User`s guide

Agilent B1500 User’s Guide, Edition 7 10-23
Application Library and Utilities
QSCV Measurement Supplemental Data
Table 10-5 Conditions for Calculating Measurement Accuracy
Calculation example data shown in Figure 10-6 through Figure 10-30 is applied to
the measurement data when the QSCV integration time is set to the same value as
the LEAK integration time.
Conditions
Measurement
unit:
HRSMU/ASU
Measurement
range
QSCV
operating mode
Output
range
Equivalent
parallel
resistance of
DUT
Guard
capacitance of
measurement
path
10 pA Normal 20 V 10 T ohm 200 pF Figure 10-6
100 pA Normal 20 V 10 T ohm 200 pF Figure 10-7
Normal 20 V 10 T ohm 1 nF Figure 10-8
Normal 20 V 100 G ohm 200 pF Figure 10-9
1 nA Normal 20 V 10 T ohm 200 pF Figure 10-10
Normal 20 V 10 T ohm 1 nF Figure 10-11
Normal 20 V 10 G ohm 200 pF Figure 10-12
Normal 20 V 1 G ohm 200 pF Figure 10-13
10 nA Normal 20 V 10 T ohm 200 pF Figure 10-14
Normal 20 V 10 G ohm 200 pF Figure 10-15
Normal 20 V 1 G ohm 200 pF Figure 10-16
100 nA Normal 20 V 10 T ohm 200 pF Figure 10-17
Normal 20 V 1 G ohm 200 pF Figure 10-18
Normal 20 V 100 M ohm 200 pF Figure 10-19
Normal 20 V 10 M ohm 200 pF Figure 10-20
1 μA Normal 20 V 10 T ohm 200 pF Figure 10-21
Normal 20 V 1 G ohm 200 pF Figure 10-22
Normal 20 V 100 M ohm 200 pF Figure 10-23
Normal 20 V 10 M ohm 200 pF Figure 10-24
10 pA 4155C/4156C
compatible
20 V 10 T ohm 200 pF Figure 10-25
100 pA 20 V 10 T ohm 200 pF Figure 10-26
1 nA 20 V 10 T ohm 200 pF Figure 10-27
10 nA 20 V 10 T ohm 200 pF Figure 10-28
100 nA 20 V 10 T ohm 200 pF Figure 10-29
1 μA 20 V 10 T ohm 200 pF Figure 10-30