Technical data

5- 26 Agilent 41000 Administration Guide, Edition 3
Measurement Techniques
Capacitance Measurements
To Perform Measurement and Compensation
Perform the capacitance measurement and compensation as shown below.
1. Set the Agilent 4284A measurement condition. Then the frequency must be the value
(Fmeas) used when the compensation coefficients are measured.
2. Before contacting the device under test (DUT), perform the Cp-G measurement in the
open condition at the end of the measurement path including positioner or probe card,
and record the measurement data (C1 and G1). See
Table 5-8.
3. Perform the compensation by using the capacitance compensation function, and record
the result data (C1r and G1r).
See Table 5-9 for the example to use the capacitance compensation function. This
example uses Microsoft Visual Basic .NET and Agilent T&M Programmers Toolkit.
And the Agilent B2200 controlled by the program is defined as AGB2200 at the 10th
line. So, the function names are changed as shown below.
agb220xa_selectCompenFile --> Agb2200.SelectCompenFile
agb220xa_compenC --> Agb2200.CompenC
Also, agb220xa_reset and agb220xa_close have been changed.
4. Contact the DUT, perform the Cp-G measurement, and record the measurement data
(C2 and G2).
5. Perform the compensation and record the result data (C2r and G2r).
6. Perform the following calculation and record it as the capacitance value.
C = C2r - C1r
Table 5-8 Recording Measurement/Compensation Data
step
Measurement/Compensation Data
C (F) G (S)
2 (measured) C1 = G1 =
3 (compensated) C1r = G1r =
4 (measured) C2 = G2 =
5 (compensated) C2r = G2r =
6 (calculated) C =