Agilent B1500A Semiconductor Device Analyzer User’s Guide Agilent Technologies
Notices © Agilent Technologies 2005, 2006, 2007, 2008 No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.
DECLARATION OF CONFORMITY According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014 Manufacturer’s Name: Manufacturer’s Address: Supplier’s Address: Agilent Technologies International sarl Rue de la Gare 29 CH - 1110 Morges Switzerland Declares under sole responsibility that the product as originally delivered Product Name: Model Number: Product Options: Semiconductor Device Analyzer High Power Source/Monitor Unit Module, Medium Power Source/Monitor Unit Module, High Resolution Source/Monitor Unit Module
• Herstellerbescheinigung GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19 • Manufacturer’s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 NOTE This ISM device complies with Canadian ICES-001. Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada. This product complies with the WEEE Directive (2002/96/EC) marking requirements.
Safety Summary The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.
• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained. • DANGEROUS PROCEDURE WARNINGS Warnings, such as example below, precede potentially dangerous procedures throughout this manual.
Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below. Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument. Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have this symbol when instrument is on. Protective conductor terminal.
HIGH VOLTAGE SHOCK HAZARD Agilent B1500 can force dangerous voltages (200 V for HPSMU, and 100 V for MPSMU/HRSMU) at the force, guard, and sense terminals. To prevent electric shock hazard, the following safety precautions must be observed during the use of Agilent B1500. • Use a three-conductor AC power cable to connect cabinet (if used) and Agilent B1500 to an electric ground (safety ground).
高電圧感電注意 Agilent B1500 のフォース、ガード、センス端子には、危険電圧が出力されることが あります（HPSMU の場合は最大± 200 Vdc、MPSMU/HRSMU の場合は最大± 100 Vdc） 。感電事故防止のため、必ず以下の事柄を守ってください。 • 3 極電源ケーブルを使用して Agilent B1500 を設置すること。 • Agilent 16442 テスト・フィクスチャ以外のフィクスチャ、あるいはプローバを 使用する場合には、シールド・ボックスにインターロック回路を接続すること。 インターロック回路とは、シールド・ボックスの蓋を開けた時に Agilent B1500 の Interlock 端子を開放にすることができる回路のことをいいます。 • インターロック機能が正常であることを定期的に確認すること。 • フォース、ガード、センス端子に繋がる接続部に触れる前には、測定器の電源 を切ること。また、測定系にキャパシタが接続されている場合は、キャパシタ を放電すること。電源を切らない場合は、以下の事項を全て実施すること。 • • Stopキーを押してMeas
PRECAUTIONS POUR COMMOTION A HAUTE TENSION Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositif Agilent B1500 peut être sortie aux bornes de force, d'appareil de protection ou de détection. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle: • Mettre à la terre le dispositif Agilent B1500 au moyen du câble d'alimentation tripolair.
Achtung! Gefährliche Spannung Von den Geräten Agilent B1500 können Spannungen an den Anschlüssen “Force, Guard und Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag vorzubeugen, ist bei der Benützung der Geräte Agilent B1500 folgendes zu beachten: • Erden Sie das Kabinett (falls verwendet) sowie die Geräte Agilent B1500 mittels dreiadriger Netzleitungen.
Precautionary Statement Agilent B1500 Semiconductor Device Analyzer operates in the Microsoft Windows XP Professional environment. Agilent B1500 requires Agilent EasyEXPERT software, a specially-designed Windows XP application program. • About guarantee and support for Agilent B1500 Agilent Technologies guarantees and supports the performance of Agilent B1500 for the same condition as the preload condition when shipped from the factory.
Working in Comfort To optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly. With that in mind, we have developed some set-up and use recommendations for you to follow based on established ergonomic principles. Improper and prolonged use of keyboards and input devices are among those tasks that have been associated with repetitive strain injury (RSI) to soft tissues in the hands and arms.
• Performing an activity in an awkward or unnatural posture. • Maintaining static posture for prolonged periods. • Failing to take frequent short breaks. • Other environmental and psychosocial factors. In addition, there have been reports associating the occurrence of RSI with the use of keyboards, mice, and other input devices. Also, certain medical conditions, such as rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of injury.
In This Manual This manual describes the front panel operation, installation, and functions of Agilent Technologies B1500. This manual consists of the following chapters: • Chapter 1, “Getting Started” This chapter describes the basic operations of Agilent B1500. • Chapter 2, “Introduction” This chapter describes overview, specifications, accessories and options of Agilent B1500.
NOTE To get the latest firmware/software/electronic manuals/support information, visit Agilent Technologies support site (http://www.home.agilent.com), and click Additional Test & Measurement Products > Parametric Test, click Semiconductor Parameter/Device Analyzer Series, and click B1500A Semiconductor Device Analyzer. You can reach Agilent B1500A support site.
Online Documents The following electronic documentation files are stored in Agilent B1500’s internal hard disk drive. The files provide the information of how to use Agilent B1500 and Agilent EasyEXPERT software. Folder: C:\Program Files\Agilent\B1500\Documents • B1500_help.chm A part of Agilent B1500A User’s Guide. This is the online help that can be opened from the Help menu on the EasyEXPERT main screen. • B1500_Self_Trng.
Utilities The following utility programs are stored in Agilent B1500’s internal hard disk drive. For details, see “Application Library and Utilities” on page 10-1. • License Management Tool This is the GUI based program used to manage the license of the EasyEXPERT Plus edition and the Desktop EasyEXPERT Plus edition. • Setup File Converter This is the GUI based program used to convert Agilent 4155/4156 setup file (.MES file) and create the EasyEXPERT setup file (.XTS file).
Contents 1. Getting Started To Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 To Turn B1500A On . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 To Turn B1500A Off. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 To Launch EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents About SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17 B1510A High Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 B1511A Medium Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21 B1517A High Resolution SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24 B1520A Multi Frequency CMU. . . . .
Contents To Connect 16442B Test Fixture. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12 To Connect Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14 Connecting the interlock terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16 To Connect ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17 To Connect SCUU/GSWU. . . . . . . . . . .
Contents If there is one workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6 If there are Workspace more than two . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 Main Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 Main Screen GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 Run Option. .
Contents Switching Matrix Operation Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-48 Standby Channel Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-50 Data Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-51 Data Display GUI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents C-V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26 Channel Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27 Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28 Direct Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents SPGU ALWG Setup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-63 Define ALWG Waveform Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-64 Waveform Pattern Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-67 6. Application Test Definition Test Definition Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Defining Numeric/Vector Input Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-43 Defining String/Numeric Input Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-43 Defining Numeric Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44 Defining Vector Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44 Defining String Output Parameter . . . . . . . . . . . . . . . .
Contents SPGU Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26 PG Operation Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27 ALWG Operation Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-34 Sweep Abort Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents SMU Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-57 Integration Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-57 Overhead Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-59 To Specify Source Output Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-59 Wait Time . . . .
Contents External GPIB Devices are not Detected. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4 To Simplify the Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5 When You Perform Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6 Measurement Takes More Time than Specified . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6 Noise Affects the Measured Values . . . . . . . . . . .
Contents Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23 Agilent EasyEXPERT Operation Error. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23 Agilent FLEX Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48 Agilent B1500A Self-test/Calibration Error. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents To Move the EasyEXPERT Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-73 Using 4155B/4156B/4155C/4156C. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Agilent B1500 User’s Guide, Edition 7
1 Getting Started
Getting Started This chapter describes the basic operations of Agilent B1500A. Before learning the product details, let’s try to use the B1500A briefly. The operations need the B1500A, power cable, and USB keyboard only (USB mouse and stylus pen are optional). During the operations, you will not connect device under test. Open all measurement terminal. This chapter consists of the following sections.
Getting Started To Turn On/Off B1500A To Turn On/Off B1500A NOTE When turning the B1500A on Open the measurement terminals at the device side when turning the B1500A on. Also disconnect the device from the measurement terminals and open the measurement terminals after the test. If you leave the connection with the device, the device may be damaged by unexpected operations or charge-up of measurement cables.
Getting Started To Turn On/Off B1500A To Turn B1500A On 1. Connect the power cable from Agilent B1500A to an AC power outlet. 2. Connect the USB keyboard to the B1500A. Optionally, connect the USB mouse to the B1500A. 3. Press the Standby switch (lower right corner of the front panel). Windows, measurement module initialization, and self-calibration will start. For the Windows logon screen, log on Windows. After logging on, the Start EasyEXPERT button will be displayed on the screen.
Getting Started To Turn On/Off B1500A NOTE Agilent B1500A has the following front panel user interface. • Stop Stops the present measurement or source output immediately. • Rotary knob Rotating the knob moves the marker on the graph window, or increases/decreases/changes the value in the active entry field. Pressing the knob sets or enters the value. • Softkeys Seven softkeys are available. Used to select one for the entry field specified or the dialog box.
Getting Started To Launch EasyEXPERT To Launch EasyEXPERT 1. Click the Start EasyEXPERT button, and wait until the EasyEXPERT main screen or workspace selection screen is displayed. NOTE Workspace is the space created in Agilent B1500A’s internal hard disk drive, and is used to store the test setup, test result data, and so on. The workspace can be created and allocated for each user. 2.
Getting Started To Launch EasyEXPERT If Only One Workspace Exists For the screen as shown in Figure 1-1, perform the following steps. 1. If you do not want to create a workspace, select the Yes radio button and click OK. Skip to “To Use Application Test Mode” on page 1-10 or “To Use Classic Test Mode” on page 1-12. 2. If you want to create a workspace, select the No radio button and click Next. The B1500A displays the screen as shown in Figure 1-2. Skip to “To Create Workspace” on page 1-8.
Getting Started To Launch EasyEXPERT To Create Workspace For the screen as shown in Figure 1-2, perform the following steps. To cancel creating workspace, click Prev. 1. Enter the name of the new workspace into the above-entry field. Check Allow other users to access this workspace box if you want to create a public workspace that is opened for all users. 2. If you are the owner of the existing workspace, you can change the name of the existing workspace.
Getting Started To Launch EasyEXPERT To Select Workspace For the screen as shown in Figure 1-3, perform the following steps. This example selects the workspace named as Demo Workspace that is a public workspace that is opened for all users. 1. Select Public Workspaces owned by other users radio button. 2. Click Demo Workspace to select it. 3. Click Continue. Skip to “To Use Application Test Mode” on page 1-10 or “To Use Classic Test Mode” on page 1-12.
Getting Started To Use Application Test Mode To Use Application Test Mode For the screen as shown in Figure 1-4, perform the following procedure. Figure 1-4 Display Example of EasyEXPERT Main Screen 1. Select a test definition on the EasyEXPERT main screen while the Application Test tab has been selected. The tab is in the leftmost column on the screen. a. Set the Category area to change the test definitions listed in the Library area. For example, check the CMOS only. b.
Getting Started To Use Application Test Mode To enter the value, use the USB keyboard or the screen/numeric keyboard opened by clicking the button to the right of the entry field. See “To Perform Measurement” on page 1-14 to start measurement. NOTE Test Definitions Test definitions are the built-in test setups that have been defined and stored in the EasyEXPERT as the application library. The EasyEXPERT contains more than two hundred test definitions. You can execute the test without modifications.
Getting Started To Use Classic Test Mode To Use Classic Test Mode The following procedure performs the I/V Sweep classic test setup. 1. Click the Classic Test tab on the main screen. The tab is in the leftmost column on the screen. 2. Click I/V Sweep and Select button sequentially. The I/V Sweep Channel Setup screen is displayed. See Figure 1-6. 3. Set the Channel Setup parameters as shown in Table 1-1. 4. Click the Measurement Setup tab and set the parameters as shown in Table 1-2. 5.
Getting Started To Use Classic Test Mode See “To Perform Measurement” on page 1-14 to start measurement. Table 1-1 I/V Sweep Channel Setup Unit V Name Mode a I Name Function SMU1 V1 I1 V VAR1 SMU2 V2 I2 V CONST a. Channel output mode. Set I or IPULSE for the current output and voltage measurement. Set V, VPULSE, or COMMON for the voltage output and current measurement.
Getting Started To Perform Measurement To Perform Measurement 1. Click the Single button (upper right on the main screen) to start measurement. This opens the Data Display window and starts a single sweep measurement. After the measurement, the measurement data is displayed on the Data Display window. For the measurement after performing “To Use Classic Test Mode” on page 1-12, you will have the test result as shown in Figure 1-7.
Getting Started To Perform Measurement To Use Test Result Editor The Test Result Editor provides the following GUI to set a flag and remarks to the test result record. • Save button and Delete button Divides test records into groups, Save and Delete. Test records in Save-group are always listed in the lower area of the EasyEXPERT main screen. Test records in Delete-group can be listed when Results > Filter > Show Deleted Data is checked. • Flags buttons The following buttons are available.
Getting Started To Use Analysis Tools To Use Analysis Tools The Data Display window provides several analysis functions. • View menu: used to adjust the graph scale. • Marker menu: used to display and control the marker. • Cursor menu: used to display and control the cursor. • Line menu: used to display and control the lines. When the marker, cursor, and lines are effective, their parameters are also displayed on the X-Y Graph Plot area.
2 Introduction
Introduction This chapter describes the basic functions and features of Agilent B1500A Semiconductor Device Analyzer, and consists of the following sections: NOTE • “Overview” • “Front View” • “Rear View” • “Measurement Units” • “Specifications” • “Accessories and Options” Application Library Agilent B1500A has installed Agilent EasyEXPERT software as the user interface. The EasyEXPERT contains an application library that is a set of test definitions.
Introduction Overview Overview Agilent B1500A Semiconductor Device Analyzer is the new generation one box solution for the semiconductor device DC/AC parametric measurement and analysis application. You can perform measurement and analysis easily and effectively on the Microsoft Windows environment with intuitive graphical user interface, touch screen LCD panel, keyboard, and mouse by using Agilent B1500A.
Introduction Overview • Agilent B1500A Semiconductor Device Analyzer Mainframe that provides the ground unit (GNDU) and ten empty slots for the measurement facilities, and Agilent EasyEXPERT software for the operating environment. The EasyEXPERT is the GUI based measurement control and analysis software runs on the Microsoft Windows XP Professional. The B1500A is equipped with the 15 inch LCD with touch panel, hard disk drive, DVD-ROM/CD-ROM/CD-RW drive, and USB/LAN/GP-IB interfaces.
Introduction Overview • Agilent 16445A Selector Adapter Used to connect the 16440A selector to the B1500A. Two selectors can be connected. • Agilent E5288A ASU Atto sense and switch unit (ASU). Used to enable the 1 pA range for the atto level current measurement, also switch the measurement resource connected to the DUT. The measurement resource can be HRSMU or the instrument connected to the AUX terminal. • Agilent N1301A-100 SCUU SMU CMU unify unit (SCUU).
Introduction Overview The EasyEXPERT has the following measurement execution environments. Application Test • Application test • Classic test • Quick test The EasyEXPERT contains an application library that supports typical measurements for CMOS devices, TFT, BJT, memory, nanotechnology devices such as CNT FET, and so on. The application library includes more than two hundred test definitions.
Introduction Front View Front View This section describes the front view of Agilent B1500A. 7 6 8 9 5 10 11 12 1 4 3 2 1. Standby switch Turns the B1500A on. Pressing the button in the ON state makes the B1500A in the standby state. The green LED lights when the B1500A is in the ON state. NOTE When turning the B1500A on Open the measurement terminals at the device side when turning the B1500A on.
Introduction Front View 3. OSD buttons LCD Off enables or disables the LCD panel. The green LED lights when the LCD is disabled. Four keys are available for the display adjustment. Press Auto to perform adjustment automatically. Use -, +, and Menu to adjust manually. 4. USB interfaces USB, 2 ports. For keyboard, mouse, and so on. USB keyboard and USB mouse are available as option. 5. LCD panel 15 inch TFT XGA display, 1024 × 768 resolution.
Introduction Front View 11. DVD-ROM/CD-ROM/CD-RW drive For data backup, B1500A update, or data transfer. 12. Touch Panel Off key Works on Agilent EasyEXPERT environment. Enables or disables the touch screen operation. The green LED lights when the touch screen is disabled. NOTE To disable the touch panel Use Touch Panel Device Properties, and remove the check from the Enabled box on the Advanced tab screen.
Introduction Rear View Rear View This section describes the rear view of Agilent B1500A. E D 4 D D D 3 D 2 5 D C B A 1 13 12 11 10 9 8 7 6 1. Serial number You need this serial number when using Agilent Technologies telephone assistance program. 2. LED status indicator For troubleshooting. Followings are some examples. • Both LEDs turn off: B1500A is in the standby state and Standby switch is OFF position. • One LED turns green: Power supply works normally.
Introduction Rear View 3. LINE input receptacle AC power cable is connected to this receptacle. 4. GPIB interface Use an Agilent 82357A USB/GPIB interface or Agilent 10833A/B/C/D GPIB cable to connect to an external computer or equipment. 5. Module slot Ten slots are available for installing the modules. Several kinds of module can be installed in the B1500A. However, the allowable number to install is different by the module type. See “Measurement Units” on page 2-16.
Introduction Rear View 8. GNDU terminal 0 V constant voltage source. Used for the reference of measurement ground. Triaxial connector. 9. LAN interface RJ45 connector. 10. USB interfaces USB, 2 ports. For keyboard, mouse, or peripherals. USB keyboard and USB mouse are available as option. 11. Ext Trig terminals Two BNC connectors, one for trigger input, and one for trigger output. For details about the trigger function, see Programming Guide. 12. Digital I/O terminal DSUB 25 pin connector.
Introduction Rear View E D 4 D D D 3 5 D 2 D C B A 1 13 12 11 10 9 8 7 6 A. GNDU/ADC Ground unit and A/D converter module. Always installed in the B1500A. B. SPGU module The semiconductor pulse generator unit (SPGU) has the Output 1 and Output 2 terminals and the following terminals to synchronize the operation between SPGUs or with an external equipment. Ref Out/Sync Out: Connect to the Ref In/Sync In of the slave SPGU. Ref In/Sync In: Connect to the Ref Out/Sync Out of the master SPGU.
Introduction Rear View In the EasyEXPERT operation mode, the SPGU outputs can be specified by the PG number. PG1 and PG2 are assigned to the Output 1 and Output 2 terminals of the SPGU at the lowest position. And the following PG numbers are assigned to the outputs of the upper SPGUs in sequence. Use the PG number label furnished with the B1500A or equivalent to identify the SPGU channel number. C.
Introduction Rear View WARNING There are potentially hazardous voltages (200 V for HPSMU, and 100 V for MPSMU/HRSMU/ASU) present at the Force, Sense, and Guard terminals of Agilent B1500A. To prevent electrical shock, the following safety precautions must be observed during the use of the B1500A. a. Use a three-conductor AC power cable to connect the cabinet (if used) and the B1500A to an electrical ground (safety ground). b.
Introduction Measurement Units Measurement Units Agilent B1500A can be equipped with the following measurement modules. • “GNDU - Ground Unit” • “B1510A High Power SMU” • “B1511A Medium Power SMU” • “B1517A High Resolution SMU” • “B1520A Multi Frequency CMU” • “B1525A High Voltage SPGU” • “B1530A WGFMU” See “Using EasyEXPERT” on page 4-1 for the functions available for Agilent EasyEXPERT software. See Programming Guide for the functions available for the GPIB remote mode.
Introduction Measurement Units About SMU Source/monitor unit (SMU) can apply DC voltage or current, and can measure DC current or voltage. Figure 2-2 is a simplified SMU circuit diagram. The SMU can perform the following operations: • Apply voltage and measures current • Apply current and measures voltage • Apply voltage and measures voltage • Apply current and measures current NOTE To select the SMU operation mode in the GPIB remote condition, enter the CMM command.
Introduction Measurement Units B1510A High Power SMU This section describes typical specification of the high power source/monitor unit (HPSMU) for Agilent B1500A. Maximum four modules can be installed in one mainframe. Figure 2-3 • Maximum voltage, current, output power: ± 200 V, ± 1 A, 20 W • Minimum range: 2 V, 1 nA • Output/measurement value and resolution: see Table 2-1 to Table 2-4.
Introduction Measurement Units Table 2-1 Table 2-2 HPSMU Output Voltage Ranges and Resolutions Range Output Value Setting Resolution Maximum Current 2V 0 ≤ |V| ≤ 2 V 100 μV ± 1000 mA 20 V 0 ≤ |V| ≤ 20 V 1 mV ± 1000 mA 40 V 0 ≤ |V| ≤ 40 V 2 mV ± 500 mA 100 V 0 ≤ |V| ≤ 100 V 5 mV ± 125 mA 200 V 0 ≤ |V| ≤ 200 V 10 mV ± 50 mA HPSMU Output Current Ranges and Resolutions Range Output Value Setting Resolution Maximum Voltage 1 nA 0 ≤ |I| ≤ 1.
Introduction Measurement Units Table 2-3 HPSMU Measurement Voltage Values and Resolutions Table 2-4 Measurement Resolutions Measurement Value a High Speed ADC High Resolution ADC 2V 0 ≤ |V| ≤ 2.
Introduction Measurement Units B1511A Medium Power SMU This section describes typical specification of the medium power source/monitor unit (MPSMU) for Agilent B1500A. Figure 2-4 • Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W • Minimum range: 0.5 V, 1 nA • Output/measurement value and resolution: see Table 2-5 to Table 2-8.
Introduction Measurement Units Table 2-5 MPSMU Output Voltage Ranges and Resolutions Range 0.5 V Maximum Current 0 ≤ |V| ≤ 0.
Introduction Measurement Units Table 2-7 MPSMU Measurement Voltage Values and Resolutions Table 2-8 Measurement Resolutions Measurement Value a High Speed ADC High Resolution ADC 0.5 V 0 ≤ |V| ≤ 0.55 V 25 μV 0.5 μV 2V 0 ≤ |V| ≤ 2.2 V 100 μV 2 μV 5V 0 ≤ |V| ≤ 5.
Introduction Measurement Units B1517A High Resolution SMU This section describes typical specification of the high resolution source/monitor unit (HRSMU) for Agilent B1500A. Figure 2-5 • Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W • Minimum range: 0.5 V, 10 pA (1 pA when the E5288A ASU is used) • Output/measurement value and resolution: see Table 2-9 to Table 2-12.
Introduction Measurement Units Table 2-9 HRSMU Output Voltage Ranges and Resolutions Range Output Value Setting Resolution Maximum Current 0.5 V 0 ≤ |V| ≤ 0.
Introduction Measurement Units Table 2-11 HRSMU Measurement Voltage Values and Resolutions Table 2-12 Measurement Resolutions Measurement Value a High Speed ADC High Resolution ADC 0.5 V 0 ≤ |V| ≤ 0.55 V 25 μV 0.5 μV 2V 0 ≤ |V| ≤ 2.2 V 100 μV 2 μV 5V 0 ≤ |V| ≤ 5.
Introduction Measurement Units NOTE To connect ASU The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU. So confirm the serial number of the ASU and connect it to the dedicated HRSMU properly. To connect the ASU, see “To Connect ASU” on page 3-17. To confirm the serial number, see “ASU” on page 4-43. NOTE Before using 1 pA range The measurement channel connected to the ASU supports the 1 pA range.
Introduction Measurement Units B1520A Multi Frequency CMU This section describes typical specification of the multi frequency capacitance measurement unit (CMU) for Agilent B1500A. The CMU performs the impedance measurement and returns the specified measurement data such as Cp-G. Only one module can be installed in one mainframe. • Measurement parameters: See Table 2-13. All measurement parameters are supported by Agilent B1500A in the GPIB remote mode.
Introduction Measurement Units Table 2-13 Measurement Parameters Primary Parameter Secondary Parameter R (resistance, Ω) X (reactance, Ω) G (conductance, S) B (susceptance, S) Z (impedance, Ω) θ (phase, radian) Z (impedance, Ω) θ (phase, degree) Y (admittance, S) θ (phase, radian) Y (admittance, S) θ (phase, degree) Cp (parallel capacitance, F) G (conductance, S) Cp (parallel capacitance, F) D (dissipation factor) Cp (parallel capacitance, F) Q (quality factor) Cp (parallel capacitance,
Introduction Measurement Units Table 2-14 Measurement Range for Fixed Ranging Mode Measurement range (impedance range) Impedance Z 1 kHz ≤ f ≤ 200 kHz 200 kHz < f ≤ 2 MHz 2 MHz < f ≤ 5 MHz 0 ≤ Z < 100 Ω 50 Ω 50 Ω 50 Ω 100 Ω ≤ Z < 300 Ω 100 Ω 100 Ω 100 Ω 300 Ω ≤ Z < 1 kΩ 300 Ω 300 Ω 300 Ω 1 kΩ ≤ Z < 3 kΩ 1 kΩ 1 kΩ 1 kΩ 3 kΩ ≤ Z < 10 kΩ 3 kΩ 3 kΩ 3 kΩ 10 kΩ ≤ Z < 30 kΩ 10 kΩ 10 kΩ 30 kΩ ≤ Z < 100 kΩ 30 kΩ 30 kΩ 100 kΩ ≤ Z < 300 kΩ 100 kΩ 300 kΩ ≤ Z 300 kΩ Impedance vs Freque
Introduction Measurement Units B1525A High Voltage SPGU This section describes key specification of the high voltage semiconductor pulse generator unit (SPGU) for Agilent B1500A. Maximum five modules can be installed in one mainframe.
Introduction Measurement Units B1530A WGFMU This section describes typical specification of the waveform generator/fast measurement unit (WGFMU) for Agilent B1500A. Maximum five modules can be installed in one mainframe.
Introduction Specifications Specifications This section lists specifications and supplemental information for the B1500A and its associated modules. The specifications are the standards against which the B1500A and its associated modules are tested. When the B1500A and any of its associated modules are shipped from the factory, they meet the specifications.
Introduction Specifications Specification Conditions The measurement and output accuracy are specified at the rear panel connector terminals when referenced to the Zero Check terminal. The B1530A WGFMU measurement and output accuracy are specified at the output terminal of the RSU. Accuracy is specified under the following conditions: 1. Temperature: 23 °C ± 5 °C 2. Humidity: 20 % to 60 % 3. After 40 minutes warm-up followed by self-calibration 4.
Introduction Specifications Mainframe The B1500A supports ten slots for plug-in modules. Measurement resolution Module Slots occupied B1510A HPSMU 2 -200 V to 200 V, -1A to 1 A 2 μV, 10 fA B1511A MPSMU 1 -100 V to 100 V, -100 mA to 100 mA 0.5 μV, 10 fA B1517A HRSMU 1 -100 V to 100 V, -100 mA to 100 mA 0.5 μV, 1 fA E5288A ASUa - -100 V to 100 V, -100 mA to 100 mA 0.5 μV, 0.1 fA B1520A MFCMU 1 1 kHz to 5 MHz 0.
Introduction Specifications When one or more WGFMU modules are installed in the B1500A mainframe, the following table applies. Multiply the values given below by the number of installed modules of that type and add the products together. The sum of the products must be less than or equal to 59 for the configuration to be permissible.
Introduction Specifications MPSMU/HRSMU MPSMU: Medium Power Source/Monitor Unit HRSMU: High Resolution Source/Monitor Unit • Voltage range, resolution, and accuracy See Table 2-15 for high resolution ADC and Table 2-17 for high speed ADC. • Current range, resolution, and accuracy See Table 2-16 for high resolution ADC and Table 2-18 for high speed ADC. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
Introduction Specifications Table 2-15 Voltage range, resolution, and accuracy (high resolution ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±0.5 V 25 μV 0.5 μV ±(0.018 + 0.15) ±(0.01 + 0.12) 100 mA ±2 V 100 μV 2 μV ±(0.018 + 0.4) ±(0.01 + 0.14) 100 mA ±5 V 250 μV 5 μV ±(0.018 + 0.75) ±(0.009 + 0.25) 100 mA ±20 V 1 mV 20 μV ±(0.018 + 3) ±(0.009 + 0.9) 100 mA ±40 V 2 mV 40 μV ±(0.018 + 6) ±(0.
Introduction Specifications Table 2-17 Voltage range, resolution, and accuracy (high speed ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±0.5 V 25 μV 0.5 μV ±(0.018 + 0.15) ±(0.01 + 0.25) 100 mA ±2 V 100 μV 2 μV ±(0.018 + 0.4) ±(0.01 + 0.7) 100 mA ±5 V 250 μV 5 μV ±(0.018 + 0.75) ±(0.01 + 2) 100 mA ±20 V 1 mV 20 μV ±(0.018 + 3) ±(0.01 + 4) 100 mA ±40 V 2 mV 40 μV ±(0.018 + 6) ±(0.
