Agilent B1500A Semiconductor Device Analyzer User’s Guide Agilent Technologies
Notices © Agilent Technologies, Inc. 2005 - 2013 Warranty No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws. The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions.
DECLARATION OF CONFORMITY According to EN ISO/IEC 17050-1:2004 Manufacturer’s Name: Manufacturer’s Address: Agilent Technologies Singapore (International) Pte. Ltd. No.
DECLARATION OF CONFORMITY According to EN ISO/IEC 17050-1:2004 Manufacturer’s Name: Manufacturer’s Address: Agilent Technologies Singapore (International) Pte. Ltd. No.
COMPLIANCE WITH GERMAN NOISE REQUIREMENTS This is to declare that this product is in conformance with the German Regulation on Noise Declaration for Machines (Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland). • Herstellerbescheinigung GERÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T.
Safety Summary The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the instrument. In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.
• GROUND THE INSTRUMENT This is Safety Class I instrument. To minimize shock hazard, the instrument chassis and cabinet must be connected to an electrical ground. The power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards. • DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes. Operation of any electrical instrument in such an environment constitutes a definite safety hazard.
Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below. Direct current. ` Alternating current. Earth ground terminal. Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment. Frame or chassis terminal.
&$7 , IEC Measurement Category I The CE mark shows that the product complies with all applicable European Directives. The CSA mark is a registered trademark of the Canadian Standards Association. The C-Tick mark is a registered trademark of the Australian Communications Authority. This signifies compliance with the Australian EMC Framework Regulations under the terms of the Radio communications Act. This ISM device complies with Canadian ICES-001.
Power Supply and Measurement Safety • Power Supply Safety This instrument can output high currents and voltages. Make sure that the load or device under test can safely handle the output current and voltage. Also, make sure that the connection leads can safely withstand the expected currents and are insulated for the expected voltages. The instrument outputs may be connected so as to float relative to earth ground.
• Source/Monitor Terminals Source/monitor unit, SMU, can simultaneously perform DC voltage or current output and measurement. Typical SMU has the Force, Guard, Sense, and Circuit Common terminals as shown below. Normally the Force, Guard, and Sense terminals are the same potential. Voltage marked around the terminals indicates the Protection Limits.
High Voltage Shock Hazard Agilent B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for MPSMU/HRSMU) at the Force, Guard, and Sense terminals. To prevent electric shock hazard, the following safety precautions must be observed during the use of Agilent B1500A. • Use a three-conductor AC power cable to appliance coupler (inlet) and the instrument to an electric ground (safety ground).
Gefahr durch Hochspannung Von den Geräten Agilent B1500A können Spannungen an den Anschlüssen “Force”, “Guard” und “Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag vorzubeugen, ist bei der Benützung der Geräte Agilent B1500A folgendes zu beachten. • Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung (Eingang) und schließen Sie das Instrument an eine Erdung an (Sicherheitserdung).
Danger de choc dû à une haute tension Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositif Agilent B1500A peut être sortie aux bornes Force, Guard et Sense. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle. • Utilisez un câble d’alimentation CA à trois conducteurs vers le coupleur secteur (entrée) et branchez l’instrument sur une mise électrique à la terre (prise de terre de sécurité).
高電圧感電注意 Agilent B1500A の Force、Guard、Sense 端子には、危険電圧が出力されることがあ ります（HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100 Vdc） 。 感電事故防止のため、必ず以下の事柄を守ってください。 • 3 極電源ケーブルを使用して本器を接地してください。 • ドアを開くことによって開放されるインターロック回路を装備し、被測定デバ イスとのインタフェースを覆うことのできるシールド・ボックスを用意してく ださい。 • 測定を開始する前にはインターロック回路を本器の Interlock 端子に接続してく ださい。 • インターロック機能が正常であることを定期的に確認してください。 • Force、Guard、Sense 端子に繋がる接続部に触れる前には、本器の電源を切断し てください。また、測定系のキャパシタを放電してください。電源を切らない 場合は、以下の事項を全て実施してください。 • • Stop キーを押して Measurement インジケータが消灯したことを確認してくだ さい。 •
Product Stewardship • Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/EC This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in domestic household waste. Product Category: With reference to the equipment types in the WEEE directive Annex 1, this product is classified as a “Monitoring and Control instrumentation” product. Do not dispose in domestic household waste.
Precautionary Statement Agilent B1500A Semiconductor Device Analyzer operates in the Microsoft Windows environment. Agilent B1500A requires Agilent EasyEXPERT software, a specially-designed Windows application program. • About guarantee and support for Agilent B1500A Agilent Technologies guarantees and supports the performance of Agilent B1500A for the same condition as the preload condition when shipped from the factory.
Working in Comfort To optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly. With that in mind, we have developed some set-up and use recommendations for you to follow based on established ergonomic principles. Improper and prolonged use of keyboards and input devices are among those tasks that have been associated with repetitive strain injury (RSI) to soft tissues in the hands and arms.
• Performing an activity in an awkward or unnatural posture. • Maintaining static posture for prolonged periods. • Failing to take frequent short breaks. • Other environmental and psychosocial factors. In addition, there have been reports associating the occurrence of RSI with the use of keyboards, mice, and other input devices. Also, certain medical conditions, such as rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of injury.
In This Manual This manual describes the product overview and installation information of Agilent Technologies B1500A. This manual consists of the following chapters: • Chapter 1, “Getting Started” This chapter describes basic operations of Agilent B1500A. • Chapter 2, “Introduction” This chapter describes basic features of Agilent B1500A. • Chapter 3, “Installation” This chapter describes installation, device connection, and maintenance.
Contents 1. Getting Started To Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 To Turn B1500A On . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 To Turn B1500A Off. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 To Launch EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents HPSMU - High Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19 MPSMU - Medium Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22 MCSMU - Medium Current SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26 HRSMU - High Resolution SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28 MFCMU - Multi Frequency CMU . . . . . . . . . . . . . .
