Agilent 41000 Series Integrated Parametric Analysis and Characterization Environment (Agilent iPACE) Administration Guide Agilent Technologies
Notices © Agilent Technologies 2004, 2005 Manual Part Number No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.
Safety Summary The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Agilent Technologies Inc. assumes no liability for customer’s failure to comply with these requirements.
Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below. Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument. Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have this symbol when instrument is on. Protective conductor terminal.
• Herstellerbescheinigung GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19 • Manufacturer’s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 Microsoft and Windows are registered trademarks of Microsoft Corporation. All other trademarks are the property of their respective owners.
DECLARATION OF CONFORMITY According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014 Manufacturer’s Name: Manufacturer’s Address: Supplier’s Address: Agilent Technologies International sarl Rue de la Gare 29 CH - 1110 Morges Switzerland Declares under sole responsibility that the product as originally delivered Product Name: fA Leakage Low Current Measurement System Solution for Positioner fA Leakage Low Current Measurement System Solution with Probe Card 10fA Level Automated 14channel Measurement Solution
In This Manual This manual provides the following information of the Agilent 41000 Series Integrated Parametric Analysis and Characterization Environment (Agilent iPACE). • Chapter 1, “Introduction.” Describes product overview, specifications, accessories, and options of the Agilent 41000. • Chapter 2, “Installation and Operation.” Explains how to install the Agilent 41000 and how to operate the Agilent 41000 system cabinet. • Chapter 3, “Using Agilent iPACE Verification Tool.
Contents 1. Introduction Product Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3 System Cabinet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9 EMO Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9 LINE Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Recovering from Power Line Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-26 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-27 Performance Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-27 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents iPACE Verification Tool Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4 Selftest Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4 Verification Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5 Batch Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Input/Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-9 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-9 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-10 Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1 Introduction
Introduction This chapter provides the following information of the Agilent 41000.
Introduction Product Overview Product Overview Agilent 41000 series Integrated Parametric Analysis and Characterization Environment (Agilent iPACE) is developed to realize the full 1 femtoamp measurement potential of the semiconductor parameter analyzer through a switching matrix, probe card interface, and probe card without any loss in measurement performance. The Agilent 41000 solutions work with the 4155C, 4156C, or E5270B, and are available in both positioner and probe card-based versions.
Introduction Product Overview Table 1-1 Agilent 41000 Measurement Solutions Model 100 Description ultra-precision, positioner-based Model 200 Model 300 Model 400 precision, positioner-based, for custom cables semi-automated, 1 fA leakage, probe card-based semi-automated, 10 fA leakage, probe card-based Minimum resolution E5270B: 0.1 fA/0.5 µV 4156C: 1 fA/0.2 µV E5270B: 1 fA/0.5 µV 4156C: 1 fA/0.2 µV E5270B: 1 fA/0.5 µV 4155C: 20 fA/0.2 µV 4156C: 10 fA/0.2 µV E5270B: 10 fA/0.
Introduction Product Overview Table 1-2 Agilent 41000 Model 100 Function Analyzer Component Option Agilent E5270B+E5287A+E5288A: E5287A: HRSMU HRSMU+ASU 1 E5280B: HPSMU 2 E5281B: MPSMU 3 Switch matrix - C-Meter Agilent 4284A DUT interface - Controller Windows note PC Optional Control software Agilent I/CV or I/CV Lite Optional Analyzer connection Kelvin connection ports up to 8 ports Verification software Agilent iPACE verification tool Cabinet 1.
Introduction Product Overview Table 1-3 Agilent 41000 Model 200 Function Analyzer Component Option Agilent 4156C Agilent 41501B Agilent E5270B E5287A: HRSMU 1 E5280B: HPSMU 2 E5281B: MPSMU 3 Switch matrix Agilent B2200A+B2210A Femto leakage matrix 12, 24, 36 or 48 outputs C-Meter Agilent 4284A Optional DUT interface - Controller Windows note PC Optional Control software Agilent I/CV or I/CV Lite Optional Analyzer connection Kelvin connection ports up to 4 ports Verification softwar
Introduction Product Overview Table 1-4 Agilent 41000 Model 300 Function Analyzer Component Option Agilent 4156C Agilent 41501B Agilent E5270B E5287A: HRSMU 1 E5280B: HPSMU 2 E5281B: MPSMU 3 Switch matrix Agilent B2200A+B2210A Femto leakage matrix 12, 24, 36 or 48 outputs C-Meter Agilent 4284A Optional DUT interface Agilent B2220A 24 or 48 pins Controller Windows note PC Optional Control software Agilent I/CV or I/CV Lite Optional Analyzer connection Kelvin connection ports up to 4
Introduction Product Overview Table 1-5 Agilent 41000 Model 400 Function Analyzer Component Option Agilent 4155C or 4156C Agilent 41501B Agilent E5270B E5287A: HRSMU 1 E5280B: HPSMU 2 E5281B: MPSMU 3 Switch matrix Agilent B2201A+B2211A 14ch low leakage matrix C-Meter Agilent 4284A Optional DUT interface Agilent B2220A 24 or 48 pins Controller Windows note PC Optional Control software Agilent I/CV or I/CV Lite Optional Analyzer connection Kelvin connection ports up to 4 ports Verifi
Introduction System Cabinet System Cabinet This section explains important panel features of the Agilent 41000 system cabinet. See Table 1-6 for the EMO/PDU operation and response. Figure 1-2 Emergency Power Off (EMO) Panel +05647/'06 219'4 1(( 10 '/1 DWVVQP .+0' KPFKECVQT EMO Button EMO button is used to turn off the power distribution unit (PDU) immediately. If the EMO button is normal position (out position), AC power can be applied to the PDU.
Introduction System Cabinet Power Distribution Unit The power distribution unit (PDU) receives AC power from a power switchboard at your site and distributes AC power to the power outlets in the system cabinet and the EMO panel. See Table 1-6 for the EMO/PDU operation and response.
Introduction System Cabinet External EMO Terminals For connecting an extra emergency power off (EMO) button. If you need to add an external EMO button, prepare a button and wire it between the Ext. EMO terminals. Opening the terminals shuts off AC power to the PDU (same as setting the EMO button to the in position), however it does not change the position of the EMO button on the EMO panel. When the terminals are shorted (normal condition), steady current (8 mA at 24 Vdc) flows to the terminals.
Introduction System Cabinet Table 1-6 PDU/EMO Operation and Response Response AC power to controller outlets Operation Sets Main Switch to ON not supply Presses System Switch Presses ON Button on EMO Panel Presses OFF Button on EMO Panel AC power to instruments outlets not supply supply supply Ext. Alarm 1 (NC) terminals Ext. Alarm 2 (NO) terminals Open Close Close Open Open Close not supply Opens Remote Ctrl. Presses EMO Button or opens Ext.
Introduction Specifications Specifications The specifications are the performance standards or limits against which these units have been tested. The supplemental information is not warranted, but provides useful information about functions and performance.
Introduction Specifications General Specifications Temperature range: Operation: 5 ° C to 35 ° C Humidity range: Operation: 5 % to 70 % R.H., no condensation Storage: −20 ° C to 60 ° C Storage: Altitude: • Model 300: < 80 % R.H. at 35 ° C, < 60 % R.H. at 60 ° C, no condensation • Model 400: < 80 % R.H. at 60 ° C, no condensation Operating: 0 to 2,000 m (6,500 ft) Storage: 0 to 15,240 m (50,000 ft) Regulatory compliance: Safety: Low Voltage Directive 73/23/EEC, 93/68/EEC EN61010-1, CSA C22.
Introduction Accessories and Options Accessories and Options The following is the furnished accessory for the Agilent 41000 Model 100/200. • Agilent 41000 System cabinet, 1 set • Agilent 41000 Manual CD-ROM, 1 ea. • Agilent iPACE Verification Tool, 1 ea. • Agilent 1250-2618 Triaxial (female to female) Adapter, 1 ea. • Agilent 1250-1708 Triaxial Open Connector, 1 ea. The following is the furnished accessory for the Agilent 41000 Model 300/400.
Introduction Accessories and Options Options and available accessories for Agilent 41000 series are listed below.
