Technical data

Contents
Contents-3
Module 5. Basic Measurement
• SMU Fundamentals
• Classic Test Environment
• SMUs Connected in Series or Parallel
• Cabling and Fixture Issues
• Kelvin and Driven Guard
• Probes and Prober Connections
• Triax and Coax Adapters
• Safety Interlock Issues
Module 6. Low Current Measurement
• Low-Current Measurement Challenges
• Calibration and Zero Cancel
• Effect of Cable Movement
• ASU for Ultra Low-Current Measurement
• Low-Current Subthreshold
• Trade-Off Speed Vs Accuracy
• Low-Current Gummel Plot
• Low-Current Gate Oxide Leakage