Technical data

5- 16 Agilent 41000 Administration Guide, Edition 3
Measurement Techniques
Low Resistance Measurements
Low Resistance Measurements
For the low resistance measurement, the differential voltage measurement is effective. The
impedance of the voltmeter is enough higher than the residual resistance. So the voltage
drop by the residual resistance can be ignored. The low resistance measurement can be
performed as shown below.
Summary • Voltage/current measurement
• Output current change
• Voltage/current measurement
• Resistance calculation
Procedure 1. Connect the device under test (DUT).
2. Connect measurement units as shown in Figure 5-9. Two source monitor units (SMU)
and one voltage measurement unit (VMU) are used.
3. Set the measurement condition; integration time, output current, output voltage,
compliance, and so on.
• Integration time 1 or 2 power line cycles is ok for the voltage measurement.
• Voltage source output value must be 0 V.
• Current source output value should be decided as described in “To Select the
Output Current Value”.
4. Perform voltage measurement in the differential mode (Vm1).
5. Perform current measurement (Im1).
6. Change the current source output value.
7. Perform voltage measurement in the differential mode (Vm2).
8. Perform current measurement (Im2).
9. Calculate the resistance by the following formula.
R = (Vm1-Vm2) / (Im1-Im2)).
Disconnect the DUT after all measurements are completed.
Figure 5-9 Low Resistance Measurement
V A
0 V
Im
Vm
If
Vm1
Vm2
Im1Im2
Im1 – Im2
R =
Vm1 – Vm2
V offset