User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
Agilent B1500 User’s Guide, Edition 7 2- 47
Introduction
Specifications
Table 2-23 Voltage range, resolution, and accuracy (high speed ADC), supplemental
information
Table 2-24 Current range, resolution, and accuracy (high speed ADC
), supplemental
information
Range
Measurement
resolut
ion
Measurement accuracy
±(%+mV)
a
a. ±(% of reading + offset value in mV). Averaging is 128 samples in 1 PLC.
Range
Measurem
ent
resolution
Measurement accuracy
±(%+mV)
a
±0.5 V
b
b. Available for MPSMU/HRSMU.
25 μV ±(0.01 + 0.25) ±40 V 2 mV ±(0.015 + 8)
±2 V 100 μV ±(0.01 + 0.7) ±100 V 5 mV ±(0.0
2 + 20)
±5 V
b
250 μV ±(0.01 + 2)
±200 V
c
c. Available for HPSMU.
10 mV ±(0.035 + 40)
±20 V 1 mV ±(0.0
1 + 4)
Range
Meas
urement
resolut
ion
Measurement accuracy
±(
%+A+A)
a
a. ±(% of reading + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
Range
Measurement
resolution
Measurement accuracy
±(%+A+A)
a
±1 pA
b
b. Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used.
0.1 fA
±(1.8+12E
-15
)
±10 μA 500 pA
±(0.04+2E
-9
+Vo×1E
-11
)
±10 pA
c
c. 10 pA and 100 pA ranges are available for HRSMU with or without ASU.
1 fA
±(0.5+15E
-15
+Vo×1E
-17
)
±100 μA 5 nA
±(0.03+2E
-8
+Vo×1E
-10
)
±100 pA
c
5 fA
±(0.3+3E
-14
+Vo×1E
-16
)
±1 mA 50 nA
±(0.03+2E
-7
+Vo×1E
-9
)
±1 nA 50 fA
±(0
.1+3E
-13
+Vo×1E
-15
)
±10 mA 500 nA
±(0.03+2E
-6
+Vo×1E
-8
)
±10 nA 500 fA
±(0.1+2E
-12
+Vo×1E
-14
)
±100 mA 5 μA
±(0.04+2E
-5
+Vo×1E
-7
)
±100 nA 5 pA
±(0
.05+2E
-11
+Vo×1E
-13
) ±1 A
d
d. Available for HPSMU.
50 μA
±(0.4+3E
-4
+Vo×1E
-6
)
±1 μA 50 pA
±(
0.05+2E
-10
+Vo×1E
-12
)