Introduction Specifications ASU ASU: Atto Sense and Switch Unit • Maximum voltage, AUX path 100 V (AUX input to AUX common) 100 V (AUX input to circuit common) 42 V (AUX common to circuit common) • Maximum current, AUX path 0.5 A (AUX input to Force output) • Band width (at -3 dB), AUX port 30 MHz, supplemental information NOTE Connect ASU to dedicated HRSMU The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU.
Introduction Specifications HPSMU HPSMU: High Power Source/Monitor Unit • Voltage range, resolution, and accuracy See Table 2-19 for high resolution ADC and Table 2-21 for high speed ADC. • Current range, resolution, and accuracy See Table 2-20 for high resolution ADC and Table 2-22 for high speed ADC. Specified measurement resolution is limited by fundamental noise limits.
Introduction Specifications Table 2-19 Voltage range, resolution, and accuracy (high resolution ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±2 V 100 μV 2 μV ±(0.018 + 0.4) ±(0.01 + 0.14) 1A ±20 V 1 mV 20 μV ±(0.018 + 3) ±(0.01 + 0.14) 1A ±40 V 2 mV 40 μV ±(0.018 + 6) ±(0.01 + 1) 500 mA ±100 V 5 mV 100 μV ±(0.018 + 15) ±(0.012 + 2.5) 125 mA ±200 V 10 mV 200 μV ±(0.018 + 30) ±(0.014 + 2.
Introduction Specifications Table 2-21 Voltage range, resolution, and accuracy (high speed ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±2 V 100 μV 2 μV ±(0.018 + 0.4) ±(0.01 + 0.7) 1A ±20 V 1 mV 20 μV ±(0.018 + 3) ±(0.01 + 4) 1A ±40 V 2 mV 40 μV ±(0.018 + 6) ±(0.015 + 8) 500 mA ±100 V 5 mV 100 μV ±(0.018 + 15) ±(0.02 + 20) 125 mA ±200 V 10 mV 200 μV ±(0.018 + 30) ±(0.035 + 40) 50 mA a.
Introduction Specifications SMU Common Specifications • Output terminal/connection Dual triaxial connector, Kelvin (remote sensing) • Voltage/current compliance (limiting) The SMU can limit output voltage or current to prevent damaging the device under test.
Introduction Specifications Period ≥ Width+2 ms (when Width ≤ 100 ms) Period ≥ Width+10 ms (when Width > 100 ms) • • Resolution: 100 μs Pulse setting accuracy (fixed measurement range), supplemental information • Width: 0.5 % + 50 μs • Period: 0.5 % + 100 μs SMU Supplemental Information • Maximum allowable cable resistance (Kelvin connection) Sense: 10 Ω Force: 10 Ω ( ≤ 100 mA), 1.5 Ω ( > 100 mA) • Voltage source output resistance (Force line, Non-Kelvin connection) 0.2 Ω (HPSMU) 0.
Introduction Specifications • Maximum guard offset voltage ± 1 mV (HPSMU) ± 3 mV (MPSMU, HRSMU) ± 4.2 mV (HRSMU with ASU, Iout ≤ 100 μA) • Noise characteristics (filter ON) Voltage source: 0.01 % of V range (rms.) Current source: 0.1 % of I range (rms.) • Overshoot (filter ON), typical Voltage source: 0.03 % of V range Current source: 1 % of I range • Range switching transient noise (filter ON) Voltage ranging: 250 mV Current ranging: 70 mV • Slew rate: 0.
Introduction Specifications Table 2-23 Range Voltage range, resolution, and accuracy (high speed ADC), supplemental information Measurement Measurement accuracy resolution ±(%+mV)a Range Measurement resolution Measurement accuracy ±(%+mV)a ±0.5 V b 25 μV ±(0.01 + 0.25) ±40 V 2 mV ±(0.015 + 8) ±2 V 100 μV ±(0.01 + 0.7) ±100 V 5 mV ±(0.02 + 20) ±5 V b 250 μV ±(0.01 + 2) ±200 V c 10 mV ±(0.035 + 40) ±20 V 1 mV ±(0.01 + 4) a. ±(% of reading + offset value in mV).
Introduction Specifications MFCMU MFCMU: Multi Frequency Capacitance Measurement Unit • • Measurement functions • Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D, Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ • Ranging: Auto or fixed • Measurement terminal: Four-terminal pair configuration, four BNC (female) connectors • Cable length: 1.
Introduction Specifications • DC bias function • DC bias Range: 0 to ± 25 V Resolution: 1 mV Accuracy: ± (0.5 % + 5.0 mV) at the measurement port of the MFCMU or the MFCMU cable (1.5 m or 3.
Introduction Specifications • Measurement accuracy Measurement accuracy at the measurement port of the MFCMU or the MFCMU cable (1.5 m or 3.0 m) • |Z| accuracy: ± E (%) • θ accuracy: ± E/100 (radian) • C accuracy: ± E (%) at Dx ≤ 0.1 ± E×(1+Dx2)1/2 (%) at Dx > 0.1 • D accuracy: ± E/100 at Dx ≤ 0.1 ± E×(1+Dx)/100 at Dx > 0.1 • G accuracy: ± E/Dx (%) at Dx ≤ 0.1 ± E×((1+Dx2)/Dx )1/2 (%) at Dx > 0.
Introduction Specifications Table 2-25 Parameters EPOSC, ZOSC Oscillator level Vosc mV EPOSC % ZOSC mΩ 125 < Vosc ≤ 250 0.03×(250/Vosc-1) 5×(250/Vosc-1) 64 < Vosc ≤ 125 0.03×(125/Vosc-1) 5×(125/Vosc-1) 32 < Vosc ≤ 64 0.03×(64/Vosc-1) 5×(64/Vosc-1) Vosc ≤ 32 0.03×(32/Vosc-1) 5×(64/Vosc-1) Vosc is oscillator level in mV. Table 2-26 Parameters EPL, YOL, ZSL Cable length EPL % YOL nS ZSL mΩ 1.5 m 0.02+3×f/100 750×f/100 5.0 3m 0.02+5×f/100 1500×f/100 5.0 f is frequency in MHz.
Introduction Specifications Table 2-28 Example of calculated C/G measurement accuracy Frequency Measured Capacitance C Accuracy a Measured Conductance G Accuracy a 5 MHz 1 pF ± 0.61 % 3 μS ± 192 nS 10 pF ± 0.32 % 31 μS ± 990 nS 100 pF ± 0.29 % 314 μS ± 9 μS 1 nF ± 0.32 % 3 mS ± 99 μS 1 pF ± 0.26 % 628 nS ± 16 nS 10 pF ± 0.11 % 6 μS ± 71 nS 100 pF ± 0.10 % 63 μS ± 624 nS 1 nF ± 0.10 % 628 μS ± 7 μS 10 pF ± 0.18 % 628 nS ± 11 nS 100 pF ± 0.
Introduction Specifications SCUU/GSWU SCUU: SMU CMU Unify Unit GSWU: Guard Switch Unit The SCUU multiplexes the outputs from two SMUs (MPSMUs and/or HRSMUs) and the CMU. The SCUU outputs are two sets of Kelvin triaxial ports (Force and Sense). The SCUU also allows the SMUs to act as DC bias sources in conjunction with the CMU. Special cables are available to connect the SMUs and CMU with the SCUU, and an auto-detect feature automatically compensates for the cable length going to the SCUU.
Introduction Specifications • SCUU supplemental information • SMU path Offset current: < 20 fA Offset voltage: < 100 μV at 300 sec Closed channel residual resistance: < 200 mΩ Channel isolation resistance: > 1015 Ω • CMU path • Test signal • Signal output level additional errors (CMU bias, open load): ± 2 % (direct docking) ± 7 % (indirect docking) • Signal output level additional errors (SMU bias, open load): ± 5 % (direct docking, ≥ 10 kHz) ± 10 % (indirect docking, ≥ 10 kHz) • Output impedance:
Introduction Specifications Additional errors (for SMU voltage output accuracy): ± 100 μV (open load) • DC bias monitor additional errors (open load): ± 20 mV, direct docking ± 30 mV, indirect docking • • Output impedance: 50 Ω, typical • DC output resistance: 50 Ω (CMU bias), 130 Ω (SMU bias) Measurement accuracy Impedance measurement error is given by adding the following additional error Ee to the MFCMU measurement error.
Introduction Specifications HV-SPGU HV-SPGU: High Voltage Semiconductor Pulse Generator Unit • Number of output channels: 2 channels per module • Modes: pulse, constant, and free run • Standard pulse mode • Two level pulse • Three level pulse per one channel • Pulse period: 30 ns to 10 s • Delay range: 0 s to 9.99 s • Delay resolution: minimum 2.
Introduction Specifications Table 2-29 Pulse range and pulse parameter Value a Item Frequency range 0.1 Hz to 33 MHz Pulse period Pulse width Programmable range 30 ns to 10 s Resolution 10 ns Minimum 100 ns (Vamp ≤ 10 V) Accuracy ± 1 % (± 0.01 % b ) Programmable range 10 ns to (period -10 ns) Resolution 2.
Introduction Specifications Table 2-30 Pulse/DC output voltage and accuracy Item Value Condition -20 V to +20 V 50 Ω load -40 V to +40 V open load Accuracy a ± (0.5 % + 50 mV) open load Amplitude resolution 0.2 mV (± 10 V range) 50 Ω load Output voltage (Vout) 0.8 mV (± 40 V range) 0.4 mV (± 10 V range) open load 1.
Introduction Specifications • • Programmable timing range: 10 ns to 10 s, 10 ns resolution SPGU supplemental information • Pulse width jitter: 0.001 % + 150 ps • Pulse period jitter: 0.001 % + 150 ps • Maximum slew rate: 1000 V/μs (50 Ω load) • Noise: 10 mVrms (at DC output) • Advanced feature: Voltage monitor: The HV-SPGU has a voltage monitor function to measure the voltage at the DUT terminal. Measurement accuracy (open load): ± (0.
Introduction Specifications Selector Agilent 16440A SMU/pulse generator selector switches either a SMU or PGU to the associated output port. You can expand to four channels by adding an additional 16440A. The PGU port on channel 1 provides a “PGU OPEN” function, which can disconnect the PGU by opening a semiconductor relay. Agilent B1500A and 16445A are required to use the 16440A. The following specifications data is specified at 23 °C ± 5 °C (73 °F ± 9 °F) and 50 % relative humidity.
Introduction Specifications WGFMU/RSU WGFMU: Waveform Generator/Fast Measurement Unit RSU: Remote-sense and Switch Unit The WGFMU is a self-contained module offering the combination of arbitrary linear waveform generation (ALWG) with synchronized fast current or voltage (IV) measurement. The ALWG function allows you to generate not only DC, but also various types of AC waveforms.
Introduction Specifications The V Monitor terminal outputs a buffered signal equal to 1/10 of the Output terminal voltage (into a 50 Ω load). • WGFMU to RSU cable length The WGFMU and RSU are connected by a special composite cable. The following configurations are available. • 3m • 5m • 1.5 m • 2.4 m + connector adapter + 0.6 m • 4.4 m + connector adapter + 0.6 m Note: The connector adapter is used when routing the cable through the prober’s connector panel. • ALWG function: See Table 2-35.
Introduction Specifications Table 2-31 Measurement functions, voltage forcing, voltage measurement, and current measurement Function V force ranges V measure ranges I measure ranges Fast IV V force/I me asure, V force/V me asure -3 V to +3 V, -5 V to +5 V, -10 V to 0 V, 0 V to +10 V -5 V to +5 V, -10 V to +10 V 1 μA, 10 μA, 100 μA, 1 mA, 10 mA PG V force/V me asure -3 V to +3 V, -5 V to +5 V -5 V to +5 V - DC V force/I me asure, V force/V me asure -3 V to +3 V, -5 V to +5 V, -10 V to 0 V, 0
Introduction Specifications Table 2-34 Voltage force accuracy, resolution, and timing V force (Fast IV mode) -5 V to +5 V, -10 V to 0 V, 0 V to +10 V V force (PG mode) -5 V to +5 V (open load), -2.5 V to +2.5 V (50 Ω load) Accuracy ± 0.1 % of setting ± 0.1 % of rangea b Resolutionc 96 μV (-3 V to +3 V), 160 μV (all ranges except for -3 V to +3 V) Overshoot/undershoot ± (5 % + 20 mV)d Rise/fall time -5 % to (+5 % + 10 ns) of settinge Pulse period timing accuracy ± 0.
Introduction Specifications Agilent EasyEXPERT Software Functions • • Operation mode • Application test mode • Classic test mode • Quick test mode Key functions • Categorized and predefined application test library • GUI-based application test editor • Save/recall My Favorite setups • Define/customize application library • Execute measurement (single/repeat/append) • Quick test execution • Direct control (GPIB FLEX) • Save/recall measurement data and settings • Test result data man
Introduction Specifications Measurement mode details Agilent B1500A supports the following measurement modes: • Staircase sweep • Multi-channel sweep (EasyEXPERT does not support VAR1’) • Pulsed sweep • Staircase sweep with pulsed bias • IV sampling • High speed IV sampling • CV sweep • C-t sampling • C-f sweep • List sweep • Linear search (supported by FLEX command) • Binary search (supported by FLEX command) Each SMU can be set to VAR1 (primary sweep), VAR2 (secondary sweep), VAR1
Introduction Specifications • CONST A source unit can be set as a constant voltage or current source depending on the unit. • Staircase sweep measurement mode Forces swept voltage or current, and measures DC voltage or current. One channel can sweep current or voltage while up to ten channels can measure current or voltage. A second channel can be synchronized with the primary sweep channel as an additional voltage or current sweep source.
Introduction Specifications Measurement time resolution: 100 μs • Standby mode SMUs in “Standby” remain programmed to their specified output value even as other units are reset for the next measurement. • Current offset cancel This function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data.
Introduction Specifications • • q: Electron charge, 1.602177E-19 C • k: Boltzman’s constant, 1.380658E-23 • ε (e): Dielectric constant of vacuum, 8.854188E-12 Engineering units The following unit symbols are also available on the keyboard. a (10-18), f (10-15), p (10-12), n (10-9), u or μ (10-6), m (10-3), k (103), M (106), G (109), T (1012), P (1015) Analysis capabilities • Overlay graph comparison Graphical plots can be stored and overlaid.
Introduction Specifications • Read out functions The read out functions are built-in functions for reading various values related to the marker, cursor, or line. Graph plot • Display mode Data display window can be printed. Only X-Y graph can be printed. • Graph plot file Graph plot can be stored as image data to clip board or mass storage device. File type: bmp, gif, png, emf Output • Display mode X-Y graph, list, and parameter • X-Y graph display X-axis and up to eight Y-axis.
Introduction Specifications • Trigger I/O Only available using GPIB FLEX commands. Trigger in/out synchronization pulses before and after setting and measuring DC voltage and current. Arbitrary trigger events can be masked or activated independently.
Introduction Specifications Agilent Desktop EasyEXPERT Software Desktop EasyEXPERT is the same software that is built-in to the PC-based Agilent B1500A Semiconductor Device Analyzer, except that it runs on a standalone PC. Just like standard EasyEXPERT, Desktop EasyEXPERT supports all aspects of parametric test, from basic manual measurements to test automation across a wafer in conjunction with a semi-automatic wafer prober.
Introduction Specifications • Automatic data export Desktop EasyEXPERT has the ability to automatically export measurement data in real time, in a variety of formats. You can save data to any drive connected to the PC. If you wish, you can export data to a network drive and view test results on your desktop PC as your instruments are performing the testing in your lab. System requirements The following are the minimum requirement for executing Desktop EasyEXPERT.
Introduction Specifications • Supported instruments: B1500A, 4155B, 4156B, 4155C, and 4156C Supported 4155/4156 firmware: HOSTC: 03.08 or later and SMUC: 04.
Introduction Specifications General Specifications • • • Temperature range Operating +5 °C to +40 °C Storage -20 °C to +60 °C Humidity Operating 20 % to 70 %RH, non-condensing Storage 10 % to 90 %RH, non-condensing Altitude Operating 0 to 2,000 m (6,561 ft.) Storage 0 to 4,600 m (15,092 ft.) • Power requirement: 90 to 264 V, 47 to 63 Hz • Maximum volt-amps (VA): 900 VA • Regulatory compliance EMC IEC61326-1:+A1 / EN61326-1:+A1 AS/NZS 2064.1 Safety CSA C22.2 No.1010.
Introduction Accessories and Options Accessories and Options Agilent B1500A is furnished with the following accessories. • Power cable, 1 ea. • Manual CD, 1 ea. • Desktop EasyEXPERT CD-ROM, 1 ea. • License-to-use for Desktop EasyEXPERT Standard edition, 1 license • Software CD-ROM (including VXIplug&play driver and utility tools), 1 ea.
Introduction Accessories and Options Table 2-36 lists the options and the available accessories for Agilent B1500A. Table 2-36 Model Number Options and Accessories Option Item B1500A Description Semiconductor Device Analyzer B1500A-050 50 Hz power line frequency B1500A-060 60 Hz power line frequency B1500A-A6J ANSI Z540 compliant calibration B1500A-UK6 Commercial cal.
Introduction Accessories and Options Model Number Option Item E5288A Description Atto Sense and Switch Unit (ASU) E5288A-001 Add triaxial and D-sub cables, 1.5 m E5288A-002 Add triaxial and D-sub cables, 3 m N1253A Accessories for Digital I/O N1253A-100 Digital I/O T-cable N1253A-200 Digital I/O BNC Box N1254A Accessories N1254A-100 GNDU to Kelvin Adapter N1254A-107 Triax(m)-Triax(f) Adapter N1254A-108 ASU Magnetic Stand N1300A CMU cable N1300A-001 1.
Introduction Accessories and Options Model Number Option Item 16442B Description Test fixture 16442B-010 Add triaxial cables, 1.5 m, 4 ea. 16442B-011 Add triaxial cables, 3 m, 4 ea. 16442B-800 Extra blank teflon board 16442B-801 Universal socket module, 0.1 inch pitch, with 10 pins 16442B-802 Universal socket module, 0.075 inch pitch, with 10 pins 16442B-803 Universal socket module, 0.05 inch pitch, with 10 pins 16442B-810 Extra pin set (for universal socket module, 10 pins.
Introduction Accessories and Options Model Number Option Item 16493G Description Digital I/O connection cable 16493G-001 1.5 m length 16493G-002 3 m length 16493J Interlock cable 16493J-001 1.5 m length 16493J-002 3 m length 16493J-003 5 m length 16493K Kelvin triaxial cable (B1500 to B1500) 16493K-001 1.5 m length 16493K-002 3 m length 16493L GNDU cable 16493L-001 1.5 m length 16493L-002 3 m length 16493L-003 5 m length 16493M Triaxial and D-sub cables for ASU 16493M-001 1.
Introduction Accessories and Options Model Number Option Item 16493R Description Accessories for WGFMU 16493R-001 60 cm cable between WGFMU and RSU 16493R-002 2.4 m cable between WGFMU and RSU 16493R-003 3 m cable between WGFMU and RSU 16493R-004 5 m cable between WGFMU and RSU 16493R-005 4.4 m cable between WGFMU and RSU 16493R-006 1.
Introduction Accessories and Options Model Number Option Item 16495F Description Connector plate w/ 12×triax., Interlock, GNDU 16495F-001 Bulkhead feedthrough connectors (female to female) 16495F-002 Connectors to contacts for soldering Connector plate w/ 24×triax., Interlock, GNDU 16495G 16495G-001 Bulkhead feedthrough connectors (female to female) 16495G-002 Connectors to contacts for soldering Connector plate w/ 6×triax., 6×coax.
3 Installation
Installation This chapter describes how to install Agilent B1500A and accessories. • “Requirements” • “Inspection and Installation” • “Installing Accessories” • “Mounting Connectors” • “Connecting Measurement Devices” • “Capacitance Compensation When Using Switching Matrix” • “Maintenance” • “About Plug-in Modules” To change the GPIB address of the B1500A, see “To Change GPIB Address” on page 3-9.
Installation Requirements Requirements This section contains information on: • “Power Requirements” • “Operating Environment” • “Storaging/Shipping Environment” • “Ventilation Requirements” • “Power Cable” Power Requirements The B1500A can operate from any single-phase AC power source supplying 90 to 264 V at 47 to 63 Hz. The maximum power consumption is 900 VA.
Installation Requirements Ventilation Requirements The B1500A has cooling fans. To ensure adequate airflow, make sure that there is sufficient clearance around the cooling fans: 6 inches (150 mm) behind, 3 inches (70 mm) on the sides, and 0.5 inch (12 mm) above and below. If the airflow is restricted, the internal operating temperature will be higher. This may reduce the instrument's reliability, or cause the thermal-protection circuits to turn the instrument off.
Installation Requirements • • • • • • • • • • Plug: BS 1363/A, 250 V, 10 A Cable: 8120-4420, 8120-1351 • Plug: NEMA 6-15P, 250 V, 10 A Cable: 8120-3996, 8120-0698 • • Plug: JIS C 8303, 125 V, 12 A Cable: 8121-0743, 8120-4753 • • Plug: GB 1002 figure 3 , 250 V, 10 A Cable: 8120-8376 • • Plug: AS 3112, 250 V, 10 A Cable: 8120-4419, 8120-1369 • • Plug: CEE 7 sheet VII, 250 V, 10 A Cable: 8120-4519, 8120-1689 • • Plug: SEV 1011, 250 V, 10 A Cable: 8120-2104 • Plug: Israel SI 32, 250 V, 10 A
Installation Inspection and Installation Inspection and Installation This section describes what to do when you receive the B1500A and accessories. 1. Inspect the shipment. See “To Inspect B1500 and Accessories”. 2. Verify the B1500A operation and perform initial setup. See “To Perform Initial Setup”. 3. Install the B1500A in the appropriate place. See “Requirements” on page 3-3. To use the B1500A briefly, see “Getting Started” on page 1-1.
Installation Inspection and Installation To Perform Initial Setup After you receive the B1500A, perform the following setup. 1. Make sure that the Standby switch is set to off. 2. On the B1500A rear panel, connect the Circuit Common terminal to the frame ground terminal by using a shorting-bar. 3. If you use Agilent 16444A-001 USB keyboard and/or the 16444A-002 USB mouse, connect it to an USB port of the B1500A. 4. Connect the power cable from the B1500A to an AC power outlet. 5.
Installation Inspection and Installation 15. For the message Thank you!, select the Finish button. The initial setup is completed by restarting Windows. To use the B1500A briefly, see “Getting Started” on page 1-1.
Installation Inspection and Installation To Change Windows Logon Setting Agilent B1500A initially enables Windows automatic logon. If you want to change this setting, select All Programs > Control Auto Logon from the Start menu. Control Auto Logon is displayed on the browser. Then click one of the following buttons on the browser and follow the setup script. NOTE • Enable Auto Logon • Disable Auto Logon If you set a password for the user account Agilent B1500 User, disable the automatic logon.
Installation Inspection and Installation To Enable System Controller To allow Agilent B1500A/EasyEXPERT to control external GPIB devices, perform the following procedure. 1. If the EasyEXPERT software is running, terminate it as shown below: a. Select the menu function File > Exit on the EasyEXPERT main screen. b. Click [x] at the upper right corner of the Start EasyEXPERT button. 2. Select All Programs > Agilent IO Libraries Suite > Agilent Connection Expert from the Start menu.
Installation Installing Accessories Installing Accessories This section describes how to install the B1500A and accessories. Additional information regarding airflow can be found in the “Ventilation Requirements” on page 3-4.
Installation Installing Accessories To Connect 16442B Test Fixture See this section if you use Agilent 16442B Test Fixture. This section describes how to set up the 16442B and how to connect the B1500A to the 16442B. To Set up 16442B You can stabilize the 16442B as shown in the figure below. 1. Put a stabilizer on both sides of the test fixture. 2. Attach each stabilizer to the unit with a flathead screw.
Installation Installing Accessories Table 3-1 To Connect 16442B Cables 16442B Terminals B1500A Terminals Agilent 16493J Interlock Cable, 3 m or 1.5 m Intlk Interlock Agilent 16493L GNDU Cable, 3 m or 1.5 m GNDU GNDU Agilent 16493K Kelvin Triaxial Cable, 3 m or 1.5 m, for the Kelvin connection SMU1 Up to 3 SMUs can be connected to the 16442B by the Kelvin connection. SMU SMU2 SMU3 Sense SMU SMU4 SMU5 Agilent N1300A CMU Cablea, 3 m or 1.
Installation Installing Accessories To Connect Connector Plate The available connector plates are listed in Table 3-2. Option 001 provides the through connectors except for the Interlock connector that provides the soldering patterns at the back side. For the option 002, the back of each connector is designed for soldering. For connector plate installation information, refer to Agilent 16495 Installation Guide.
Installation Installing Accessories Table 3-3 To Connect Connector Plate Connector Plate B1500A Terminals Agilent 16493J Interlock Cable, 3 m or 1.5 m Intlk Interlock Agilent 16493L GNDU Cable, 3 m or 1.5 m GNDU GNDU Cables Agilent 16493Ka Kelvin Triaxial Cable, 3 m or 1.5 m, for the Kelvin connection odd number 16495F provides the inputs 1 to 12 (6 Kelvin). 16495H provides the inputs 1 to 6 (3 Kelvin). Force SMU even number Sense 16495J provides the inputs 1 to 8 (4 Kelvin).
Installation Installing Accessories Connecting the interlock terminal The B1500A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the Interlock connector is open, the B1500A cannot force high voltage more than ± 42 V. When using the 16442B test fixture, connect the Interlock connectors together using the 16493J interlock cable.
Installation Installing Accessories To Connect ASU Agilent E5288A Atto Sense and Switch Unit (ASU) will add the 1 pA range to the high resolution SMU (HRSMU) when it is connected between the HRSMU and the device under test (DUT). The ASU also provides the input selection function when instruments are connected to the SMU input and the AUX input. NOTE For the installation of the ASU and the connection to the DUT interface (probe card, manipulators, and so on), contact your favorite prober vender.
Installation Installing Accessories To install ASU 1. Fix the ASU in the shielding box. The ASU must be fixed to the best position for accessing its connectors. Agilent N1254A-108 Magnetic Stand will be useful for fixing the ASU. 2. Pass the 16493M (D-sub cable, triaxial cable), N1300A CMU cable, 16048D/E test leads, BNC cable and so on through the cable hole of the 16495K. They will be connected between the ASU and the instruments 3. Connect the D-sub cable to the ASU D-sub connector.
Installation Installing Accessories Figure 3-2 To Connect ASU $68 7R &08 7R 608 +F &08 FXU $8; ,Q +S &08 SRW )RUFH )RUFH ' VXE )URP 608 )RUFH &08 $8; 6HQVH 7R '87 &08 5HWXUQ $8; &RPPRQ $68 7R &08 7R 608 Figure 3-3 /F &08 FXU $8; ,Q /S &08 SRW )RUFH )RUFH ' VXE )URP 608 &08 5HWXUQ $8; &RPPRQ )RUFH &08 $8; 6HQVH 7R '87 To Set Shorting Bar 5/8 AUX CMU-cur/AUX In b/c SMU Force 6/9 SMU Force Shorting bar Agilent B1500 User’s Guide, Edition 7 3- 19
Installation Installing Accessories To connect MFCMU/4284A to AUX Perform the following procedure to connect the MFCMU or the 4284A. See Figure 3-2 and Figure 3-3. Prepare a shorting bar furnished with the ASU. The shorting bar is effective for reducing the offset capacitance caused by connecting a measurement terminal to the chuck of a wafer prober. 1. Turn the instrument off. 2. Prepare two ASUs (#1 and #2) and two shorting bar. And perform the following procedure for each ASU. a.
Installation Installing Accessories To Connect SCUU/GSWU Agilent N1301A-100 SMU CMU Unify Unit (SCUU) is used to switch the module (CMU or SMU) to be connected to the DUT. The SCUU is available for the MPSMU and HRSMU. Agilent N1301A-200 Guard Switch Unit (GSWU) is used to connect the CMU high and low guard lines together near the DUT. The connection is broken when the SCUU is in the SMU connection state. The GSWU is effective for the accurate impedance measurement.