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27 Mounting Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29 To Make an Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Desktop EasyEXPERT Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-50 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-51 5.
1 Getting Started
Getting Started This chapter describes the basic operations of Agilent B1500A. Before learning the product details, let’s try to use the B1500A briefly. The operations need the B1500A, power cable, and USB keyboard only (USB mouse and stylus pen are optional). Agilent B1500A also requires Agilent EasyEXPERT software as its graphical user interface. During the operations, you will not connect device under test. Open all measurement terminal. This chapter consists of the following sections.
Getting Started To Turn On/Off B1500A To Turn On/Off B1500A NOTE When turning the B1500A on Open the measurement terminals at the device side when turning the B1500A on. Also disconnect the device from the measurement terminals and open the measurement terminals after the test. If you leave the connection with the device, the device may be damaged by unexpected operations or charge-up of measurement cables.
Getting Started To Turn On/Off B1500A To Turn B1500A On 1. Connect the power cable from Agilent B1500A to an AC power outlet. 2. Connect the USB keyboard to the B1500A. Optionally, connect the USB mouse to the B1500A. 3. Press the Standby switch (lower right corner of the front panel). Windows, measurement module initialization, and self-calibration will start. For the Windows logon screen, log on Windows.
Getting Started To Turn On/Off B1500A NOTE Agilent B1500A has the following front panel user interface. • Stop Stops the present measurement or source output immediately. • Rotary knob Rotating the knob moves the marker on the graph window, or increases/decreases/changes the value in the active entry field. Pressing the knob sets or enters the value. • Softkeys Seven softkeys are available. Used to select one for the entry field specified or the dialog box.
Getting Started To Launch EasyEXPERT To Launch EasyEXPERT 1. If the automatic start function is off, the Start EasyEXPERT button is displayed. Click the button and wait until the EasyEXPERT main screen or workspace selection screen is displayed. NOTE Workspace is the space created in Agilent B1500A’s internal hard disk drive, and is used to store the test setup, test result data, and so on. The workspace can be created and allocated for each user. 2.
Getting Started To Launch EasyEXPERT If Only One Workspace Exists For the screen as shown in Figure 1-1, perform the following steps. • If you do not want to create a workspace, select the Yes radio button and click OK. Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test Mode” on page 1-12, or “To Use Classic Test Mode” on page 1-14. • If you want to create a workspace, select the No, I want to start a new session. radio button and click Next.
Getting Started To Launch EasyEXPERT To Create Workspace For the screen as shown in Figure 1-2, perform the following steps. To cancel creating workspace, click Prev. 1. Enter the name of the new workspace into the above-entry field. Check Allow other users to access this workspace box if you want to create a public workspace that is opened for all users. 2. If you are the owner of the existing workspace, you can change the name of the existing workspace.
Getting Started To Launch EasyEXPERT To Select Workspace For the screen as shown in Figure 1-3, perform the following steps. This example selects the workspace named as test that is a private workspace. 1. Select Your Workspaces radio button. 2. Select test and click Continue. Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test Mode” on page 1-12, or “To Use Classic Test Mode” on page 1-14. If you want to manage workspaces, click the Manage Workspaces button.
Getting Started To Use Tracer Test Mode To Use Tracer Test Mode The following procedure performs the tracer test setup. 1. Click the Tracer Test tab on the main screen. The tab is in the leftmost column on the screen. The I/V Trace screen is displayed. See Figure 1-4. 2. Set the channels at the field below the graph as shown in Table 1-1. 3. Set the measurement condition at the right field of the graph as shown in Table 1-3. 4.
Getting Started To Use Tracer Test Mode Table 1-3 I/V Trace Measurement Setup VAR1 Figure 1-4 CONST Mode LIN-SGL Unit SMU2 Start 0 V Source 0 V Stop 1 V Compliance 5 mA Step 10 mV NOS 101 Interlacing 1 Compliance 5 mA Pwr Comp. OFF Meas.
Getting Started To Use Application Test Mode To Use Application Test Mode For the screen as shown in Figure 1-5, perform the following procedure. Figure 1-5 Display Example of EasyEXPERT Main Screen 1. Click the Application Test tab on the main screen. The tab is in the leftmost column on the screen. 2. Set the Category field. For example, check the CMOS only. The Library field lists the test definitions. 3. Select a test definition at the Library field.
Getting Started To Use Application Test Mode To enter the value, use the USB keyboard or the screen/numeric keyboard opened by clicking the right button of the entry field. See “To Perform Measurement” on page 1-16 to start measurement. NOTE Test Definitions Test definitions are the built-in test setups that have been defined and stored in the EasyEXPERT as the application library. The EasyEXPERT contains more than two hundred test definitions. You can execute the test without modifications.
Getting Started To Use Classic Test Mode To Use Classic Test Mode The following procedure performs the I/V Sweep classic test setup. 1. Click the Classic Test tab on the main screen. The tab is in the leftmost column on the screen. 2. Click I/V Sweep and Select button sequentially. The I/V Sweep Channel Setup screen is displayed. See Figure 1-7. 3. Set the Channel Setup parameters as shown in Table 1-4. 4. Click the Measurement Setup tab and set the parameters as shown in Table 1-5. 5.
Getting Started To Use Classic Test Mode See “To Perform Measurement” on page 1-16 to start measurement. Table 1-4 I/V Sweep Channel Setup Unit V Name Mode a I Name Function SMU1 V1 I1 V VAR1 SMU2 V2 I2 V CONST a. Channel output mode. Set I or IPULSE for the current output and voltage measurement. Set V, VPULSE, or COMMON for the voltage output and current measurement.
