Specifications

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Measurement Settings
Measurement Instrument : 4294A
Measurement Frequency : 40 Hz-10 MHz
Measurement Parameter : Z-
Compensation : Performed short Compensation
Bandwidth : 3
Measurement Method : Inserted the shorting plate, measured the short condition, and then removed the short-
ing plate. Repeated this for 50 times.
Display Method : Overlaying traces by using the Accumulate Mode
Lastly of all, a method to visually analyze the accurate measurement range of a test fixture is introduced. This method
is only appropriate when all three error-terms (proportional error, open and short repeatability) are known. The table
below shows the additional error of 16034G. The whole equation, with all three terms can be solved for measurement
impedance rather than additional error, for example when additional error is equal to 0.5%. If the obtained impedance
values are plotted with measurement impedance (y-axis) against frequency (x-axis), a graph similar to the one shown
down below can be obtained. The shaded area shows the range of impedance that can be measured with an additional
error better than 0.5%. In the same way, other graphs can be drawn with other additional error values to better visualize
the accuracy that can be obtained for a given impedance and frequency range. The operational manuals of recent test
fixtures present such graphs.
Additional Error of 16034G
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Appendix Additional Error
Range of impedance measurable with additional error ≤ 0.5%
Type of Error Impedance
Proportional Error 0.5 x (f/10)
2
[%]
Open Repeatability 5 + 500 x (f/10) [
µS]
Short Repeatability 10 + 13 x (f/10) [mΩ]