Installation Installing Accessories To install 16495K Fix your necessary 16495 connector plates to the shielding box or something that will cover the DUT interface. See Agilent 16495 Installation Guide. For the GSWU installation, the 16495K is required. It is the plate that has the mechanism to block the light from the cable hole used to pass the cables in the shielding box. Before starting 1. GSWU is furnished with wires (2 ea.) for the connection between the GSWU and the DUT interface Guard terminal.
Installation Installing Accessories To connect SCUU/GSWU 1 To attach the SCUU to the B1500A: 1. Attach the SCUU to the B1500A rear panel connectors for the MFCMU in the slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3 to 10). Connection will be easy by bringing the control connectors together before bringing the BNC connectors. 2. Fix the GSWU in the shielding box. The GSWU must be fixed to the best position for accessing its connectors. 3.
Installation Installing Accessories 2. Fix the SCUU inside or outside the shielding box. The SCUU must be fixed to the best position for accessing its connectors. Agilent N1301A-110 Magnetic Stand will be useful for fixing the SCUU. 3. Attach the other end of the SCUU cable to the B1500A rear panel connectors for the MFCMU in the slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3 to 10). Connection will be easy by bringing the control connectors together before bringing the BNC connectors. 4.
Installation Installing Accessories To Connect GNDU Adapter The ground unit (GNDU) output is the single triaxial connector. Agilent N1254A-100 GNDU to Kelvin Adapter enables to change it to the dual triaxial connector. Connect the adapter to the GNDU connector on the rear panel, then connect a Kelvin triaxial cable to extend the GNDU terminal. Maximum current is restricted when the Kelvin triaxial cable is used. See Table 3-4.
Installation Installing Accessories To Interconnect SPGUs If multiple SPGUs have been installed, connect the SPGUs by using the following parts. See Figure 3-7. Figure 3-7 • SPGU-SPGU connection cable16493Q, (number of SPGUs-1)×2 ea. • SMA open cap, 4 ea.
Installation Mounting Connectors Mounting Connectors Previous sections described how to install the available accessories, and Agilent 16495 Installation Guide provides the information on how to install connector plates on the shielding box. However, you may choose to mount connectors directly on your own connector plate or test fixture. To do this, you will need to make connector holes and mount the connectors yourself. This section contains information on connector hole dimensions.
Installation Mounting Connectors Table 3-5 Recommended Parts Usage Agilent Part No. Making an interlock circuit Table 3-6 Description 1252-1419C Interlock Connector (6 pin, female) 3101-0302 or 3101-3241 Switch 1450-0641 LED (VF ≅ 2.
Installation Mounting Connectors To Make an Interlock Circuit The interlock circuit is designed to prevent electrical shock when a user touches the measurement terminals. CAUTION You must install an interlock circuit on a shielding box to prevent hazardous voltages when the door of the shielding box is open. Figure 3-8 shows the pin assignments of the interlock connector that should be mounted on a connector plate or test fixture.
Installation Mounting Connectors Installing the interlock circuit Install the interlock circuit as follows: 1. Mount two mechanical switches on your shielding box, so that the switches close when the door of the shielding box is closed, and open when the door is opened. For the dimensions of the switch, see Figure 3-10 and Figure 3-11 below. 2. Mount an LED on your shielding box. For the dimensions of the LED, see Figure 3-9. 3.
Installation Mounting Connectors Figure 3-10 Dimensions of the Interlock Switch (Agilent part number 3101-0302) 12 0D[ 6ZLWFK RQ 6ZLWFK RII 1& & 20 8QLWV PP Figure 3-11 Dimensions of the Interlock Switch (Agilent part number 3101-3241) 6ZLWFK RII 6ZLWFK RQ 8QLWV PP Agilent B1500 User’s Guide, Edition 7 3- 31
Installation Mounting Connectors To Connect GNDU Output The GNDU output connection examples are shown in Table 3-7 Table 3-7 GNDU Output Connections Kelvin connections non-Kelvin connections Use a low-noise coaxial cable (Agilent part number 8121-1189) from the connector to the prober, socket, or DUT as shown. Short the Sense and Force on the connector as shown below. Measurement data will include the residual resistance of the connection wire.
Installation Mounting Connectors To Connect SMU Output The SMU output connection examples are shown in Table 3-8. WARNING Potentially hazardous voltages, up to ± 100 V (MPSMU/HRSMU) or ± 200 V (HPSMU), are present at the Force, Sense, and Guard terminals. To prevent electrical shock, do not expose these lines. Before turning Agilent B1500A on, connect the Interlock terminal to an interlock circuit.
Installation Mounting Connectors Table 3-8 SMU Output Connections Kelvin connections non-Kelvin connections Use low-noise coaxial cable (Agilent part number 8121-1191) from the connector to the prober, socket, or DUT as shown. Use low-noise coaxial cable (Agilent part number 8121-1191). The following figure is for the connection using Kelvin triaxial cable. See Figure 3-13 and Figure 3-15 for the ASU and SCUU connections respectively.
Installation Mounting Connectors Figure 3-13 ASU Output Kelvin Connection *XDUG :LUH &0+ RU )RUFH $68 &RD[LDO FDEOH &RPPRQ WR '87 RU '87 KLJK WHUPLQDO 6HQVH &08 5HWXUQ *XDUG &08 5HWXUQ &0/ RU )RUFH $68 &RPPRQ WR '87 RU '87 ORZ WHUPLQDO 6HQVH *XDUG The ASU inputs can be connected to the instruments by using a control cable, a triaxial cable, and two coaxial cables. The cables can be connected to the ASU inside the shielding box through the 16495K plate.
Installation Mounting Connectors Figure 3-14 ASU Output non-Kelvin Connection *XDUG :LUH &0+ RU )RUFH $68 &RD[LDO FDEOH &RPPRQ :LUH WR '87 RU '87 KLJK WHUPLQDO 6HQVH &08 5HWXUQ *XDUG WR '87 RU '87 ORZ WHUPLQDO &08 5HWXUQ &0/ RU )RUFH &RPPRQ $68 6HQVH *XDUG The ASU inputs can be connected to the instruments by using a control cable, a triaxial cable, and two coaxial cables. The cables can be connected to the ASU inside the shielding box through the 16495K plate.
Installation Mounting Connectors Figure 3-15 SCUU Output Kelvin Connection *XDUG )RUFH RU &0+ &RPPRQ WR *6:8 WR '87 RU '87 KLJK WHUPLQDO *XDUG 6HQVH ,QVXODWRU 3ODWH *XDUG )RUFH RU &0/ &RPPRQ WR *6:8 WR '87 RU '87 ORZ WHUPLQDO *XDUG 6HQVH &RD[LDO FDEOH 7ULD[LDO FRQQHFWRU :LUH The SCUU should be connected to the DUT by using coaxial cables and wires as shown above.
Installation Mounting Connectors Figure 3-16 SCUU Output non-Kelvin Connection *XDUG )RUFH RU &0+ WR *6:8 &RPPRQ WR '87 RU '87 KLJK WHUPLQDO *XDUG WR *6:8 ,QVXODWRU 6HQVH 3ODWH WR '87 RU '87 ORZ WHUPLQDO *XDUG )RUFH RU &0/ &RD[LDO FDEOH :LUH &RPPRQ *XDUG 7ULD[LDO FRQQHFWRU 6HQVH The SCUU should be connected to the DUT by using coaxial cables and wires as shown above.
Installation Mounting Connectors To Connect MFCMU Output The MFCMU output connection example is shown in Figure 3-17. This connection is for the MFCMU without the SCUU. Then Agilent N1300A-001/002 CMU cable should be used for the connection between the MFCMU and the connectors you mount. It is ok to leave open the ground wire extended from the CMU cable.
Installation Connecting Measurement Devices Connecting Measurement Devices This section describes how to connect device under test (DUT) to the 16442B test fixture, and how to connect cables to the connector plate. If you use a wafer prober, see wafer prober manuals. Note that you must set the module output off when connecting or disconnecting DUTs. If not, the DUTs may be damaged. To set the module output off, press the Stop key.
Installation Connecting Measurement Devices Using Test Fixture 1. Press the Stop key to set the module output off. 2. Select a proper socket module for your DUT, then set the socket module on the test fixture. 3. Mount your DUT on the socket module. 4. Connect between the socket module and the test fixture by using the proper test leads. 5. Close the lid of the test fixture. To force more than ± 42 V, close the lid of the test fixture. Otherwise, the interlock function will stop Agilent B1500A output.
Installation Connecting Measurement Devices Connections for High Current Measurements When you force or measure a large current, you may want to use a Kelvin (4-wire) connection to eliminate the residual resistance effects of test leads and contacts. For example, you can use the following connections as Kelvin connections on the test fixture.
Installation Connecting Measurement Devices Using Connector Plate This section provides the information useful for connecting cables and probing needles to a connector plate. • “To Reduce Leakage Current” • “To Measure Low Resistance” To Reduce Leakage Current To reduce the leakage current caused by connection cables, the guard technique is effective. Connect the probing needles to the terminals of the connector plate by using coaxial cables as shown below: 1.
Installation Connecting Measurement Devices Guarding Guarding reduces the leakage current between the measurement points and instrument. This is important when you measure low current. The following figure shows the theory of guarding. The buffer amplifier (×1) keeps the potential of the guard conductor at the same potential as the force conductor, so current does not flow between the force and guard conductors.
Installation Connecting Measurement Devices To Measure Low Resistance When you measure a low resistance, high current flows through the DUT. This high current increases the measurement error caused by the residual resistance of cables. To cancel the effect of this resistance, you can use Kelvin connections (4-wire), which means the force and sense lines are extended separately to the DUT. Connect the probing needles to the terminals of the connector plate by using test leads or coaxial cables.
Installation Connecting Measurement Devices Kelvin Connection Kelvin connections give good measurement results when you force high-current. The following figure shows the equivalent circuits for Kelvin and non-Kelvin connections. • For the non-Kelvin connection, the voltmeter measures the voltage drop of resistances rF1, RDUT, and rF2. • For the Kelvin connection, the voltmeter measures the voltage drop of resistance RDUT only.
Installation Capacitance Compensation When Using Switching Matrix Capacitance Compensation When Using Switching Matrix When the capacitance/conductance measurement is performed through Agilent B2200A/B2201A/E5250A switching matrix, Agilent B1500A measures the capacitance/ conductance of the path including a DUT (device under test), matrix switches, extension cables and so on. So, the data measured by the B1500A is far from the DUT’s capacitance/conductance.
Installation Capacitance Compensation When Using Switching Matrix Required Conditions The following conditions must be satisfied to use the capacitance compensation function. For the instrument connections, see Figure 3-18. • Setting of the MFCMU • Range of the measurement frequency: 1 kHz to 5 MHz • Measurement function: Cp-G, Cp-D, Cs-Rs, or Z-Th. There is no limitation. • Calibration Perform the MFCMU open calibration at the end of the measurement paths in front of the switching matrix inputs.
Installation Capacitance Compensation When Using Switching Matrix In Figure 3-18, C1 (DATA04), C2H (DATA05), C2L (DATA06), C3H (DATA07), C3L (DATA08) are the compensation coefficients defined in the compensation data file. where, CxH is for the path connected to the MFCMU Hc-Hp terminal, and CxL is for the path connected to the MFCMU Lc-Lp terminal. When Agilent B2220A probe card interface is used, obtain the coefficients for C3x, and create your compensation data file.
Installation Capacitance Compensation When Using Switching Matrix To Create Compensation Data File This section explains how to create the compensation data file. To perform the capacitance compensation, enter the file name of the compensation data file to the User Compensation Data File field of the “Extended Configuration” on page 4-46. 1. Create a text file (e.g. C:\temp\c_data.txt) that contains the information as shown below.
Installation Capacitance Compensation When Using Switching Matrix • For E5250A: # E5250A C Compensation coefficient data table # # CAUTION : Do not add or delete "REVISION" line and "DATAxx" line. # Change the value for R,L,C of DATA05,06,07 or 08. # REVISION A.03.00 # R [ohm] L [H] C [F] DATA00 74.65E-3 140.00E-9 58.44E-12 # Frame Path 1 DATA01 75.41E-3 90.00E-9 67.13E-12 # Frame Path 2 DATA02 231.41E-3 450.00E-9 178.85E-12 # Card Path High DATA03 177.56E-3 390.00E-9 135.45E-12 # Card Path Low DATA04 100.
Installation Capacitance Compensation When Using Switching Matrix 2. Measure the R, L, C values of the for C2H (DATA05), C2L (DATA06), C3H (DATA07), and C3L (DATA08) by using the MFCMU. See “To obtain compensation coefficients” on page 3-53. After the measurements, calculate the per meter value of the R, L, C, and record them into the following table. Compensation coefficients Explanation R (Ω) L (H) C (F) C2H (DATA05) C2L (DATA06) C3H (DATA07) C3L (DATA08) 3.
Installation Capacitance Compensation When Using Switching Matrix To obtain compensation coefficients Obtain the compensation coefficients as shown below. 1. Select the measurement frequency (Fmeas) used for the capacitance measurement of a device under test (DUT), and set it to the MFCMU. The coefficients must be measured at the same frequency. 2. Perform the MFCMU open calibration at the measurement terminal. Optionally, perform short calibration if you want. 3.
Installation Capacitance Compensation When Using Switching Matrix Table 3-11 Template Compensation Data Files for B2200A/B2201A Measurement environment that template targets File namea \b2210a\pcif\triax\3m.data Switch module Cableb DUT interfacec Coefficients to be modified B2210A 16494A-002 B2220A C3H and C3L 16495F/G C2H, C2L, C3H, and C3L B2220A C3H and C3L 16495F/G C2H, C2L, C3H, and C3L \b2210a\pcif\triax\4m.data 16494A-005 \b2210a\pcif\kelvin\3m.
Installation Maintenance Maintenance Maintenance should be performed periodically to keep Agilent B1500A in good condition. Cleaning Before performing cleaning, turn off the instrument, and disconnect power cable from the rear panel. Use a dry cloth to clean the external case parts. To prevent electrical shock, do not perform cleaning when the instrument is turned on, and do not use a wet cloth. Self-test and Diagnostics Agilent B1500A provides the following functions to check the operation.
Installation About Plug-in Modules About Plug-in Modules Agilent Technologies is responsible for the module installation of Agilent B1500A. Contact Agilent Technologies for the module installation. Then send the following equipment and accessories to Agilent Technologies.
Installation About Plug-in Modules Module Type and Locations Module locations when the B1500A is shipped from the factory are shown in Table 3-12. This table shows the relative locations by the module types. If the SPGUs are installed, the SPGUs must be installed in the slots from the slot number 1. And if the SPGU and the WGFMU are not installed and the HPSMUs are installed, the HPSMUs must be installed in the slots from the slot number 1.
Installation About Plug-in Modules 3- 58 Agilent B1500 User’s Guide, Edition 7
4 Using EasyEXPERT
Using EasyEXPERT This chapter provides the reference information of Agilent EasyEXPERT software that is the graphical user interface of Agilent B1500A.
Using EasyEXPERT To start EasyEXPERT, see “Start EasyEXPERT” on page 4-4 and “Workspace Configurator” on page 4-5. To perform application test setup, see “Application Test” on page 4-27. To perform classic test setup, see “Classic Test Definition” on page 5-1. To perform quick test setup, see “Quick Test” on page 4-29. To perform measurement, see “Main Screen” on page 4-10. To display measurement data and perform data analysis, see “Data Display” on page 4-51.
Using EasyEXPERT Start EasyEXPERT Start EasyEXPERT The Start EasyEXPERT window is displayed by selecting the Start EasyEXPERT icon on Windows desktop or Start EasyEXPERT in the Start menu. This window provides the following graphical user interface. Start EasyEXPERT This button launches EasyEXPERT. File menu Exit closes the Start EasyEXPERT window. Option menu EasyEXPERT Database provides the following two functions.
Using EasyEXPERT Workspace Configurator Workspace Configurator Workspace means the space created in Agilent B1500A’s internal hard disk drive, and is used to store the test setup, test result data, and so on. The workspace can be created and allocated for each user. The workspace configurator will run after you launch Agilent EasyEXPERT. The workspace configurator displays a screen used to select the workspace you use. There are three types of display, depending on the number of existing Workspace.
Using EasyEXPERT Workspace Configurator If there is one workspace You will see a message asking you if you want to create a workspace or not. Select one of the following radio buttons. • Yes, I want to continue working on the previous setups and data. This button must be selected if you do not want to create a new workspace, and want to use the workspace previously used. The OK button will work to open the EasyEXPERT main screen.
Using EasyEXPERT Workspace Configurator • No, I want to start a new session. This button must be selected if you want to create a new workspace, and want to use it instead of the workspace previously used. If you select No, the label of the OK button will change to Next. The Next button will work to display the following entry fields used to set the workspace name.
Using EasyEXPERT Workspace Configurator If there are Workspace more than two You will see the message as shown in the following example.
Using EasyEXPERT Workspace Configurator • Create a new Workspace This button must be selected if you want to create a new workspace. Enter the name of the new workspace in the Workspace Name field. Check the Allow other users to access this workspace box to create a public workspace that is opened for all users. • Open an existing Workspace • Your Workspace This button must be selected if you want to open your workspace. Select the name to specify the workspace to open.
Using EasyEXPERT Main Screen Main Screen The EasyEXPERT main screen will be displayed after the workspace is specified or created by the workspace configurator. The main screen provides several tools and functions described in this section.
Using EasyEXPERT Main Screen Main Screen GUI File menu Provides the following four functions. Import Test Setup... Opens a dialog box used to specify a test setup to import. Export Test Setup... Opens a dialog box used to specify a destination file for exporting the present test setup. Close Workspace Closes the work space and returns to the workspace configurator. Exit Exits the EasyEXPERT software. Data Display menu Provides the following three functions.
Using EasyEXPERT Main Screen Data Display Opens “Data Display (page 4-51)” used to display the test result data. EasyEXPERT always handles the test setup corresponding to the Data Display window now active or most recently activated. Calibration Opens “Calibration (page 4-35)” used to see the self-calibration results, to perform the self-calibration, or to perform the current offset cancel.
Using EasyEXPERT Main Screen Count Displays the number of single measurements executed for the test setup now opened. Effective for the measurements triggered by both Single and Repeat. Device ID This entry field is used to enter a string in the test record. The string can data ID, device ID, test ID, or anything you want. Performing measurement and changing setup do not change the value in this field. Change the value if you want.
Using EasyEXPERT Main Screen Organize Preset Group... Opens the “Organize Preset Group (page 4-33)” dialog box used to organize the preset group. Flag Rename You can change the name of the selected test setup. Duplicate Creates a copy of the selected test setup. Delete Deletes the selected test setup. Delete All Deletes all test setups in the present preset group. Shows the flag, Important (!), Valid (#), or Questionable (?) set to the record. The top button sorts the test records by the flag.
Using EasyEXPERT Main Screen Standby ON This indicator is located at the bottom of the EasyEXPERT main screen and is lit while the standby function is enabled (standby mode is ON). Multi Display ON This indicator is located at the bottom of the EasyEXPERT main screen and is lit while the Multi Display function is enabled. workspace name Field below the Results button shows the present workspace name. Results This button provides the following functions. The list area shows the test records.
Using EasyEXPERT Main Screen Show All Append Data Check this function to see all test records created by the append measurement. In the test record list, S indicates the test records obtained by a single measurement, and A indicates the records obtained by an append measurement. Transport Data Provides the following ten functions. Import... Opens the Test Result Import dialog box. Imports the specified test record. Export As Test Result... Opens the Test Result Export dialog box.
Using EasyEXPERT Main Screen Auto Export Setting... Opens the “Test Results Data Auto Export (page 4-24)” dialog box used to set the automatic data export function and the automatic data save function. Edit Provides the following two functions. Flag and Remarks Opens the “Test Result Editor (page 4-21)” used to put the selected test record in Save-group or Delete-group. Also this dialog box can set a flag and remarks to the selected record.
Using EasyEXPERT Main Screen Run Option This dialog box appears by clicking the Run Option button and is used to set the data record functions (Auto Record and Auto Export) and the Multi Display function. This dialog box provides the following GUI. • Record Test Result Data Automatically This check box changes the status of the data record functions (Auto Record and Auto Export). The functions provide four status shown in Table 4-1. Removing the check sets Auto Export=Auto Record=OFF.
Using EasyEXPERT Main Screen ON Test result data of the same test setup name will be displayed on the exclusive Data Display window and the test result data of the different test setup name will be displayed on the new Data Display window. Data Display Manager This dialog box is opened by selecting the Manage Data Display... function of the Data Display menu, and is used to control the appearances of the Data Display windows. This dialog box provides the following three action buttons.
Using EasyEXPERT Main Screen Apply same scale to all graph Tiling Resize and collate the data display windows such that they fill up the entire screen. Stacking Resize and collate the data display windows so that they overlap slightly with an offset. Overlaying Resize, overlap, and make transparent the data display windows so that multiple graphs can be viewed and superimposed on one another. This check box must be checked to apply the same graph scale to all graphs.
Using EasyEXPERT Main Screen X/Y Axis Title Font size for the axis title Scale Font size for the X and Y coordinate values Legend Font size for the graph legend Test Result Editor The Test Result Editor appears when measurement is completed or by clicking Results > Edit > Flag & Remarks. This is used to set a flag and remarks to the associated test record and provides the following GUI. Save, Delete Divides test records into groups, Save and Delete.
Using EasyEXPERT Main Screen Test Results Data Filter This dialog box appears by clicking Results > Filter > Filter... and is used to specify the test records listed in the lower area of the EasyEXPERT main screen. Data records in Save-group Check this box to list the test records in Save-group. Data records in Delete-group Check this box to list the test records in Delete-group. Flag Select or enter a flag in this field to list the test records with the specified flag.
Using EasyEXPERT Main Screen Test Results Data Folder Export This dialog box appears by clicking Results > Transport Data > Folder Export... after the test result records are selected (highlighted). This function is used to export the multiple test records. The test records can be exported by specifying the records, the destination folder name, and the naming rule and the file type for the exported files. Destination for Export Selects the folder used to save the exported test records. The Browse...
Using EasyEXPERT Main Screen My Format • Custom format created by the specified XSLT filter. The following two entry fields are available. My Format Specifies the file name of the XSLT filter (XML style sheet) used to export test records. The Browse... button opens the Select XML Style Sheet File dialog box used to select the file. • Extension of Output File Enters the appropriate extension, or selects the extension from xml, txt, csv, or xls.
Using EasyEXPERT Main Screen • Default Format: File name without extension is as follows. Setup Name[Device ID(Count);Date] Example: Id-Vd [cmos1(1) ; 1_22_2006 3_44_55 PM] • Custom Format: You can specify the style by the File Name Format dialog box. The File Name Format dialog box appears by clicking the Settings... button. In the dialog box, enter the desired style into the Format field, for example, the next example sets the same style as the Default Format.
Using EasyEXPERT Main Screen Data Storage Remove a check from the following check box to disable the Auto Record function (automatic data record). • Enable automatic data record to the internal storage device OK Applies the setup, and closes this dialog box. Cancel Cancels the setup, and closes this dialog box. NOTE Automatic Data Record Output When the automatic data record function is enabled, one test execution result is stored in one test record.
Using EasyEXPERT Application Test Application Test In the application test mode, the EasyEXPERT main screen has the following additional graphical user interface. Category Lists the categories of the application test definitions. You can select the categories by using the check box. The test definitions listed in the Library area depend on the selection of the categories. The Category button opens the Categories dialog box used to select the categories.
Using EasyEXPERT Application Test Open Definition of This Test... Opens the “Test Definition Window (page 6-3)” to display the definition of the present (selected) application test or to modify the definition. Delete Definition of This Test Deletes the present (selected) application test. The test will be deleted from the application library. Import Test Definition... Opens a dialog box used to specify the test definition to import. Export Test Definition...
Using EasyEXPERT Quick Test Quick Test In this mode, you can execute the test setups saved in a preset group (My Favorite Setup) sequentially. In the quick test mode, the EasyEXPERT main screen has the following additional graphical user interface. My Favorite Setup The following menu is displayed by clicking this button. Cancel Duplicate This Preset Group Import Preset Group... Export Preset Group... Organize Preset Group Closes this menu. Opens the Duplicate Preset Group dialog box.
Using EasyEXPERT Quick Test Down Moves the selected test setup downward. • Set the • mark to the right cell of the Setup Name to be executed in the quick test. To do so, select the test setup, then click this button. After the quick test is started, the test setup with the • mark will be executed in order from top to bottom of the setup table. Recall Recalls the selected test setup. The screen is changed to Application Test or Classic Test. Rename You can change the name of the selected test setup.
Using EasyEXPERT Repeat Measurement Setup Repeat Measurement Setup This dialog box is opened by clicking the Repeat button, and is used to set the repeat measurement condition. This dialog box supports the following action buttons. Run Starts measurement. Abort Aborts the measurement. Cancel Cancels performing the repeat measurement and closes this dialog box. The repeat measurement is performed as shown in Figure 4-1. The repeat measurement operation is controlled by the value of Count and status.
Using EasyEXPERT Repeat Measurement Setup Start Procedure Specifies the procedure executed before starting measurement. Iteration Procedure Specifies the procedure executed every single measurement. Final Procedure Specifies the procedure executed after the repeat measurement. If the procedure requires arguments, enter the values to the Arguments field.
Using EasyEXPERT Organize Preset Group Organize Preset Group This dialog box is opened by selecting the Organize Preset Group function of the main screen, the Quick Test setup screen, or the Switching Matrix Operation Panel, and is used to organize the preset group. Preset Group List Lists the preset group saved in the workspace. The following buttons are available. Add Opens the Add Preset Group dialog box. Creates a new preset group and saves it as the specified name.
Using EasyEXPERT Organize Preset Group Preset Group Lists the preset setup saved in the preset group. The following buttons are available. Preset Group Selects the preset group to open. Setup Name Lists all preset setup saved in the preset group. Select All Selects all preset setup. Unselect All Unselects all preset setup. Rename You can change the name of the selected preset setup. Duplicate Creates a copy of the selected preset setup and places it at the bottom of the setup list.
Using EasyEXPERT Calibration Calibration The Calibration window is opened by clicking the Calibration button, and is used to perform the self-calibration, SMU current offset cancel, CMU data correction, and so on. • “Module Self Calibration” • “SMU Zero Cancel” • “CMU Calibration” Module Self Calibration The Module Self Calibration tab screen is used to perform the self-calibration of modules. Check the left check box of Name to select the module for self-calibration.
Using EasyEXPERT Calibration Enable Auto Calibration Enables or disables the auto-calibration capability. If this box has been checked (function ON), and the B1500 automatically starts calibration for all modules every 30 minutes if the output switches of all modules are off for 30 minutes. If auto-calibration is enabled, do not forget to open the measurement terminals or disconnect the device under test from the terminals after measurement.
Using EasyEXPERT Calibration CMU Calibration The CMU calibration tab screen is used to perform the measurement data correction of the multi frequency capacitance measurement unit (MFCMU). For the easy way, perform the phase compensation and the open correction at least. See also “Error Correction” on page 7-24. NOTE For a more accurate measurement, perform correction data measurement at the measurement frequency before starting the capacitance measurement.
Using EasyEXPERT Calibration Open Correction This check box is effective after the open correction data is measured, and is used to enable or disable the open correction. Uncheck this box to disable the correction. To measure the correction data, connect the open standard that has the calibration value or reference value, or open the measurement terminals at the end of the device side. Then, click the Measure... button.
Using EasyEXPERT Calibration Advanced Options for CMU Calibration This dialog box is opened by clicking the Advanced Options... button, and is used to set the information required to measure the open/short/load correction data and the phase compensation data. This dialog box provides the following action button. Frequency OK Applies the setup changes and closes this dialog box. Cancel Cancel the setup changes and closes this dialog box.
Using EasyEXPERT Calibration Integration Time Reference Standard Values This area defines the integration time used for measuring phase compensation data or open/short/load correction data. The number of averaging samples (Mode=AUTO) or the averaging time (Mode=PLC) is set. Mode A/D converter operation mode, AUTO or PLC Factor Factor for the initial value. See “Mode, Factor” on page 7-20.
Using EasyEXPERT Configuration Configuration The Configuration window is opened by clicking the Configuration button, and is used to display the system information and event log, as well as to perform diagnostics and self-test. • “Main Frame” • “Modules” • “ASU” • “Switching Matrix” • “SMU/PG Selector” • “Event Log” Main Frame The Main Frame tab screen is used to display the system information and perform diagnostics. Model Identification Displays the instrument ID. B1500A.