Introduction Accessories and Options Model Number Option Item C1233A 10 fA Level Automated 14 channel Measurement Solution for Probe Card (Model 400) C1233A-003 3 m Cable for Probe Card Interface C1233A-004 4 m Cable for Probe Card Interface C1233A-012 Matrix 12 Outputs C1233A-024 Matrix 24 Outputs C1233A-036 Matrix 36 Outputs C1233A-048 Matrix 48 Outputs C1233A-100 100 V Power Line C1233A-120 120 V Power Line C1233A-200 200 V Power Line C1233A-240 240 V Power Line C1233A-ABA Paper
Introduction Accessories and Options Model Number Option Item 4155C Semiconductor Parameter Analyzer (for Model 400) 4155C-ABA Paper Manual Set, English 4155C-ABJ Paper Manual Set, Japanese 4156C Precision Semiconductor Parameter Analyzer 4156C-ABA Paper Manual Set, English 4156C-ABJ Paper Manual Set, Japanese E5270B 8 Slot Precision Measurement Mainframe E5270B-ABA Paper Manual Set, English E5270B-ABJ Paper Manual Set, Japanese B2200A Femto Leakage Switch Mainframe (for Model 200/300) B2
Introduction Accessories and Options Table 1-8 Available Accessories for Model 100 Model Number Option Item 16493B Coaxial Cable for 4155/4156 VSU/VMU/PGU 16493J Interlock Cable 16493K Kelvin Triaxial Cable 16493L GNDU Cable 16494A Triaxial Cable 16048D/E Test Leads for 4284A 16495E Blank Plate 16495F Connector Plate (12 triaxial connectors) 16495G Connector Plate (24 triaxial connectors) 16495F Connector Plate (6 triaxial connectors) 16495G Connector Plate (8 triaxial connectors) 1
Introduction Accessories and Options Model Number Option Item 16495G N1253A N1254A Table 1-10 Connector Plate (24 triaxial connectors) N1253A-100 Digital I/O T-cable N1253A-200 Digital I/O BNC Box N1254A-100 GNDU to Kelvin Adapter N1254A-107 Triax(m)-Triax(f) Adapter Available Accessories for Model 300/400 Model Number Option Item Description 16493B Coaxial Cable for 4155/4156 VSU/VMU/PGU 16493J Interlock Cable for 4155/4156/E5270 16493K Kelvin Triaxial Cable from 4156/E5270 to B2200
2 Installation and Operation
Installation and Operation This chapter describes how to install the Agilent 41000 and how to operate the Agilent 41000 system cabinet. NOTE • “Installation” • “Turning the PDU On and Off” • “Recovering from Power Line Problems” • “Maintenance” About System Components For the operation of the instruments (system components of the Agilent 41000), see manuals of each instrument. NOTE Site Preparation You have to perform the site preparation before you receive the Agilent 41000.
Installation and Operation Installation Installation This section provides the information and the procedures needed to install the Agilent 41000.
Installation and Operation Installation Model 100: To Connect ASU The Agilent E5288A Atto Sense and Switch Unit (ASU) will add the 1 pA range to the high resolution SMU (HRSMU) when it is connected between the HRSMU and the device under test (DUT). And the ASU provides the input selection function when instruments are connected to the SMU input and the AUX input. NOTE For the installation of the ASU and the connection to the DUT interface, contact your favorite prober vender.
Installation and Operation Installation To connect E5270B 1. Turn the Agilent E5270B off. 2. Connect the 16493M cable to the HRSMU D-sub connector. 3. Connect the 16494A triaxial cable to the HRSMU Force terminal. 4. Conect the BNC cable from the AUX In terminal to the appropriate instrument. Prepare an adapter if the instrument does not have the BNC input connector. NOTE Connect ASU to dedicated HRSMU The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU.
Installation and Operation Installation Model 100/200: To Connect 16495 The available connector plates are listed in Table 2-1. For connector plate installation information, refer to Agilent 16495 Installation Guide. For the connections between the instruments and the connector plate, use the measurement cables listed in Table 2-2 and Table 2-3, and connect them to the appropriate connectors. For the connections over the connector plate, see the following tables.
Installation and Operation Installation Table 2-2 Model 100 Measurement Cable Connections Terminal name Designation on plate 1 Interlock Intlk Agilent 16493J Interlock Cable GNDU GNDU Agilent 16493L GNDU Cable E5270B SMU E5270B SMU 4284A Force Odd number from 1 to 24 Sense Even number from 1 to 24 Force 1 to 24 Cable For Kelvin connection. Agilent 16493K Kelvin Triaxial Cable. 16495F/G/H/J allow 6/12/3/4 Kelvin triaxial connections respectively. For non-Kelvin connection.
Installation and Operation Installation Table 2-4 GNDU Output Connections Kelvin connections non-Kelvin connections Use a low-noise coaxial cable (Agilent part number 8121-1189) from the connector to the prober, socket, or DUT as shown. Short the Sense and Force on the connector as shown below. Measurement data will include the residual resistance of the connection wire. To cancel the effects of cable resistance, connect the Sense line and Force line as close as possible to the terminal of the DUT.
Installation and Operation Installation Table 2-5 SMU Output Connections Kelvin connections non-Kelvin connections Use low-noise coaxial cable (Agilent part number 8121-1191) from the connector to the prober, socket, or DUT as shown. The following figure is when the Kelvin triaxial cable is used. If the triaxial cable is used, connect the cable to the Force terminal only. With this connection, the measurement data will include residual resistance from the connection cable.
Installation and Operation Installation Low-Noise Coaxial Cable For the extended measurement paths over the connector plate, use low-noise coaxial cable (Agilent part number 8121-1191). This cable can maximize the guard effects and minimize the impression of the external noise. Figure 2-3 shows the cutting example of this cable. Key point is the isolation between the conductive layer and the center conductor. So, cut and trim the end of the cable as shown in this figure by using a cutter and so on.
Installation and Operation Installation To Make an Interlock Circuit The Agilent E5270B/4155C/4156C provides an interlock terminal to prevent you from receiving an electrical shock from high voltage (more than ±42 V). If the interlock terminal is open, the instrument cannot force high voltage more than ±42 V. You must install an interlock circuit on a shielding box and connect it to the instrument’s Interlock terminal to prevent hazardous voltages when the door of the shielding box is open.
Installation and Operation Installation Figure 2-5 Dimensions of the LED (Agilent part number 1450-0641) 11 5 5 Cathode(-) Anode(+) 10 6 5.6 Units: mm UGI01013,50x50 Dimensions of the Interlock Switch (Agilent part number 3101-0302) 4.75 4.3 10.3 2.8 Figure 2-6 2.8 6.35 3.1 6.5 18.8 5.5 10.3 NC NO 15.9 Max 9 15.2 2.8 8.1 2.8 Switch off Switch on 59.4 COM 3.1 22.2 27.8 Units: mm UGI01011,85x60 Figure 2-7 10 37.
Installation and Operation Installation Model 100/200: To Make Your Connector Panel This section is for you who do not use the Agilent 16495 connector plate. If you want to mount connectors that accept the measurement cables from the instruments directly on your own connector panel, test fixture, or shielding box, perform the following procedure. 1. Select the appropriate parts for your application. See Table 2-7. 2. Make the holes and mount the connectors on your connector panel. See Table 2-8.
Installation and Operation Installation Table 2-8 Dimensions of Connector Holes Interlock Connector (in mm) 1.8 5.1 8.2 BNC Connector (in mm) 12.1 12.8 Triaxial Connector (in mm) 10.3 ∅11.3 Kelvin Triaxial Connector (in mm) 14 11 11 14 2.8 10.3 2 − ∅11.3 2- 14 ∅3.2 2 − M3 x 0.
Installation and Operation Installation Model 300/400: To Install B2220A This section describes how to install the Agilent B2220A probe card interface. This information is for you who use the auto prober. NOTE Figure 2-8 For the installation of the B2220A and the connection to the DUT interface, contact your favorite prober vender. The prober vender will be able to provide the DUT interface and mechanisms required to install the B2220A.
Installation and Operation Installation • Pin holes for the B2220A’s guide pins. • Rack, cramp, or something to reduce stress to the input connectors/cables. Enough space is required at the side of the prober to access the input cables and to perform maintenance of the B2220A. See “Probe Card Interface” on page 6-1. Also see Agilent 41000 Preinstallation Guide.
