User`s guide
Setting Up the Agilent 5500 SPM 3
Agilent 5500 SPM User’s Guide 56
Utilities
The following table summarizes the utility requirements for the Agilent
5500 SPM.
Noise and Facility Specifications
Acoustic Noise
The semiconductor manufacturing industry has developed a
standardized set of one-third octave band velocity spectra, called
vibration criterion curves (Figure 30), to define acceptable
environmental noise. For operation of the Agilent 5500 SPM, facility
Table 1 Agilent 5500 SPM utility requirements
Configuration Agilent 5500 SPM
Electrical 1600 W; single phase; 100-120 V or
220-240 VAC; 5 A; 50-60 Hz
Surge protection Strongly recommended; minimum 7 outlets
Air for isolation chamber Not required
Internet connection Recommended