Using EasyEXPERT Configuration Start Diagnosis Starts diagnostics for the selected items. To perform diagnostics, specify the items to perform and click this button. A dialog box appears. Follow the dialog box to perform the diagnostics. Some items need your judgement, pass or fail. Also you will need to connect an adapter, press keys, check LEDs, and so on. Modules The Modules tab screen is used to perform self-test of modules. Slot Configuration This area lists Slot, Module Type, Name, and Status.
Using EasyEXPERT Configuration ASU The ASU tab screen is available if the B1500A installs the HRSMU calibrated with the ASU (Atto Sense/Switch Unit) regardless of the ASU connection status, and shows the ASU information. Slot Slot number Module Type Type of module Name Name of module ASU Serial Number Serial number of the usable ASU. This cell shows the serial number even if the ASU is disconnected.
Using EasyEXPERT Configuration Poll Confirms if the switching matrix with the specified GPIB Address is connected to the B1500A. Start Self Test This button starts the selftest of the switching matrix. SWM IN SWM INn means the switching matrix input port n. where, n is an integer 1 to 10 for the E5250A or an integer 1 to 14 for the B2200A/B2201A. Enter the label used to specify the input port to the right entry field. The port name and the connected module name can be the label.
Using EasyEXPERT Configuration Extended Configuration This button opens the “Extended Configuration” on page 4-46 dialog box. SMU/PG Selector The SMU/PG Selector tab screen is used to specify the input connection and the channel connection status of the Agilent 16440A SMU/PG selector. The selector can be controlled by the B1500A via the Digital I/O connector and the Agilent 16445A selector adapter. Two selectors can be used. The first selector must be connected to the Digital I/O connector via the 16445A.
Using EasyEXPERT Configuration ID Process ID of the event Process Process name User User name. Windows login name. Host Host name of the B1500 Refresh Refreshes the event log. Extended Configuration This dialog box opens by clicking the Extended Configuration button in the Configuration window’s Switching Matrix screen. Save as Hardware Profile Switching matrix hardware configuration can be saved as the hardware profile. Save Saves the present hardware profile.
Using EasyEXPERT Configuration Cable Specifies the model number of the cable from the B2200A/ B2201A output to the DUT I/F. The selections are the 16494A/B/C-001 (1.5 m) / 002 (3 m) / 005 (4 m). This mode cannot perform the capacitance compensation for the cables to positioner/manipulator or the probe card.
Using EasyEXPERT Switching Matrix Operation Panel Switching Matrix Operation Panel The Switching Matrix Operation Panel is opened by clicking the Switching Matrix button, and is used to create the switch setup for Agilent B2200A/B2201A/E5250A switching matrix, send the setup to the switching matrix, and so on. The switch setup can be saved to the switch setup preset group. This group is different from the preset group for test setups.
Using EasyEXPERT Switching Matrix Operation Panel Apply Switch Setup This button sends the switch setup to the switching matrix. Read Switch Setup This button reads the switch setup from the switching matrix. Open All This button opens all relays on the switching matrix. Preset List The switch setups you create MUST be saved to the preset group to reuse them. Click the Preset List button to display the menu that provides the following functions.
Using EasyEXPERT Standby Channel Definition Standby Channel Definition The Standby Channel Definition window is opened by clicking the Standby button, and is used to define the standby channels and set the standby mode. See “Standby Function” on page 7-37. The standby channel is the channel for maintaining specified output when the standby mode is ON and in the non-measurement state.
Using EasyEXPERT Data Display Data Display The Data Display window is opened by clicking the Data Display button, and is used to display measurement data and analyze the data.
Using EasyEXPERT Data Display NOTE About Display Mode The Data Display window provides two display mode Overwrite and Append. In Overwrite mode, the “Display Data (page 4-15)” function opens a new Data Display window and displays data. In Append mode, the “Display Data (page 4-15)” function creates a new display layer on the present Data Display window and displays data.
Using EasyEXPERT Data Display Data Display GUI Setup Name This field just displays the name of the test setup used to get this test record. X-Y Graph Plot This area displays the measurement result graph, traces, marker, cursor, and lines. The Properties button opens “Graph Properties (page 4-63)”. Parameters This area lists the user-defined output parameters if the output parameters are set. List Display This area displays the measurement result data list.
Using EasyEXPERT Data Display Print Preview Figure 4-3 Opens the Print Preview dialog box used to specify Print Range/Data to print/Scaling of the graph image to display. Clicking the Preview button opens the Print preview window. See Figure 4-4. • Print Range sets Whole Data Display window or Graph Only. • Data to print sets Current Data Display window only or All Data Display windows now opened. • Scaling sets Adjust To the specified percent of the normal size or Fit To Page (automatic adjustment).
Using EasyEXPERT Data Display Figure 4-4 Print Preview Example Edit menu Provides the following functions. Copy When the X-Y Graph Plot area is active, this function copies the graph image as BMP and EMF into the clipboard. When the line cursor in the List Display area is active, this function copies the data list as CSV. When the Parameters area is active, this function copies the parameter data as CSV. Copy Graph Copies the graph image as BMP and EMF into the clipboard.
Using EasyEXPERT Data Display Figure 4-5 shows the graph copy and paste example. Click the X-Y Graph Plot area on the Data Display window, select Edit > Copy menu, and paste it to WordPad. You will see the result as shown in this example. Figure 4-5 Graph Copy and Paste &RS\ WR &OLSERDUG 3DVWH WR :RUG3DG Figure 4-6 shows the list copy and paste example. Click a line of the List Display area on the Data Display window, select Edit > Copy menu, and paste it to Notepad.
Using EasyEXPERT Data Display View menu Provides the following functions. X-Y Graph Displays or hides the X-Y Graph Plot area. List Displays Displays or hides the List Display area. Parameters Displays or hides the Parameters area. Graph Legend ON/OFF Displays or hides the graph legend below the plot area. Line Information ON/OFF Displays or hides the line information (X-intercept, Y-intercept, gradient) in the plot area.
Using EasyEXPERT Data Display 1. Graph scale is optimized for the data on the selected layer (top layer). 2. The graph scale is applied to the graph in all layers. Note that auto scaling is performed independently for the left and right Y axes. Marker menu Cursor menu Line menu Marker can move on the measurement data curve. The Marker menu provides the following six functions. Marker ON/OFF Enables or disables the marker.
Using EasyEXPERT Data Display Gradient... Opens the Gradient Value dialog box used to specify the gradient value of the gradient line. You can draw a line as shown below: 1. Set Line 1 or Line 2 on. 2. Select a Line Mode. Figure 4-7 Normal A line and two cursors appear. Move cursors to the points where the line passes through. Gradient A line and a cursor appear. Move cursor to the point where the line passes through.
Using EasyEXPERT Data Display Text menu Up to 20 texts can be added to a graph. The following functions are provided. New Opens the text editor for adding a new text. Hide All/ Show All Hides or shows all texts. Delete All Deletes all texts. Clicking on a text will select the text. To select multiple texts, click the texts while holding down the Shift key on the keyboard. The following functions are available for the selected text(s) via the Text menu, the Text icons, or the right-click menu.
Using EasyEXPERT Data Display Pointer menu Up to 30 pointers can be added to a graph. The following functions are provided. New This function is enabled when the marker is ON. Adds a new pointer at the position of the active marker. Hide All/ Show All Hides or shows all pointers. Show All Descriptions Shows all descriptions (pointer ID and X-Y coordinate values) of the pointers. Hide All Descriptions Hides all descriptions of the pointers. Delete All Deletes all pointers.
Using EasyEXPERT Data Display Display Setup This setup screen is displayed by selecting View > Display Setup..., and is used to select the data displayed in the Data Display window. X-Y Graph Selects the data to be displayed in the X-Y Graph Plot area. The X and Y1 to Y8 axes can be set. Name Specifies the parameter for the axis. Sharing Specifies the group for sharing the Y axis scale. Select from Group 1, Group 2, Group 3, Group 4, or None (no grouping).
Using EasyEXPERT Data Display Graph Properties This dialog box is opened by clicking the Properties... button in the X-Y Graph Plot area or by selecting Edit > Graph Properties..., and is used to set the graph plot area. Click the OK button to apply the setup and close this dialog box. Effective Area This area provides the following check box. Grid ON Graph Color Check this button to display the grid on the X-Y Graph. This area is used to set the color map for the graph plot area.
Using EasyEXPERT Data Display List Display Properties This dialog box is opened by clicking the Properties... button in the List Display area or by selecting Edit > List Display Properties..., and is used to set the data display format in the List Display area. Click the OK button to apply the setup and close this dialog box. Display Number Format Check the following check box to add the data status or the physical unit to data. Unchecking the box removes it.
Using EasyEXPERT Data Display Auto Scale This icon will change the graph scale automatically to fit the trace in the graph. The right arrow button opens the menu for enabling or disabling the run time auto scaling. This function is set independently for the X and Y axes. If this function is enabled, the graph scale will be changed automatically to fit the trace in the graph during the measurement. If multiple layers are opened on the Data Display window, the scale change is applied to all layers.
Using EasyEXPERT Data Display Marker Minimum This icon moves the marker to the minimum measurement point. Marker Search... This icon opens the Direct Marker/Cursor dialog box used to specify the coordinate values to move the marker. Line 1 State This icon enables or disables line 1 and its function: disabled, normal, gradient, tangent, regression, or fix. Line 2 State This icon enables or disables line 2 and its function: disabled, normal, gradient, tangent, regression, or fix.
Using EasyEXPERT Data Display Data Status If measurement unit detects any status while measurement, the status code is recorded with the measurement data. And the status code will be displayed in the Data Display window as shown in the following example. Example • X-Y Graph Plot area MARKER( 5.9000000 C 1.82520000 XV 3.33249E-3 ) This line will be displayed at the top of the plot area when marker is ON. The marker is used to read data of the marker point.
Using EasyEXPERT Data Display Miscellaneous Operations The following user interfaces provide several miscellaneous functions when you operate the Data Display window. • “Mouse/Touch Panel” • “Rotary Knob” • “Softkeys” • “Keyboard” Mouse/Touch Panel While the Data Display window is focused, the mouse/touch panel operations shown in Table 4-7 (p. 4-72) are available. Rotary Knob The following miscellaneous functions are available by using the rotary knob.
Using EasyEXPERT Data Display Keyboard While the Data Display window is focused, the key operations shown in Table 4-2 are available.
Using EasyEXPERT Data Display Table 4-3 Controlling X-Y Graph Key Table 4-4 Description S Shortcut to View > Auto Scale Z Shortcut to View > Zoom In Shift+Z Shortcut to View > Zoom Out Ctrl+Z Shortcut to View > Cancel Scaling Y Changes the active data, Y1 → Y2 → ... → Y8 → Y1 R Activates the right Y axis and changes the data set to the axis, Y2 → Y3 → ...
Using EasyEXPERT Data Display Table 4-5 Controlling Cursor Key Table 4-6 Description C Shortcut to Cursor > Cursor ON/OFF T Shortcut to Cursor > Go To Marker ↑ Moves the cursor +1/1000 in the Y axis direction Shift+ ↑ Moves the cursor +1/100 in the Y axis direction → Moves the cursor +1/1000 in the X axis direction Shift+ → Moves the cursor +1/100 in the X axis direction ↓ Moves the cursor -1/1000 in the Y axis direction Shift+ ↓ Moves the cursor -1/100 in the Y axis direction ← Moves t
Using EasyEXPERT Data Display Table 4-7 Mouse/Touch Panel Operations on Data Display Window Location Operation Description X-Y Graph clicking on the left Y axis Activates the Y1 data. clicking on the right Y axis Activates the data of the right Y axis, or changes the active data if it is already active. clicking on a plot Moves the marker to the position of the mouse pointer if the marker is displayed on the graph.
Using EasyEXPERT Data Display Location Operation X-Y Graph clicking the mouse wheel Same as clicking the rotary knob. dragging a column heading Moves the column. dragging boundary of the column Changes the width of the column. clicking on a row in the table Moves the marker to the corresponding position. moving the scroll bar Changes the data displayed in the List Display area. rotating the mouse wheel Changes the data displayed in the List Display area.
Using EasyEXPERT Preview Preview The Preview window and the Preview Settings dialog box are opened by selecting View > Open Preview Window in the Data Display window. The Preview Settings dialog box is used to set the graph title, X axis title, Y axis title, and line style. And the Preview window displays a new plot, and is used to output it to the specified printer. The Data Display window cannot do the above settings and display the new plot.
Using EasyEXPERT Preview Edit menu Provides the following functions. See also Figure 4-5 and Figure 4-6. Copy While the X-Y Graph Plot area is active, this function copies the graph image as BMP and EMF into the clipboard. While the line cursor in the List Display area is active, this function copies the data list as CSV. While the Parameters area is active, this function copies the parameter data as CSV. View menu Help menu Copy Graph Copies the graph image as BMP and EMF into the clipboard.
Using EasyEXPERT Preview Preview Settings The Preview Settings dialog box provides the following GUI. General Defines the graph title in the Graph Title field. The title will appear at the bottom of the plot area. X/Y Axis Title Defines the X axis title in the X field and the Y axis title in the Y field, Y1 to Y8. The title will appear near the axis. Line Style Selects the line style for the line 1, line 2, and trace Y1 to Y8. Color and Thickness...
Using EasyEXPERT Text File Export settings Text File Export settings This dialog box is opened by clicking Results > Transport Data > Text File Export Settings... or the Settings button on the Test Results Data Folder Export dialog box or the Test Results Data Auto Export dialog box. This dialog box is used to define the style of the test record exported by the Export As Text File function. Reset Applies the default value to the all setup items.
Using EasyEXPERT Text File Export settings Table 4-9 Identification Section Record Items Item Description Setup title Test setup name Classic test name Classic test name. I/V Sweep, Multi Channel I/V Sweep, I/V-t Sampling, C-V Sweep, SPGU Control, Switching Matrix Control, or Direct Control. This record item is exclusive against the “Application test name” record item. Application test name Application test name. This record item is exclusive against the “Classic test name” record item.
Using EasyEXPERT Text File Export settings Measurement data Record items of the measurement data. It may contain the measurement parameter section names, data units, and data size. See Table 4-13 for the definition of the record items. Check the box for the items you want to record, and uncheck the box for the items you do not want to record.
Using EasyEXPERT Text File Export settings Table 4-12 Setup Data Section Record Items (ON: checked, OFF: unchecked) Item Table 4-13 Description Default Test parameters Test parameters defined by the classic test or the application test. ON DUT parameters DUT parameters defined by the application test.
5 Classic Test Definition
Classic Test Definition This chapter provides the reference information of the graphical user interface in the classic test mode of Agilent EasyEXPERT software.
Classic Test Definition NOTE If You Use GNDU (Ground Unit) Keep to the following rule to use the ground unit. 1. Set Mode to COMMON. 2. Set Function to CONST. 3. Do not use the I Name assigned to the ground unit. Missing any one will cause an execution error.
Classic Test Definition I/V Sweep I/V Sweep On the EasyEXPERT main screen, click the Classic Test tab and select the I/V Sweep icon. The main screen displays the I/V sweep test setup screen. For the measurement mode, see “I/V Sweep Measurement” on page 7-3. Setup Name Used to set the name of test setup. The name must be the identification for the test setup saved to a My Favorite group (preset group). Enter a unique name that is distinct from other definitions.
Classic Test Definition I/V Sweep Channel Setup This setup screen is used to define the channel setups and the variables for the channel output data, measurement data, time stamp data, and index data. Channel Definition This area defines the channel setups and the variables for the channel output data and the measurement data.
Classic Test Definition I/V Sweep Measurement Setup This setup screen is used to set the source channel outputs, the measurement ranging mode, the sweep abort condition, the measurement channel A/D converter, the series resistor, the filter, and the source output/measurement wait time. VAR1 This area defines the primary sweep source output.
Classic Test Definition I/V Sweep VAR2 VAR1’ This area defines the secondary sweep source output. Unit Source monitor unit (SMU) used for the VAR2 output Name Variable name for the VAR2 output data Start Sweep start value Stop Sweep stop value. The value is automatically calculated by using the start, step, and number of step values. Step Incremental step value of the sweep output No of Step Number of sweep steps Compliance Compliance value.
Classic Test Definition I/V Sweep Constant SMU Pulse This area defines the constant output source. Unit Source monitor unit (SMU) used for the constant source V Name Variable name for the constant voltage output or measurement data I Name Variable name for the constant current output or measurement data Mode Output mode, V (voltage), I (current), VPULSE (voltage pulse), or IPULSE (current pulse) Source Output value Compliance Compliance value.
Classic Test Definition Multi Channel I/V Sweep Multi Channel I/V Sweep On the EasyEXPERT main screen, click the Classic Test tab and select the Multi Channel I/V Sweep icon. The main screen displays the Multi Channel I/V Sweep test setup screen. For the measurement mode, see “Multi Channel I/V Sweep Measurement” on page 7-12. Setup Name Sets the name of the test setup. The name is used to identify the test setup saved to a My Favorite group (preset group).
Classic Test Definition Multi Channel I/V Sweep Channel Setup This setup screen is used to define the channel setups and the variables for the channel output data, measurement data, time stamp data, and index data. Channel Definition This area defines the channel setups and the variables for the channel output data and the measurement data.
Classic Test Definition Multi Channel I/V Sweep Measurement Setup This setup screen is used to set the source channel outputs, the measurement ranging mode, the sweep abort condition, the measurement channel A/D converter, the series resistor, the filter, and the source output/measurement wait time. VAR1 Constant This area defines the primary sweep source output.
Classic Test Definition Multi Channel I/V Sweep VAR2 Timing This area defines the secondary sweep source output. Unit Source monitor unit (SMU) used for the VAR2 output Name Variable name for the VAR2 output data Start Sweep start value Stop Sweep stop value. The value is automatically calculated from the start, step, and number of step values. Step Incremental step value for the sweep output No of Step Number of sweep steps Compliance Compliance value.
Classic Test Definition I/V List Sweep I/V List Sweep On the EasyEXPERT main screen, click the Classic Test tab and select the I/V Sweep icon. The main screen displays the I/V List sweep test setup screen. I/V List Sweep measurement is similar to I/V Sweep measurement described in “I/V Sweep Measurement” on page 7-3. Changes from the I/V Sweep are listed below. Setup Name • VAR1/VAR2 step output values are set by using a vector data.
Classic Test Definition I/V List Sweep Channel Setup This setup screen is used to define the channel setups and the variables for the channel output data, the measurement data, the time stamp data, and the index data. Channel Definition This area defines the channel setups and the variables for the channel output data and the measurement data.
Classic Test Definition I/V List Sweep Miscellaneous Variables This area defines the variables for the time stamp data and the index data. Time Stamp Name Variable name of the time stamp. Time stamp data indicates the time at which step measurement was started. Index Name Variable name of the data index. Integer above 0 is returned.
Classic Test Definition I/V List Sweep VAR2 Timing SMU Pulse This area defines the secondary sweep source output. Unit Source monitor unit (SMU) used for the VAR2 output Name Variable name for the VAR2 output data Source Click the grid button to open the Define vector data dialog box. See “Define vector data” on page 5-18. Compliance Compliance value. Enter the current limit value for the voltage source, or the voltage limit value for the current source.
Classic Test Definition I/V List Sweep Constant This area defines the constant output source. Unit Source monitor unit (SMU) used for the constant source V Name Variable name for the constant voltage output or measurement data I Name Variable name for the constant current output or measurement data Mode Output mode, V (voltage), I (current), VPULSE (voltage pulse), or IPULSE (current pulse) Source Output value Compliance Compliance value.
Classic Test Definition I/V List Sweep Define vector data This dialog box is opened by clicking the grid button in the vector data entry field. See Figure 5-1. The vector data entry field can be displayed on the followings.
Classic Test Definition I/V List Sweep The Define vector data dialog box provides the following GUI. OK button Saves the vector data displayed on the dialog box and closes the dialog box. Cancel button Displays a confirmation message and closes the dialog box. Vector data is not saved. File menu Provides the following function. Exit Edit menu Mouse menu 1 Mouse menu 2 Displays a confirmation message and closes the dialog box. Vector data is not saved. Provides the following four functions.
Classic Test Definition I/V List Sweep To import vector data The Define vector data dialog box can import comma separated data (each data must be separated by a comma, and have a CR/LF or LF at the end of each line) and tab separated data (each data must be separated by a tab, and have a CR/LF or LF at the end of each line). The procedure for importing vector data is as follows. 1. Open a vector data with Notepad. 2. Copy the data in Notepad. 3.
Classic Test Definition I/V-t Sampling I/V-t Sampling On the EasyEXPERT main screen, click the Classic Test tab and select the I/V-t Sampling icon. The main screen displays the I/V-t sampling test setup screen. For details of the measurement mode, see “I/V-t Sampling Measurement” on page 7-13. Setup Name Used to set the name of test setup. The name must be the identification for the test setup saved to a My Favorite group (preset group). Enter a unique name that is distinct from other definitions.
Classic Test Definition I/V-t Sampling Channel Setup This setup screen is used to define the channel setups and the variables for the channel output data, measurement data, time stamp data, and index data. Channel Definition This area defines the channel setups and the variables for the channel output data and the measurement data.
Classic Test Definition I/V-t Sampling Measurement Setup This setup screen is used to set the sampling timing parameters, constant voltage/current outputs, and so on. Sampling Parameter This area defines the sampling timing parameters. Linear/Log Sampling mode. LINEAR for linear sampling. LOG10, LOG25, LOG50, LOG100, LOG250, or LOG500 for logarithmic sampling. For the logarithmic sampling, the number after LOG indicates the number of measurement data in a decade.
Classic Test Definition I/V-t Sampling Base Hold Time Stop Condition This area defines the sampling measurement stop condition. See “Stop Condition” on page 7-18 for this function. Enable/Disable Enables or disables the stop condition. Enable Delay Delay time. in second. This is the time from starting sampling measurement to enabling this function. Name Name of measurement data or user function to monitor for stop condition. Val of Event.
Classic Test Definition I/V-t Sampling Base value is available for all output channels for the SIMULTANEOUS mode and the last source channel for the SEQUENTIAL mode. Compliance Compliance value, in A or V. 0 to ±0.1 A (HRSMU/MPSMU) or ±1 A (HPSMU) 0 to ±100 V (HRSMU/MPSMU) or ±200 V (HPSMU) Range This button opens a window used to set the measurement ranging operation. See “SMU Range Setup Window” on page 5-48.
Classic Test Definition C-V Sweep C-V Sweep On the EasyEXPERT main screen, click the Classic Test tab and select the C-V Sweep icon. The main screen displays the C-V sweep test setup screen. For details of the measurement mode, see “C-V Sweep Measurement” on page 7-19. Setup Name Used to set the name of test setup. The name must be the identification for the test setup saved to a My Favorite group (preset group). Enter a unique name that is distinct from other definitions.
Classic Test Definition C-V Sweep Channel Setup This setup screen is used to define the channel setups and the variables for the channel output data, time stamp data, and index data. Channel Definition This area defines the channel setups and the variables for the channel output data. Unit Module used for the source output or measurement V Name Available for the MFCMU and the SMU used for voltage output. Variable name of voltage output data I Name Available for the SMU used for current output.
Classic Test Definition C-V Sweep Measurement Setup This setup screen is used to set the MFCMU measurement mode, source channel outputs, the sweep abort condition, and the measurement time. C-V This area defines the MFCMU measurement mode and DC bias output. V Name Variable name of the DC bias output data Model MFCMU measurement mode. Primary and secondary measurement parameters. Select one from the following four models.
Classic Test Definition C-V Sweep Integration Time Timing Constant Up Moves the selected frequency upward. Down Moves the selected frequency downward. This area sets the A/D converter of MFCMU. Mode A/D converter operation mode, AUTO or PLC Factor Factor for the initial value. See “Mode, Factor” on page 7-20. This area defines the hold time and the delay time. See “To Specify Source Output Time” on page 7-59. Hold Hold time.
Classic Test Definition Direct Control Direct Control On the EasyEXPERT main screen, click the Classic Test tab and select the Direct Control icon. The main screen displays the Direct Control test setup screen. Direct Control test mode performs measurement by controlling measurement resources, SMU, CMU, and SPGU directly. The instrument can be controlled by using GPIB commands. For the B1500A GPIB commands, see “Agilent B1500A Programming Guide”.
Classic Test Definition Direct Control Channel Setup This setup screen is used to define the channel setups and the variables for the channel output data, measurement data, time stamp data, and index data. Channel Definition This area defines the channel setups and the variables for the channel output data and the measurement data.
Classic Test Definition Direct Control Table 5-1 Available Type Values for Measurement Data Variables Type Description SMU Quasi-Static C SMU capacitance measurement data (F) CMU Re(Z) CMU resistance measurement data (Ω) CMU Im(Z) CMU reactance measurement data (Ω) CMU Re(Y) CMU conductance measurement data (S) CMU IM(Y) CMU susceptance measurement data (S) CMU Frequency CMU output signal frequency data (Hz) CMU AC Level Output Data CMU oscillator level output data (Vac) CMU DC Bias Monitor
Classic Test Definition Direct Control Measurement Setup This setup screen is used to define GPIB commands for controlling the SMU and CMU directly, and is used to set the SMU series resistor, the SMU filter, and the bias hold function. Advanced This button opens a window for setting the SMU series resistor, the SMU filter, and the bias hold function. See “Advanced Setup” on page 5-34. Command Setup This area defines GPIB commands for controlling the SMU and CMU directly.
Classic Test Definition Direct Control Advanced Setup This window is opened by clicking the Advanced button on the Direct Control Measurement Setup screen, and is used to set the SMU series resistor, the SMU filter, and the bias hold function. Options The following setup is available. Primary Setup Primary setup ON or OFF. If Primary Setup=ON, the primary setup is applied to the instrument when the Direct Control test is started. For the setup condition, see “Primary Setup” on page 5-35.
Classic Test Definition Direct Control CH1 represents channel 1 on the first selector and CH3 represents channel 1 on the second selector. See “SMU/PG Selector” on page 7-48 for details on the selector. Agilent 16445A selector adapter is needed for connecting the 16440A. Primary Setup Primary setup is the initial setting set for when the Direct Control test is started. This setting is different from the initial setting set by the device clear or the *RST command. The differences are listed below.
Classic Test Definition Direct Control Command Setup To define the Command Setup, set a command or a function to the Command field, and enter the command parameters to the Argument field. Also, be aware of the following note. • FMT command’s first parameter must be 13. • Use the Unit value of Channel Setup to specify the channel. • Use the ReadDataBuffer function to read measurement data. • Program memory number must be within the range of 1 to 1000. • SCR command parameter cannot be abbreviated.
Classic Test Definition Direct Control ReadDataBuffer This function reads the measurement data. The number of data blocks to be read is specified by the count parameter. If count is abbreviated, this function reads one data block. Syntax ReadDataBuffer [count] Parameters count Number of data blocks or the number of terminators to be read. A data block is a group of data that ends with a terminator. For the data output format, see “Agilent B1500A Programming Guide”.
Classic Test Definition Direct Control compenReZ This built-in function performs compensation on the specified impedance data and returns the real data for the compensation results. This function is effective for the CMU measurement data compensation while the switching matrix is used with the CMU to extend the measurement terminals.
Classic Test Definition Direct Control compenImZ This built-in function performs compensation on the specified impedance data and returns the imaginary data for the compensation results. This function is effective for the CMU measurement data compensation while the switching matrix is used with the CMU to extend the measurement terminals.
Classic Test Definition Direct Control compenReY This built-in function performs compensation on the specified admittance data and returns the real data for the compensation results. This function is effective for the CMU measurement data compensation while the switching matrix is used with the CMU to extend the measurement terminals.
Classic Test Definition Direct Control compenImY This built-in function performs compensation on the specified admittance data and returns the imaginary data for the compensation results. This function is effective for the CMU measurement data compensation while the switching matrix is used with the CMU to extend the measurement terminals.
Classic Test Definition Function Setup Function Setup This setup screen is displayed by clicking the Function Setup tab of the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling / C-V Sweep / Direct Control test setup screen, and is used to set the user function and the analysis function. Calculation of the function is automatically performed after measurement. And the functions defined in the Display Setup screen will be displayed on the Data Display window.