Installation and Operation Installation Procedure The following procedure shows how to install the Agilent B2220A. Do not remove the contact protector and the light shielding panel before starting the procedure. See also “Probe Card Interface” on page 6-1. 1. Place the B2220A. Then, face the contact side (bottom side) up. 2. Unscrew and remove the contact protector from the bottom cover. Keep the protector in trust. You may need it for move in future. 3. Mount the B2220A on your prober.
Installation and Operation Installation Model 300/400: To Use Test Fixture If you perform the measurement of the package devices, use the test fixture. Then, install the Agilent B2220A as standalone, not on the prober. Preparation 1. Prepare the following items. • Rubber feet, 4 ea. and bond or double-sided adhesive tape The rubber feet should be attached on the corner of the B2220A top cover to protect the jutty on the top cover. • Agilent E3140A Test Fixture Adapter, 1 ea.
Installation and Operation Installation Model 300/400: To Connect Measurement Cables Connect measurement cables between the Agilent B2200 switch mainframe outputs and the Agilent B2220A probe card interface inputs as shown below. For the cable connection between instruments, see “Service” on page 7-1. 1. Connect the interlock cable between the Agilent 4155C/4156C/E5270B’s interlock connector and the interlock connector of the Agilent B2220A probe card interface. See Figure 2-11 and Figure 2-12. 2.
Installation and Operation Installation Figure 2-12 Measurement Cable Connection $JLOHQW $ /&5 PHWHU $JLOHQW % $ 3UREH FDUG LQWHUIDFH $JLOHQW ( % RU & & % 3DUDPHWHU DQDO\]HU ,QWHUORFN 3UREH FDUG *1'8 :DIHU WR SUREHU FKXFN $XWR SUREHU $JLOHQW % 6ZLWFK PDLQIUDPH Table 2-10 Agilent B2200 Outputs to Agilent B2220A Inputs Connections B2200 output 2- 20 B2220A input: non-Kelvin connection B2220A input: Kelvin connection 48 pin 24 pin 48 pin 24 pin 1 1 2 1 2 2
Installation and Operation Installation B2200 output B2220A input: non-Kelvin connection B2220A input: Kelvin connection 48 pin 24 pin 48 pin 24 pin 17 17 34 17 34 18 18 36 18 36 19 19 38 19 38 20 20 40 20 40 21 21 42 21 42 22 22 44 22 44 23 23 46 23 46 24 24 48 24 48 25 25 - 25 - 26 26 - 26 - 27 27 - 27 - 28 28 - 28 - 29 29 - 29 - 30 30 - 30 - 31 31 - 31 - 32 32 - 32 - 33 33 - 33 - 34 34 - 34 - 35 35 - 35
Installation and Operation Installation To Connect GNDU Cable The Agilent E5270B or 41501B’s GNDU (ground unit) is connected as shown below. The GNDU is normally connected to the prober chuck. NOTE For the connection to the prober chuck, contact your favorite prober vender. • Non-Kelvin connection (Agilent E5270B or Agilent 41501B) 1. Connect the Agilent N1254A-107 adapter to the instrument’s GNDU connector. 2. Connect the Agilent 16493H GNDU cable between the adapter and the prober chuck.
Installation and Operation Installation To Connect Power Cable 1. Prepare the site power line and the power receptacle for the Agilent 41000 power cable as described in Agilent 41000 Preinstallation Guide. 2. Connect the Agilent 41000 power cable to the power receptacle. The power cable will come from the bottom rear side of the Agilent 41000 system cabinet. It will be connected to the rear panel of the power distribution unit (PDU). 3.
Installation and Operation Turning the PDU On and Off Turning the PDU On and Off This section describes how to turn on or off your Agilent 41000 equipped with the power distribution unit (PDU). WARNING • “To Turn On your System” • “To Turn Off your System” • “To Turn Off your System in Emergency” • “To Reset EMO Button” Electrical Work Type 3: 24 V is forced to the uninsulated parts of the EMO rear panel. Do not touch these parts.
Installation and Operation Turning the PDU On and Off To Turn Off your System 1. Press the INSTRUMENT POWER OFF button on the EMO panel. This shuts off AC power to the instruments outlets. 2. Perform the shutdown procedure for your computer and turn off its line switch 3. Optional. Set the PDU main switch to the OFF position. This shuts off AC power to the PDU.
Installation and Operation Recovering from Power Line Problems Recovering from Power Line Problems The PDU has protectors to detect power line problems and protect the system from damage. These protectors stop the supply of power from the PDU to instruments and computer/controller. The following conditions will stop the supply. • Excessive current flows through the breaker. • The EMO button is pressed. • The Ext. EMO terminal is open. • The Remote Ctrl. terminal is open.
Installation and Operation Maintenance Maintenance Maintenance should be performed periodically to keep the Agilent 41000 in good condition. Performance Verification Performance verification must be performed periodically so that the instruments satisfy the specifications, and keep a good condition. It is recommended to perform the performance verification once a year at least. For the performance verification, contact your nearest Agilent Technologies Service Center.
Installation and Operation Maintenance Model 300/400: Replacing Contact Pins Agilent B2220A probe card interface fixes the contact pins on its contact assemblies by using rings. To replace the defective pins, perform the following procedure. You will need a mini-screwdriver and a slip-joint pliers. Also use rubber gloves if possible to prevent the contact pin from dirty.
Installation and Operation Maintenance Model 300/400: Checking Interlock Circuit Perform the following steps to check the operation of the interlock circuit of your measurement system. 1. Connect the interlock cable between the B2220A’s interlock connector and the instrument’s interlock connector. 2. If you use the auto prober, place the B2220A on the prober to set the prober sense switch to the make position. If you use your test fixture, close the top cover of the Agilent E3140A Test Fixture Adapter. 3.
Installation and Operation Maintenance 2- 30 Agilent 41000 Administration Guide, Edition 3
3 Using Agilent iPACE Verification Tool
Using Agilent iPACE Verification Tool This chapter explains how to use the Agilent iPACE Verification Tool. NOTE • “Overview” • “Installation” • “Start-Up” • “Self-test” • “Connection Check” • “Noise Offset Measurement” • “Settling Time/Leakage Current Measurement” • “Using Batch Mode” • “Reading Result Data” About Agilent iPACE Verification Tool The Agilent iPACE Verification Tool is a non support sample program used to specify any defective components of the Agilent 41000.
Using Agilent iPACE Verification Tool NOTE Agilent 41000 Measurement Record of Integrity Verification Keep the Agilent 41000 Measurement Record of Integrity Verification report. The report shows the following data measured at the factory. The values shown below are just sample. • Noise/Offset Record #Source, Input, Slot, Output, IOffset[A], Noise[Sigma] SMU1, 1, 1, 1, -2.115E-13, 8.01234E-15 • • IOffset[A]: Averaging value of the all data of the offset current measurement result.
Using Agilent iPACE Verification Tool Overview Overview The Agilent iPACE Verification Tool can perform the following test and measurements. This tool will be helpful to specify the defective components of the Agilent 41000 or to know the measurement ability of whole system including the extended measurement paths and so on. It is also useful for the system administration. • Self-test Performs self-test of each instrument. You can see the test results on the Verification Tool window or the log file.
Using Agilent iPACE Verification Tool Installation Installation This section explains how to install the Agilent iPACE Verification Tool. • “System Requirements” • “Installation Procedure” System Requirements The following system environment is required to execute the Agilent iPACE verification tool. • Operating System Microsoft Windows 2000 or Windows XP Professional • Agilent GPIB (IEEE 488) Interface and Agilent IO Libraries M.01.01.
Using Agilent iPACE Verification Tool Installation Installation Procedure The installation flow is shown below. If you have already installed the Agilent IO libraries and the Agilent GPIB (IEEE 488) interface on your computer, skip steps 1 through 3. 1. Install Agilent IO libraries. Follow the setup program instructions, and complete the installation. Then do not forget to add the VISACOM to the libraries to install. The VISACOM is required to execute the Agilent iPACE verification tool. 2.
