Technical data

1- 4 Agilent 41000 Administration Guide, Edition 3
Introduction
Product Overview
Table 1-1 Agilent 41000 Measurement Solutions
NOTE About system components
For the system cabinet, see “System Cabinet” on page 1-9.
For the probe card interface, see “Probe Card Interface” on page 6-1.
For each instrument, see each manual.
For the Agilent I/CV software, see its on-line manual.
Model 100 Model 200 Model 300 Model 400
Description ultra-precision,
positioner-based
precision,
positioner-based,
for
custom cables
semi-automated,
1
fA leakage,
probe
card-based
semi-automated,
10
fA leakage,
probe
card-based
Minimum
resolution
E5270B: 0.1 fA/0.5 µV 4156C: 1 fA/0.2 µV
E5270B: 1 fA/0.5 µV
4156C: 1 fA/0.2 µV
E5270B: 1 fA/0.5 µV
4155C: 20 fA/0.2 µV
4156C: 10 fA/0.2 µV
E5270B: 10 fA/0.5 µV
Standard
hardware
E5270B with
HRSMU/ASU
1
1. HRSMU is the high resolution source monitor unit. ASU is the atto sense and switch unit.
E5270B or 4156C E5270B or 4156C E5270B, 4156C, or
4155C
B2200A switching
matrix, 12 outputs
B2200A switching
matrix
B2201A switching
matrix
B2220A probe card
interface (24 or 48 pin)
B2220A probe card
interface (24 or 48 pin)
Rack, cables,
PDU/EMO
2
.
2. Items can be deleted. PDU is the power distribution unit. EMO is the emergency power-off button.
Rack, cables,
PDU/EMO
2
.
Rack, cables,
PDU/EMO
2
.
Rack, cables,
PDU/EMO
2
.
Standard
software
Agilent I/CV
2
Agilent I/CV
2
Agilent I/CV
2
Agilent I/CV
2
Furnished
software
performance integrity
verification tools
performance integrity
verification tools
performance integrity
verification tools
performance integrity
verification tools
Optional
hardware
4284A LCR meter 4284A LCR meter 4284A LCR meter 4284A LCR meter
41501B Expander
(HPSMU, MPSMU,
PGU)
41501B Expander
(HPSMU, MPSMU,
PGU)
41501B Expander
(HPSMU, MPSMU,
PGU)
Third-party
hardware
Wafer prober and
positioner
Wafer prober and
positioner
Wafer prober and
sub-fA leakage probe
card
Wafer prober and low
leakage probe card