Classic Test Definition Auto Analysis Setup Auto Analysis Setup This setup screen is displayed by clicking the Auto Analysis Setup tab of the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling / C-V Sweep / Direct Control test setup screen, and is used to set the automatic analysis function. When a measurement finishes, the function automatically draws lines, a marker, or both on the X-Y Graph of the Data Display window.
Classic Test Definition Auto Analysis Setup • Marker “Regression line”: For drawing a regression line by using the measurement data included in the area specified by any two points. This area sets the marker automatically displayed and moved to the specified position after the measurement. Enable Check this box to enable the marker. Condition Enter a variable name and a condition expression to specify where you want the marker to appear. After Check this box to enable the additional condition.
Classic Test Definition Auto Analysis Setup Tangent line The First Point area is used to specify the measurement point the tangent line passes through. Enter a variable name and condition expression to specify the point. This is the same method as specifying the Marker point. Regression line The First Point area and the Second Point area are used to specify the range of the measurement data used for the regression calculation. The following two ways are available to specify the point.
Classic Test Definition Display Setup Display Setup This setup screen is displayed by clicking the Display Setup tab of the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling / C-V Sweep / Direct Control test setup screen or by checking the Define own Output Parameters box on the Test Definition window, and is used to set the test result output. X-Y Graph Selects the data to be displayed in the X-Y Graph Plot area. The X and Y1 to Y8 axes can be set.
Classic Test Definition Display Setup Up Moves the selected parameter upward. Down Moves the selected parameter downward.
Classic Test Definition SMU Range Setup Window SMU Range Setup Window This window is opened by clicking the Range button on the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling Measurement Setup screen, and is used to set the measurement ranging operation. For the measurement ranging function, see “SMU Ranging Mode” on page 7-49.
Classic Test Definition SMU Range Setup Window NOTE To use 1 pA range The measurement channel connected to the ASU (Atto Sense and Switch Unit) supports the 1 pA range. To use the 1 pA range, set the 1 pA fixed range or the 1 pA limited auto ranging. The B1500A automatically performs the compensation of the data measured by the 1 pA range and returns the compensated data. You can use either the pre-stored offset data or the pre-measured offset data.
Classic Test Definition ADC and Integration Time Setup Window ADC and Integration Time Setup Window This window is opened by clicking the ADC/Integ button on the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling Measurement Setup screen, and is used to set the A/D converter of the measurement channels. A/D Converter Integration Time This area selects the ADC type and enables/disables the auto zero function. See “Integration Time” on page 7-57.
Classic Test Definition Advanced Setup Window Advanced Setup Window This window is opened by clicking the Advanced button on the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling Measurement Setup screen, and is used to set the following functions of the measurement channel. Channel Settings Wait Time Control This area sets the series resistor and the filter.
Classic Test Definition Advanced Setup Window Semiconductor Relays (16440A SMU/PG Selector) This area sets the Agilent 16440A selector CH1/CH3 status (DEFAULT or PGU OPEN). To use this function, set the DEFAULT setting to Always SMU or Normally PGU (AUX) by using the SMU/PG Selector tab screen on the Configuration window before starting the SPGU output. CH1 CH1 status, DEFAULT or PGU OPEN. CH3 CH3 status, DEFAULT or PGU OPEN.
Classic Test Definition CMU Range Setup Window CMU Range Setup Window This window is opened by clicking the Range button on the C-V Sweep Measurement Setup screen, and is used to set the measurement ranging operation. Table 5-3 Unit Module (MFCMU) used for the measurement Mode Ranging mode, AUTO (auto ranging) or FIXED (fixed range). If Mode=AUTO, the MFCMU automatically searches for and measures at the range that provides the best resolution.
Classic Test Definition Advanced Setup Window for C-V Sweep Advanced Setup Window for C-V Sweep This window is opened by clicking the Advanced button on the C-V Sweep Measurement Setup screen, and is used to set the following functions of the MFCMU. AC Level/DC Bias Monitor Settings This area defines the variables for the AC level data and the DC bias data monitored by the MFCMU while the capacitance measurement is performed.
Classic Test Definition Switching Matrix Control Switching Matrix Control On the EasyEXPERT main screen, click the Classic Test tab and select the Switching Matrix Control icon. The main screen displays the Switching Matrix Control setup screen. This setup screen is used to create the relay control setup for Agilent B2200A/B2201A/E5250A Switching Matrix. To apply the relay control setup, click the Single button.
Classic Test Definition Switching Matrix Control Outputs Switching matrix output channel number or label Four entry fields are available for the Switch Setup and Open Output operations to specify the output channels. Two entry fields are available for the Close Range and Open Range operations to specify the range of output channels. Rule Relay connection rule BBM: Breaks the previous connection and then makes the new connection for the specified outputs.
Classic Test Definition SPGU Control SPGU Control On the EasyEXPERT main screen, click the Classic Test tab and select the SPGU Control icon. The main screen displays the SPGU control screen. See “SPGU Module” on page 7-26 for the function of the SPGU. Setup Name Used to set the name of the SPGU control setup. The name must be able to identify a setup saved in a My Favorite group (preset group). Enter a unique name that is distinct from other definitions.
Classic Test Definition SPGU Control Progress Monitor Provides the following check boxes used to set the Data Display window displayed while the SPGU channel output is applied. Graph: % of Progress Check this box to display the Percent of Progress vs. Time plot. List: Time Data Check this box to display the Time data list. No data may be displayed on the Data Display window if the SPGU output time is too short.
Classic Test Definition SPGU Pulse Setup Window SPGU Pulse Setup Window This window is opened by clicking the Pulse/ALWG button on the SPGU Control screen when Mode=VPULSE, or by clicking the SPGU Pulse Setup button on the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling Measurement Setup screen. It is used to set the SPGU pulse output. See Figure 5-3 for the pulse setup parameters. Global Settings Provides the following entry field. The setting is effective for all channels.
Classic Test Definition SPGU Pulse Setup Window SPGU setup view order Up Moves the selected channel setup upward. Down Moves the selected channel setup downward. Changes are effective only for the display on the SPGU Pulse Setup window and not memorized. They are not applied to the Channel Setup. Load Z This button opens the “Load Z Setup Window” used to set the load impedance of the DUT (device under test) connected to the SPGU channel.
Classic Test Definition Load Z Setup Window Load Z Setup Window This window is opened by clicking the Load Z button on the SPGU Pulse Setup window or the SPGU ALWG Setup window, and is used to set the load impedance of the DUT (device under test) connected to the specified SPGU channel. Set the correct impedance value. The SPGU will automatically adjust the output voltage by using this value, and output the voltage close to the specified pulse base and peak values.
Classic Test Definition Pulse Switch Setup Window Pulse Switch Setup Window This window is opened by clicking the Pulse Switch button on the SPGU Pulse Setup window, and is used to set the pulse switch operation. The pulse switch is used to set the open condition of the SPGU output channel. The pulse switch is more durable than mechanical relays, and is better suited for frequent switching applications.
Classic Test Definition SPGU ALWG Setup Window SPGU ALWG Setup Window This window is opened by clicking the Pulse/ALWG button on the SPGU Control screen when Mode=ALWG, or by clicking the SPGU ALWG Setup button on the I/V Sweep / Multi Channel I/V Sweep / I/V List Sweep / I/V-t Sampling Measurement Setup screen. It is used to set the arbitrary linear waveform output. Operation Provides the following radio buttons used to set the SPGU channel output operation mode, free run, sequence count, or duration.
Classic Test Definition Define ALWG Waveform Window Define ALWG Waveform Window This window is opened by clicking the start button in the waveform data entry field or the ALWG Source field on the SPGU ALWG Setup window, and is used to create the arbitrary linear waveform data which is defined by the pattern data and the sequence data. File menu Provides the following five functions. Export ALWaveform... Exports the waveform data. Import ALWaveform... Imports the specified waveform data.
Classic Test Definition Define ALWG Waveform Window Sequence Editor Delete Deletes the column data highlighted in the Sequence Editor area. Move Moves the highlighted column to the left or the right. Repeat Count Opens the Repeat Count dialog box used to set the repeat count. Specifies the output channel, the output pattern, the repeat count of the pattern, and the output sequence of patterns. These setup information create the arbitrary linear waveform data. Column No.
Classic Test Definition Define ALWG Waveform Window The Repeat Count field provides the following functions in the menu displayed by right-clicking the field. Cut Cuts the highlighted value and stores it on the Clipboard. Copy Copies the highlighted value to the Clipboard. Paste Pastes the value stored on the Clipboard. When a column is highlighted (light blue), the highlighted area provides the following functions in the menu displayed by right-clicking the field. Cancel Closes the menu.
Classic Test Definition Define ALWG Waveform Window Waveform Pattern Editor This window is opened by several actions, for example by selecting New from the Pattern menu, and is used to create or edit the pattern data. File menu Edit menu Provides the following three functions. Save Saves the pattern data. Save As... Opens a dialog box used to specify a pattern name and save the pattern data. Close Closes the Waveform Pattern Editor without saving the data. Provides the following seven functions.
Classic Test Definition Define ALWG Waveform Window Pattern Editor Defines the pattern data. The Pattern Editor provides two methods, graphic mode and tabular mode, for defining the pattern data. In the graphic mode, you can define the pattern data by using the mouse pointer and GUIs on the graph (on the left side of the Pattern Editor).
6 Application Test Definition
Application Test Definition This chapter provides the reference information of the Test Definition window used to create the application test definitions.
Application Test Definition Test Definition Window Test Definition Window The Test Definition window is opened by selecting the Define New Test... function or the Open Definition of This Test... function of the Library menu, and is used to create a test definition used in the application test mode. The test definition consists of the elements shown in Figure 6-1. And the Test Definition window provides the following three tabs for creating a test definition.
Application Test Definition Test Definition Window The Test Definition window provides the following menus. File menu Help menu Provides the following two functions. Save Saves the test definition. The sample application tests furnished with the EasyEXPERT and the application tests created by other users cannot be saved without changing the Test Name value. The Test Name must be your original. Close Opens a dialog box that asks if you want to save before closing the window.
Application Test Definition Test Specification Test Specification This setup screen is used to define the test definition information and the input parameters for the test definition. Test Information The test information is defined in this area. Category Displays the category of the test definition. The button opens a dialog box used to set the category. It must be 1 to 30 characters. Multiple categories can be set to a test definition. Test Name Specifies the test definition name.
Application Test Definition Test Specification Test Parameters Definition The test parameters are defined in this area. Background Specifies a bitmap file used for the background in the Test Parameters area of the main screen. Browse...: Opens a dialog box used to select a bitmap file. Cancel: Returns to the default setting.
Application Test Definition Test Specification Properties Add Adds a row for the test parameter. Delete Deletes the selected test parameter. To select the parameter, use the left radio button. Up Moves the selected test parameter upward. Down Moves the selected test parameter downward. The Properties area is used to define the following values for the specified device parameter or test parameter. See “Device Parameters Definition” on page 6-5 and “Test Parameters Definition” on page 6-6.
Application Test Definition Test Specification Dimension... For Vector parameters. Opens the Define dimensions dialog box for defining the dimension of vector data. Use Dim1Min and Dim1Max to specify the primary dimension of vector data. This direction can be for the primary sweep data. Use Dim2Min and Dim2Max to specify the secondary dimension of vector data. This direction can be for the secondary sweep data. The following conditions must be satisfied. Assign Output Channels...
Application Test Definition Test Specification Symbols... For Numeric or Vector parameters. Opens the Define dimensions dialog box for assigning a symbol (string value) to a numeric value for the specified numeric parameter. By defining the numeric-symbol assignment, the symbol value, instead of the numeric value, is set to the parameter entry field displayed on the main screen in the application test mode. In the test definition, the parameter works as a numeric value.
Application Test Definition Test Specification Define Layout This dialog box is opened by clicking the Layout... button on the Test Specification screen of the Test Definition window, and is used to define the layout of the test parameter entry fields displayed on the application test setup screen. See Figure 6-2. To define the layout of the entry field, follow the procedures below. 1. Select the entry fields to move. See “To Select Entry Fields” on page 6-13. 2. Move the selected entry fields.
Application Test Definition Test Specification The Define Layout dialog box provides the following menus. File menu Exit Closes the Define Layout dialog box without saving the layout definitions. Edit menu Undo Cancels an operation. Up to ten operations can be cancelled. Redo Performs the canceled operation again. Select All Selects all entry fields. View menu Property... Opens the “Properties (page 6-12)” window.
Application Test Definition Test Specification Tab Order menu Top to Bottom Sets the TabIndex in ascending order of the X of the entry fields, starting at the upper left entry field. If the X of the entry fields are equal, the TabIndex is set in ascending order of the Y of the entry fields. For more information on X/Y, see “Properties” on page 6-12. Left to Right Sets the TabIndex in ascending order of the Y of the entry fields, starting at the upper left entry field.
Application Test Definition Test Specification To Select Entry Fields The following methods are available for selecting the entry fields. • Click on the entry field. Multiple entry fields can be selected by clicking on the entry field while holding down the Ctrl key on the keyboard. • Drag the mouse to draw a rectangle around multiple entry fields. • Select Select All from the EDIT menu to select all entry fields. The selected entry fields are outlined by the blue rectangles.
Application Test Definition Test Output Test Output This setup screen is used to set the test result output (test result display and record) that is the output of the test definition. The test output setup is optional. If you have the following requirements, define the analysis parameters and set the display parameters.
Application Test Definition Test Output Analysis Parameter Definition This window is opened by clicking the Define Analysis Parameters button, and is used to define the vector variables and the scalar variables used in the test result output. The variables are called as the analysis parameters. This window is closed by the Close button. NOTE Analysis parameters can be referred from a test definition which uses this application test.
Application Test Definition Test Contents Test Contents Test contents are the core of the test definition, and consists of the local variables, test setups, and test execution flow. In the test contents, the following elements can be defined. See Figure 6-3.
Application Test Definition Test Contents Defining/Editing Test Contents The Test Contents setup screen is used to define the test execution flow that is the core of the test definition. To define the test execution flow, use the test flow list area at the lower left of the window, and do following. Also see Figure 6-5. 1. Define local variables by using the Local Variables Definition statement. 2. Select a component from the component selection area. See Figure 6-4 for the available components. 3.
Application Test Definition Test Contents Program Component This component selection menu lists the program components available for the test flow. See “Program Component” on page 6-26. Application Test This menu lists the application test setups available for the user. Inserting an application test setup to the test flow displays the test setup screen almost same as the “Application Test” on page 4-27. You set the test condition on this screen. Variables can be used for setting the test condition.
Application Test Definition Test Contents Miscellaneous This component selection menu lists the miscellaneous functions available for the test flow, and provides the following components. • “GPIB I/O” on page 6-33 • “Message” on page 6-38 • “Command Execution” on page 6-40 • “Data Store Control” on page 6-39 To add a component to the test flow, select the destination line for the component and drag the component from the component selection area to the test flow list area.
Application Test Definition Test Contents Insert This button puts the selected component on the next line of the selected line. The following lines will shift downward. Delete This button deletes the selected line. The following lines will shift upward. Copy This button copies the selected line to the clipboard. Cut This button moves the selected line to the clipboard. The following lines will shift upward.
Application Test Definition Test Contents Debugging Test Contents On the Test Contents tab screen, click the Debug tab. The following buttons will appear. They are useful for debug of your test contents. Set the break point, and click the Run button. And check the operation of the test contents, the value of variables by using the Variable Inspector, and so on. Figure 6-6 Debugging Test Contents %UHDN SRLQW 3DXVHG SRLQW Run/Pause This button starts the debug (executes the test flow).
Application Test Definition Test Contents Variable Inspector This Variable Inspector is displayed by clicking the “Inspect (page 6-21)” button on the Test Contents screen, and is used to monitor or change the value of the local variables, device parameters, test parameters, and analysis parameters. For the vector variables, only data monitor is available. The Variable Inspector provides the following buttons to add the variable monitor area. Add Numeric Variable Adds the numeric variable monitor area.
Application Test Definition Test Contents External Variable Setup This dialog box is displayed by clicking the Assign to external variable... button on an Application Test setup screen or a Classic Test setup screen, and is used to make a mapping table between the test setup internal variables and the local variables, device parameters, test parameters, or analysis parameters defined in the test definition which uses this test setup.
Application Test Definition Local Variable Definition Local Variable Definition This setup editor is displayed while the Local Variable Definition is selected in the test execution flow list area, and is used to define the variables used in the test definition. The setup editor provides the following buttons to add the variables. Add Numeric Variable Adds the numeric variable. Add Vector Variable Adds the vector variable. Add String Variable Adds the string variable.
Application Test Definition Local Variable Definition Vector Variable This area provides the following entry fields. Name Vector variable name. Two dimensional array. Count Number of elements, or array size Description Additional information for the variable This area also provides the following radio button used to specify how to set the initial value of the array data automatically.
Application Test Definition Program Component Program Component The Program Component selection menu provides the components described in “Script Program Statements” on page 8-19. Especially, the following components provide the setup editor. ASSIGN • “ASSIGN” • “COMMENT” • “IF” • “ELSE IF” • “FOR” This component provides the setup editor that contains the following entry fields used to define the value of the variable.
Application Test Definition Auto Analysis Auto Analysis This component provides the setup editor used to set up the automatic analysis function. When a measurement finishes, the function automatically draws lines, a marker, or both on the X-Y Graph of the Data Display window. You can set up two lines and one marker for the automatic analysis function by using the setup editor. In the Line 1 and Line 2 areas, you can set up the lines to be drawn. In the Marker area, you can set up the marker.
Application Test Definition Auto Analysis Marker This area sets the marker automatically displayed and moved to the specified position after the measurement. Enable Check this box to enable the marker. Condition Enter a variable name and a condition expression to specify where you want the marker to appear. After Check this box to enable the additional condition. Enter a second variable and condition expression. This sets up a search start condition for finding specified point.
Application Test Definition Auto Analysis Tangent line The First Point area is used to specify the measurement point the tangent line passes through. Enter a variable name and condition expression to specify the point. This is the same method as specifying the Marker point. Regression line The First Point area and the Second Point area are used to specify the range of the measurement data used for the regression calculation. The following two ways are available to specify the point.
Application Test Definition Data Display Control Data Display Control This component enables or disables the test result display of the application test or the classic test used in the test definition. Enable Data Display Checking this box enables the test result display. If you do not use this component, the test result display is enabled. This component cannot control the test result display of the test definition. The test result display is always enabled for the test definition.
Application Test Definition Display Data Setup Display Data Setup This component is used to set the data output of the local variables defined in the test execution flow. The values can be displayed on the Data Display window. X-Y Graph Selects the data to be displayed in the X-Y Graph Plot area. The X and Y1 to Y8 axes can be set. Name Specifies the parameter for the axis. Sharing Specifies the group for sharing the Y axis scale. Select from Group 1, Group 2, Group 3, Group 4, or None (no grouping).
Application Test Definition Display Data Setup List Display, Parameters The List Display area sets the output for the List Display area of the Data Display window. The Parameters area sets the output for the Parameters area of the Data Display window. Up to 20 parameters can be set for each area. parameter Specifies the parameter for the data output. Add Adds a row for the parameter. Delete Deletes the selected parameter. To select the parameter, use the left radio button.
Application Test Definition GPIB I/O GPIB I/O This component provides the setup editor that contains the following entry fields. This component is used to control the GPIB interface. For the fields to enter a variable name, only the variable name defined in the test definition can be entered. CAUTION Do not set the GPIB address of the B1500A to the Address parameter of this component even if this is on the Desktop EasyEXPERT software. Operation of the B1500A is not guaranteed.
Application Test Definition GPIB I/O Read String Reads a string value from the specified GPIB device. Address GPIB address of the target device String String variable name. Used to store the returned value. Length To Read Byte length of the string value to read Length Actually Read Read Value Numeric variable name. Used to store the byte length of the returned value.
Application Test Definition GPIB I/O Read List Reads a vector data from the specified GPIB device. Address GPIB address of the target device Values Vector variable name. Used to store the returned value. Delimiter Delimiter. 1 character. 0 to 9, E, e, +, -, and . (comma) cannot be specified. Length Actually Read Read STB GP-IB Control Numeric variable name. Used to store the number of data stored in the vector variable.
Application Test Definition GPIB I/O • Go To Local Returns the specified GPIB device to the local state. • Address GPIB address of the target device Timeout Timeout. The value must be less than 231 s, 1 ms resolution. 0 does not set timeout. Local LockOut Locks the specified GPIB device. Example 1 Address GPIB address of the target device Timeout Timeout. The value must be less than 231 s, 1 ms resolution. 0 does not set timeout.
Application Test Definition GPIB I/O Example 2 After performing Example 1, enter the following query command and read the response by using Write String and Read String functions as shown below. Use Write String to send the command, after that use Read String to read the response. :ROUT:SYMB:CHAN? 0, 1 This command returns the string assigned to the output 1 of the B2200A in the auto configuration mode.
Application Test Definition Message Message This component provides the setup editor that contains the following entry fields. These are used to set up the message box that pauses program execution, appears on the screen, and waits for the response of the user. Message Enter the message displayed on the message box. User Response This area provides the Button 1, Button 2, Button 3, and Button 4 areas. Button 1 This area provides the following entry fields.
Application Test Definition Data Store Control Data Store Control This component enables or disables the test record of the application test or the classic test used in the test definition. Enable Creating Test Result Record Checking this box enables the test record. If you do not use this component, the test record is enabled. This component cannot control the test record of the test definition. The test record is always enabled for the test definition.
Application Test Definition Command Execution Command Execution This component provides the setup editor that contains the following entry fields. This component is used to execute the specified execution file (EXE file) and obtain the execution results. For the fields to enter a variable name, only the variable name defined in the test definition can be entered. See “Using Command Execution” on page 6-42. Command Filename File name of the Windows execution file (EXE file) to execute.
Application Test Definition Command Execution Read Type Type of data to read. String (string data), Value (numeric data), List (vector data), or None (no response). • String Displays the Read String area that provides the following entry fields. Result Numeric variable name. Used to store the execution result. String String variable name. Used to store the returned value. Length Actually Read • Numeric variable name. Used to store the byte length of the returned value.
Application Test Definition Using Command Execution Using Command Execution Windows execution file (.exe file) can be executed by using the Command Execution component. Most execution files will need parameters to be sent or returned. The parameters will be variables that can be defined on the Test Specification tab screen or the Local Variable Definition component on the Test Contents tab screen. This section describes how to enter the windows execution file.
Application Test Definition Using Command Execution NOTE string built-in function The string built-in function is used to translate a numeric expression to a string value. Be careful about the argument for this function. If it is a numeric variable defined with the numeric-symbol assignment, the string function execution result will be the symbol assigned to the numeric value, not the string value just translated from the numeric value.
Application Test Definition Using Command Execution Defining Numeric Output Parameter 1. Define a numeric variable in the Test Specification tab screen or the Local Variable Definition component of the Test Contents tab screen. 2. Set the Read Type to Value in the Windows Command Execution component. 3. Enter the variable name in the Value field of the Read Value area. The Result field can be blank or the name of another numeric variable defined in the Test Specification or Local Variable Definition.
Application Test Definition Using Command Execution Defining Format Field The Format field requires a keyword to specify a data in vector variable. The keyword must have the style such as {I,A:F}. where, I Index used to specify the element. Integer, 0 or positive number. Mandatory. 0 specifies the first element. A Character length of the specified data element. Positive integer for right-aligned, or negative integer for left-aligned. If this value is not set, the length is not specified (no limit).
Application Test Definition Using Command Execution Setup Example The following example setup is used to execute a PlsdivMeasureId command that has two numeric inputs and four numeric outputs. ranging and id_range are numeric variables used for the input parameters, read_data is a vector variable used for the output parameters, and PassFail is a numeric variable used to store the command execution result.
7 Function Details
Function Details This chapter explains the following measurement functions of Agilent B1500A/EasyEXPERT, and the efficient functions of the EasyEXPERT software.
Function Details I/V Sweep Measurement I/V Sweep Measurement For the I/V sweep measurements, sweep source channels (SMU) perform staircase sweep output of voltage or current, while monitor channels (SMU) measure voltage or current for each sweep step. According to the output function, the following measurements are available. See Figure 7-1 for the SMU output function.
Function Details I/V Sweep Measurement Output Range Output range of the sweep source channel is automatically set to the following range. • minimum range covers all sweep output values in Linear sweep. • minimum range covers all sweep output values in Log voltage sweep. • optimum range for output value every sweep step in Log current sweep. Basic Sweep Measurement Basic sweep measurement uses the primary sweep source (VAR1).
Function Details I/V Sweep Measurement The following setup is required to perform the basic sweep measurements. 1. Select the following on the Channel Setup tab screen. • Select VAR1 for the Function of the SMU used for VAR1. • Select V, VPULSE, or COMMON for the Mode of current monitor SMU, or I or IPULSE for voltage monitor SMU. Pulse is available only for one SMU. 2. Specify the following parameters for VAR1 on the Measurement Setup tab screen. Direction Single or double sweep.
Function Details I/V Sweep Measurement Figure 7-3 Basic Sweep Measurement Subordinate Sweep Measurement For subordinate sweep measurement, you set up a secondary sweep source (VAR2) in addition to a primary sweep source (VAR1). After VAR1 sweep is completed, the output of VAR2 sweep source is increased or decreased by the specified step value, then the VAR1 sweep source is swept again. Only the linear single sweep is available for the VAR2.
Function Details I/V Sweep Measurement 2. Set the VAR1 channel as shown in “Basic Sweep Measurement”. 3. Specify the following parameters for VAR2 on the Measurement Setup tab screen. Start Start value of secondary sweep. Allowable range of start depends on the output range of secondary sweep source. Stop Stop value of secondary sweep is calculated from start, step, and number of steps. Allowable range of stop depends on the output range of secondary sweep source.
Function Details I/V Sweep Measurement Synchronous Sweep Measurement For synchronous sweep measurement, you set up a synchronous sweep source (VAR1’) in addition to a primary sweep source (VAR1). The relationship between the output of primary and synchronous sweep sources is determined by the following equation: synchronous output = primary output × ratio + offset The synchronous output determined by above equation must not exceed the output range of synchronous sweep source.
Function Details I/V Sweep Measurement Figure 7-5 Synchronous Sweep Measurement Pulsed Sweep Measurement For a sweep measurement, a sweep or constant source SMU can be a pulse source. But only one SMU can be a pulse source. Figure 7-6 shows the relationship between pulse source and other sources. Each step of the primary sweep source is synchronized with output of the SMU pulse source. Measurements are made during the pulse output. For the pulsed sweep measurement, the delay time setting is ignored.
Function Details I/V Sweep Measurement Period SMU forces the next pulse after specified pulse period. 5 ms to 5 s with 100 μs resolution. Width Time from when SMU output starts to change from base value to time when SMU starts to return from peak value. Measurements are made while the peak value is output. 0.5 ms to 2 s with 100 μs resolution. Base The base output value of the SMU pulse. Pulse peak value Pulse peak value depends on the Function setting of the pulse source SMU. See Table 7-1.
Function Details I/V Sweep Measurement Figure 7-6 Pulse Source and Other Sources Figure 7-7 SMU Pulse Agilent B1500 User’s Guide, Edition 7 7- 11
Function Details Multi Channel I/V Sweep Measurement Multi Channel I/V Sweep Measurement Multi Channel I/V Sweep measurement is similar to I/V Sweep measurement. Changes from I/V Sweep are listed below. • All SMU can be set to the VAR1 sweep source (up to 10 channels) • Both voltage mode and current mode are available for the VAR1 sweep output • VAR1’ sweep output is not available • SMU pulse output is not available The timing of the sweep output and measurements are shown in Figure 7-8.
Function Details I/V-t Sampling Measurement I/V-t Sampling Measurement For the I/V-t sampling measurements, source channels (SMU) force constant current or voltage, and monitor channels (SMU) measure current or voltage changes at a device under test (DUT) with a specified sampling interval. Available Modules SMUs and SPGUs can be used. SMU can be constant voltage source or constant current source and perform voltage measurement or current measurement. SPGU can be pulse voltage source.
Function Details I/V-t Sampling Measurement 1. When the Output Sequence is SEQUENTIAL, source channels start the Source value output in order, and the last source channel starts the Base value output (Starts sampling). See “Source Output Sequence and Time Origin” on page 7-18. When the Output Sequence is SIMULTANEOUS, source channels start the Base value output simultaneously (Starts sampling).