Getting Started To Perform Measurement To Perform Measurement 1. Click the Single button (upper right on the main screen) to start measurement. This opens the Data Display window and starts a single sweep measurement. After the measurement, the measurement data is displayed on the Data Display window. For the measurement after performing “To Use Classic Test Mode” on page 1-14, you will have the test result as shown in Figure 1-8.
Getting Started To Perform Measurement To Use Test Result Editor The Test Result Editor provides the following GUI to set a flag and remarks to the test result record. • Save button and Delete button Divides test records into groups, Save and Delete. Test records in Save-group are always listed in the lower area of the EasyEXPERT main screen. Test records in Delete-group can be listed when Results > Filter > Show Deleted Data is checked. • Flags buttons The following buttons are available.
Getting Started To Use Analysis Tools To Use Analysis Tools The Data Display window provides several analysis functions. • View menu: used to adjust the graph scale. • Marker menu: used to display and control the marker. • Cursor menu: used to display and control the cursor. • Line menu: used to display and control the lines. When the marker, cursor, and lines are effective, their parameters are also displayed on the X-Y Graph Plot area.
2 Introduction
Introduction This chapter describes the basic functions and features of Agilent B1500A Semiconductor Device Analyzer, and consists of the following sections: NOTE • “Overview” • “Front View” • “Rear View” • “Measurement Modules” Application Library Agilent B1500A has installed Agilent EasyEXPERT software as the user interface. The EasyEXPERT contains an application library that is a set of test definitions.
Introduction Overview Overview Agilent B1500A Semiconductor Device Analyzer is the new generation one box solution for the semiconductor device DC/AC parametric measurement and analysis application. Agilent B1500A provides the DC voltage/current output capability, DC voltage/current measurement capability, and AC signal output and impedance measurement capability. So you can perform a current-voltage sweep measurement and a capacitance-voltage sweep measurement for example by one instrument.
Introduction Overview • Agilent B1500A Semiconductor Device Analyzer Mainframe that provides the ground unit (GNDU) and ten empty slots for the measurement facilities, and Agilent EasyEXPERT software for the operating environment. The EasyEXPERT is the GUI based measurement control and analysis software runs on the Windows. This instrument is equipped with the 15 inch LCD with touch panel, hard disk drive, DVD drive, and USB/LAN/GP-IB interfaces.
Introduction Overview • WGFMU module and RSU Waveform generator/fast measurement unit module and the remote-sense and switch unit. Occupies one slot. Up to five modules can be installed in one mainframe. One module provides two channels. See Agilent B1530A User’s Guide for using the WGFMU. • Agilent 16440A SMU/PGU pulse generator selector (B1500A-A04) Used to switch the measurement resource connected to the DUT. The measurement resource can be SPGU or SMU. Needs the 16445A adapter to use the selector.
Introduction Overview Agilent EasyEXPERT Software Agilent EasyEXPERT software is a specially-designed Windows application program for controlling Agilent B1500A. The EasyEXPERT provides the easy and effective measurement and analysis environment with intuitive graphical user interface (GUI), touch screen LCD panel, keyboard, and mouse. Some of the functions are listed below.
Introduction Overview Classic Test You can perform measurements by using the user interface similar to the semiconductor parameter analyzers such as Agilent 4156C. The setup can be made by entering values into the setup tables used for the measurement module control. And it can be saved and recalled as your setup (My Favorite Setup). This measurement environment provides the following functions.
Introduction Front View Front View This section describes the front view of Agilent B1500A. 6 7 8 9 5 10 11 12 1 4 3 2 1. Standby switch Turns the instrument on. Pressing the button in the ON state makes it in the standby state. The green LED lights when it is in the ON state. NOTE When turning the B1500A on Open the measurement terminals at the device side when turning the B1500A on.
Introduction Front View 2. HDD access indicator This green LED lights in the access status of HDD or DVD drive. Do not turn the instrument off during this LED lights. 3. LCD adjustment keys LCD Off enables or disables the LCD panel. The green LED lights when the LCD is disabled. Four keys are available for adjusting brightness. Use + and - to adjust it and then press Set to fix it. Pressing Cancel instead of Set cancels the adjustment. 4. USB interfaces USB, 2 ports. For keyboard, mouse, and so on.
Introduction Front View 10. Softkeys Seven softkeys are available for Agilent EasyEXPERT environment. Used to select an alternative for the entry field specified or the dialog box. 11. DVD-R drive For data backup, software update, and so on. With the option DR1, the drive is changed to the DVD-ROM drive. 12. Touch Panel Off key Works on the execution environment of EasyEXPERT software. Enables or disables the touch screen operation. The green LED lights when the touch screen is disabled.
Introduction Rear View Rear View This section describes the rear view of Agilent B1500A. 14a 14 E D 4 D D D 3 D 2 5 D C B A 1 13 12 11 10 9 8 7 6 1. Serial number You need this serial number when using Agilent Technologies telephone assistance program. 2. LED status indicator For troubleshooting. Followings are some examples. • Both LEDs turn off: The instrument is in the standby state and Standby switch is OFF position. • One LED turns green: Power supply works normally.
Introduction Rear View 3. LINE input receptacle AC power cable is connected to this receptacle. 4. GPIB interface Use an Agilent 82357A USB/GPIB interface or Agilent 10833A/B/C/D GPIB cable to connect to an external computer or equipment. 5. Module slot Ten slots are available for installing the modules. Several kinds of module can be installed in the B1500A. However, the allowable number to install is different by the module type. See “Measurement Modules” on page 2-17.
Introduction Rear View 10. USB interfaces USB, 2 ports. For keyboard, mouse, or peripherals. To remove USB devices from the instrument, use “Safely Remove Hardware” on Windows taskbar. If it is not used, the instrument may cause the internal USB communication error. If the error occurs, turn the instrument off and disconnect the power cable from it. Leave it about 30 seconds before rebooting it, and connect the power cable again, and then turn the instrument on. 11.
