Technical data

Module 1

Introduction

1-11

ASU

• 100 aA level sensing

• Channel switching

• C measurements

• PG for charge pumping

To CMU Hpot/Hcur

ASU 2

ASU 1

To HRSMU 1

CMU return path

CMUH or Force

CMUL or

Force

Sense

To CMU Lpot/Lcur

To HRSMU 2

The high-resolution SMU (HRSMU) has an innate 1 fA & 0.5 uV measurement resolution. The

optional ASU extends the HRSMU measurement resolution to 0.1 fA.

The ASU has another feature, built-in switching capability. It can switch between the SMU and an

auxiliary input (AUX input, two BNC).

If the CMU is connected to the AUX inputs, the ASU can switch between the low current and CV

measurements. Then connect a wire between the CMU return terminals of ASUs to make the return

path of measurement current. This is effective for accurate capacitance measurement. However, you

need to perform capacitance compensation by yourself.