User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
Agilent B1500 User’s Guide, Edition 7 2- 39
Introduction
Specifications
Table 2-17 Voltage range, resolution, and accuracy (high speed ADC)
Table 2-18 Current range, resolution, and accuracy
(high speed ADC)
Range
Force
resolut
ion
Measurement
resolution
Force accuracy
±(%+mV)
a
a. ±(% of output/measured value + offset value in mV)
Measurement accuracy
±(%+mV)
a
Maximum
current
±0.5 V 25 μV 0.5 μV ±(
0.018 + 0.15) ±(0.01 + 0.2
5) 100 mA
±2 V 100 μV 2 μV ±(0.018 + 0.4) ±(0.01
+ 0.7) 100 mA
±5 V 250 μV 5 μV ±(0.018 + 0.75) ±(0.01 + 2) 100 mA
±2
0 V 1 mV 20 μV ±(0.018 + 3) ±(0.01 + 4) 100 mA
±4
0 V 2 mV 40 μV ±(0.018 + 6) ±(0.015 +
8)
b
b. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo), Vo is the output voltage.
±100 V 5 mV 100 μV ±(0.018 + 15) ±(0.0
2 + 20)
Range
Force
resolut
ion
Measurement
resolution
Force accuracy ±(%+A+A)
a
a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
Measurement accuracy
±(%+A+A)
a
Maximum
voltage
±1 pA
b
b. Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used.
1 fA 0.1 fA
±(0.9+15E
-15
) ±(1.8+12E
-15
)
100 V
±10 pA
c
c. Available for HRSMU.
5 fA
0.4 fA
b
/ 1 fA ±(0.46+3E
-14
+Vo×1E
-17
) ±(0.5+15E
-15
+Vo×1E
-17
)
100 V
±100 pA
c
5 fA
0.5 fA
b
/ 2 fA ±(0.3+1E
-13
+Vo×1E
-16
) ±(0.5+4E
-14
+Vo×1E
-16
)
100 V
±1 nA 50 fA 10 fA
±(0.1+3E
-13
+Vo×1E
-15
) ±(0.25+3E
-13
+Vo×1E
-15
)
100 V
±10 nA 500 fA 10 fA
±(0.1+3E
-12
+Vo×1E
-14
) ±(0.25+2E
-12
+Vo×1E
-14
)
100 V
±100 nA 5 pA 100 fA
±(0.05+3E
-11
+Vo×1E
-13
) ±(0.1+2E
-11
+Vo×1E
-13
)
100 V
±1 μA 50 pA 1 pA
±(0.05+3E
-10
+Vo×1E
-12
) ±(0.1+2E
-10
+Vo×1E
-12
)
100 V
±10 μA 500 pA 10 pA
±(0.05+3E
-9
+Vo×1E
-11
) ±(0.05+2E
-9
+Vo×1E
-11
)
100 V
±100 μA 5 nA 100 pA
±(0.035+15E
-9
+Vo×1E
-10
) ±(0.05+2E
-8
+Vo×1E
-10
)
100 V
±1 mA 50 nA 1 nA
±(0.04+15E
-8
+Vo×1E
-9
) ±(0.04+2E
-7
+Vo×1E
-9
)
100 V
±10 mA 500 nA 10 nA
±(0.04+15E
-7
+Vo×1E
-8
) ±(0.04+2E
-6
+Vo×1E
-8
)
100 V
±100 mA 5 μA 100 nA
±(0.045+15E
-6
+Vo×1E
-7
) ±(0.1+2E
-5
+Vo×1E
-7
)
d
d. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io), Io is the output current.