Introduction Rear View A. GNDU/ADC Ground unit and A/D converter module. Always installed in the B1500A. B. SPGU module The semiconductor pulse generator unit (SPGU) has the Output 1 and Output 2 terminals and the following terminals to synchronize the operation between SPGUs or with an external equipment. Ref Out/Sync Out: Connect to the Ref In/Sync In of the slave SPGU. Ref In/Sync In: Connect to the Ref Out/Sync Out of the master SPGU.
Introduction Rear View C. WGFMU module The waveform generator/fast measurement unit (WGFMU) has the Ch 1 and Ch 2 terminals and the following terminals to synchronize the operation between WGFMUs or with an external equipment. Sync Out: Connect to the Sync In of the slave WGFMU. Sync In: Connect to the Sync Out of the master WGFMU. Trig Out: Connect to the trigger input terminal of the equipment synchronized with the WGFMU output.
Introduction Rear View under test (DUT). Also the Lcur and Lpot have to be connected together at the other terminal of the DUT. Then, the guard lines of four-terminal pair must be connected together. CAUTION Do not apply voltage more than ±25 V to the MFCMU input terminals. Failure to heed this caution may result in damage to the module. WARNING To avoid electrical shock and instrument damage, turn the all instruments off before connecting or disconnecting measurement cable.
Introduction Measurement Modules Measurement Modules Agilent B1500A can be equipped with the following measurement modules. • “GNDU - Ground Unit” • “HPSMU - High Power SMU” • “MPSMU - Medium Power SMU” • “MCSMU - Medium Current SMU” • “HRSMU - High Resolution SMU” • “MFCMU - Multi Frequency CMU” • “HVSPGU - High Voltage SPGU” • “WGFMU - Waveform Generator/Fast Measurement Unit” See Agilent EasyEXPERT User’s Guide for the functions available for Agilent EasyEXPERT software.
Introduction Measurement Modules About SMU Source/monitor unit (SMU) can apply DC voltage or current, and can measure DC current or voltage. Figure 2-2 is a simplified SMU circuit diagram.
Introduction Measurement Modules HPSMU - High Power SMU This section describes typical specification of the high power source/monitor unit (HPSMU). Maximum four modules can be installed in one mainframe. Figure 2-3 • Maximum voltage, current, output power: ± 200 V, ± 1 A, 20 W • Minimum range: 2 V, 1 nA • Output/measurement value and resolution: see Table 2-1 to Table 2-4.
Introduction Measurement Modules Table 2-1 Table 2-2 HPSMU Output Voltage Ranges and Resolutions Range Output Value Setting Resolution Maximum Current 2V 0 |V| 2 V 100 V ± 1000 mA 20 V 0 |V| 20 V 1 mV ± 1000 mA 40 V 0 |V| 40 V 2 mV ± 500 mA 100 V 0 |V| 100 V 5 mV ± 125 mA 200 V 0 |V| 200 V 10 mV ± 50 mA HPSMU Output Current Ranges and Resolutions Range Output Value Setting Resolution Maximum Voltage 1 nA 0 |I| 1.
Introduction Measurement Modules Table 2-3 HPSMU Measurement Voltage Values and Resolutions Table 2-4 Measurement Resolutions Measurement Value a High Speed ADC High Resolution ADC 2V 0 |V| 2.
Introduction Measurement Modules MPSMU - Medium Power SMU This section describes typical specification of the medium power source/monitor unit (MPSMU). There is no restriction for the number of modules installed in one mainframe. Figure 2-4 • Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W • Minimum range: 0.5 V, 1 nA (1 pA when the E5288A ASU is used) • Output/measurement value and resolution: see Table 2-5 to Table 2-8.
Introduction Measurement Modules Table 2-5 MPSMU Output Voltage Ranges and Resolutions Range 0.5 V Maximum Current 0 |V| 0.
Introduction Measurement Modules Table 2-7 MPSMU Measurement Voltage Values and Resolutions Table 2-8 Measurement Resolutions Measurement Value a High Speed ADC High Resolution ADC 0.5 V 0 |V| 0.55 V 25 V 0.5 V 2V 0 |V| 2.2 V 100 V 2 V 5V 0 |V| 5.
Introduction Measurement Modules NOTE To connect ASU To use the ASU, it must be connected to the SMU which is connected together when the calibration is performed. The specifications are satisfied and guaranteed in this condition only. So confirm the serial number of the ASU and connect it to the dedicated SMU properly. To connect the ASU, see “To Connect ASU” on page 3-17. To confirm the serial number, see Agilent EasyEXPERT User’s Guide.
Introduction Measurement Modules MCSMU - Medium Current SMU This section describes typical specification of the medium current source/monitor unit (MCSMU). Maximum four modules can be installed in one mainframe. Figure 2-5 • Maximum current: ± 1 A (pulse), ± 0.1 A (DC) • Maximum voltage: ± 30 V • Maximum output power: 30 W (pulse), 3 W (DC) • Minimum range: 0.2 V, 10 A • Minimum pulse width: 10 s • Output/measurement value and resolution: see Table 2-9 and Table 2-10.
Introduction Measurement Modules Table 2-9 MCSMU Voltage Ranges and Resolutions Range Output Value and Measurement Value Setting/ Measurement Resolution Maximum Current Maximum Pulse Base Value 0.2 V 0 |V| 0.2 V 200 nV 100 mA, 1 A a ± 0.2 V 2V 0 |V| 2 V 2 V ±2V 20 V 0 |V| 20 V 20 V ± 20 V 40 V 0 |V| 30 V 40 V ± 30 V a. For pulse.
