User`s guide

Scanner Maintenance and Calibration 8
Agilent 5500 SPM User’s Guide 145
X Non-Linearity
To check X non-linearity, in the Realtime Images window choose Tools
> Horizontal Cross Section. Use markers to report the dimensions
between sets of features at either end of the scan range (Figure 96).
Figure 96 Horizontal cross-section tool used to check non-linearity. Two
sets of cursors are shown.
If the spacing is not identical for the two sets of features, adjust the X
Non-linearity term in the Scanner Setup window, according to the
following equation:
where
StartSize = size of features at the start of the scan
EndSize = size of features at the end of the scan
CurrentTerm = current non-linear correction term.
You can also use the diagram in Figure 97 as a guide.
Figure 97 Correction diagram for X non-linearity
NewTerm
StartSize CurrentTerm
EndSize
-----------------------------------------------------------------
=