User`s guide

10-40 Agilent B1500 User’s Guide, Edition 7
Application Library and Utilities
QSCV Measurement Supplemental Data
Figure 10-22 Calculation Example of Measurement Accuracy: HRSMU/ASU
Conditions:
QSCV Operating Mode: Normal
Measurement Range: 1 μA
Output Range: 20 V
Integration Time: 2, 1, 0.5, 0.3 s corresponding to the lines from top to bottom
Equivalent Parallel Resistance of DUT: 1 G ohm
Guard Capacitance of Measurement Path: 200 pF
0
2
4
6
8
10
12
14
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)-
Reading Accuracy (%)
1.E-14
1.E-13
1.E-12
1.E-11
1.E-10
1.E-09
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)
Offset Accuracy (F)