Using Agilent iPACE Verification Tool Start-Up Start-Up • “Required Tools” • “Kelvin Cable Output Signal” • “Start-Up” Required Tools Before starting the verification, prepare the tools listed in Table 3-1. The tools except for the multimeter are furnished with the Agilent 41000. Table 3-1 Required Tools Agilent model number / part number / description Purpose Qty. E2373A basic 3.
Using Agilent iPACE Verification Tool Start-Up Start-Up To start up the Agilent iPACE verification tool, boot the program and set the system configuration as shown below. 1. Click Start, Programs, Agilent iPACE Verification Tool, and iPACE Verification Tool. The Set Configuration window and the iPACE Verification Tool window will open. On the Set Configuration window, perform the following steps. 2. Specify the GPIB interface by using the GPIB Name combo box.
Using Agilent iPACE Verification Tool Self-test Self-test This section explains how to perform the self-test for the system component (instrument). Perform the following procedure after the configuration setup is completed as shown in “Start-Up” on page 3-8. 1. Click the ‘Selftest’ tab on the ‘iPACE Verification Tool’ window. 2. Click Run to start the self-test of the all instruments. Clicking Break aborts the self-test and initializes each instrument. 3.
Using Agilent iPACE Verification Tool Connection Check Connection Check This section explains how to perform the connection check. The connection check will be performed by applying voltage from an instrument (voltage source) and monitoring voltage at an output of the Agilent B2220A Probe Card Interface. A hand held multimeter is used to measure the voltage.
Using Agilent iPACE Verification Tool Connection Check 4. Specify the switching matrix output port by using Output Slot and Output Ch. The example in Figure 3-4 selects the output port 2 of the switch module installed in the slot number 2. 5. Click Run. A dialog box opens to confirm the start of the connection check. Click Cancel to cancel the connection check, or click OK to start. DC voltage (approximately 10 V) will be applied to the specified output port.
Using Agilent iPACE Verification Tool Connection Check Table 3-2 Output Port and Force Pattern Output ports Force pattern (F) numbers on E3141A Universal fixture B2220A: non-Kelvin connection Output Slot 1 2 3- 12 B2220A: Kelvin connection Output Ch 48 pin 24 pin 48 pin 24 pin 1 1 2 1 2 2 2 4 3 3 6 3 6 4 4 8 5 5 10 5 10 6 6 12 7 7 14 7 14 8 8 16 9 9 18 9 18 10 10 20 11 11 22 11 22 12 12 24 1 13 26 13 26 2 14 28 3 15 30 15 30 4 16 32
Using Agilent iPACE Verification Tool Connection Check Output ports Force pattern (F) numbers on E3141A Universal fixture B2220A: non-Kelvin connection Output Slot Output Ch 3 4 B2220A: Kelvin connection 48 pin 24 pin 48 pin 24 pin 1 25 - 25 - 2 26 - 3 27 - 4 28 - 5 29 - 6 30 - 7 31 - 8 32 - 9 33 - 10 34 - 11 35 - 12 36 - 1 37 - 2 38 - 3 39 - 4 40 - 5 41 - 6 42 - 7 43 - 8 44 - 9 45 - 10 46 - 11 47 - 12 48 - Agilent 41000 A
Using Agilent iPACE Verification Tool Connection Check Troubleshooting If the proper voltage does not appear, it may be caused by the following reasons. NOTE • Contact pins or connectors are dirty. • Contact pins or cables are defective. • Any instrument is defective. If you found any defect in the system component If you found any defect in the system component (DC source/monitor, LCR meter, switching matrix, or probe card interface), contact your nearest Agilent Technologies Service Center.
Using Agilent iPACE Verification Tool Connection Check 4. If the measurement result is good, reconnect the cable to the connector 2. And disconnect cable from the switching matrix output connector (3 in Figure 3-5). Then, perform the connection check at the switching matrix output connector. If the proper voltage does not appear, the switch module or mainframe will be defective. 5. If the measurement result is good, reconnect the cable to the connector 3.
Using Agilent iPACE Verification Tool Noise Offset Measurement Noise Offset Measurement This section explains how to perform the noise offset measurement. The noise offset measurement will be performed by applying 0 V from the DC source/monitor and monitoring current by the DC source/monitor when the Agilent B2220A outputs are open. • “Measurement Setup” • “Execution Procedure” • “Troubleshooting” Measurement Setup Make the following measurement setup to perform the noise offset measurement. 1.
Using Agilent iPACE Verification Tool Noise Offset Measurement Execution Procedure Perform the following procedure after the instrument self-test is completed as shown in “Self-test” on page 3-9. 1. On the ‘iPACE Verification Tool’ window, click the ‘Verification’ tab, and select Noise from the Test Item combo box. See Figure 3-7. 2. Specify the voltage source by using Source. The example in Figure 3-7 selects the SMU3. 3. Specify the switching matrix input port by using Input Port.
Using Agilent iPACE Verification Tool Noise Offset Measurement Figure 3-7 iPACE Verification Tool window - Verification tab - Noise Troubleshooting If the result data is worse than the expected value, check your measurement environment. The following factors can affect the measurement result. • Temperature change • Humidity change • Environmental noise such as pump, motor, light, and so on See “Measurement Environments” on page 5-3 for the acceptable measurement environments.
Using Agilent iPACE Verification Tool Settling Time/Leakage Current Measurement Settling Time/Leakage Current Measurement This section explains how to perform the settling time/leakage current measurement. The settling time/leakage current measurement will be performed by applying voltage (10 V) from the DC source/monitor and monitoring current by the DC source/monitor when the Agilent B2220A outputs are open.
Using Agilent iPACE Verification Tool Settling Time/Leakage Current Measurement Execution Procedure Perform the following procedure after the instrument self-test is completed as shown in “Self-test” on page 3-9. 1. On the ‘iPACE Verification Tool’ window, click the ‘Verification’ tab, and select Settling/Leak from the Test Item combo box. See Figure 3-9. 2. Specify the voltage source by using Source. The example in Figure 3-9 selects the SMU2. 3.
Using Agilent iPACE Verification Tool Settling Time/Leakage Current Measurement Figure 3-9 iPACE Verification Tool window - Verification tab - Settling/Leak Troubleshooting If the result data is worse than the expected value, check your measurement environment. The following factors can affect the measurement result.
Using Agilent iPACE Verification Tool Using Batch Mode Using Batch Mode This section explains how to use the batch mode that is the function to perform the self-test, connection check, noise offset measurement, and settling time/leakage current measurement automatically. To use the batch mode, you need a batch file that is used to specify the measurement items and the measurement conditions.
Using Agilent iPACE Verification Tool Using Batch Mode To Perform Batch Mode Verification Perform the following procedure after the configuration setup is completed as shown in “Start-Up” on page 3-8. 1. On the ‘iPACE Verification Tool’ window, click the ‘Batch’ tab. 2. Click Open.... The ‘Open Batch File’ window appears. 3. On the ‘Open Batch File’ window, select the batch file to use and click Open. The ‘Open Batch File’ window will be closed.
Using Agilent iPACE Verification Tool Using Batch Mode To Create Batch File This section explains how to create the batch file. • “Batch File” • “Connection Check” • “To Create Batch File” Especially, you have to understand the measurement mechanisms in the batch mode to define the batch files to perform the connection check. Batch File Contents of the batch file are described in this section. Each line of the batch file should contains the following information.
Using Agilent iPACE Verification Tool Using Batch Mode Setup Example • Connection check: All parameters must be specified. The program ignores the line that contains the improper value. Example: 0,SMU1,1,2,12,SMU4,5,2,9 Example: 0,SMU1,1,2,12,SMU4,5,2,7 Example: 0,SMU1,1,2,12,SMU4,5,2,5 Example: 0,SMU1,1,2,12,SMU4,5,2,3 Example: 0,SMU1,1,2,12,SMU4,5,2,1 • Noise offset measurement: Specify the parameters test item to s output ch. The program ignores the line that contains the improper value.
Using Agilent iPACE Verification Tool Using Batch Mode Figure 3-12 Sample Batch File # [,,,
Using Agilent iPACE Verification Tool Using Batch Mode Connection Check To perform the connection check in the batch mode, the connection check fixture (E3143-60001) must be connected to the Agilent B2220A probe card interface. The fixture has four 12 pin block, and the pins are connected by the resistor as shown in Figure 3-13. For the 48(24) pin configuration, the batch file should be created upon the following connections of the voltage source (VS) and the voltmeter (VM).