Introduction Measurement Modules HRSMU - High Resolution SMU This section describes typical specification of the high resolution source/monitor unit (HRSMU). There is no restriction for the number of modules installed in one mainframe. Figure 2-6 • Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W • Minimum range: 0.5 V, 10 pA (1 pA when the E5288A ASU is used) • Output/measurement value and resolution: see Table 2-11 to Table 2-14.
Introduction Measurement Modules Table 2-11 HRSMU Output Voltage Ranges and Resolutions Range Output Value Setting Resolution Maximum Current 0.5 V 0 |V| 0.
Introduction Measurement Modules Table 2-13 HRSMU Measurement Voltage Values and Resolutions Table 2-14 Measurement Resolutions Measurement Value a High Speed ADC High Resolution ADC 0.5 V 0 |V| 0.55 V 25 V 0.5 V 2V 0 |V| 2.2 V 100 V 2 V 5V 0 |V| 5.
Introduction Measurement Modules NOTE To connect ASU To use the ASU, it must be connected to the SMU which is connected together when the calibration is performed. The specifications are satisfied and guaranteed in this condition only. So confirm the serial number of the ASU and connect it to the dedicated SMU properly. To connect the ASU, see “To Connect ASU” on page 3-17. To confirm the serial number, see Agilent EasyEXPERT User’s Guide.
Introduction Measurement Modules MFCMU - Multi Frequency CMU This section describes typical specification of the multi frequency capacitance measurement unit (CMU). The CMU performs the impedance measurement and returns the specified measurement data such as Cp-G. Only one module can be installed in one mainframe. • Measurement parameters: See Table 2-15. • AC signal, output frequency: 1 kHz to 5 MHz Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to), 0.
Introduction Measurement Modules Table 2-15 Measurement Parameters Primary Parameter Secondary Parameter R (resistance, ) X (reactance, ) G (conductance, S) B (susceptance, S) Z (impedance, ) (phase, radian) Z (impedance, ) (phase, degree) Y (admittance, S) (phase, radian) Y (admittance, S) (phase, degree) Cp (parallel capacitance, F) G (conductance, S) Cp (parallel capacitance, F) D (dissipation factor) Cp (parallel capacitance, F) Q (quality factor) Cp (parallel capacitanc
Introduction Measurement Modules Table 2-16 Measurement Range for Fixed Ranging Mode Measurement range (impedance range) Impedance Z 1 kHz f 200 kHz 200 kHz < f 2 MHz 2 MHz < f 5 MHz 0 Z < 100 50 50 50 100 Z < 300 100 100 100 300 Z < 1 k 300 300 300 1 k Z < 3 k 1 k 1 k 1 k 3 k Z < 10 k 3 k 3 k 3 k 10 k Z < 30 k 10 k 10 k 30 k Z < 100 k 30 k 30 k 100 k Z < 300 k 100 k 300 k Z 300 k Impedance vs Freq
Introduction Measurement Modules HVSPGU - High Voltage SPGU This section describes key specification of the high voltage semiconductor pulse generator unit (SPGU). Maximum five modules can be installed in one mainframe.
Introduction Measurement Modules WGFMU - Waveform Generator/Fast Measurement Unit This section describes typical specification of the waveform generator/fast measurement unit (WGFMU) and the remote-sense and switch unit (RSU). Maximum five modules can be installed in one mainframe.
3 Installation
Installation This chapter describes how to install Agilent B1500A and accessories. • “Requirements” • “Inspection and Installation” • “Installing Accessories” • “Mounting Connectors” • “Connecting Measurement Devices” • “Capacitance Compensation When Using Switching Matrix” • “Maintenance” • “About Plug-in Modules” To change the GPIB address of the B1500A, see “To Change GPIB Address” on page 3-10.
Installation WARNING There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for MPSMU/HRSMU) present at the Force, Sense, and Guard terminals of this instrument. To prevent electrical shock, the following safety precautions must be observed during the use of the instrument. • Use a three-conductor AC power cable to connect the instrument to an electrical ground (safety ground).
Installation Requirements Requirements This section contains information on: • “Power Requirements” • “Operating Environment” • “Storaging/Shipping Environment” • “Installation Requirements” • “Power Cable” Power Requirements This instrument can operate from any single-phase AC power source supplying 100-240 V (±10 %) at 50/60 Hz. The maximum power consumption is 900 VA.
Installation Requirements Installation Requirements WARNING Do not operate the instrument in dusty environment, or in the presence of flammable gasses, corrosive gasses, or fumes. • Environmental conditions for this instrument are documented in “General Specifications” on page 4-51. In principle, this instrument should only be operated indoors in a controlled environment. • Install the instrument horizontal place then face the roof up.
Installation Requirements Option 900 Option 901 Option 902 Option 903 • • • • • Plug: BS 1363/A, 250 V, 10 A PN: 8120-4420 • Plug: AS/NZS 3112, 250 V, 10 A PN: 8120-4419 • Plug: IEC 60277-1, 250 V, 10 A PN: 8121-1226 • Plug: NEMA 5-15P, 125 V, 10 A PN: 8120-6825 Option 904 Option 906 Option 912 Option 917 • • • • • Plug: NEMA 6-15P, 250 V, 10 A PN: 8120-3996 • Plug: SEV 1011, 250 V, 10 A PN: 8120-4416 • Plug: SB 107-2-D1, 250 V, 10 A PN: 8121-1655 • Plug: IS 1293 and IS 6538,
Installation Inspection and Installation Inspection and Installation This section describes what to do when you receive the instrument and accessories. 1. Inspect the shipment. See “To Inspect B1500 and Accessories”. 2. Verify the instrument operation and perform initial setup. See “To Perform Initial Setup”. 3. Install the instrument in the appropriate place. See “Requirements” on page 3-4. To use the instrument briefly, see “Getting Started” on page 1-1.
