User`s guide

Agilent B1500 User’s Guide, Edition 7 10-17
Application Library and Utilities
QSCV Measurement Supplemental Data
Considering Measurement Accuracy
NOTE The measurement accuracy is not the specifications but the reference data.
Applicable conditions for supplemental data: Leak current compensation function
ON, Offset cancel function ON, QSO mode OFF
The capacitance measurement accuracy can be calculated by the following formula:
Measurement accuracy = A (%) + B (F)
A: Reading accuracy. % accuracy of the measured value.
B: Offset accuracy.
where,
Tinteg: Integration time for the capacitance measurement, in seconds
Tleak: Integration time for the leakage current measurement, in seconds
Vstep: QSCV measurement voltage, in V
Rdut: Equivalent parallel resistance of DUT, in Ω
Cg: Guard capacitance of the measurement path, in F
Ax, Bx, Cx, and Dx values are the constant. For the values, see Table 10-2 for the
high resolution SMU (HRSMU), and Table 10-3 for the medium power/high power
SMU (MPSMU and HPSMU).
Calculation examples of the measurement accuracy are shown in Figure 10-6
through Figure 10-30. Conditions of the calculation are shown in Table 10-5.
NOTE Settings for the QSCV Measurement Mode
The measurement mode should be selected based on the measurement conditions.
Normal mode is effective for large leakage currents. The 4155C/4156C compatible
mode is effective if the leakage current is low, or the QSCV measurement voltage is
low.
AAp
Bp Cp Tinteg Dp
Tinteg
Tleak
-------------------
×+×+
Vstep
------------------------------------------------------------------------------------+=
B
Ao
Rdut
-------------
Bo Boc + Cg Co ( Coc Cg ×+ )+× Tinteg Do Doc Cg )×+(
Tinteg
Tleak
-------------------
×+×
Vstep
--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------+=