Using Agilent iPACE Verification Tool Using Batch Mode If the system contains a source monitor unit (SMU) that is connected to the Agilent B2200 switch mainframe by using a Kelvin triaxial cable, the switch module output ports work as the couple output port. See Figure 3-14. You can use one of the following SMUs for the voltage source and the voltmeter.
Using Agilent iPACE Verification Tool Using Batch Mode To Create Batch File Open the ‘iPACE Verification Tool’ window, and perform the following step. 1. Click the ‘Batch’ tab. 2. Click Open.... The ‘Open Batch File’ window appears. On the ‘Open Batch File’ window, select the batch file to use, and click Open. The ‘Open Batch File’ window will be closed. And the selected file name will be displayed in the ‘Batch File Name’ field. 3. Click Edit.... Then the Notepad will open.
Using Agilent iPACE Verification Tool Reading Result Data Reading Result Data This section explains the contents of the result data displayed on the ‘Result Window’ area of the ‘iPACE Verification Tool’ window. The parameters covered by [ ] are optional. The data will be logged into the log file. In the log file, the parameters are separated by tab.
Using Agilent iPACE Verification Tool Reading Result Data Table 3-4 Parameters in Report File Parameter Description Model Model number of the instrument that the self-test was performed. Result Self-test result. Pass or Fail. Source Source monitor unit or voltage source. SMU1 to SMU8, VSU1 to VSU2, PGU1 to PGU2, or CMU. Input SWM input port number 1 that was used for the Source connection. 1 to 14. Slot SWM slot number that was used for the Source connection. 1 to 4.
Using Agilent iPACE Verification Tool Reading Result Data 3- 32 Agilent 41000 Administration Guide, Edition 3
4 Agilent iPACE Verification Tool
Agilent iPACE Verification Tool This chapter provides the reference information of the Agilent iPACE Verification Tool and consists of the following sections. NOTE • Set Configuration Window • iPACE Verification Tool Window • Project Files • Project Items • To Change Measurement Conditions System Requirements For the system requirements to perform the verification tool or modify the program code, see “Installation” on page 3-5.
Agilent iPACE Verification Tool Set Configuration Window Set Configuration Window This window is used to set the system configuration of the Agilent 41000. GPIB Name Selects the VISA name of the GPIB interface. Instrument Selects the instrument. Check the check box of the left side. Then the Instrument combo box will be active. Figure 4-1 GPIB Address Selects the GPIB address of the instrument set to the Instrument combo box.
Agilent iPACE Verification Tool iPACE Verification Tool Window iPACE Verification Tool Window This section explains GUI of the iPACE Verification Tool window. File The Open Report File... menu opens the Open Report File window. On the window, selects the log file used to save the measurement result data. The Exit menu closes the iPACE Verification Tool window. Config The Set GPIB Address... menu opens the Set Configuration window. See “Set Configuration Window” on page 4-3.
Agilent iPACE Verification Tool iPACE Verification Tool Window Verification Tab Executes the connection check, noise offset measurement, or settling time/leakage current measurement. Test Item Selects the measurement item to perform. Connection Path connection check Figure 4-3 Noise noise offset measurement Settling/Leak settling time/leakage current measurement Source Selects the voltage source (voltage output unit).
Agilent iPACE Verification Tool iPACE Verification Tool Window Batch Tab Executes the measurement in the batch mode. Figure 4-4 4- 6 Batch File Name Displays the batch file to execute. Open... Opens the Open Batch File window. On the window, select the batch file to execute. Edit... Opens the Notepad and displays the contents of the batch file that is specified by the Batch File Name. You can edit the batch file on the Notepad. Run Starts the specified measurement.
Agilent iPACE Verification Tool Project Files Project Files Agilent iPACE verification tool consists of the following projects. • Tool Main project of the verification tool. Creates the GUI, controls the measurements, displays the measurement results, creates the log file, and so on. This project imports the Control project. Location: /src/iPACE Verification Tool • Control Measurement control subprograms are defined in this project. This project activates the Body project.
Agilent iPACE Verification Tool Project Items Project Items Each project consists of the project items shown in the following tables. Table 4-1 • Tool Project Items • Control Project Items • Body Project Items • Instrument Project Items Tool Project Items Item name Description Main.vb Creates the iPACE Verification Tool window. Config.vb Creates the Set Configuration window. Parameter.vb Defines value of the instrument setup parameters (measurement condition).
Agilent iPACE Verification Tool Project Items Table 4-2 Control Project Items Item name Body.vb Description Collects the instrument control basic information; instrument model, GPIB card number, address, program internal information, and so on. And activates the Body project. Table 4-3 Control.vb Defines the measurement control subprograms used for connection path control, source output control, measurement data read, and so on. KeyCode.vb Defines key code used by the measurement control subprograms.
Agilent iPACE Verification Tool Project Items Table 4-4 Instrument Project Items Item name 4- 10 Description Inst.vb Defines the common functions such as configuration confirmation, error detection, initialization, self-test, and so on, in functions or subprograms. InstSpa.vb Defines the functions for the source monitor unit in functions or subprograms. InstCmu.vb Defines the functions for the LCR meter in functions or subprograms. InstMat.
Agilent iPACE Verification Tool To Change Measurement Conditions To Change Measurement Conditions The following procedure provides how to change the measurement condition and the instrument setup. See Table 4-5 for the measurement condition setup parameters. 1. Make backup of all files in \src. For example, copy them to \backup\src. Then, is the folder where this program has been installed.
Agilent iPACE Verification Tool To Change Measurement Conditions Table 4-5 Measurement Condition Setup Parameters Variable name Description Default value Connection check VERIFY_CHECK_VS_FORCE Voltage source output value (V) 10.0 VERIFY_CHECK_VS_COMPLIANCE Voltage source compliance value (A) 0.001 VERIFY_CHECK_IS_FORCE Voltage measurement unit output value (A) 0.0 VERIFY_CHECK_IS_COMPLIANCE Voltage measurement unit compliance value (V) 20.
5 Measurement Techniques
Measurement Techniques This chapter explains the following measurement techniques.
Measurement Techniques Measurement Environments Measurement Environments It is important to prevent the device under test (DUT) from light, noise, vibration, and temperature change to perform measurement, especially sensitive measurement such as low current measurement and low resistance measurement. Before starting measurement: Light and Noise To prevent the DUT from light and noise, attach the light shielding panel (E3120-00211) to the probe card interface (Agilent B2220A).
Measurement Techniques Kelvin Connections Kelvin Connections This section describes the Kelvin connections effective for the high current measurement or the low resistance measurement. The Kelvin connection is available for the source monitor unit (SMU) installed in the Agilent 4156C and E5270B.
Measurement Techniques Kelvin Connections To Make Kelvin Connections The instruments should be connected as shown in Figure 5-1 to make Kelvin connections. Table 5-1 lists the connection cables required to make the Kelvin connection of the source monitor unit (SMU). Connect the 16493K Kelvin cable between the SMU and the switching matrix (SWM) input. And connect the 16494C Kelvin cable between the SWM output and the probe card interface (PC I/F) input.
Measurement Techniques Kelvin Connections Force-sense connections Kelvin output sense and force appear on the adjacent output pins of the Agilent B2220A probe card interface. For example, if a Kelvin path is connected to the inputs 1-2, it is extended to the output 1-2. When the measurement is performed, the force and sense must be connected together. There is the following ways to make the force-sense connections. Select the way suitable for your measurement environment, and make it.
Measurement Techniques Kelvin Connections To Control Switching Matrix The Agilent B2200 switching matrix provides the couple mode function. When the couple mode is ON, the matrix switches will be controlled to connect the specified couple input port to the specified couple output port. The couple input ports have to be set to the input ports used for the Kelvin connection. To set couple input ports There is two ways to set the couple input ports.
Measurement Techniques Kelvin Connections To connect non-couple input ports to couple output ports When you control the Agilent B2200 switching matrix to connect the non-couple input port to the couple output port that the Kelvin cable is connected to, control the switches to connect the input port to both lines of the Kelvin cable. They should be the same potential when the measurement is performed. The following example connects the input port 1 to the output ports 11 and 12.