Installation Inspection and Installation To Perform Initial Setup After you receive the instrument, perform the following setup. For the users available just after the initial setup, see Table 3-1. 1. Make sure that the Standby switch is set to off. 2. On the instrument rear panel, connect the Circuit Common terminal to the frame ground terminal by using a shorting-bar. 3. If you use Agilent 16444A-001 USB keyboard and/or the 16444A-002 USB mouse, connect it to an USB port of the instrument. 4.
Installation Inspection and Installation Table 3-1 Users Available Just After the Initial Setup User Account Description Agilent B1500 User Account for automatic logon. Password is not set to this account. AgilentOnly Account for Agilent service personnel. Do not delete this account. This account is password protected. Administrator Administrator. Password is not set to this account. You can add users after the initial setup. Add users as you need.
Installation Inspection and Installation To Change GPIB Address When this instrument is shipped from the factory, the GPIB address is set to 17. To change the GPIB address, perform the following procedure. 1. If the EasyEXPERT software is running, terminate it as shown below: a. Select the menu function File > Exit on the EasyEXPERT main screen. b. Click [x] at the upper right corner of the Start EasyEXPERT button. 2.
Installation Inspection and Installation To Enable System Controller To allow Agilent B1500A/EasyEXPERT to control external GPIB devices, perform the following procedure. 1. If the EasyEXPERT software is running, terminate it as shown below: a. Select the menu function File > Exit on the EasyEXPERT main screen. b. Click [x] at the upper right corner of the Start EasyEXPERT button. 2. Select All Programs > Agilent IO Libraries Suite > Agilent Connection Expert from the Start menu.
Installation Installing Accessories Installing Accessories This section describes how to install the accessories. • “To Connect 16442B Test Fixture (B1500A-A5F)” • “To Connect Connector Plate” • “To Connect ASU” • “To Connect SCUU/GSWU” • “To Connect GNDU Adapter” • “To Connect MCSMU Connection Box” WARNING To avoid electrical shock and instrument damage, turn the instrument off before connecting or disconnecting measurement cable.
Installation Installing Accessories To Connect 16442B Test Fixture (B1500A-A5F) See this section if you use Agilent 16442B test fixture (B1500A-A5F). This section describes how to set up the 16442B and how to connect the B1500A to the 16442B. To Set up 16442B (B1500A-A5F) You can stabilize the 16442B (B1500A-A5F) as shown in the figure below. 1. Put a stabilizer on both sides of the test fixture. 2. Attach each stabilizer to the test fixture with a flathead screw.
Installation Installing Accessories Table 3-2 To Connect 16442B (B1500A-A5F) Cables 16442B Terminals B1500A Terminals Agilent 16493J Interlock Cable, 3 m or 1.5 m Intlk Interlock Agilent 16493L GNDU Cable, 3 m or 1.5 m GNDU GNDU Agilent 16493K Kelvin Triaxial Cable, 3 m or 1.5 m, for the Kelvin connection SMU1 SMU SMU2 Up to 3 SMUs can be connected to the 16442B by the Kelvin connection. SMU3 Sense SMU SMU4 SMU5 Agilent 16493P SPGU Cable, 3 m or 1.
Installation Installing Accessories To Connect Connector Plate The available connector plates are listed in Table 3-3. Option 001 provides the through connectors except for the Interlock connector that provides the soldering patterns at the back side. For the option 002, the back of each connector is designed for soldering. For connector plate installation information, see Agilent 16495 Installation Guide.
Installation Installing Accessories Table 3-4 To Connect Connector Plate Connector Plate B1500A Terminals Agilent 16493J Interlock Cable, 3 m or 1.5 m Intlk Interlock Agilent 16493L GNDU Cable, 3 m or 1.5 m GNDU GNDU Cables Agilent 16493Ka Kelvin Triaxial Cable, 3 m or 1.5 m, for the Kelvin connection odd number 16495F provides the inputs 1 to 12 (6 Kelvin). 16495H provides the inputs 1 to 6 (3 Kelvin). Force SMU even number Sense 16495J provides the inputs 1 to 8 (4 Kelvin).
Installation Installing Accessories To Connect ASU Agilent E5288A Atto Sense and Switch Unit (ASU) adds the following functions to the B1500A. To use the ASU, it must be connected to the SMU which is connected together when the calibration is performed.
Installation Installing Accessories To install ASU 1. Fix the ASU in the shielding box. The ASU must be fixed to the best position for accessing its connectors. Agilent N1254A-108 Magnetic Stand will be useful for fixing the ASU. 2. Pass the 16493M (D-sub cable, triaxial cable), N1300A CMU cable, 16048D/E test leads, BNC cable and so on through the cable hole of the 16495K. They will be connected between the ASU and the instruments 3. Connect the D-sub cable to the ASU D-sub connector.
Installation Installing Accessories To connect MFCMU/4284A/ E4980A to AUX Perform the following procedure to connect the MFCMU or the 4284A/E4980A. See Figure 3-2 and Figure 3-3. Prepare a shorting bar furnished with the ASU. The shorting bar is effective for reducing the offset capacitance caused by connecting a measurement terminal to the chuck of a wafer prober. 1. Turn the instrument off. 2. Prepare two ASUs (#1 and #2) and two shorting bar. And perform the following procedure for each ASU. a.
Installation Installing Accessories Figure 3-2 To Connect ASU $68 7R &08 7R 608 +F &08 FXU $8; ,Q +S &08 SRW )RUFH )RUFH ' VXE )URP 608 )RUFH &08 $8; 6HQVH 7R '87 &08 5HWXUQ $8; &RPPRQ $68 7R &08 7R 608 Figure 3-3 /F &08 FXU $8; ,Q /S &08 SRW )RUFH )RUFH ' VXE )URP 608 &08 5HWXUQ $8; &RPPRQ )RUFH &08 $8; 6HQVH 7R '87 To Set Shorting Bar 5/8 AUX CMU-cur/AUX In b/c SMU Force 6/9 SMU Force Shorting bar To connect other To connect the instrument other than the MFCMU or t
Installation Installing Accessories To Connect SCUU/GSWU Agilent N1301A-100 SMU CMU Unify Unit (SCUU) is used to switch the measurement resource (CMU or SMU) to be connected to the DUT. Agilent N1301A-200 Guard Switch Unit (GSWU) is used to connect the CMU high and low guard lines together near the DUT. The connection is broken when the SCUU is in the SMU connection state. The GSWU is effective for the accurate impedance measurement.
