User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
Agilent B1500 User’s Guide, Edition 7 7- 47
Function Details
Atto Sense and Switch Unit
The ASU has output connectors, two triaxial, that must be connected to the DUT
interface such as manipulators and probe card. When the measurement resource is
the HRSMU, they are the Force/Sense connectors for the Kelvin connection. And
when the resource is not HRSMU, the CMU/AUX is connected to the Force, and the
Sense is not used.
If you connect the MFCMU or the LCR meter with the four-terminal pair
configuration, two ASUs ar
e required. Then the CMU-pot/CMU-cur connectors of a
ASU must be connected to the Hpot/Hcur of the instrument. And the other one must
be connected to the Lpot/Lcur in like manner.
To realize accurate impedance measurements using the four-terminal pair
measurement method, connect the C
MU Return terminals of ASUs together. See
“Four-Terminal Pair Configuration” on page 7-23 and Figure 7-14 on page 7-25.
NOTE To use 1 pA range
The measurement channel connected to the ASU (Atto Sense and Switch Unit)
supports the 1 pA range. To use the 1 pA range, set the 1 pA fixed range or the 1 pA
limited auto ranging.
The B1500A automatically performs the compensation of the data m
easured by the
1 pA range and returns the compensated data. You can use either the pre-stored
offset data or the pre-measured offset data.
To measure the offset data, perform the self-calibration before starting the
measurement for a D
UT. This offset data is temporarily memorized until the
B1500A is turned off.
NOTE Before using ASU
ASU connection must be done before Agilent B1500A is turned on.
The combination of ASU and HRSMU is important. The B1500A can work with
wrong com
bination, but it cannot satisfy its specifications. The specifications are
guaranteed for the correct combination which the performance verification was
performed. See “ASU” on page 4-43 and check if the combination is correct.
The CMU-pot connector is for the MFCMU or the LCR meter that uses the
four-terminal
pair. For the other instrument, connect a BNC open connector or
nothing to there. The line will be internally connected to the CMU-cur/AUX-in line.
It is unavailable to use the series resistor in the HRSMU connected to the ASU.