Function Details I/V-t Sampling Measurement Setup Parameters The following setup is required to perform the I/V-t sampling measurements. See “I/V-t Sampling” on page 5-21 for the GUI. NOTE If you set Interval < 0.002 s Sampling mode must be linear. This setting is not permitted for the log sampling. Also SPGU is not available. All measurement channels must use the high speed A/D converter (ADC). This setting is not permitted if a measurement channel uses the high resolution ADC.
Function Details I/V-t Sampling Measurement Interval ≥ 0.0001 + 0.00002 × (number of measurement channels-1) No of Samples Number of samples. Integer. 1 to the following value. For linear: 100001 / (number of measurement channels) For logarithmic: 1 + (number of data for 11 decades) Total Sampling Time This field just displays the total sampling time that is the time from the measurement start time for the first point to the end of sampling measurement. It does not include the hold time.
Function Details I/V-t Sampling Measurement Time Data and Index To obtain the time data, enter a variable name (e.g. Time) into the Time Stamp Name field of the Channel Setup screen. The time data can be obtained after the linear sampling measurement is executed, and can be expressed by the following formula. Time = Hold Time + Interval × [(Index − 1) + N] + α Time : Variable name set to the Time Stamp Name field of the Measurement Setup screen. Time data is returned.
Function Details I/V-t Sampling Measurement Source Output Sequence and Time Origin When the Output Sequence is SEQUENTIAL, source channels start output in order. The order is top to bottom of the channels defined in the Channel Setup screen. The order of bias stop is bottom to top. When the Output Sequence is SIMULTANEOUS, source channels start output simultaneously. And the source channels stop output at the same time. The time origin is when the source output value is changed from Base to Source.
Function Details C-V Sweep Measurement C-V Sweep Measurement For the C-V sweep measurements, the multi frequency capacitance measurement unit (MFCMU) forces AC signal, performs staircase sweep output of DC bias voltage, and measures impedance for each sweep step. Available Module MFCMU can be used for the C-V sweep measurements. For the DC bias output over ± 25 V, use the SMU CMU Unify Unit (SCUU) and SMUs. This expands the voltage range up to ± 100 V.
Function Details C-V Sweep Measurement Frequency List AC signal frequency. 1 kHz to 5 MHz. Resolution: 6 digits. F Name Variable name of frequency list. AC Level AC signal level. 10 mV to 250 mV, 1 mV resolution. Mode, Factor One of the following is used for setting the measurement time. For Mode=AUTO, you set the number of samples used for averaging of the measurement data. The initial value is the predefined constant, and you set the multiple number to Factor.
Function Details C-V Sweep Measurement Measurement Parameters MFCMU performs impedance measurement, calculates parameters shown in Table 7-2, and returns the calculated data. A combination can be selected for the return data. For your reference, select the parallel measurement mode (Cp-G or Cp-D) for the low capacitance measurements (100 Ω or more of impedance), and select the series measurement mode (Cs-Rs) for the high capacitance measurements (100 Ω or less of impedance).
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Function Details C-V Sweep Measurement Four-Terminal Pair Configuration Generally, any mutual inductance, interference of the measurement signals, and unwanted residual factors in the connection method incidental to ordinary termination methods will have significant effects on the measurements, especially at a high frequency.
Function Details C-V Sweep Measurement To realize accurate measurements using the four-terminal pair measurement method, the following connection tips are important. See Figure 7-13 and Figure 7-14. • The signal path from MFCMU to DUT must be as short as possible. • The four-terminal pair configuration must be extended as close as possible to the DUT. • The outer shield conductors must be connected together at the extended cable ends. Then take care of contacts. They must be electrically isolated.
Function Details C-V Sweep Measurement The MFCMU will internally perform the error correction for the CMU cables and CMU accessories that keep the four-terminal pair configuration. For the measurements for evaluating DUT against a working standard, perform the open/short/load correction. However, you have to consider that some parasitic remain in measurement path even after performing corrections.
Function Details SPGU Module SPGU Module High voltage SPGU is a pulse generator module designed for semiconductor parametric test applications and provides the following key functions. The SPGU can be controlled by using the SPGU Control classic test or the SPGU setup function in the I/V Sweep, Multi Channel I/V Sweep, I/V List Sweep, and I/V-t Sampling classic tests.
Function Details SPGU Module PG Operation Mode In the PG mode (pulse generator operation mode), the SPGU outputs 2-level or 3-level pulse voltage as shown in Figure 7-16. The SPGU channels simultaneously start the pulse output and repeat the output every pulse period. The channels continue the pulse output until the specified time elapses or the repeat count reaches the specified number of pulses. For the SPGU pulse setup, see “SPGU Pulse Setup Parameters” on page 7-28.
Function Details SPGU Module SPGU Pulse Setup Parameters The following setup is required to apply the SPGU pulse. See “SPGU Control” on page 5-57 for the GUI. 1. Set the following for the SPGU channel on the Channel Setup tab screen. • Set the V Name of the SPGU. • Set the Mode to VPULSE. This sets the PG mode. Do not set to ALWG. 2. On the SPGU Pulse Setup window, specify the following parameters for the SPGU. See Figure 7-17 for the pulse setup parameters. Period Pulse period.
Function Details SPGU Module 3. (Optional) Set the Additional Pulse fields for the 3-Level Pulse. 3-level pulses can be achieved by the Primary Pulse and the Additional Pulse. See Figure 7-16 for examples. 4. On the Load Z Setup window, specify the load impedance of the DUT (device under test). The value is used to adjust the SPGU output voltage automatically. The SPGU will output the voltage close to the specified Base or Peak value. 5.
Function Details SPGU Module Pulse Output Operation Summary The SPGU can be used for I/V Sweep, Multi Channel I/V Sweep, I/V List Sweep, and I/V-t Sampling classic tests. The SPGU pulse output operation will differ as shown in the following cases. Pulse output example of the sampling measurement is shown in Figure 7-18. Figure 7-18 • Sampling measurement, simultaneous output mode. See Table 7-3. • Sampling measurement, sequential output mode. See Table 7-4 • Sweep measurement mode. See Table 7-5.
Function Details SPGU Module Table 7-3 Pulse output conditions Duration > Measurement time Output Timing for I/V-t Sampling, Simultaneous Source Channel Operation Starting During measurement After measurement Ending SMUs and SPGUs start the base value output simultaneously. After the base hold time, SMUs start the source value output and SPGUs start pulse output simultaneously.
Function Details SPGU Module Table 7-4 Pulse output conditions Duration > Measurement time Free run Output Timing for I/V-t Sampling, Sequential Source Channel Operation Starting During measurement After measurement Ending Except for the last SMU, SMUs start the source value output. And SPGUs and the last SMU start the base value output. The source output sequence is the definition order on the Channel Setup screen (top to bottom).
Function Details SPGU Module Table 7-5 Pulse output conditions Output Timing for I/V Sweep, Multi Channel I/V Sweep, I/V List Sweep Source Channel Operation Starting Free run SMUs and SPGUs start output. The source output sequence is the definition order on the Channel Setup screen (top to bottom). Duration < Measurement time Then, sweep sources output the start value, constant sources output the source value, and SPGUs output the base value.
Function Details SPGU Module ALWG Operation Mode In the ALWG mode (arbitrary linear waveform generator operation mode), SPGU can output an arbitrary linear waveform voltage as shown in Figure 7-19. The waveform is the voltage pattern sequence specified by the pattern data and the sequence data, which can be created by using the Define ALWG Waveform Window (p. 5-64). For a summary of source output operation in sweep or sampling measurement mode, see “Pulse Output Operation Summary” on page 7-30.
Function Details SPGU Module In the example in Figure 7-19, SPGU1 and SPGU2 are used. The channels output Pattern2 twice and Pattern1 three times in one sequence, although the two patterns for SPGU1 are the same. The SPGU channels simultaneously start the sequence output. The sequence will be repeated in the same way as for the pulse period. The channels continue the sequence output until the specified time elapses or the repeat count reaches the specified number of sequences.
Function Details Sweep Abort Function Sweep Abort Function The automatic sweep abort function is used to stop sweep measurement (increasing or decreasing source output value) when one of the following conditions occurs. This function is useful to reduce sweep time and to prevent damage to the device during measurement.
Function Details Standby Function Standby Function This function forces the specified DC bias outputs (standby outputs) before starting or after stopping a measurement. Standby Channels Standby channels are source monitor units (SMU) that force the standby output. Standby channels maintain the specified DC bias output when the standby mode is ON and in the non-measurement state.
Function Details Standby Function Output Sequence of Standby Channels The standby channels will start to output in order, from the top to bottom, as listed in the Standby Channel Definition on the Standby Channel Definition window. The order of bias stop is bottom to top. Figure 7-20 shows the standby and measurement operations for the following example setup.
Function Details Standby Function To Use Standby Function To start the standby output, click the Standby ON button on the Standby Channel Definition window. However, if no channel has been defined as the standby channel, the standby mode cannot be turned ON. In the standby state, the Standby ON indicator appears at the bottom of the EasyEXPERT main screen. The Standby Channel Definition window is opened by clicking the Standby button on the main screen.
Function Details Bias Hold Function Bias Hold Function This function is used to keep source output after measurement. Source modules apply the specified bias between measurements in a quick test or application test that defines some classic test setups, or a repeat measurement. And the source modules change the output value and the unused modules are disconnected when the next measurement is started.
Function Details Bias Hold Function Setup method This function can be set by using the Advanced Setup window. • Bias hold after measurement Set the function ON (enable) or OFF (disable, default setting). • Output value after measurement Select the bias output value START (default) or STOP for the I/V or C-V sweep measurement, or BASE or SOURCE (default) for the sampling measurement. This is invalid for the VAR2, CONST, and constant source for C-V Sweep.
Function Details Current Offset Cancel Current Offset Cancel This function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data. This function is used to compensate the error factor (offset current) caused by the measurement path such as the measurement cables, manipulators, or probe card. The offset cancel is not available for measurement over 100 nA range.
Function Details Current Offset Cancel Table 7-7 Measurement range, allowable offset value, and module type Measurement range Allowable offset value 1 nA ±10 pA HR/ASU, HR, MP, HP 100 pA ±1 pA HR/ASU, HR 10 pA ±400 fA HR/ASU, HR 1 pA ±100 fA HR/ASU Module type If the offset value for a measurement range of a channel exceeds the allowable value, the offset data is not effective in this range and lower for this channel.
Function Details SMU CMU Unify Unit SMU CMU Unify Unit The SMU CMU Unify Unit (SCUU) is available for Agilent B1500A installed with the multi frequency capacitance measurement unit (MFCMU). The MFCMU must be installed in the slot N (integer, 3 to 10) and the SMUs must be installed in the slot N-1 and N-2. See “To Connect SCUU/GSWU” on page 3-21 to install the SCUU properly. The SCUU cannot be connected to the high power SMU (HPSMU).
Function Details SMU CMU Unify Unit Figure 7-21 SCUU Input/Output Connections 6HWXS &0+ )RUFH 6HQVH 608 VORW 1 &0/ )RUFH 6HQVH 2SHQ )RUFH 6HWXS &0+ )RUFH &08+ VORW 1 &0/ )RUFH &08/ VORW 1 6HQVH 6HQVH 2SHQ )RUFH +FXU &08+ 608 LQ VORW 1 6HQVH &08 5HWXUQ 6HQVH +SRW WR *6:8 WKURXJK '87 LQWHUIDFH 0)&08 LQ VORW 1 6HWXS &0+ )RUFH 6HQVH 2SHQ &0/ )RUFH 6HQVH 608 VORW 1 /FXU &08/ &08 5HWXUQ /SRW )RUFH )RUFH WR *6:8 WKURXJK '87 LQWHUIDFH 608 LQ VORW 1 6H
Function Details Atto Sense and Switch Unit Atto Sense and Switch Unit The Atto Sense and Switch Unit (ASU) can be used with the high resolution SMU (HRSMU). Using the ASU permits use of the 1 pA range. Also the ASU can switch the measurement resources, HRSMU or an instrument connected to the AUX input connectors. The ASU can configure two setups shown in Figure 7-22. When the B1500A is turned on, the ASU will be the Setup 1 condition. See “To Connect ASU” on page 3-17 to install the ASU properly.
Function Details Atto Sense and Switch Unit The ASU has output connectors, two triaxial, that must be connected to the DUT interface such as manipulators and probe card. When the measurement resource is the HRSMU, they are the Force/Sense connectors for the Kelvin connection. And when the resource is not HRSMU, the CMU/AUX is connected to the Force, and the Sense is not used. If you connect the MFCMU or the LCR meter with the four-terminal pair configuration, two ASUs are required.
Function Details SMU/PG Selector SMU/PG Selector Agilent 16440A SMU/PG Selector provides the built-in switching capability to select a measurement path connected to the Output port. See Figure 7-23 for the simplified circuit diagram of the selector. The selector has the channels CH 1 and CH 2 which provide the following conditions. It can be controlled by using the SMU/PG Selector tab screen of the Configuration window.
Function Details SMU Ranging Mode SMU Ranging Mode Agilent B1500 provides the following operation modes for the measurement range and the output range. The ranging mode must be set for each channel. • “Auto Ranging” • “Limited Auto Ranging” • “Fixed Range” • “Compliance Range” • “Enhanced Auto Ranging for Current Measurement” To Set Ranging Mode The following points must be noted when setting the ranging mode.
Function Details SMU Ranging Mode Auto Ranging Range changing is performed as below. For measurement channels The measurement channel automatically searches for and measures at the range that provides the best resolution as follows: • For current measurement, the measurement channel uses the present range if the following formula is satisfied; otherwise, the channel changes the range. Range × 0.1 ≤ Measurement value ≤ Range × X/100 where X=115, or 100 at the maximum range.
Function Details SMU Ranging Mode Limited Auto Ranging Limited auto ranging is similar to auto ranging. However, limited auto ranging does not use the range(s) less than what you specified. For example, if you select 10 mA limited auto ranging, the measurement unit does not use the 1 mA range or less. Consequently, the measurement time for limited auto ranging is less than for auto ranging. Fixed Range The channel uses the specified range only.
Function Details SMU Ranging Mode Enhanced Auto Ranging for Current Measurement Expanded functions are available for the auto ranging operation of the current measurement channel. To use the functions, set Range Change Rule. See “SMU Range Setup Window” on page 5-48. Rate value defines the boundary of ranging. • Range Change Rule=BY FULL RANGE: Performs normal auto ranging operation. If a condition shown below is satisfied, the range changes immediately, even during measurement.
Function Details SMU Compliance SMU Compliance Compliance is the output limiter to prevent damage to the test device from overcurrent, overvoltage, or overpower. Voltage compliance is for the current output channels, and current compliance is for the voltage output channels. When a channel reaches compliance, the channel acts as a constant voltage source or a constant current source. The channel keeps the output value when reaching compliance.
Function Details SMU Compliance Power Compliance In addition to V compliance or I compliance, you can set power compliance for the staircase sweep source. If you specify power compliance, the source/monitor unit (SMU) changes the current or voltage compliance value every sweep step. The value is the lower value of either the specified compliance value or the compliance value given by the following formula. See Figure 7-25.
Function Details SMU Compliance SMU output values If you specify power compliance, the SMU changes the current or voltage compliance every sweep step. Hence, the SMU can apply voltage or current with the maximum power. Figure 7-26 shows the differences between the output with power compliance and the output without power compliance, for MPSMU.
Function Details SMU Pulse SMU Pulse The source/monitor unit (SMU) can apply voltage or current pulse. The pulse width and pulse period must be the following values. Pulse width 0.5 ms to 2 s, 0.1 ms resolution Pulse period 5 ms to 5 s, 0.1 ms resolution The setup values must satisfy the following conditions. • period ≥ width + 2 ms (for pulse width ≤ 100 ms) • period ≥ width + 10 ms (for pulse width > 100 ms) To Set Pulse Output The following points must be noted when setting the pulse output.
Function Details SMU Measurement Time SMU Measurement Time Measurement time depends on integration time, measurement range, and other measurement conditions, and can be expressed by the following formula: Measurement time = Integration time + Overhead time Integration time is the time required for measurement, and does not include such factors as range changing or data compensation, which would be the overhead time. Integration Time Integration time is the time required to get measurement data.
Function Details SMU Measurement Time Table 7-8 Integration Time and Number of Samples ADC Mode High Speed ADC AUTO Description Number of averaging samples = N × reference where reference is the number of averaging samples automatically set by Agilent B1500; this cannot be changed. Specify the N value shown above. Available values are 1 to 1023. Initial value is 1. MANUAL Specify the number of averaging samples (N). Available values are 1 to 1023. Initial value is 1.
Function Details SMU Measurement Time Overhead Time The overhead time is the time required for range changing and so on. This time depends on the measurement condition, and cannot be specified.
Function Details SMU Measurement Time Wait Time Wait time is the time after starting source output until changing the source output value or until starting measurement. You can set the source wait time and the measurement wait time individually. The source wait time is the time the source channel always waits after it starts output until it changes the output value.
Function Details SMU Measurement Time Multiple Measurement Channels To use multiple measurement channels, define multiple measurement parameters in the Display Setup screen or the Function Setup screen. Then, measurement sequence, time data, and measurement time for each measurement point are as follows. • Sequence of measurement execution Measurement channels perform measurement in the order shown below. 1.
Function Details SMU Filter SMU Filter The filter is mounted on each source/monitor unit (SMU) module. It assures clean source output with no spikes or overshooting. However, using a filter may increase the SMU settling time. To set the filter, refer to “Advanced Setup Window” on page 5-51. NOTE The SMU filter is set to OFF for the standby channels in the standby state.
Function Details SMU Series Resistor SMU Series Resistor The series resistor (approx. 1 MΩ) is mounted on each source/monitor unit (SMU) module. The series resistor may be used for the device protection, negative resistance measurement, and so on. It depends on the characteristics of test device and measurement environment. If you use a series resistor, the voltage you set is applied to the near side of the series resistor. Thus, the voltage will be divided by the series resistor and the device under test.
Function Details Interlock Function Interlock Function The interlock function is designed to prevent electrical shock when a user touches the measurement terminals. If the Interlock terminal is open, maximum output is limited to ± 42 V. To perform high voltage measurement more than ± 42 V, connect the Interlock terminal to an interlock circuit of test fixture or connector plate. The interlock circuit must have one LED and two mechanical switches placed near the shielding box opening doors.
Function Details Auto Power Off Function Auto Power Off Function If an abnormal voltage or current is detected in Agilent B1500, Agilent B1500 automatically turns off to prevent damage. If this function is activated, Agilent B1500 is turned off, but the Standby switch is left ON. Perform the following steps to turn Agilent B1500 on again. 1. If Windows is running, end all tasks, and shutdown Windows. 2. Open the measurement terminals. 3. Press the Standby switch to set it to the OFF position. 4.
Function Details Initial Settings Initial Settings Agilent B1500 is initialized by turning the B1500 on, the *RST command, or the device clear. Initial settings of the B1500 are shown in the following tables.
Function Details Initial Settings Setup Item CMU SPGU Initial Setting SCUU path/indicator open/enable Measurement parameter Cp-G Measurement range auto Measurement time auto Open/short/load correction off Phase compensation mode auto Measurement signal frequency 1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1 M, 2 M, 5 MHz Automatic abort function off Hold time 0s Delay time 0s Operation mode VPULSE (PG mode) Pulse period 1.
Function Details Initial Settings 7- 68 Agilent B1500 User’s Guide, Edition 7
8 Built-in Programming Tool
Built-in Programming Tool This chapter explains the programming tool built into Agilent B1500A/EasyEXPERT. The programming tool is used to define user functions and analysis functions in the Classic Test definitions and to define the test contents in the Application Test definitions. This chapter contains the following sections.
Built-in Programming Tool Variables and Expressions Variables and Expressions Variables can be used in Agilent EasyEXPERT setup editor for the following applications. User functions and analysis functions can also be used for variables.
Built-in Programming Tool Variables and Expressions Expressions Figure 8-1 shows the expression effective for variable definition. The elements are explained below. Figure 8-1 Syntax of Expression ([SUHVVLRQ 0RQRPLDO 2SHUDWRU ([SUHVVLRQ %LQRPLDO 2SHUDWRU /LWHWUDO &RQVWDQW 9DULDEOH %XLOW LQ )XQFWLRQ ([SUHVVLRQ 5HDG 2XW )XQFWLRQ 8VHU )XQFWLRQ $QDO\VLV )XQFWLRQ Constants The following scientific constants are available. • q: electric charge. 1.602177×10-19 • k: Boltsmann’s constant. 1.
Built-in Programming Tool Variables and Expressions Literals Numeric type and string type are available. • Numeric type To enter a numeric value, type as follows, where [] is optional. Dd[.d][E[S]d][s] D: Numeric character 0 to 9 d: This means repeating D 0 times or more. E: Exponent symbol, E or e S: Sign, + or s: Prefix symbol. The subsequent symbols (y, z, a, f, p, n, u, m, k, M, G) separated by the comma mean the value following the colon.
Built-in Programming Tool Variables and Expressions Table 8-1 Monomial Operator and Binomial Operator Priority Type of operand Operator Vectora String Module () Yes Yes Yes Yes NOT Yes Yes No No ^ Yes Yes No No * or / Yes Yes No No + or -, monomial Yes Yes +: Yes, -: No No + or -, binomial Yes Yes +: Yes, -: No No >, >=, <, <= Yes Yes Yes No =, <> Yes Yes Yes No AND Yes Yes No No XOR Yes Yes No No OR Yes Yes No No High Numeric Low a.
Built-in Programming Tool Built-in Functions Built-in Functions This section describes Agilent EasyEXPERT built-in functions. The functions appear in alphabetical order. In the function name, the character in parentheses is a variable. abs(A) Returns the absolute value of the expression A. Example B=abs(A) Data type A: numeric, B: numeric. Or A: vector, B: vector. acos(A) Returns the arccosine value of the expression A. The A value must be between -1 and 1.
Built-in Programming Tool Built-in Functions atan(A) Returns the arctangent value of the expression A. Example B=atan(A) Data type A: numeric, B: numeric. Or A: vector, B: vector. atan2(A,B) Returns the radian value of the angle made by the X-axis and the line that passes through the coordinates (0, 0) and (A, B). Example C=atan2(A,B) Data type A: numeric, B: numeric, C: numeric. If A and/or B is vector, C: vector. avg(A) Returns the average value of data in the expression A.
Built-in Programming Tool Built-in Functions delta(A) Returns the difference of the expression A. Calculation is performed as follows. Dn = (A2-A1) when n = 1 Dn = (An+1-An-1) / 2 when 1 < n < N Dn = (AN-AN-1) when n = N where, Dn difference for the index number n An A value for the index number n N number of sweep steps or number of samples For subordinate sweep, the first index number of each primary sweep is always 1.
Built-in Programming Tool Built-in Functions dim1Size(A) Returns the number of elements in the primary plane of the vector variable A. Example B=dim1Size(A) Data type A: vector, B: numeric. dim2Size(A) Returns the number of elements in the secondary plane of the vector variable A. Example B=dim2Size(A) Data type A: vector, B: numeric. exp(A) Raises e (exponential) to the power of the expression A. The following example enters eA calculation result to the variable B.
Built-in Programming Tool Built-in Functions integ(A,B) Performs numerical integration of the expression A by B. Calculation is performed as follows. When n = 1, αn = 0 When n > 1, αn is defined as follows: AQ L Q 3 \ \L [ L [L L where, α n: integral of A for the index number n yi: A value for the index number i xi: B value for the index number i If A or B contain some invalid values, the invalid values are ignored for the calculation.
Built-in Programming Tool Built-in Functions log(A) Returns the logarithm (base e) of the expression A. If A=0, -Overflow is returned with the status “Arithmetic error”. If A is a negative value, the logarithm of the absolute value is returned with the status “Arithmetic error”. Example B=log(A) Data type A: numeric, B: numeric. Or A: vector, B: vector. mavg(A,B) Returns the moving average value of data in the expression A. B specifies how many data to use for the average.
Built-in Programming Tool Built-in Functions max(A) Returns the maximum value of data in the expression A. For subordinate sweep measurement, this function returns the maximum value of the primary sweep for each secondary sweep step. If there are invalid values in A, invalid values are ignored. Example B=max(A) Data type A: vector or numeric, B: vector. min(A) Returns the minimum value of data in the expression A.
Built-in Programming Tool Built-in Functions string(A) Translates the expression A to a string data, and returns it. Example B=string(A) Data type A: numeric or module, B: string. NOTE Translating the variable defined with the numeric-symbol assignment If the argument of the string function is a numeric variable defined with the numeric-symbol assignment, the string function execution result will be the symbol assigned to the numeric value, not the string value just translated from the numeric value.
Built-in Programming Tool Read Out Functions Read Out Functions The read out functions are built-in functions for reading various values related to the marker, cursor, or line. You can use these functions to perform complex analysis of the measurement results. They are available only for the Analysis Functions. To read the value of the read out function, use a numeric variable. The following example reads the X intercept of the line 1 and enters it to the variable A.
Built-in Programming Tool Read Out Functions @CYn Returns the value of the Yn coordinate at the active cursor position (n: 1 to 8, integer). Functions for Line @LmCO Returns the correlation coefficient of the regression for Line m (m: 1 or 2). Line m must be in regression mode. If not, this function returns invalid data. @LmG Returns the slope of Line m (m: 1 or 2). If there are two Y axes, this function returns the value for the selected axis.
Built-in Programming Tool Read Out Functions • If the X axis is linear scale, and the Yn axis is log scale: α = (log y1-log y0) / (x1-x0) • If the X and Yn axes are both log scale: α = (log y1-log y0) / (log x1- log x0) where, @LmX α: Slope of Line m x0 , y0 , x1 , y1 : X and Y coordinate values at the two points where Line m intercepts the perimeter of the plotting area. Returns the X intercept value (Y=0) of Line m (m: 1 or 2). If Line m is horizontal, this function returns invalid data.
Built-in Programming Tool Read Out Functions @IY Returns the value of the Y coordinate at the intersection of Line 1 and Line 2. If there are two Y axes, this function returns the value for the selected axis. This function calculates the intersection by using the following formula: Y = y1+α1 ×(y2-y1)/(α1-α2) where, Y: Value of the Y coordinate at the intersection. If the Y axis is log scale, this function returns 10Y. ym : Y intercept value of Line m (m: 1 or 2).
Built-in Programming Tool Script Program Statements Script Program Statements The program statements are used to define the test execution flow on the Test Contents tab screen of the Test Definition window. On the screen, click the Program Component tab. The program statements are listed in the component selection area. See also “Program Component” on page 6-26. Local Variable Definition This statement defines the local variables used in the test definition.
Built-in Programming Tool Script Program Statements COMMENT This statement enters a comment in the program line. END This statement terminates program execution. After the END statement, the routines defined by the FINALLY statement are performed. ERROR This statement causes an error. However, no error code is stored in the @ERROR system variable because of the fictious error. FOR Beginning of the FOR/NEXT loop block. FOR and NEXT are added to the program list as a pair.
Built-in Programming Tool Script Program Statements LOOP Beginning of the LOOP/END LOOP block. LOOP and END LOOP are added to the program list as a pair. The statements repeatedly performed during looping should be defined between the statements. The EXIT LOOP statement is available to exit from the loop. After looping, the next line of END LOOP is performed.
Built-in Programming Tool Script Program Statements Example 2 Test definition name: NandFlash IV-Write-IV Local Variables Definition BLOCK !***** Integration Time Setting ***** IF IntegTime="SHORT" IntegMode = "MANUAL" AdcFactor = 8 ELSE IF IntegTime="MEDIUM" IntegMode = "PLC" AdcFactor = 1 ELSE IF IntegTime="LONG" IntegMode = "PLC" AdcFactor = 16 END IF !***** I/V Sweep & Analysis Initial Characteristics ***** ForcePG2 Id-Vg_Initial ResetPG Auto Analysis (continues to the next page) Line 1: Defines local
Built-in Programming Tool Script Program Statements (continues from the previous page) VthInitial = getNumericData("VthBefore") VgateList = getVectorData("Vgate") IdInitialList = getVectorData("Idrain") !***** Force Pulse ***** ForcePG1 ResetPG !***** I/V Sweep & Analysis after Write ***** ForcePG2 Id-Vg_Written ResetPG Auto Analysis VthWritten = getNumericData("VthAfter") IdWrittenList = getVectorData("Idrain") END BLOCK Lines 19 to 21: Enters the value of the variables (VthBefore, Vgate, Idrain) defined
Built-in Programming Tool Script Program Statements 8- 24 Agilent B1500 User’s Guide, Edition 7
9 If You Have a Problem
If You Have a Problem This chapter explains how to solve problems or how to read error codes, if you encounter some problems. This chapter consists of the following sections. • “When You Operate B1500A” • “When You Perform Measurement” • “Before Shipping to Service Center” • “Data Backup and Recovery” • “B1500A System Recovery” • “Updating EasyEXPERT” • “Error Codes” If error occurs, find solutions in the following sections and solve problems.
