User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
7- 26 Agilent B1500 User’s Guide, Edition 7
Function Details
SPGU Module
SPGU Module
High voltage SPGU is a pulse generator module designed for semiconductor
parametric test applications and provides the following key functions. The SPGU
can be controlled by using the SPGU Control classic test or the SPGU setup
function in the I/V Sweep, Multi Channel I/V Sweep, I/V List Sweep, and I/V-t
Sampling classic tests.
• Number of output channels: 2 channels per module
• Output impedance: 50 Ω
• Output level: 0 to ± 40 V (open load), ± 20 V (50 Ω load)
• SPGU op
eration mode (effective for all channels installed in B1500A):
PG (pulse generator) or ALWG (arbitrary linear waveform generator)
• Channel output operation mode:
Free run, duration, or pulse count (PG mode)/sequence count (ALWG mode)
Free run mode is not available for the SPGU Control classic test.
• PG output mode:
2-level pulse or 3-level pulse, for each channel
• Pulse switch, which is more durable than mechanical relays, and better suited for
fr
equent s
witching applications.
• Automatic voltage level adjustment by specifying load impedance of DUT
Figure 7-15 SPGU Simplified Circuit Diagram
NOTE To use the SPGU for I/V-t Sampling tests, the sampling interval must be ≥ 2 ms.
50
7
Pulse switch
ALWG
PG
2-level
or 3-level
Output 2
or
50
7
Pulse switch
ALWG
PG
2-level
or 3-level
Output 1
or