User`s guide

Agilent 5500 SPM User’s Guide 13
Contents
Electrostatic Force Microscopy (EFM) 130
Kelvin Force Microscopy (KFM) 134
8 Scanner Maintenance and Calibration
Care and Handling of the Probes and Scanner 138
Probes 138
Nose Assembly 138
Two-Piece Nose Cone Cleaning 139
Scanner 139
Scanner Characteristics 139
Non-Linearity 140
Sensitivity 140
Hysteresis 140
Other Characteristics 141
Bow 141
Cross Coupling 141
Aging 142
Creep 142
Calibrating the Multi-Purpose Scanner 143
X Calibration 144
X Non-Linearity 145
X Hysteresis 146
X Sensitivity 147
Y Calibration 147
Y Non-Linearity 148
Y Hysteresis 149
Y Sensitivity 150
Z Calibration 151
Sensitivity 151
Servo Gain Multiplier 152
Archive the Calibration Files 152
9 Closed-Loop Scanners
Scanner Types 153
Z-Axis Closed-Loop Scanner 153
X/Y/Z Closed-Loop Scanner 154
Calibration 154
X and Y Sensor Calibration 154
Z Sensor Calibration 158