Figure 8-16
100 nA Normal 20 V 10 T 200 pF Figure 8-17
Normal 20 V 1 G 200 pF Figure 8-18
Normal 20 V 100 M 200 pF Figure 8-19
Normal 20 V 10 M 200 pF Figure 8-20
1 A Normal 20 V 10 T 200 pF Figure 8-21
Normal 20 V 1 G 200 pF Figure 8-22
Normal 20 V 100 M 200 pF Figure 8-23
Normal 20 V 10 M 200 pF Figure 8-24
10 pA 4155C/4156C
compatible
20 V 10 T 200 pF Figure 8-25
100 pA 20 V 10 T 200 pF Figure 8-26
1 nA 20 V 10 T 200 pF Figure 8-27
10 nA 20 V 10 T 200 pF Figure 8-28
100 nA 20 V 10 T 200 pF Figure 8-29
1 A 20 V 10 T 200 pF Figure 8-30