User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
7- 44 Agilent B1500 User’s Guide, Edition 7
Function Details
SMU CMU Unify Unit
SMU CMU Unify Unit
The SMU CMU Unify Unit (SCUU) is available for Agilent B1500A installed with
the multi frequency capacitance measurement unit (MFCMU). The MFCMU must
be installed in the slot N (integer, 3 to 10) and the SMUs must be installed in the slot
N-1 and N-2. See “To Connect SCUU/GSWU” on page 3-21 to install the SCUU
properly. The SCUU cannot be connected to the high power SMU (HPSMU).
The Guard Switch Unit (GSWU) controls the connection of the CMU High and Low
guard lines (C
MU return). The connection will be broken when using the SMU and
made when using the MFCMU.
The SCUU can switch the measurement resources, MFCMU or SMU, and can
configure
four setups shown in Figure 7-21. When the B1500A is turned on, no
measurement resource is connected to the output.
The SCUU has input connectors,
four coaxial and four triaxial, connected to the MFCMU and SMU directly or by
using the dedicated SCUU cable.
The SCUU front panel LEDs indicate the following conditions of the SCUU.
SMU SMU in the slot N-1/N-2 can be used.
CMU Interna
l Bias MFCMU can be used. CMU internal DC bias source is used.
CMU SMU Bias MFCMU can be used. SMU is used as DC bias source.
The SCUU has output connectors, four triaxial,
that must be connected to
the DUT
interface such as manipulators and probe card. When the measurement resource is
the SMU, they are the Force1/Sense1 and Force2/Sense2 connectors for the Kelvin
connection. And when the resource is the MFCMU, the CMU High/Low are
connected to the Force1/Force2 respectively, and the Sense1/Sense2 are not used.
To realize accurate impedance measurements, connect the CMU retur
n terminals
together. The CMU return terminal means the shield end of the outer shield
conductor extended to the DUT interface. The shield end must be opened as close as
possible to the DUT. See Figure 7-14 on page 7-25.
The GSWU has one connector and two terminals. The connector must be connected
to the SCUU b
y using the SCUU cable. And the terminals must be connected to the
CMU High/Low guard lines at the shield ends of the DUT interface by using a wire.