User`s guide
Table Of Contents
- User’s Guide
- 1 Getting Started
- 2 Introduction
- 3 Installation
- 4 Using EasyEXPERT
- 5 Classic Test Definition
- I/V Sweep
- Multi Channel I/V Sweep
- I/V List Sweep
- I/V-t Sampling
- C-V Sweep
- Direct Control
- Function Setup
- Auto Analysis Setup
- Display Setup
- SMU Range Setup Window
- ADC and Integration Time Setup Window
- Advanced Setup Window
- CMU Range Setup Window
- Advanced Setup Window for C-V Sweep
- Switching Matrix Control
- SPGU Control
- SPGU Pulse Setup Window
- Load Z Setup Window
- Pulse Switch Setup Window
- SPGU ALWG Setup Window
- Define ALWG Waveform Window
- 6 Application Test Definition
- 7 Function Details
- I/V Sweep Measurement
- Multi Channel I/V Sweep Measurement
- I/V-t Sampling Measurement
- C-V Sweep Measurement
- SPGU Module
- Sweep Abort Function
- Standby Function
- Bias Hold Function
- Current Offset Cancel
- SMU CMU Unify Unit
- Atto Sense and Switch Unit
- SMU/PG Selector
- SMU Ranging Mode
- SMU Compliance
- SMU Pulse
- SMU Measurement Time
- SMU Filter
- SMU Series Resistor
- Interlock Function
- Auto Power Off Function
- Initial Settings
- 8 Built-in Programming Tool
- 9 If You Have a Problem
- When You Operate B1500A
- When You Perform Measurement
- Measurement Takes More Time than Specified
- Noise Affects the Measured Values
- Voltage Measurement Error is Large
- SMU Oscillates for High-Frequency Device Measurements
- SMU Oscillates for Negative Resistance Measurements
- Large Current Causes High Temperature (Thermal Drift)
- Measurement Damages the Device under Test
- Leaving Connections Damages Devices after Measurement
- Unexpected Sampling Measurement Data is Returned
- MFCMU Causes Unbalance Condition
- Before Shipping to Service Center
- Data Backup and Recovery
- B1500A System Recovery
- Updating EasyEXPERT
- Error Codes
- 10 Application Library and Utilities
3- 20 Agilent B1500 User’s Guide, Edition 7
Installation
Installing Accessories
To connect
MFCMU/4284A to
AUX
Perform the following procedure to connect the MFC
MU or the 4284A. See Figure
3-2 and Figure 3-3.
Prepare a shorting bar furnished with the ASU. The shorting bar i
s effective for
reducing the offset capacitance caused by connecting a measurement terminal to the
chuck of a wafer prober.
1. Turn the instrument off.
2. Prepare two ASUs (#1 and #2) and two shorting bar. And perform the following
procedure for each
ASU.
a. Disconnect the triaxial cable from the ASU if it is connected to the ASU
Force terminal.
b. Face the concave s
ide of the shorting bar to front.
c. Slide the shorting bar from the right side of the connectors.
3. Connect the cable to the instrument. For
the MFCMU, use the N1300A C
MU
cable. For the 4284A, use the 16048D/E test leads. It is ok to leave open the
ground wire extended from the cable.
4. Connect the high potential (Hp) cable of the test leads to the ASU #1 CMU-pot
terminal.
5. C
onnect the high current (Hc) cable to the ASU #1 CMU-cur/AUX In terminal.
The shorting
bar is fixed to the ASU #1 by the step 5 and 6.
6. Connect the triaxial cable from the HRSMU #1 For
ce terminal to the ASU #1
Force terminal.
7. Connect the low potential (Lp) cable to the ASU #2 CMU-pot terminal.
8. Connect the low current (Lc) cable to the ASU #2 CMU-cur/AUX In terminal.
The shorting
bar is fixed to the ASU #2 by the step 8 and 9.
9. Connect the triaxial cable from the HRSMU #2 For
ce terminal to the ASU #2
Force terminal.
10. Prepare the connection wire (both pin terminals) furnished with the ASU and
connect it between the C
MU Return terminals of the ASU #1 and ASU #2
together.
NOTE About ASU output cables
To perform capacitance measurements accurately, the cable length between DUT
and the ASU output must be as short as possible.