User`s guide

2- 54 Agilent B1500 User’s Guide, Edition 7
Introduction
Specifications
• SCUU supplemental information
•SMU path
Offset current: < 20 fA
Offset voltage: < 100 μV
at 300 sec
C
losed channel residual resistance: < 200 mΩ
Channel isolation resistance: > 10
15
Ω
•CMU path
• Test signal
• Signal output level additional errors (CMU bias, open load):
± 2 % (direct docking)
± 7 % (indirect docking)
• Signal output level additional errors (SMU bias, open load):
± 5 % (direct docking, ≥ 10
kHz)
± 10 % (in
direct docking, ≥ 10 kHz)
• Outpu
t impedance: 50 Ω, typical
• Signal lev
el monitor additional errors (open load):
± 2 % (CMU bias), direct docking
± 5 % (SMU bias), direct docking
± 7 % (CMU bias), indirect docking
± 10 % (SMU bias), indirect docking
• DC bias function
• DC voltage bias (CMU bias)
Range: 0 to ± 25 V
Resolution: 1 mV
Additional errors (for CMU bias): ± 100 μV (open load)
• DC voltage bias (SMU bias)
Range: 0 to ± 100 V
Resolution: 5 mV