Installation Installing Accessories To install 16495K Fix your necessary 16495 connector plates to the shielding box or something that will cover the DUT interface. See Agilent 16495 Installation Guide. For the GSWU installation, the 16495K is required. It is the plate that has the mechanism to block the light from the cable hole used to pass the cables in the shielding box. Before starting 1. GSWU is furnished with wires (2 ea.) for the connection between the GSWU and the DUT interface Guard terminal.
Installation Installing Accessories To connect SCUU/GSWU 1 To attach the SCUU to the B1500A: 1. Attach the SCUU to the B1500A rear panel connectors for the MFCMU in the slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3 to 10). Connection will be easy by bringing the control connectors together before bringing the BNC connectors. 2. Fix the GSWU in the shielding box. The GSWU must be fixed to the best position for accessing its connectors. 3.
Installation Installing Accessories 2. Fix the SCUU inside or outside the shielding box. The SCUU must be fixed to the best position for accessing its connectors. Agilent N1301A-110 Magnetic Stand will be useful for fixing the SCUU. 3. Attach the other end of the SCUU cable to the B1500A rear panel connectors for the MFCMU in the slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3 to 10). Connection will be easy by bringing the control connectors together before bringing the BNC connectors. 4.
Installation Installing Accessories To Connect GNDU Adapter The ground unit (GNDU) output is the single triaxial connector. To change it to the dual triaxial connector, use Agilent N1254A-100 GNDU to Kelvin Adapter. The adapter and cables are furnished with the B1500A. Attach the adapter directly to the rear panel as shown below. 1. Face the adapter’s GNDU connector and banana jack to the B1500A’s GNDU connector and Circuit Common terminal respectively. 2. Push the adapter toward the B1500A. 3.
Installation Installing Accessories To Connect MCSMU Connection Box Agilent N1255A connection box is used to make the connection of MCSMU easy. Input panel provides six triaxial connectors for connecting two MCSMU and one GNDU or SMU. Output panel provides six triaxial connectors for the High1, High2, and Low terminals. See Figure 3-10 for image of the Input panel and the Output panel. Also see Figure 3-8 for the connection image. And see Figure 3-9 for the internal connection.
Installation Installing Accessories Figure 3-9 N1255A Internal Connections N1255A Connection Box High Low Force MCSMU1 High Sense Low High Low Force MCSMU2 Sense High Low Force SW1 High1 Sense 100 Ω SW4 SW2 High2 Sense 50 Ω SW5 Force Force SW3 GNDU/SMU Sense NOTE Force Low Sense • SW1: Kelvin/Non-Kelvin selection switch for High1 • SW2: Kelvin/Non-Kelvin selection switch for High2 • SW3: Kelvin/Non-Kelvin selection switch for Low • SW4: 0 /100 series resistor selection switch for
Installation Installing Accessories NOTE Series Resistor and Shunt Resistor The series resistor and the shunt resistor can be used for preventing MCSMU from oscillation. If the MCSMU oscillates, insert either 100 series resistor or 50 shunt resistor. If it does not stop the oscillation, prepare the resistor of the other value and insert it between the Output High and the device under test (DUT).
Installation Mounting Connectors Mounting Connectors Previous sections described how to install the available accessories, and Agilent 16495 Installation Guide provides the information on how to install connector plates on the shielding box. However, you may choose to mount connectors directly on your own connector plate or test fixture. To do this, you will need to make connector holes and mount the connectors yourself. This section contains information on connector hole dimensions.
Installation Mounting Connectors Table 3-5 Recommended Parts Usage Agilent Part No. Making an interlock circuit Table 3-6 Description 1252-1419 Interlock Connector (6 pin, female) 3101-0302 or 3101-3241 Switch 1450-0641 LED (VF 2.
Installation Mounting Connectors To Make an Interlock Circuit The interlock circuit is designed to prevent electrical shock when a user touches the measurement terminals. CAUTION You must install an interlock circuit on a shielding box to prevent hazardous voltages when the door of the shielding box is open. Figure 3-11 shows the pin assignments of the interlock connector that should be mounted on a connector plate or test fixture.
Installation Mounting Connectors Installing the interlock circuit Install the interlock circuit as follows: 1. Mount two mechanical switches on your shielding box, so that the switches close when the door of the shielding box is closed, and open when the door is opened. For the dimensions of the switch, see Figure 3-13 and Figure 3-14 below. 2. Mount an LED on your shielding box. For the dimensions of the LED, see Figure 3-12. 3.
Installation Mounting Connectors Figure 3-13 Dimensions of the Interlock Switch (Agilent part number 3101-0302) 12 0D[ 6ZLWFK RQ 6ZLWFK RII 1& & 20 8QLWV PP Figure 3-14 Dimensions of the Interlock Switch (Agilent part number 3101-3241) 6ZLWFK RII 6ZLWFK RQ 8QLWV PP Agilent B1500A User’s Guide, Edition 13 3- 33
Installation Mounting Connectors To Connect GNDU Output The GNDU output connection examples are shown in Table 3-7 Table 3-7 GNDU Output Connections Kelvin connections (remote sensing) non-Kelvin connections Use a low-noise coaxial cable (Agilent part number 8121-1189) from the connector to the prober, socket, or DUT as shown. Short the Sense and Force on the connector as shown below. Measurement data will include the residual resistance of the connection wire.
