User`s guide
Agilent 5500 SPM Components 2
Agilent 5500 SPM User’s Guide 39
• The large multi-purpose scanner includes four piezo elements for X
and Y and provides scans up to 90 microns square. There are also 2
piezo tubes for Z motion. It provides high resolution and speed for
general use applications.
• The large multi-purpose scanner is also available with closed-loop
positioning, in which ultra-precise positioning sensors measure
displacement in the Z axis only, or X/Y/Z axes. Closed-loop
scanning provides superior positioning and more accurate z-position
and force control.
• An STM-specific scanner is purpose-built for Scanning Tunneling
Microscopy.