If You Have a Problem When You Operate B1500A When You Operate B1500A This section covers the following basic problems that you may encounter when you install or operate Agilent B1500A, and the solutions. See also “Error Codes” on page 9-23.
If You Have a Problem When You Operate B1500A ASU is not Detected If Agilent B1500A/EasyEXPERT cannot detect ASU (atto sense/switch unit), turn B1500A off, check the cable connection, and reboot B1500A/EasyEXPERT. For the installation and connection of ASU, see “To Connect ASU” on page 3-17. NOTE Connect ASU to dedicated HRSMU The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU.
If You Have a Problem When You Operate B1500A To Simplify the Connections If you want to simplify the measurement connections, use the triaxial cables instead of the kelvin triaxial cables, and connect the triaxial cables between the Force terminals and the test fixture or the connector plate. Then the Sense terminals must be opened. NOTE The B1500A has the Force and Sense terminals to make the kelvin connection.
If You Have a Problem When You Perform Measurement When You Perform Measurement This section covers the following basic problems that you may encounter when you making a measurement, and the solutions.
If You Have a Problem When You Perform Measurement Noise Affects the Measured Values When you measure low current of a DUT, the measured values may not be stable. To solve this problem: • Set the power line frequency correctly. The value affects the integration time. So the wrong value causes the measurement error by the power line noise. You can set the power line frequency by using the Configuration window of the EasyEXPERT.
If You Have a Problem When You Perform Measurement Voltage Measurement Error is Large Voltage measurement error may be large because of the effects of the cable resistance when forcing a large current. To solve this problem: • Use kelvin connections between SMUs and DUT. To cancel the effects of cable resistance, connect the sense line as close as possible to the terminal of the DUT.
If You Have a Problem When You Perform Measurement SMU Oscillates for Negative Resistance Measurements If the DUT has negative resistance characteristics, SMUs may oscillate. Because the positive feedback may be configured by the DUT and the SMUs. To solve this problem: • For voltage controlled negative resistance device • Connect G in parallel with your DUT to cancel negative resistance. To obtain an output I-V curve, use the following equation.
If You Have a Problem When You Perform Measurement Large Current Causes High Temperature (Thermal Drift) If a large current is forced to a DUT, the temperature of the DUT may increase, which may cause characteristics to drift. To solve this problem: • Use the pulse output mode of the SMU. For large currents, the SMU should be set to pulse output mode. This decreases the average power output to prevent temperature rise of DUT.
If You Have a Problem When You Perform Measurement Unexpected Sampling Measurement Data is Returned If sampling interval is set to a short time and if FILTER ON is set, you may get unwanted data. FILTER ON causes a slower rise time, so short initial interval will sample during this rise time. To solve this problem: • Set FILTER field to OFF if you set initial interval to a short time. Some data may be skipped because measurement takes a long time.
If You Have a Problem Before Shipping to Service Center Before Shipping to Service Center Before shipping Agilent B1500 to the Service Center, you have to do following: • “To Make Backup” • “To Check Module Slots” • “To Check ASU/HRSMU Combination” • “To Collect Equipment and Accessories” To Make Backup If the internal hard disk drive (HDD) is failed, you will lose all data stored in the HDD. So it is important to make backup constantly.
If You Have a Problem Before Shipping to Service Center To Collect Equipment and Accessories The following equipment and accessories are required for servicing and must be shipped to the Service Center. • B1500A with all plug-in modules installed • ASU exclusive to HRSMU • Connection cable set between ASU and HRSMU • RSU • Connection cable set between RSU and WGFMU For returning ASU or RSU, do not forget to notify the combination of the unit, connection cable, and module channel.
If You Have a Problem Data Backup and Recovery Data Backup and Recovery Unexpected trouble of HDD (hard disk drive), operation mistake, or malfunction may cause elimination of valuable data. To avoid this kind of risk, make backup of data in the HDD as frequently as possible.
If You Have a Problem Data Backup and Recovery Folders to Backup Backup should be made for the following data areas.
If You Have a Problem Data Backup and Recovery To Restore Database Backup EasyEXPERT database can be restored by the following procedure. 1. Make a copy of the database backup file (xdb file) into the D drive. 2. Launch Start EasyEXPERT. 3. Click Option > EasyEXPERT Database > Restore EasyEXPERT Database in the Start EasyEXPERT window. 4. Follow the EasyEXPERT Database Restoration wizard, and restore the backup of EasyEXPERT database.
If You Have a Problem Data Backup and Recovery To Make Backup of Other Data There are the following three ways to make backup of data other than the EasyEXPERT database. Make backup by using one of the following methods. • To use Windows backup program: 1. Click Start > All Programs > Accessories > System Tools > Backup. 2. Follow the Backup or Restore wizard, and make backup into the D drive. The extension of the backup file is bkf. 3.
If You Have a Problem Data Backup and Recovery To Restore Backup of Other Data Backups can be restored as shown below. The recovery method depends on how the backup was made. • Backup is a bkf file: 1. Make a copy of the backup file (bkf file) into the D drive. 2. Click Start > All Programs > Accessories > System Tools > Backup. 3. Follow the Backup or Restore wizard, and restore the bkf file. • Backup is a compressed file: 1. Make a copy of the compressed file into the D drive. 2.
If You Have a Problem B1500A System Recovery B1500A System Recovery If you find problems in the B1500A system, perform the system recovery. NOTE • “To Perform System Recovery” • “To Initialize Database” • “To Restore Database” Before system recovery After performing B1500A system recovery, the C drive will be returned to the condition when you received the B1500A or when it left the factory.
If You Have a Problem B1500A System Recovery Figure 9-1 Agilent System Recovery Screen Agilent Technologies System Utilities Recovery Options Choose one of the following: ----------------------------------------------------------1. Recover Factory Backup Image. 2. Update System. 3. Exit ----------------------------------------------------------Enter a Choice: To Initialize Database EasyEXPERT database can be initialized by the following procedure. You can use EasyEXPERT after this procedure is completed.
If You Have a Problem B1500A System Recovery To Restore Database EasyEXPERT database can be restored by the following procedure. In the example shown in “To Initialize Database” on page 9-20, the EasyEXPERT database backup is the whole D:\Agilent\EasyEXPERT\1-backup folder. The database can be restored by using the data in this folder. • For EasyEXPERT revision A.02.10 and earlier The database reconfiguration tool is required. Obtain it from Agilent Technologies web site.
If You Have a Problem Updating EasyEXPERT Updating EasyEXPERT NOTE The latest version of the EasyEXPERT update package can be obtained from Agilent Technologies web site. NOTE The EasyEXPERT revision A.03.20 does not require the administrator privilege which is required by the revision A.03.11 and previous revisions. However, if the software is updated from a previous revision to the revision A.03.20, it still requires the administrator privilege.
If You Have a Problem Error Codes Error Codes This section lists Agilent B1500 error codes and messages. • “Agilent EasyEXPERT Operation Error” • “Agilent FLEX Execution Error” • “Agilent B1500A Self-test/Calibration Error” • “Setup File Converter Execution Error” Agilent EasyEXPERT Operation Error When Agilent B1500 causes errors in Agilent EasyEXPERT execution environment, the B1500 returns the following error codes and error messages. 101001 Log repository operation failed.
If You Have a Problem Error Codes 104001 Module (A) is not available. 105001 Generic setup error occurred. Code: A, Reason: B 105002 Duplicate data name was found. Data name must be unique. Data name: A 105003 Operation is not supported in offline mode. 105004 Interlock circuit is open. Interlock circuit must be closed for setting voltage source/compliance absolute value exceeding 42V. 105005 Output series resistor cannot be used for HRSMU with ASU.
If You Have a Problem Error Codes 105031 The product of voltage source value and current compliance value of A exceeds its output power range. Please set the current compliance value between B A and C A. 105032 The product of current source value and voltage compliance value of A exceeds its output power range. Please set the voltage compliance value between B V and C V. 105033 The polarity of peak value(s) and the base value of SMU current pulse must be the same.
If You Have a Problem Error Codes 105049 The coefficient for High Speed ADC A averaging mode must be between B and C. 105050 Invalid value (A) was specified for the integral mode of ADC. Valid option(s): B 105051 Invalid value (A) was specified for the sweep direction. Valid option(s): B 105052 Invalid value (A) was specified for the sweep stop condition. Valid option(s): B 105053 Invalid value (A) was specified for the impedance measurement model.
If You Have a Problem Error Codes 105073 Hold time for I/V-t sampling must be between A s and B s. 105074 Multiplying the number of monitor channels by No of Samples must be between A and B. 105075 Invalid value A specified for I/V-t sampling Lin/Log setting. Valid option(s): B 105076 Base hold time for I/V-t sampling must be between A s and B s. 105077 Invalid value A specified for I/V-t sampling output sequence.
If You Have a Problem Error Codes 105804 Bias hold function execution error. Output voltage or voltage compliance must be ± 40 V or less to control the output switch or the series resistor. 105811 Invalid value A was specified for Semiconductor Relays (B) of Advanced Setup. Valid option(s): C 105821 Invalid value A was specified for Type of SPGU Pulse Setup. Valid option(s): B, VName: C 105822 Invalid value A was specified for SW Sync of Pulse Switch Setup.
If You Have a Problem Error Codes 105841 Sum of Delay, Width, and Trailing × 1.25 must be within Period value. VName: A 105842 Invalid value A was specified for PGU output impedance. Valid option(s): B, VName: C 105843 SPGU cannot be used for bias source of I/V-t linear sampling measurement of interval < 2 ms. 105844 |Peak-Base| value of PGU pulse must be between A V and B V. VName: C 105845 Period, Width, and Delay values of PGU pulse must be in the same setting range.
If You Have a Problem Error Codes 105912 Test execution error was detected. Check the parameter values of the command, and set the Arguments field again. Setup Name=A, Line Number=B, Command=C 105913 Incorrect usage of ST and END commands. Use them as a pair to store a command group into the program memory. 105914 Improper number of Arguments for the A command. Enter the Arguments correctly. 106001 Logon request was rejected. The number of Logons already reaches the limit of the software regulation.
If You Have a Problem Error Codes 108006 Function Module is inaccessible because it has been removed. Restart Agilent B1500A. If the problem still occurs, contact your nearest Agilent Technologies Service Center. 108007 The same process is running now. Restart Agilent B1500A. If the problem still occurs, contact your nearest Agilent Technologies Service Center. 108008 Profile was not found. Restart Agilent B1500A. If the problem still occurs, contact your nearest Agilent Technologies Service Center.
If You Have a Problem Error Codes 109022 The value of standard for CMU short correction must be finite as impedance. 109031 CMU load correction failed. 109032 The value of standard for CMU load correction must be finite in impedance (non-zero as admittance). 109041 Cannot define multiple standby settings for a SMU. Channel: A 109051 Direct Control execution status. Sweep measurement was aborted by the automatic abort function or the power compliance.
If You Have a Problem Error Codes 111016 ALWaveform type expression must be entered. Expression: A 111021 Test setup name cannot be an empty string. 111022 Test setup name must be A characters or less. 111031 Assign module parameter for ALWaveform type parameter. 111032 ALWG Pattern Name must be entered. 111033 Invalid character is included in Name of module parameter assigned for ALWaveform type parameter.
If You Have a Problem Error Codes 112010 All SPGU channels must be set to the same output mode, VPULSE or ALWG. 112011 SMU descriptor expression is expected. Expression: A 112012 CMU descriptor expression is expected. Expression: A 112013 SPGU descriptor expression must be entered. Expression: A 112014 Mode must be V or COMMON for VSU (A). 112015 VMU (A) must be defined as a constant current source. 112016 Mode must be COMMON for GNDU. 112022 No CMU was assigned.
If You Have a Problem Error Codes 112072 Invalid value A was specified for Enable/Disable of I/V-t Sampling Stop Condition. Valid option(s): B 112073 Invalid value A was specified for Name of I/V-t Sampling Stop Condition. Valid option(s): B 112074 Invalid value A was specified for Event of I/V-t Sampling Stop Condition. Valid option(s): B 112075 Invalid function was used in the definition of variable specified by Name of I/V-t Sampling Stop Condition. 112100 ALWG waveform data for A was not found.
If You Have a Problem Error Codes 113023 Value for string parameter is not contained in the enumeration. Value must be a member of the enumeration. Parameter name: A, Parameter value: B, Enumeration: C 113024 Value for module parameter is invalid or is not compliant to the resource type of the parameter. Parameter name: A, Parameter value: B 113025 Improper value specified for the vector parameter. The value must be within the following range.
If You Have a Problem Error Codes 114104 Folder creation failed during automatic data export. Specify the correct drive letter and folder path in the Test Results Data Auto Export dialog box. 114105 Change the file extension in the Test Results Data Auto Export dialog box. Specified value contains an invalid character. Specified file extension: A 114106 Data file creation failed during automatic data export. Refer to the detail message, and retry after taking necessary measures.
If You Have a Problem Error Codes 117001 Enter another label for the switching matrix input port. A is already used for another port. 117002 Do not use a colon (:) in the label for a switching matrix input port. 117003 Connect the switching matrix to use this function. To establish the GPIB connection, set the GPIB address on the Configuration window’s Switching Matrix tab, and click the Poll button. 117004 Invalid value A for the switching matrix output channel. Value must be between B and C.
If You Have a Problem Error Codes 120003 Script program execution ended abnormally. Program execution stopped by an illegal operation or statement. For more information, click the Detail button. 120004 An error forced by ERROR statement. Program execution stopped by the ERROR statement. This is the status message in normal operation. 120005 Invalid value detected in flow control statement. Correct the IF, FOR, or other flow control statement. Inappropriate expression used in the statement.
If You Have a Problem Error Codes 122004 Invalid expression is specified for function argument. Function: A, Argument: B Correct the expression defined for the argument B of the function A. Click the Detail button for more information. 122005 Invalid type of data is specified as function argument. Correct the data type of the variable used for the argument. Or change the variable that is the same data type as the argument. 122006 Incorrect data is specified as function argument.
If You Have a Problem Error Codes 130001 Transport function error occurred. 130002 A target package was not found. Cannot import data because of invalid file format or corrupted file. Specify correct file. 130003 The package is unusable because it includes incorrect data. Cannot import data because of invalid file format or corrupted file. Specify correct file. 130004 Package data is insufficient for this process. Cannot import data because of invalid file format or corrupted file.
If You Have a Problem Error Codes 133006 The specified GPIB address value is invalid. Set the correct GPIB address of the GPIB device. 133007 The specified GPIB interface number value is invalid. Set the correct GPIB interface number of the GPIB device. 133008 The specified timeout value is invalid. Set the proper timeout value. 133009 The specified delimiter characters are invalid. Set the proper delimiter value. 133010 Install Agilent IO Library.
If You Have a Problem Error Codes 140005 Invalid operation for the stream occurred. Internal error. 140006 Duplicate data name was found. Data name must be unique. data name: A 140007 No printers installed. 140008 Operation for printing failed. Perform printer setup properly. 140009 Failed to evaluate the read out function “A”. 140010 Enable the X-Y Graph to use this read out function. 140011 Define the axis A to use this read out function. 140012 There is no data for this read out function.
If You Have a Problem Error Codes 170001 Archive process failed. Reason: A 171001 Data compression failed. Program error. Contact Agilent Technologies. 171002 Specify a correct file for the import. Specified file is either unsupported or corrupt. 171003 File I/O failed during compressed data export. Could not access destination file. Specified file is either unsupported or corrupt. Specify a correct file for the export. 171004 Compression process or decompression process failed.
If You Have a Problem Error Codes 300021 SDA daemon failed to start SDA service. path: A, arguments: B, reason: C 300031 SDA daemon failed to start SDA shell. path: A, arguments: B, reason: C 300041 SDA daemon failed to start model name inspection process. Path: A, Arguments: B, Reason: C 300042 Model name inspection failed. Set VISA interface ID and GPIB address correctly, or connect the GPIB cable properly. Reason: A 300051 SDA daemon failed to start database recovery process.
If You Have a Problem Error Codes 300109 EasyEXPERT database backup extraction error. See the log file C:\Documents and Settings\All Users\Application Data\Agilent Technologies, inc\EasyEXPERT\StaDaemon.log if needed. Backup restoration is canceled, and the present EasyEXPERT database remains the same. 300110 Folder delete error. Delete the folder in the following path manually. Path: A 300111 EasyEXPERT database backup restoration error. Database could not be replaced with the backup.
If You Have a Problem Error Codes 500011 License device not found. Connect the license device for EasyEXPERT properly. Feature: A, Error: B 500012 License device busy. Try again later. Feature: A, Error: B 500021 License for this feature is locked. Try again later. Feature: A, Error: B 500022 Unlicensed feature found. Feature: A 500023 Unknown license information for this feature. The software revision may be too old. Feature: A 500024 You need the license to use this function.
If You Have a Problem Error Codes Agilent FLEX Execution Error When Agilent B1500 causes errors in Agilent FLEX command execution environment, the B1500 returns the following error code and error message. 100 Undefined GPIB command. Send the correct command. 102 Incorrect numeric data syntax. Correct the data syntax. 103 Incorrect terminator position. Correct the command syntax. The number of parameters will be incorrect. 104 Incorrect serial data syntax. 120 Incorrect parameter value.
If You Have a Problem Error Codes For a log sweep, the polarity of the start and stop values must be the same in the WV, WI, WSV, WSI, or WNX command. Also, 0 is not allowed for the start and stop values. 150 Command input buffer is full. Agilent B1500 can receive 256 characters maximum including the terminator at one time. 151 This command is not allowed to this channel. 152 Cannot use failed module. The channel number specifying the module failed the self-test or calibration.
If You Have a Problem Error Codes The internal variables %In and %Rn are not available for the ACH, VAR, and VAR? commands. Do not use the internal variables for the commands. 200 Channel output switch must be ON. To enter the specified command, set the channel output switch to ON. 201 Compliance must be set. To change the source output mode (voltage or current), set the compliance value. 202 Interlock circuit must be closed.
If You Have a Problem Error Codes Send the TM1 command to use the GPIB GET command (TRIGGER statement in HP BASIC). 212 Compliance must be set correctly. Compliance was not set or an incorrect compliance value was set in the DV, DI, PV, PI, PWV, PWI, TDV, TDI, LSV, LSI, LSSV, LSSI, BSV, BSI, BSSV, or BSSI command. Set the compliance value correctly. 213 Cannot perform self-test or calibration. Self-test and calibration cannot be performed in the high voltage state.
If You Have a Problem Error Codes 225 Send WSV, WSI, or WNX to get sync sweep data. If you enable data output of the synchronous sweep source, do not forget to set the synchronous sweep source by the WSV, WSI, or WNX command. For data output, see the FMT command of Programming Guide. 226 Set linear sweep for MM4 or MM5. Only the linear sweep is available for the PWV or PWI command for the pulsed sweep measurement (MM4) or the WV or WI command for the staircase sweep with pulsed bias measurement (MM5).
If You Have a Problem Error Codes 242 QSCV measurement was aborted. Quasi-static CV measurement was aborted by the automatic abort function. 243 Enter MM13 before QSZ. Before the QSZ command, the MM13 command must be entered to set the measurement mode. 244 Set a longer integration time to QST. The integration time is too short to perform the offset measurement. Set a longer value to the integration time parameter of the QST command. 245 Specify a higher measurement range to QSR.
If You Have a Problem Error Codes 270 Search source channel must be set. Before triggering the search measurement or sending the LSSV, LSSI, BSSV, or BSSI command to set the synchronous search source, send the LSV, LSI, BSV, or BSI command to set the primary search source. 271 Search monitor channel must be set. Before triggering the search measurement, send the LGV, LGI, BGV, or BGI command to set the search monitor channel. 273 Search and sync output modes must be the same.
If You Have a Problem Error Codes Before triggering the pulsed spot C measurement, send the PDCV command to set the pulsed voltage source. 282 Send PWDCV to set CV pulse sweep source. Before triggering the pulsed CV measurement, send the PWDCV command to set the pulsed voltage sweep source. 283 Set linear sweep for MM20. Only the linear sweep is available for the PWDCV command for the pulsed CV measurement (MM20). 284 Improper setting of CMU frequency and pulse width.
If You Have a Problem Error Codes 312 SCUU control cable was connected/disconnected. The B1500 must be turned off when the SMU CMU Unify Unit (SCUU) is connected/disconnected. 320 Excess current in CMU. Current that exceeds maximum current at the present voltage range was detected by the CMU. The output switch was set to OFF. 321 This command is not available for CMU. CMU was specified for the SMU dedicated command. Specify SMU. 322 This command is not available for SMU.
If You Have a Problem Error Codes 603 Sweep and pulse channels must be different. Set the sweep source and the pulse source to different channels for the staircase sweep with pulsed bias measurement (MM5). 610 Quasi-pulse source channel must be set. Before triggering the quasi-pulsed spot measurement, send the BDV command to set the quasi-pulse source. 620 TGP specified incorrect I/O port. Specify trigger input for the Ext Trig In port, or trigger output for the Ext Trig Out port by the TGP command.
If You Have a Problem Error Codes The time stamp function is not available for the binary data output format. To use the time stamp function, set the data output format to ASCII. 655 Cannot connect/disconnect series resistor. The series resistor status cannot be changed in the high voltage state. Set the output voltage or the voltage compliance to ±42 V or less to connect or disconnect the series resistor. 656 Series resistor must be OFF for 1 A range.
If You Have a Problem Error Codes 683 Frequency index is not available for CMU correction. 684 AC Voltage is 0 mV. 685 CMU correction is not complete. 2000 SPGU module does not exist. The SPGU channel number must be specified correctly. 2001 SPGU channel does not exist. The SPGU channel number must be specified correctly. 2002 SPGU signal source does not exist. The SPGU signal source number must be specified correctly. 2003 SPGU operation mode must be PG. (SIM 0).
If You Have a Problem Error Codes Set the appropriate count value to SPRM. 2105 Specified load voltage is out of range. Set the appropriate voltage to SPV or ALW. 2106 Specified load voltage of added amplitude is out of range. Set the appropriate voltage to SPV for setting the 3-level pulse output. 2107 Specified voltage is out of absolute limits (can't achieve amplitude). Set the appropriate voltage to SPV. It must be the voltage which can be applied under the present load impedance condition.
If You Have a Problem Error Codes Set the appropriate value to CORRSER?. The period value must be more than delay+interval×count value. 2132 Specified delay for DUT impedance measurement out of absolute limits. Set the appropriate delay time value to CORRSER?. 2133 Specified interval for DUT impedance measurement out of absolute limits. Set the appropriate interval value to CORRSER?. 2134 Specified count for DUT impedance measurement out of absolute limits. Set the appropriate count value to CORRSER?.
If You Have a Problem Error Codes Set the appropriate pattern data to ALW. The output level value in the pattern data must be 0 to ± 40 V in 1 mV resolution. 2204 Load voltage is too small for DUT impedance measurement. Failed to perform the terminal voltage measurement and the load impedance calculation by the CORRSER? command. Set the SPGU output voltage more than 1 V. Set high voltage for high impedance. 2206 Auto correction of load impedance failed. Cannot perform the SPGU automatic level adjustment.
If You Have a Problem Error Codes 3301 Specified output voltage is out of absolute limits. Check the output voltage and set the correct value. The value must be -3 V to +3 V for the 3 V range, -5 V to +5 V for the 5 V range, -10 V to 0 V for the -10 V range, or 0 V to +10 V for the + 10 V range. 3302 Specified voltage output range is invalid. Check the voltage output range and set the correct value. 3303 Invalid measurement mode for current operation mode.
If You Have a Problem Error Codes 3312 Specified ALWG measurement interval time is out of absolute limits. Check the measurement interval time and set the correct value. The value must be 10 ns to 1.34217728 s, in 10 ns resolution. 3313 Specified ALWG measurement instruction code is invalid. Check the measurement event setting and set the correct values. 3314 Specified ALWG range change instruction code is invalid. Check the range event setting and set the correct values.
If You Have a Problem Error Codes Check the current measurement range and set the correct value. 3324 WGMA?,WGMB? command query size is out of absolute limits. Check the data size for WGMA? or WGMB? and set the correct value. 3325 Specified count for spot measurement is out of absolute limits. Check the count value for WGMS? and set the correct value. 3326 Specified interval for spot measurement is out of absolute limits. Check the interval value for WGMS? and set the correct value.
If You Have a Problem Error Codes Agilent B1500A Self-test/Calibration Error When Agilent B1500 fails the self-test or self-calibration, the B1500 returns the following error code and error message. In the error code, N indicates the slot number. If the module is installed in slot 1, and it fails the function test, the error code will be 1760. 700 CPU failed NVRAM read/write test. 701 CPU failed FPGA read/write test. 702 CPU failed H-RESOLN ADC end signal test.
If You Have a Problem Error Codes 2400 SPGU module is in TEST FAIL state. 2401 Digital H/W function test failed. 2402 CPLD access function test failed. 2403 CPLD version check test failed. 2404 CPLD revision check test failed. 2405 FPGA configuration test failed. 2406 FPGA access function test failed. 2407 FPGA version check test failed. 2408 FPGA revision check test failed. 2409 DCM function test failed. 2410 CONVEND interrupt function test failed.
If You Have a Problem Error Codes 2452 4.5 Vref Internal ADC function test failed. 2453 Power Amp initial test failed. 2454 Filter & Amp test failed. 2455 Internal temperature test failed. 2456 Internal output resistance test failed. 2481 Invalid frame configuration. 2482 Frame has no modules. 2483 PLL not locked in slave module. 2484 Reference line is not connected. 2485 Sync line is not connected. 2486 Interrupt line is not available.
If You Have a Problem Error Codes 3013 EEPROM CRC data of RSU calibration data is invalid. 3014 Invalid EEPROM type. 3400 WGFMU module is in TEST FAIL state. 3401 Digital H/W function test failed. 3402 CPLD access function test failed. 3403 FPGA configuration test failed. 3404 FPGA1 access function test failed. 3405 FPGA2 access function test failed. 3406 FPGA1 System Clock DCM function test failed. 3407 FPGA1 DAC Clock DCM function test failed.
If You Have a Problem Error Codes 3426 WGFMU EEPROM CRC data is invalid. 3427 WGFMU EEPROM CRC data of format revision data is invalid. 3428 WGFMU EEPROM CRC data of serial number data is invalid. 3429 WGFMU EEPROM CRC data of system timing data is invalid. 3430 WGFMU EEPROM CRC data of DAC DCM PS data is invalid. 3431 WGFMU EEPROM CRC data of ADC DCM PS data is invalid. 3432 WGFMU EEPROM CRC data of DAC clock edge data is invalid. 3433 WGFMU EEPROM CRC data of ADC clock edge data is invalid.
If You Have a Problem Error Codes 3483 PLL not locked in slave module. 3484 Reference line is not connected. 3485 Sync line is not connected. 3486 Sync Reserve line is not connected. 3487 Interrupt line is not available. 3488 Module service request assertion test failed. 3489 Module service request detection test failed. 3490 Emergency interrupt is not available. 3500 WGFMU calibration failed. 3501 ADC gain calibration failed. 3502 CMR calibration failed.
If You Have a Problem Error Codes N771 SMU failed VF offset calibration. N772 SMU failed VF gain calibration. N773 SMU failed VF gain calibration at 20 V range. N774 SMU failed VF filter offset calibration. N775 SMU failed H-SPEED ADC self-calibration. N776 SMU failed H-SPEED ADC VM offset calibration. N777 SMU failed H-SPEED ADC VM gain calibration. N778 SMU failed IF/IM calibration. N779 SMU failed calibration bus test. N780 SMU failed IM offset calibration.
If You Have a Problem Error Codes N807 CMU failed Vch full scale measurement. N808 CMU failed nominal gain measurement N809 CMU failed extent range X3 adjustment. N810 CMU failed range resistor 50ohm adjustment. N811 CMU failed range resistor 1kohm adjustment. N812 CMU failed range resistor 10kohm adjustment. N813 CMU failed range resistor 100kohm adjustment. N814 CMU failed relative Z calculation. N820 CMU failed correction. N830 CMU failed configuration test.