Measurement Techniques Kelvin Connections To Connect Ground Unit To use the ground unit (GNDU) of the Agilent 41501B or E5270B, connect the GNDU output to the probe card interface (PC I/F) input, not the switching matrix input. See Figure 5-5. Table 5-2 lists the connection cables required to connect the GNDU. Connect the adapter to the PC I/F input, then connect the GNDU cable between the GNDU and the adapter. The Kelvin connection can be supported over the PC I/F output.
Measurement Techniques Kelvin Connections To make force-sense connection at PC I/F input To keep the Kelvin connection up to the Agilent B2220A probe card interface (PC I/F) input, not output, see Table 5-3 instead of Table 5-2. Connect the adapter to the PC I/F input, then connect the GNDU cable between the GNDU and the adapter. The path over the PC I/F input will be the non-Kelvin connection.
Measurement Techniques Low Current Measurements Low Current Measurements This section describes the measurement techniques effective for the low current measurement. • “Guard Technique” • “Hold Time” • “Offset Current Subtraction” Guard Technique The guard technique was developed to reduce the leakage current that occurs to the measurement path. It is important to extend the guard pattern as close as possible to the front edge of the probe needle to maximize the effect of the guard.
Measurement Techniques Low Current Measurements Hold Time Dielectric absorption is considerable for the low current measurement. It may be unexpected current caused by rapid voltage changes. To measure low current properly, it is important to wait until when this transitional current settles down. So, the low current measurement should be performed with the reasonable hold time setting. To find the reasonable hold time, perform the dielectric absorption current measurement as shown below. 1.
Measurement Techniques Low Current Measurements Offset Current Subtraction Offset current of the measurement path is considerable for the low current measurement. It is important to subtract the offset current (Iaverage) from the measurement data (Imeasure) to approximate the real data (Iresult). This section introduces the following two ways. • “To subtract the open state offset current” • “To subtract the contact state offset current” The offset current can be subtracted as shown in Figure 5-8.
Measurement Techniques Low Current Measurements To subtract the open state offset current In this way, the offset current is defined as the current measured when the end of measurement path is opened. The offset current can be subtracted as shown below. Summary Procedure • Open state offset current measurement • Low current measurement of device under test (DUT) • Offset current subtraction 1. Make open state at the end of the measurement path for the all output ports.
Measurement Techniques Low Current Measurements To subtract the contact state offset current In this way, the offset current is defined as the current measured when a device is connected and it is in the off state. This will be acceptable for active devices such as MOSFET and bipolar transistor. The offset current can be subtracted as shown below. Summary Procedure • Contact state offset current measurement • Low current measurement of device under test (DUT) • Offset current subtraction 1.
Measurement Techniques Low Resistance Measurements Low Resistance Measurements For the low resistance measurement, the differential voltage measurement is effective. The impedance of the voltmeter is enough higher than the residual resistance. So the voltage drop by the residual resistance can be ignored. The low resistance measurement can be performed as shown below. Summary Procedure • Voltage/current measurement • Output current change • Voltage/current measurement • Resistance calculation 1.
Measurement Techniques Low Resistance Measurements To Select the Output Current Value The current source output value is a key factor to perform resistance measurement accurately. The optimum value can be find as shown below. Summary Procedure • Performs the voltage/current measurement for a sample with current output log sweep • Plots the resistance, measured voltage, measured current vs. output current curves • Plots the resistance vs. measured voltage plot curve • Plots the resistance vs.
Measurement Techniques Low Resistance Measurements Figure 5-11 Rcalc vs. Imeas, Vmeas Plot Example 0.040 0.039 0.038 0.037 Rcalc 0.036 0.035 0.034 0.033 0.032 0.031 0.030 1.00E-04 1.00E-03 1.00E-02 1.00E-01 1.00E-03 1.00E-02 Imeas 0.0400 0.0390 0.0380 0.0370 Rcalc 0.0360 0.0350 0.0340 0.0330 0.0320 0.0310 0.0300 1.00E-05 1.
Measurement Techniques Capacitance Measurements Capacitance Measurements NOTE Information described in this section is effective for the Agilent 41000 Model 200/300/400. When the capacitance/conductance measurement is performed, LCR meter measures the capacitance/conductance of the path including a device under test (DUT), matrix switches, extension cables and so on. So, the data measured by the LCR meter is far from the DUT’s capacitance/conductance.
Measurement Techniques Capacitance Measurements Required Conditions The following conditions must be satisfied to use the capacitance compensation function. For the instrument connections, see Figure 5-12.
Measurement Techniques Capacitance Measurements In Figure 5-12, C2H, C2L, C3H, C3L are the compensation coefficients defined in the compensation data file. where, CxH is for the path connected to the Agilent 4284A Hc-Hp terminal, and CxL is for the path connected to the Agilent 4284A Lc-Lp terminal. When the Agilent B2220A probe card interface is used, obtain the coefficients for C3x, and create your compensation data file. In this case, probe card will be used for the C3x path.
Measurement Techniques Capacitance Measurements To Create Compensation Data File This section explains how to create the compensation data file. 1. Select one of the compensation data files (template, 20 files) installed when the Agilent B2200 VXIplug&play driver is installed. To select the most appropriate template for your measurement environment, see Table 5-5 that lists the file name and the measurement environment where the template targets.
Measurement Techniques Capacitance Measurements Table 5-5 Template Compensation Data Files Measurement environment that template targets File name1 \B2210A\pcif\triax\3m.data Switch module Cable2 DUT interface3 B2210A 16494A-002 B2220A C3H and C3L 16495F/G C2H, C2L, C3H, and C3L B2220A C3H and C3L 16495F/G C2H, C2L, C3H, and C3L \B2210A\pcif\triax\4m.data 16494A-005 \B2210A\pcif\kelvin\3m.data 16494C-002 \B2210A\pcif\kelvin\4m.
Measurement Techniques Capacitance Measurements Table 5-6 Compensation Coefficients and Modifications Compensation coefficients C2H C2L Modifications of data file For the Agilent B2220A probe card interface, do not modify the lines. For the connector plate, change the R, L, C values in the lines. The value must be changed to the R, L, C values of the C2x path (triaxial cable with connector plate) shown in Figure 5-12. C3H C3L Change the R, L, C values in the lines.
Measurement Techniques Capacitance Measurements To obtain compensation coefficients Obtain the compensation coefficients as shown below. 1. Select the measurement frequency (Fmeas) used for the capacitance measurement of a device under test (DUT), and set it to the Agilent 4284A. The coefficients must be measured at the same frequency. 2. Perform the Agilent 4284A open calibration at the measurement terminal. Optionally, perform short calibration if you want. 3.
Measurement Techniques Capacitance Measurements To Perform Measurement and Compensation Perform the capacitance measurement and compensation as shown below. 1. Set the Agilent 4284A measurement condition. Then the frequency must be the value (Fmeas) used when the compensation coefficients are measured. 2.
Measurement Techniques Capacitance Measurements Table 5-9 Capacitance Compensation Program Example Imports Agilent.TMFramework Imports Agilent.TMFramework.DataAnalysis Imports Agilent.TMFramework.DataVisualization Imports Agilent.TMFramework.InstrumentIO Imports Agilent.TMFramework.InstrumentDriverInterop Imports Agilent.TMFramework.InstrumentDriverInterop.Design Imports Agilent.TMFramework.InstrumentDriverInterop.
Measurement Techniques Capacitance Measurements agb220xa_compenC This function compensates capacitance/conductance data measured by the Agilent 4284A LCR meter, and returns compensation results. Before this function is executed, a compensation data file must be specified by using the agb220xa_selectCompenFile function. The file must contain the appropriate compensation coefficients for your measurement environment.
6 Probe Card Interface
Probe Card Interface This chapter provides the following information of the Agilent B2220A Probe Card Interface. NOTE 6- 2 • “Product Overview” • “Outside View and Dimensions” • “Specifications” • “Accessories” • “Options” The Agilent B2220A probe card interface is a system component of the Agilent 41000 Model 300 and 400. The probe card interface is not furnished with the option NIF.
