User`s guide

Agilent B1500 User’s Guide, Edition 7 2- 45
Introduction
Specifications
Period ≥ Width+2 ms (when Width ≤ 100 ms)
Period ≥ Width+10 ms (when Width > 100 ms)
• Resolution: 100 μs
• Pulse setting accuracy (fixed measurement range), supplemental information
• Width: 0.5 % + 50 μs
• Period: 0.5 % + 100 μs
SMU Supplemental Information
• Maximum allowable cable resistance (Kelvin connection)
Sense: 10 Ω
Force: 10 Ω ( ≤ 100 mA), 1.5 Ω ( > 100 mA)
• Voltage s
ource output resistance (Force line, Non-Kelvin connection)
0.2 Ω (HPSMU)
0.3 Ω (MPS
MU, HRSMU)
• Voltage measu
rement input resistance: ≥ 10
13
Ω
• Current source output resistance: ≥ 10
13
Ω (at 1 nA range)
• Current compliance setting accuracy (for opposite polarity)
For 1 pA to 10 nA ranges: Setting accuracy ± 12 % of range
For 100 nA to 1 A ranges: Setting accuracy ± 2.5 % of range
• Maximum capacitive load
For 1 pA to 10 nA ranges: 1000 pF
For 100 nA to 10 mA ranges: 10 nF
For 100 mA and 1 A ranges: 100 μF
• Maximum guard capacitance
900 pF (HPSMU, MPSMU, HRSMU)
660 pF (HRSMU with ASU)
• Maximum shield capacitance
5000 pF (HPSMU, MPSMU, HRSMU)
3500 pF (HRSMU with ASU)