If You Have a Problem Error Codes N849 CMU failed PLL0 test. N850 CMU failed PLL0 lock test. N851 CMU failed PLL0 lock test. N852 CMU failed DDS test. N853 CMU failed DDS1 test. N854 CMU failed DDS2 test. N855 CMU failed VRD normalizer test. N856 CMU failed RA1 test. N857 CMU failed RA2 test. N858 CMU failed ExR test. N859 CMU failed R_LPF2 f1 test. N860 CMU failed MODEM DAC test. N861 CMU failed N_II_DAC test. N862 CMU failed N_QI_DAC test. N863 CMU failed N_IQ_DAC test.
If You Have a Problem Error Codes N877 SCUU failed LRL test. N880 CMU failed Hcur AC and VRD Fm test. N881 CMU failed SA/RA 32mV test. N882 CMU failed SA/RA 64mV test. N883 CMU failed SA/RA 125mV test. N884 CMU failed SA/RA 250mV test. N885 CMU failed ExR test. N886 CMU failed Bias_chg test. N887 CMU failed R_LPF2/R_HPF_vs test. N888 CMU failed VRD IF test. N889 CMU failed IRM local 0deg test. N890 CMU failed IRM local 90deg test. N891 CMU failed S_LPF1 f1 120kHz test.
If You Have a Problem Error Codes N907 CMU failed Rr/Rf 1kohm test. N908 CMU failed Rr/Rf 10kohm test. N909 CMU failed Rr/Rf 100kohm test. N910 CMU failed TRD IVAmp test. N911 CMU failed N_HPF1/N_LPF1 10kHz test. N912 CMU failed N_HPF1/N_LPF1 200kHz test. N913 CMU failed N_HPF1/N_LPF1 1MHz test. N914 CMU failed N_HPF1/N_LPF1 2MHz test. N915 CMU failed N_HPF1/N_LPF1 5MHz test. N916 CMU failed NA1 test. N917 CMU failed NA2 test. N918 CMU failed NA3 test.
If You Have a Problem Error Codes Setup File Converter Execution Error The followings are the error code for the setup file converter (SetupFileConverter.exe). See “SetupFileConverter.exe” on page 10-53. #01 Maximum length for the file path is 256 characters. #02 fopen failure. Could not open source file. #03 Specify a proper source file. The specified file is unsupported. #04 Specify a proper source file. The specified file is corrupt. #05 fopen failure. Could not open destination file.
If You Have a Problem Error Codes 9-78 Agilent B1500 User’s Guide, Edition 7
10 Application Library and Utilities
Application Library and Utilities This chapter introduces the application library and utility programs included in the Agilent B1500A/EasyEXPERT software.
Application Library and Utilities Application Test Definitions Application Test Definitions Agilent EasyEXPERT software contains the application library which supports the characteristic measurements of CMOS devices, TFT, BJT, diode, resistor, capacitor, varactor, memory, nanotechnology devices such as CNT FET, and so on. The application library includes more than one hundred test definitions. And they are classified into the following categories.
Application Library and Utilities Application Test Definitions Table 10-1 Application Test Definitions Category BJT Test definition name Supported analyzer Required equipment and quantity BC Diode Fwd B1500A,4155B/C,4156B/C SMU 2 BC Diode Rev B1500A,4155B/C,4156B/C SMU 2 BVcbo B1500A,4155B/C,4156B/C SMU 2 BVcei B1500A,4155B/C,4156B/C SMU 3 BVceo B1500A,4155B/C,4156B/C SMU 2 BVebo B1500A,4155B/C,4156B/C SMU 2 CS Diode Fwd B1500A,4155B/C,4156B/C SMU 2 CS Diode Rev B1500A,4155B/C,41
Application Library and Utilities Application Test Definitions Category BJT CMOS Test definition name Supported analyzer Required equipment and quantity Ic-Vc Pulse Ib[3] B1500A,4155B/C,4156B/C SMU 3 Ic-Vc Pulse Vb B1500A,4155B/C,4156B/C SMU 4 Ic-Vc Pulse Vb[3] B1500A,4155B/C,4156B/C SMU 3 Ic-Vc Vb B1500A,4155B/C,4156B/C SMU 4 Ic-Vc Vb[3] B1500A,4155B/C,4156B/C SMU 3 Rb B1500A,4155B/C,4156B/C SMU 4 Re+Rc B1500A,4155B/C,4156B/C SMU 4 Re B1500A,4155B/C,4156B/C SMU 4 Simple Gummel
Application Library and Utilities Application Test Definitions Category CMOS Discrete GenericTest Memory Test definition name Supported analyzer Required equipment and quantity Id-Vg[3] B1500A,4155B/C,4156B/C SMU 3 IonIoffSlope B1500A,4155B/C,4156B/C SMU 4 Isub-Vg B1500A,4155B/C,4156B/C SMU 4 QSCV[4] B1500A SMU 5 QSCV C Offset Meas B1500A SMU 2 Simple Cgb B1500A MFCMU 1 Simple Vth B1500A,4155B/C,4156B/C SMU 4 Vth Const Id B1500A,4155B/C,4156B/C SMU 4 Vth gmMax B1500A,4155B/C
Application Library and Utilities Application Test Definitions Category Memory Test definition name Supported analyzer Required equipment and quantity NandFlash2 Retention(WrittenCell) B1500A SMU 2, HRSMU/ASU 1, 81110A (2 outputs) 1 NandFlash2 Vth(ErasingTimeDependence) B1500A SMU 1, HRSMU/ASU 2, 81110A (2 outputs) 1 NandFlash2 Vth(WritingTimeDependence) B1500A SMU 2, HRSMU/ASU 1, 81110A (2 outputs) 1 NandFlash2 WordDisturb(ErasedCell) B1500A HRSMU/ASU 3, 81110A (2 outputs) 1 NandFlash2 Wor
Application Library and Utilities Application Test Definitions Category Memory MixedSignal NanoTech Test definition name Supported analyzer Required equipment and quantity NorFlash Vth(ErasingTimeDependence) B1500A [SPGU 1, SMU 2, HRSMU/ASU 2] or [SPGU 1, SMU 4, 16440A/16445A 1] NorFlash Vth(WritingTimeDependence) B1500A [SPGU 1, SMU 2, HRSMU/ASU 2] or [SPGU 1, SMU 4, 16440A/16445A 1] NorFlash WordDisturb(ErasedCell) B1500A [SPGU 1, SMU 2, HRSMU/ASU 2] or [SPGU 1, SMU 4, 16440A/16445A 1] Nor
Application Library and Utilities Application Test Definitions Category NanoTech PwrDevice Reliability Test definition name Supported analyzer Required equipment and quantity CNT Id-Vd B1500A,4155B/C,4156B/C SMU 4 CNT Id-Vg B1500A,4155B/C,4156B/C SMU 4 CNT Id-Vg-Time B1500A,4156B/C SMU 4 CNT IV Sweep B1500A,4155B/C,4156B/C SMU 2 CNT R-I Kelvin 2SMU B1500A,4155B/C,4156B/C SMU 2 CNT R-V Kelvin 2SMU B1500A,4155B/C,4156B/C SMU 2 CNT Vth gmMax B1500A,4155B/C,4156B/C SMU 4 BVdss[3] Pwr
Application Library and Utilities Application Test Definitions Category Reliability Structure Test definition name Supported analyzer Required equipment and quantity EM Istress[2] B1500A SMU 2 EM Istress2[2] B1500A SMU 2 EM Istress[6] B1500A SMU 6 EM Istress2[6] B1500A SMU 6 EM Vstress B1500A SMU 4 EM Vstress2 B1500A SMU 4 EM Vstress[2] B1500A SMU 2 EM Vstress2[2] B1500A SMU 2 EM Vstress[6] B1500A SMU 6 EM Vstress2[6] B1500A SMU 6 HCI 3devices B1500A SMU 8 HCI B1500A
Application Library and Utilities Application Test Definitions Category Structure Test definition name Supported analyzer Required equipment and quantity Diode BVAndCj-V ASU B1500A MFCMU 1, HRSMU/ASU 2 Diode BVAndCj-V SCUU B1500A MFCMU 1, SMU 2, SCUU 1, GSWU 1 Ig-Vg Iforce B1500A,4155B/C,4156B/C SMU 2 Ig-Vg Vforce B1500A,4155B/C,4156B/C SMU 2 Interconnect CouplingCap B1500A MFCMU 1 Interconnect OverlapCap B1500A MFCMU 1 Junction BV B1500A,4155B/C,4156B/C SMU 2 Junction DcParam B15
Application Library and Utilities Application Test Definitions Category Utility WGFMU (needs test definitions of WGFMU Utility) WGFMU Utility (cannot be executed directly) NOTE Test definition name Supported analyzer Required equipment and quantity Measure Diff-V B1500A,4155B/C,4156B/C 3458A 1 QSCV C Offset Meas B1500A SMU 2 ResetPG B1500A,4155B/C,4156B/C 81110A (2 outputs) 1 Subsite move B1500A,4155B/C,4156B/C Wafer prober 1 CVSweep4284_a B1500A,4155B/C,4156B/C 4284A 1 or E4980A 1 Fa
Application Library and Utilities QSCV Measurement Supplemental Data QSCV Measurement Supplemental Data This section provides the following supplemental data of the QSCV measurement. You can perform the QSCV measurement by using the QSCV[2] application test. NOTE • “Maximum Measurement Value” • “Considering Measurement Accuracy” To obtain stable QSCV measurement results, use two source monitor units (SMU). Assign the current meter and the voltage sweep source to the individual SMU.
Application Library and Utilities QSCV Measurement Supplemental Data Figure 10-1 Maximum Measurement Value Using 10 pA and 100 pA Range: HRSMU/ASU 1.00E-06 1.00E-07 Integration Time 2s Capacitance (F) 1.00E-08 1.00E-09 1.00E-10 1s 1.00E-11 500ms 1.00E-12 300ms 1.00E-13 1.00E-14 1.00E-15 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) Maximum Measurement Value Using 1 nA Range: HPSMU/MPSMU/HRSMU/ASU 1.00E-05 Integration Time 2s 1.00E-06 Capacitance (F) Figure 10-2 1.00E-07 1s 1.
Application Library and Utilities QSCV Measurement Supplemental Data Figure 10-3 Maximum Measurement Value Using 10 nA Range: HPSMU/MPSMU/HRSMU/ASU 1.00E-04 Integration Time 2s Capacitance (F) 1.00E-05 1.00E-06 1s 1.00E-07 500ms 300ms 1.00E-08 100ms 1.00E-09 50ms 30ms 1.00E-10 1.00E-11 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) Maximum Measurement Value Using 100 nA Range: HPSMU/MPSMU/HRSMU/ASU 1.00E-03 Integration Time 2s 1.00E-04 Capacitance (F) Figure 10-4 1.00E-05 1s 1.
Application Library and Utilities QSCV Measurement Supplemental Data Maximum Measurement Value Using 1 μA Range: HPSMU/MPSMU/HRSMU/ASU 1.00E-02 Integration Time 2s 1.00E-03 Capacitance (F) Figure 10-5 1.00E-04 1s 1.00E-05 500ms 300ms 1.00E-06 100ms 1.00E-07 50ms 30ms 1.00E-08 1.00E-09 0.001 0.01 0.
Application Library and Utilities QSCV Measurement Supplemental Data Considering Measurement Accuracy NOTE The measurement accuracy is not the specifications but the reference data. Applicable conditions for supplemental data: Leak current compensation function ON, Offset cancel function ON, QSO mode OFF The capacitance measurement accuracy can be calculated by the following formula: Measurement accuracy = A (%) + B (F) A: Reading accuracy. % accuracy of the measured value. B: Offset accuracy.
Application Library and Utilities QSCV Measurement Supplemental Data Table 10-2 Measurement Range Constant Value for Calculating the Measurement Accuracy: HRSMU/ASU Voltage Output Range Constant 0.5 V 10 pA 2V 20 V 40 V 100 V Ap 0.47 0.47 0.47 0.47 0.48 0.48 Bp 0.014 0.029 0.051 0.15 0.30 0.72 Normal 0.009 0.011 0.015 0.03 0.06 0.13 4155C/4156C compatible Cp 0.013 Dp 0.001 Ao 0.04 Normal 0.07 4155C/4156C compatible Bo 1.3E-16 Boc 1.1E-05 Co 5.4E-15 Coc 2.
Application Library and Utilities QSCV Measurement Supplemental Data Table 10-3 Measurement Range Constant Value for Calculating the Measurement Accuracy: MPSMU/HRSMU/ASU Voltage Output Range Constant 0.5 V 1 nA 2V 40 V 100 V 200 V Ap 0.11 0.11 0.11 0.11 0.12 0.12 Bp 0.014 0.029 0.051 0.153 0.298 0.720 Normal 0.009 0.011 0.015 0.033 0.056 0.131 4155C/4156C compatible Cp 0.026 Dp 0.014 Ao 0.03 Normal 0.04 4155C/4156C compatible Bo 1.7E-15 Boc 1.3E-04 Co 5.
Application Library and Utilities QSCV Measurement Supplemental Data Measurement Range Voltage Output Range Constant 0.5 V 100 nA 2V 40 V 100 V 200 V Ap 0.06 0.06 0.06 0.06 0.07 0.07 Bp 0.014 0.029 0.051 0.153 0.298 0.720 Normal 0.009 0.011 0.015 0.033 0.056 0.131 4155C/4156C compatible Cp 0.209 Dp 0.023 Ao 0.03 Normal 0.04 4155C/4156C compatible Bo 2.4E-15 Boc 2.0E-04 Co 8.7E-12 Coc 4.6.0E-04 Do 2.4E-15 Doc 1 μA 20 V QSCV Operating Mode 2.0E-04 Ap 0.
Application Library and Utilities QSCV Measurement Supplemental Data Table 10-4 Measurement Range Constant Value for Calculating the Measurement Accuracy: HPSMU Voltage Output Range Constant 2V 1 nA 20 V 100 V 200 V Ap 0.11 0.11 0.12 0.12 0.14 Bp 0.033 0.149 0.293 0.717 1.459 Normal 0.0100 0.03 0.05 0.12 0.2347 4155C/4156C compatible Cp 0.026 Dp 0.014 Ao 0.03 Normal 0.04 4155C/4156C compatible Bo 1.7E-15 Boc 1.3.0E-04 Co 5.9E-14 Coc 4.5.0E-04 Do 1.
Application Library and Utilities QSCV Measurement Supplemental Data Measurement Range Voltage Output Range Constant 2V 100 nA 20 V 100 V 200 V Ap 0.06 0.06 0.07 0.07 0.09 Bp 0.033 0.149 0.293 0.717 1.459 Normal 0.0100 0.03 0.05 0.12 0.2347 4155C/4156C compatible Cp 0.209 Dp 0.023 Ao 0.01 Normal 0.04 4155C/4156C compatible Bo 2.4E-15 Boc 2.0E-04 Co 8.7E-12 Coc 4.6.0E-04 Do 2.4E-15 Doc 1 μA 40 V QSCV Operating Mode 2.0E-04 Ap 0.06 0.06 0.07 0.07 0.
Application Library and Utilities QSCV Measurement Supplemental Data Table 10-5 Conditions for Calculating Measurement Accuracy Conditions Measurement range 10 pA 100 pA 1 nA 10 nA 100 nA 1 μA 10 pA 100 pA 1 nA 10 nA 100 nA 1 μA QSCV operating mode Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal Normal 4155C/4156C compatible Output range 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-6 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 10 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-7 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 100 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-8 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 100 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-9 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 100 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-10 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-12 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-13 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-14 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-15 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-16 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-06 1.E-07 Offset Accuracy (F) Figure 10-17 1.E-08 1.E-09 1.E-10 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 100 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-06 1.E-07 Offset Accuracy (F) Figure 10-18 1.E-08 1.E-09 1.E-10 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 100 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-06 1.E-07 Offset Accuracy (F) Figure 10-19 1.E-08 1.E-09 1.E-10 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 100 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-06 1.E-07 Offset Accuracy (F) Figure 10-20 1.E-08 1.E-09 1.E-10 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 100 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-21 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV M-easurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 μA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V)- 1.E-09 1.E-10 Offset Accuracy (F) Figure 10-22 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 μA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 10-23 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 μA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-08 1.E-09 Offset Accuracy (F) Figure 10-24 1.E-10 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: Normal Measurement Range: 1 μA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-25 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: 4155C/4156C compatible Measurement Range: 10 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-26 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: 4155C/4156C compatible Measurement Range: 100 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-27 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: 4155C/4156C compatible Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-28 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: 4155C/4156C compatible Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-06 1.E-07 Offset Accuracy (F) Figure 10-29 1.E-08 1.E-09 1.E-10 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: 4155C/4156C compatible Measurement Range: 100 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities QSCV Measurement Supplemental Data Calculation Example of Measurement Accuracy: HRSMU/ASU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 10-30 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: QSCV Operating Mode: 4155C/4156C compatible Measurement Range: 1 μA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Application Library and Utilities License Management Tool License Management Tool The licence management tool is the program used to install the license of the Agilent B1540A-002 EasyEXPERT Plus edition or the Agilent B1541A-002 Desktop EasyEXPERT Plus edition. This program is also used to confirm the licenses already installed and the host ID of the B1500A or the controller for Desktop EasyEXPERT. To launch program Click Start > All Programs > Agilent B1500A EasyEXPERT > Licence Management Tool.
Application Library and Utilities Setup File Converter Setup File Converter The setup file converter is the program which converts the Agilent 4155A/4156A/ 4155B/4156B/4155C/4156C setup file (extension: DAT or MES) and creates the EasyEXPERT setup file (extension: XTS). This program can convert the setup information but cannot convert the test result data. To launch setup file converter Click Start > All Programs > Agilent B1500A EasyEXPERT > 4155,4156 Setup File Converter.
Application Library and Utilities Setup File Converter Setup File Converter GUI The setup file converter provides the following GUI. File menu Select Files Opens the Select 4155/4156 MES Files or DAT Files dialog box used to specify the 4155/4156 setup files to convert. Convert Files Performs conversion and creates XTS file. This program overwrites the file of the same name. Clear Clears the Selected Files area and the Log area. Quit Closes the setup file converter.
Application Library and Utilities Utility Programs Utility Programs The following useful programs are stored in the following folder on the Agilent B1500A internal hard disk drive. Remember that they are just sample programs. C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities\ • “Prober Control” • “SetupFileConverter.exe” • “sleep.
Application Library and Utilities Utility Programs SetupFileConverter.exe This program is the script version of the setup file converter. This program converts the 4155A/4156A/4155B/4156B/4155C/4156C setup file (.DAT or .MES) and creates the EasyEXPERT setup file (.XTS). This program can convert the setup information but cannot convert the test result data. Execution environment Windows 2000 Professional, Windows XP Professional or Home edition Syntax SetupFileConverter.
Application Library and Utilities Utility Programs XTS file creation example 1 The .XTS file can be created by using Command Prompt as shown below. 1. Create your working folder (for example, C:\415xConvert\ ). 2. Copy the 4155/4156 setup files to be converted and the SetupFileConverter.exe file, and paste them to the working folder. 3. Open Command Prompt. 4. On Command Prompt, execute SetupFileConverter.exe as shown below. This creates the .
Application Library and Utilities Utility Programs To read XTS file Use the import function to read the created .XTS file on the EasyEXPERT. Open the Import Test Setup window by clicking File > Import Test Setup... on the Classic Test screen. Specify the .XTS file to be imported, and click Open. About conversion results The setup file conversion is not complete. The following are the expected differences. When you use the .
Application Library and Utilities Utility Programs sleep.exe This execution file is used to put a wait time in the test execution flow of an application test. Execution environment Agilent EasyEXPERT application test execution environment File Name C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities\sleep.exe Parameters The following parameters are available for this file. To use sleep.
Application Library and Utilities Utility Programs XSLT The XSLT (XSL-Transformation, eXtensible Stylesheet Language Transformation) filter files are used to export test records. The fifteen filter files listed below are stored in the C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities\XSLT folder. See Table 10-7. Filter files that contain csv in the file name export test record in the format that uses a comma (,) as data separator.
Application Library and Utilities Utility Programs Table 10-7 XSLT Filter Files Group 1 2 3 File name Description • meas-csv.xsl Filter files for exporting the measurement data only • meas-tab-sv.xsl Classic test record export example is shown in Table 10-8. • meas-xmlss.xsl • meas-index-csv.xsl Filter files for exporting the measurement data with the index • meas-index-tab-sv.xsl Classic test record export example is shown in Table 10-9. • meas-index-xmlss.xsl • meas-meta-csv.
Application Library and Utilities Utility Programs Table 10-8 Example of the data exported by using the XSLT Filter File Group 1 Vd Vg Index Time Id ABS_ID Slope 0 1 1 0.00264 -0.00012 0.00012 0.004346 0.06 1 2 0.01265 0.000398 0.000398 0.004346 0.12 1 3 0.02265 0.000902 0.000902 0.004346 : : : Table 10-9 : : : : Example of the data exported by using the XSLT Filter File Group 2 No. Vd Vg Index Time Id ABS_ID Slope 1 0 1 1 0.00264 -0.00012 0.00012 0.
Application Library and Utilities Utility Programs Table 10-11 Example of the data exported by using the XSLT Filter File Group 4 I/V Sweep Trng Id-Vd Record Time 04/04/2007 08:36:42 Device ID Count 2 Flag Remarks No. : Vd Vg Index Time Id ABS_ID Slope 1 0 1 1 0.00264 -0.00012 0.00012 0.004346 2 0.06 1 2 0.01265 0.000398 0.000398 0.004346 3 0.12 1 3 0.02265 0.000902 0.000902 0.
Application Library and Utilities Utility Programs Filter File Modification Example This section explains the modification example of a filter file. In this example, a filter file of group 5 is used. The group 5 filter files will export the data that contains the test setup information. To obtain the data without the setup information, modify the filter file as shown below, also see Figure 10-31, and export data by using the filter file after modification.
Application Library and Utilities Utility Programs Modification Example Figure 10-31 [VO WHPSODWH PDWFK VWD 7HVW3DUDPHWHU/LVW ! [VO DSSO\ WHPSODWHV VHOHFW VWD 3DUDPHWHU ! [VO ZLWK SDUDP QDPH SDUPWDJ !7HVW3DUDPHWHU [VO ZLWK SDUDP! [VO DSSO\ WHPSODWHV! [VO WHPSODWH! [VO WHPSODWH PDWFK VWD 'XW3DUDPHWHU/LVW ! [VO WHPSODWH! [VO WHPSODWH PDWFK VWD 7HVW3DUDPHWHU/LVW ! [VO WHPSODWH! uËh¿É_uU=Ë [VO WHPSODWH PDWFK VWD 'XW3DUDPHWHU/LVW ! [VO DSSO\ WHPSO
Application Library and Utilities Utility Programs Table 10-12 Example of the data exported by using the filter file before modification SetupTitle Trng Id-Vd PrimitiveTest I/V Sweep TestParameter Channel.Unit TestParameter SMU2:HP SMU3:HR SMU4:HR Channel.IName Id Ig Is Isub TestParameter Channel.VName Vd Vg Vs Vsub : : : : : MetaData TestRecord.Entr true : : : : : AnalysisSetup Analysis.Setup.
Application Library and Utilities Utility Programs Table 10-14 Filter File Reference Name Reference name Description sta:TestData Indicates a test result data saved in an EasyEXPERT test result record sta:MeasurementData Indicates a measurement result data saved in a test result data sta:DataVectorSet Indicates a set of vector data saved in a measurement result data sta:TestSetup Indicates a test setup data saved in a test result data sta:Title Indicates test setup name, SetupTitle in export da
Application Library and Utilities Utility Programs Table 10-15 Label Export Data Components for Classic Test Result Description Example (csv output) SetupTitle Title of this test setup Trng_Id_Vd PrimitiveTest Setup name of this classic test I/V Sweep TestParameter Parameter name and setup value of Channel Setup, Measurement Setup, Function Setup, Auto Analysis Setup, and Display Setup. Channel.Unit, SMU1:HP, SMU2:HP, SMU3:HR, SMU4:HR Data file contains a lot of rows for TestParameter.
Application Library and Utilities Utility Programs Table 10-16 Export Data Components for Application Test Result Label Description Example (csv output) SetupTitle Title of this test setup Trng_Id_Vd ApplicationTest Setup name of this application test Trng_Id_Vd, Public TestParameter Two rows. The upside is for the test parameter names. The downside is for the test parameter values. Order sensitive. For example, Vd=0.1 in Example.
Application Library and Utilities Desktop EasyEXPERT Desktop EasyEXPERT The Desktop EasyEXPERT software CD-ROM is included with Agilent B1500A. This section describes the following topics.
Application Library and Utilities Desktop EasyEXPERT About Desktop EasyEXPERT The Desktop EasyEXPERT software provides the following additional advantages to the B1500A, allowing you to minimize the amount of offline tasks performed on B1500A and increase the working ratio for measurements. • Allows B1500A to be controlled from an external computer via GPIB while online. • Allows test setup to be created on an external computer while offline.
Application Library and Utilities Desktop EasyEXPERT System Requirements The following are the minimum requirement for executing Desktop EasyEXPERT revision A.03.20 or later. Operating system and service pack Microsoft Windows XP Professional SP2 Microsoft Windows Vista Business SP1 Processor Intel Celeron 2 GHz Memory 512 Megabytes DDR266 Display XGA 1024×768 (SXGA 1280×1024 recommended) HDD .
Application Library and Utilities Desktop EasyEXPERT To Install Desktop EasyEXPERT To install Desktop EasyEXPERT onto your computer, follow the procedure below. 1. Insert the Desktop EasyEXPERT software CD-ROM into the CD-ROM drive. 2. Execute Setup.exe and follow the instructions of the setup wizard. 3. Wait for installation to complete, and remove the CD-ROM from the CD-ROM drive.
Application Library and Utilities Desktop EasyEXPERT To Start Desktop EasyEXPERT To launch Desktop EasyEXPERT, follow the procedure below. 1. Double click the Start EasyEXPERT icon or click Start > All Programs > Start EasyEXPERT. The Execution Mode dialog box is displayed. 2. Select the execution mode, Online or Offline. If you select the Online mode, set the GPIB configuration. See “Execution Mode dialog box” on page 10-71. 3. Click the OK button. The Start EasyEXPERT window is displayed. 4.
Application Library and Utilities Desktop EasyEXPERT Start EasyEXPERT window The Start EasyEXPERT window provides the following graphical user interface. Start EasyEXPERT This button launches Desktop EasyEXPERT. File menu Exit closes the Start EasyEXPERT window. Option menu Execution Mode opens the Execution Mode dialog box. EasyEXPERT Database provides the following three functions.
Application Library and Utilities Desktop EasyEXPERT To Change Execution Mode and GPIB Settings To change the Desktop EasyEXPERT execution mode or the GPIB configuration, follow the procedure below. 1. Launch Start EasyEXPERT. If the Execution Mode dialog box is not opened, click Option > Execution Mode. If Desktop EasyEXPERT is running, exit it. And in the Start EasyEXPERT window, click Option > Execution Mode. 2. Select the execution mode, Online or Offline.
Application Library and Utilities Desktop EasyEXPERT Using 4155B/4156B/4155C/4156C This section describes the notices when using Desktop EasyEXPERT and 4155/4156. 4155/4156 4155/4156 firmware revision supported by Desktop EasyEXPERT Firmware Revision • HOSTC: 03.08 or later • 4155/4156 Functions Desktop EasyEXPERT SMUC: 04.
Application Library and Utilities Desktop EasyEXPERT Calibration Configuration, Main Frame Differences on Calibration window • Calibration window provides Module Self Calibration screen only. • Module Self Calibration screen provides Enable Auto Calibration only. Differences on Configuration window Main Frame screen • Line Frequency just displays the setting of 4155/4156. • Firmware Rev. displays as follows. [HOSTC Rev.]:[SMUC Rev.]:[ADC Rev.
Application Library and Utilities Desktop EasyEXPERT Advanced Setup Restrictions for Standard Edition Table 10-17 Differences on Advanced Setup • Series R always shows NONE. • Wait Time Control is not supplied. There are the following restrictions for the Desktop EasyEXPERT Standard edition. • I/V-t Sampling classic test is not supported. • VSU, VMU, and PGU are not supported. • Agilent E5250A Switching Matrix is not supported.