Probe Card Interface Product Overview Product Overview Agilent B2220A probe card interface is designed for testing semiconductor devices on the wafer placed on a semi-auto prober or a full-auto prober. The Agilent B2220A functions as the interface between a probe card and semiconductor parametric measurement instruments such as the Agilent 4155C/4156C Semiconductor Parameter Analyzer, Agilent B2200 Switching Matrix, and so on. Product image and option configuration are shown in Figure 6-1 and Table 6-1.
Probe Card Interface Product Overview The interconnections of the probe card interface are quite simple. The inputs 1 through 48 are connected to the outputs 1 through 48 respectively. Then, the triaxial connector’s center and middle conductors are connected to the pins A and B of the contact assembly as shown in Figure 6-2. And the outer conductor is connected to common. In addition, the middle conductor is also connected to the shield plate of the contact assembly.
Probe Card Interface Product Overview Interlock Circuit The Agilent B2220A provides the interlock circuit to support the interlock function of the instrument such as the Agilent 4155/4156/E5270. The interlock circuit has been made by connecting the high voltage indicator, prober sense switch, and interlock connector internally. See Figure 6-3. The connector type is same as the interlock connector of the Agilent 4155/4156/E5270.
Probe Card Interface Outside View and Dimensions Outside View and Dimensions This section provides the outside drawings of the Agilent B2220A. The drawings are for the 24 inputs/outputs configuration. However, you will be able to imagine the 48 inputs/outputs configuration easily. Only the different point is the number of inputs/outputs.
Probe Card Interface Outside View and Dimensions Figure 6-5 Handle Side View and Dimensions (in mm) +LJK YROWDJH LQGLFDWRU ,QSXW FRQQHFWRUV WULD[LDO 6FUHZ KROHV +DQGOH )UHH VSDFH UHTXLUHG WR DFFHVV $JLOHQW % $ DQG LQSXW FDEOHV *XLGH SLQ &RQWDFW EORFN &RQWDFW SLQV WZR SLQV IRU HDFK RXWSXW 8VHG WR IL[ VRPHWKLQJ H J KLQJH XVHG WR PRXQW WKH % $ RQ WKH SUREHU Figure 6-6 Input Connector Side View ,QSXW FRQQHFWRUV WULD[LDO ,QWHUORFN FRQQHFWRU +DQGOH +DQGOH *XLGH SLQ
Probe Card Interface Outside View and Dimensions Figure 6-7 Bottom View and Dimensions (in mm) *XLGH SLQ +DQGOH ,QWHUORFN FRQQHFWRU 3UREHU VHQVH VZLWFK ,QSXW FRQQHFWRUV WULD[LDO &RQWDFW EORFN WZR SLQV IRU HDFK RXWSXW +DQGOH *XLGH SLQ Total 24 or 48 contact assemblies are installed in the contact block. The number of assemblies depends on the option (B2220A-024 or B2220A-048). Each assembly has two contact pins.
Probe Card Interface Specifications Specifications This section lists complete specifications and supplemental information of the Agilent B2220A. The specifications are the performance standards or limits against which the B2220A is tested. When the B2220A is shipped from the factory, it meets the specifications. The supplemental information are not specifications but are typical characteristics included as additional information for the operator.
Probe Card Interface Accessories Accessories The Agilent B2220A contains the accessories listed in Table 6-2. Table 6-3 lists the accessories available for the Agilent B2220A. Table 6-2 Furnished Accessories Agilent Part Number Qty.
Probe Card Interface Accessories Table 6-3 Available Accessories Model Number Description E3140A Test fixture adapter 1 E3141A Universal test fixture for package device test E3142A Performance check fixture for low current E3143A • E3144-60001 Card fixture • E3190-60042 Open fixture Connection check fixture set for PCIF • E3141A Universal test fixture (E3141-60005) • E3143-60001 Connection check fixture 1. The E3140A is necessary to use the E3141A, E3142A, or E3143A.
Probe Card Interface Options Options The Agilent B2220A has the following options. Table 6-4 Options Option Item 6- 12 Description B2220A-024 24 inputs/outputs configuration Inputs: 24 triaxial connectors. Outputs: 24 pairs of contact pins. Input/output labels: Even numbers from 2 to 48. B2220A-048 48 inputs/outputs configuration Inputs: 48 triaxial connectors. Outputs: 48 pairs of contact pins. Input/output labels: Integer numbers from 1 to 48.
7 Service
Service This chapter consists of the following sections: CAUTION • “Troubleshooting” • “PDU and EMO” • “Replaceable Parts” • “Replacement Procedure” • “Replacement Procedure” • “Replacement Procedure” If the Agilent B2200 must be shipped If you need to ship the Agilent B2200 for servicing or any reasons, use the packing kit furnished with the Agilent B2200. The Agilent B2200 may have a performance degrade if it is transported or stored in high temperature or high humidity environment.
Service Troubleshooting Troubleshooting This section gives troubleshooting and repair information for the Agilent 41000, and contains the following sections: • “Safety Considerations” • “Checking Power Distribution Unit (PDU)” • “Troubleshooting” A troubleshooting overview for the Agilent 41000 is shown below. 1. If the Agilent 41000 loses power: Check the operation of the power distribution unit (PDU) and the emergency off (EMO) panel. See “Checking Power Distribution Unit (PDU)” on page 7-4. 2.
Service Troubleshooting Safety Considerations WARNING, CAUTION, and NOTE must be observed to ensure the safety of the service personnel or to prevent damage of the system and any system component (instrument). WARNING Several procedures described in this chapter are performed with power applied. Service personnel must be aware of the hazards involved, and perform the procedures carefully and safely to prevent electric shock hazard.
Service Troubleshooting Troubleshooting Troubleshoot the PDU as shown below. 1. Confirm that the site power line is turned off. 2. Disconnect power cable of PDU from site power line. 3. Confirm that the following items are connected properly. If you find any incorrect connection, correct it. • a cable from the EMO panel to the PDU • cables between the PDU and the instrument power outlets • short bar (on the PDU rear panel) 4. Turn on the site power line. 5.
Service PDU and EMO PDU and EMO This section explains the following system cabinet components: Figure 7-1 • “Power Distribution Unit (PDU)” • “Emergency off (EMO) Panel” Agilent 41000 System Cabinet (02 SDQHO 3'8 7- 6 Agilent 41000 Administration Guide, Edition 3
Service PDU and EMO Power Distribution Unit (PDU) The power distribution unit (PDU) receives AC power from a power switchboard at the installation site and distributes that AC power to the following components in the system cabinet: • Controller power outlets • Instrument power outlets • EMO panel The PDU is located in the bottom of the cabinet. For the PDU components, see “System Cabinet” on page 1-9. Figure 7-3 and Figure 7-4 are the overall PDU block diagrams.
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Service PDU and EMO Emergency off (EMO) Panel The emergency off (EMO) panel is located at the top front of the Agilent 41000 system cabinet. The panel has an EMO button (large red button), LINE indicator, and INSTRUMENT POWER ON and OFF buttons. The EMO button is used to immediately shut down the Agilent 41000 power in an emergency. When the EMO button is pressed, all equipment connected to the Instruments outlets and the Controller outlets are shut off.
Service Replaceable Parts Replaceable Parts This section gives information for the Agilent 41000 replaceable parts, and contains the following sections: • “System Cabinet” • “Cables and Accessories” • “Probe Card Interface” • “Accessories for Performance Check” System Cabinet Table 7-3 through Table 7-6 list the replaceable parts of the system cabinet, and Figure 7-6 through Figure 7-9 show the locations of the replaceable parts.
Service Replaceable Parts Figure 7-6 System Cabinet Table 7-3 System Cabinet Reference Designation Part Number Quantity 1 C1230-04002 1 Top panel 2 E3160-60176 1 EMO panel assembly 1, 2U 3 E3160-00252 3 Panel, blank, 2U 4 C1230-00211 2 Panel, cable through, 1U 5 E3160-00254 1 Panel, blank, 4U 6 C1230-00201 1 Panel, cable through, 1U 7 C1230-61401 1 PDU 100-120V 20 A -Spare Part C1230-61402 1 PDU 200-240V NEMA -Spare Part C1230-61403 1 PDU 200
Service Replaceable Parts Figure 7-7 Flanges of Instruments Table 7-4 Flanges of Instruments Reference Designation Part Number Quantity 1 0515-1718 -1 2 5063-9216 1 Flange for 4155, 4156, and 5270B C1230-01201 2 Flange for B2200A C1230-01204 1 Right side of flange for Power Distribution Unit (PDU) C1230-01205 1 Left side of flange for Power Distribution Unit (PDU) Description Screw M4 1. Quantity depends on the instrument.
