User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
2- 44 Agilent B1500 User’s Guide, Edition 7
Introduction
Specifications
SMU Common Specifications
• Output terminal/connection
Dual triaxial connector, Kelvin (remote sensing)
• Voltage/current compliance (limiting)
The SMU can limit output voltage or current to prevent damaging the device
u
nder test.
•
Voltage compliance:
0 V to ± 100 V (MPSMU, HRSMU)
0 V to ± 200 V (HPSMU)
• Current compliance:
± 10 fA to ± 100 mA (HRSMU with ASU)
± 100 fA to ± 100 mA (HRSMU)
± 1 pA to ± 100 mA (MPSMU)
± 1 pA to ± 1 A (HPSMU)
• Compliance accuracy:
Same as the current or voltage set accuracy.
• About measurement accuracy
• RF electromagnetic field and SMU measurement accuracy
Voltage and current measurement accuracy can be affected by RF
electro
magnetic field s
trengths greater than 3 V/m in the frequency range of
80 MHz to 1 GHz. The extent of this effect depends upon how the
instrument is positioned and shielded.
• Induced RF field noise and SMU measurement accuracy
Voltage and current measurement accuracy can be affected by induced
RF
field noise strengths greater than 3Vrms in the frequency range of 150 kHz
to 80 MHz. The extent of this effect depends upon how the instrument is
positioned and shielded.
• Pulsed measurement
• Width: 500 μs to 2 s
• Period
: 5 ms to 5 s