User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
Agilent B1500 User’s Guide, Edition 7 9-11
If You Have a Problem
When You Perform Measurement
Unexpected Sampling Measurement Data is Returned
If sampling interval is set to a short time and if FILTER ON is set, you may get
unwanted data. FILTER ON causes a slower rise time, so short initial interval will
sample during this rise time.
To solve this problem:
• Set FILTER field to OFF if you set initial interval to a short time.
Some data may be skipped because measurement takes a long time. Meas
urement
takes a long time if measurement is performed in a low current range, if many
measurement channels are set up, or if analysis, such as moving a marker, is
performed during measurements.
To solve this problem:
• Measure current using a fixed range that is more than 10 μA. For measur
ement
ranges 10 μA or less, measurement takes longer than the specified integration
time.
• Do not perform analysis operation during measurement state.
MFCMU Causes Unbalance Condition
Extending measurement cables may cause the unbalance condition of the MFCMU.
To solve this problem:
• Perform the phase compensation. See “CMU Calibration” on page 4-37.
• The signal path from MFCMU to DUT must be as short as possible.
• Reduce stray capacitance and guard capacitance on the signal line.
Do not connect the Low (Lcur, Lpot) term
inal to the w
afer chuck. If the
MFCMU must be connected to the wafer chuck, use the High (Hcur, Hpot)
terminal to connect to the wafer chuck.