Service Replaceable Parts Figure 7-8 Front Side (around Cables) Table 7-5 7- 14 Front Side (around Cables) Reference Designation Part Number Quantity 1 0570-1577 2 Dress Screw, 10-32, L=0.625 inch (15.
Service Replaceable Parts Figure 7-9 Rear Side Table 7-6 Rear Side Reference Designation Part Number Quantity 1 1400-3280 4 Zipper tube 2 m (for the 3 m cables) 1400-3280 6 Zipper tube 3 m (for the 4 m cables) 2 C1230-04002 1 Top panel 3 2680-0278C 2 Torx screw, 10-32 4 0515-0386 1 Torx M5 L=10mm with washer 5 0535-0081 1 Nut (HEX NUT M5 with a Washer) 2190-0687 1 Washer, T-B 5.
Service Replaceable Parts Cables and Accessories Table 7-7 lists the furnished cables and accessories of the Agilent 41000. Table 7-7 Cables and Accessories Model Number/ Part Number Quantity1 16494F-001 1 CMU cable 2 m for 4284A 1250-2405 3 BNC-T (m-f-f) type adapter for 4284A 16493B-002 4 BNC cable 3 m for VSU, VMU and PGU of 4155C/4156C/41501B 16494A-001 1 to 8 Triaxial cable 1.5 m for E5270B 16494A-002 1 to 4 Triaxial cable 3 m for 4156C 16493K-001 1 to 4 Kelvin triaxial cable 1.
Service Replaceable Parts Probe Card Interface Table 7-8 lists the replaceable parts of the Agilent B2220A probe card interface. Table 7-8 Probe Card Interface Contact Pin Part Number 0360-2066 Description Contact pin Accessories for Performance Check Table 7-9 through Table 7-11 list the replaceable parts of the accessories required for the performance check.
Service Replacement Procedure Replacement Procedure This section explains how to remove the system components of the Agilent 41000 and how to replace the measurement cables.
Service Replacement Procedure Safety Considerations Before servicing is started, turn off the Agilent 41000. For the procedure, see “Turning the PDU On and Off” on page 2-24. WARNING Turn OFF the power distribution unit (PDU) before starting service. Do not turn on the PDU while accessing internal components of the cabinet or until the replacement parts are reinstalled. Dangerous voltage may be applied to several terminals.
Service Replacement Procedure Required Tools The following tools are required for replacement procedure.
Service Replacement Procedure To Remove Top Panel 1. Remove Torx screws that fix the top panel at the rear side of the system cabinet (see Figure 7-10 and Figure 7-11). Then use the Torx screwdriver (T25). 2. Slide the top panel to the rear side. 3. Remove the top panel.
Service Replacement Procedure To Remove Top Cover 1. Remove the top panel. Then see “To Remove Top Panel” on page 7-21. 2. Remove Torx screws at the rear side of the top cover. Then use the Torx screwdriver (T25). 3. Lift up the top cover and remove it.
Service Replacement Procedure To Remove Instruments 1. Remove the power cable and the GPIB cable from the instrument at the rear side. 2. Remove the test leads or cable assemblies from the instrument at the front side. 3. Remove dress screws that fix the instrument with flanges to the system cabinet. Then use a plus screwdriver (H2). 4. Slide the instrument to the front side a little, as shown in Figure 7-13. 5.
Service Replacement Procedure To Remove EMO Panel 1. Set the main switch on the power distribution unit (PDU) to the OFF position. 2. Disconnect the PDU system power cable from the power outlet of the installation site. 3. Remove the top panel. Then see “To Remove Top Panel” on page 7-21. 4. Remove the top cover. Then see “To Remove Top Cover” on page 7-22. 5. Disconnect the EMO cable from the rear side of the PDU. 6. Remove the nut that fastens the EMO ground wire to the system cabinet.
Service Replacement Procedure To Remove PDU 1. Set the main switch on the power distribution unit (PDU) to the OFF position. 2. Disconnect the PDU system power cable from the power outlet of the installation site. 3. Disconnect the EMO cable from the rear side of the PDU. 4. Remove the power cables of instruments from the rear side of the PDU. 5. Remove screw that fastens the ground wire to the PDU. Then use a plus screwdriver (H2). 6.
Service Replacement Procedure To Remove Measurement Cables 1. Disconnect the measurement cables from instruments. 2. Remove screws that fix the cable-through-panel to the system cabinet. Then use a plus screwdriver (H2). 3. Slide the cable-through-panel to the front side a little. 4. Remove screws that fix the cable-through-panel to the cable-tray. Then use a pozidrive screwdriver (PZ1), and remove the cable-through-panel. 5. Remove cables from the cable-through-panel.
Service Replacement Procedure To Replace Probe Card Interface Cables 1. Open the zipper tube. 2. Disconnect and remove the defective cables. 3. Connect and reinstall the new cables instead of the defective cables. 4. Wrap the all measurement cables by using the zipper tube, and close it completely. Then use the Tool Zip Lock Sealing (Agilent part number 8710-1576). Figure 7-17 Replacing Probe Card Interface Cables 6QQN
Service Replacement Procedure To Replace Contact Pins Agilent B2220A probe card interface fixes the contact pins on its contact assemblies by using rings. To replace the defective pins, perform the following procedure. You will need a mini-screwdriver and a slip-joint pliers. Also use rubber gloves if possible to prevent the contact pin from dirty. NOTE Contact Pins The contact pin consists of the narrow part (pin) and the thick part (tube), and the pin can be inserted into the tube.
Service Measurement Cable Connections Measurement Cable Connections The measurement cables are connected between the Agilent B2200 switch mainframe and the instruments as shown in the following tables. For the Agilent E5270B, see “Agilent E5270B Modules and Cables” on page 7-32.
Service Measurement Cable Connections Table 7-13 Agilent 4284A Cable Connections Instrument terminal Cable B2200 Input 4284A high (CMH) Agilent 16494F test leads 13 CMH 4284A low (CML) Table 7-14 14 CML Agilent 4156C Connections without HPSMU Instrument terminal 1 Cable B2200 Input 4156C SMU1 Agilent 16494A triaxial cable 1 Agilent 16493K Kelvin triaxial cable 2 1 and 2 Agilent 16494A triaxial cable 2 or 3 Agilent 16493K Kelvin triaxial cable 3 3 and 4 Agilent 16494A triaxial cable 3 o
Service Measurement Cable Connections Table 7-15 Agilent 4156C Connections with HPSMU Instrument terminal 1 Cable B2200 Input 4156C SMU1 Agilent 16494A triaxial cable 1 Agilent 16493K Kelvin triaxial cable 2 1 and 2 Agilent 16494A triaxial cable 2 or 3 Agilent 16493K Kelvin triaxial cable 3 3 and 4 Agilent 16494A triaxial cable 3 or 4 or 5 Agilent 16493K Kelvin triaxial cable 4 5 and 6 4156C SMU4 Agilent 16494A triaxial cable 4 or 5 or 6 or open 4156C VSU1 5 Agilent 16493B coaxial cable
Service Measurement Cable Connections Agilent E5270B Modules and Cables The source monitor unit (SMU) modules are installed in the Agilent E5270B mainframe by following the next rule. 1. Modules are installed in the mainframe from the slot 1 sequentially. 2. The HRSMUs are installed in the mainframe before the MPSMUs are installed. 3. The MPSMUs are installed in the mainframe before the HPSMUs are installed. 4. The HPSMU occupies two slots. So it is never installed in the slots 4-5.
Service System Rack and Instruments System Rack and Instruments The system components (instruments) will be installed in the system rack as shown in Table 7-17 when the Agilent 41000 is shipped from the factory.
Service System Rack and Instruments 7- 34 Agilent 41000 Administration Guide, Edition 3