Installation Mounting Connectors To Connect SMU Output The SMU output connection examples are shown in Table 3-8. WARNING There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for MPSMU/HRSMU) present at the Force, Sense, and Guard terminals. To prevent electrical shock, do not expose these lines. Before turning the instrument on, connect the Interlock terminal to an interlock circuit.
Installation Mounting Connectors Table 3-8 SMU Output Connections Kelvin connections (remote sensing) non-Kelvin connections Use low-noise coaxial cable (Agilent part number 8121-1191) from the connector to the prober, socket, or DUT as shown. Use low-noise coaxial cable (Agilent part number 8121-1191). The following figure is for the connection using Kelvin triaxial cable. See Figure 3-16 and Figure 3-18 for the ASU and SCUU connections respectively.
Installation Mounting Connectors Figure 3-16 ASU Output Kelvin Connection (Remote Sensing) *XDUG :LUH &0+ RU )RUFH $68 &RD[LDO FDEOH &RPPRQ WR '87 RU '87 KLJK WHUPLQDO 6HQVH &08 5HWXUQ *XDUG &08 5HWXUQ &0/ RU )RUFH $68 &RPPRQ WR '87 RU '87 ORZ WHUPLQDO 6HQVH *XDUG The ASU inputs can be connected to the instruments by using a control cable, a triaxial cable, and two coaxial cables. The cables can be connected to the ASU inside the shielding box through the 16495K plate.
Installation Mounting Connectors Figure 3-17 ASU Output non-Kelvin Connection *XDUG :LUH &0+ RU )RUFH $68 &RD[LDO FDEOH &RPPRQ :LUH WR '87 RU '87 KLJK WHUPLQDO 6HQVH &08 5HWXUQ *XDUG WR '87 RU '87 ORZ WHUPLQDO &08 5HWXUQ &0/ RU )RUFH &RPPRQ $68 6HQVH *XDUG The ASU inputs can be connected to the instruments by using a control cable, a triaxial cable, and two coaxial cables. The cables can be connected to the ASU inside the shielding box through the 16495K plate.
Installation Mounting Connectors Figure 3-18 SCUU Output Kelvin Connection (Remote Sensing) *XDUG )RUFH RU &0+ &RPPRQ WR *6:8 WR '87 RU '87 KLJK WHUPLQDO *XDUG 6HQVH ,QVXODWRU 3ODWH *XDUG )RUFH RU &0/ &RPPRQ WR *6:8 WR '87 RU '87 ORZ WHUPLQDO *XDUG 6HQVH &RD[LDO FDEOH 7ULD[LDO FRQQHFWRU :LUH The SCUU should be connected to the DUT by using coaxial cables and wires as shown above.
Installation Mounting Connectors Figure 3-19 SCUU Output non-Kelvin Connection *XDUG )RUFH RU &0+ WR *6:8 &RPPRQ WR '87 RU '87 KLJK WHUPLQDO *XDUG WR *6:8 ,QVXODWRU 6HQVH 3ODWH WR '87 RU '87 ORZ WHUPLQDO *XDUG )RUFH RU &0/ &RD[LDO FDEOH :LUH &RPPRQ *XDUG 7ULD[LDO FRQQHFWRU 6HQVH The SCUU should be connected to the DUT by using coaxial cables and wires as shown above.
Installation Mounting Connectors To Connect MCSMU Output The MCSMU output connection example is shown in Figure 3-20. For the connection of the MCSMU, the N1255A connection box is required. See “To Connect MCSMU Connection Box” on page 3-26 to connect the MCSMU to the N1255A Input terminals. To connect the N1255A Output terminals to the connectors as shown in Figure 3-20, use the 16494A triaxial cable.
Installation Mounting Connectors To Connect MFCMU Output The MFCMU output connection example is shown in Figure 3-21. This connection is for the MFCMU without the SCUU. Then Agilent N1300A-001/002 CMU cable should be used for the connection between the MFCMU and the connectors you mount. It is ok to leave open the ground wire extended from the CMU cable.
Installation Connecting Measurement Devices Connecting Measurement Devices This section describes how to connect device under test (DUT) to the 16442B test fixture (B1500A-A5F), and how to connect cables to the connector plate. If you use a wafer prober, see wafer prober manuals. Note that you must set the module output off when connecting or disconnecting DUTs. If not, the DUTs may be damaged. To set the module output off, press the Stop key.
Installation Connecting Measurement Devices Using Test Fixture 1. Press the Stop key to set the output off. 2. Select a proper socket module for your DUT, then set the socket module on the test fixture. 3. Mount your DUT on the socket module. 4. Connect between the socket module and the test fixture by using the proper test leads. 5. Close the lid of the test fixture. To force more than ± 42 V, close the lid of the test fixture. Otherwise, the interlock function will stop Agilent B1500A output.
Installation Connecting Measurement Devices Connections for High Current Measurements When you force or measure a large current, you may want to use a Kelvin connection (4-wire, remote sensing) to eliminate the residual resistance effects of test leads and contacts. For example, you can use the following connections as Kelvin connections on the test fixture.
Installation Connecting Measurement Devices Using Connector Plate This section provides the information useful for connecting cables and probing needles to a connector plate. • “To Reduce Leakage Current” • “To Measure Low Resistance” To Reduce Leakage Current To reduce the leakage current caused by connection cables, the guard technique is effective. Connect the probing needles to the terminals of the connector plate by using coaxial cables as shown below: 1.
Installation Connecting Measurement Devices CAUTION Never connect the guard terminal to any other output, including circuit common, frame ground, or the terminals of any other measurement resource. Doing so may damage it. Guarding Guarding reduces the leakage current between the measurement points and instrument. This is important when you measure low current. The following figure shows the theory of guarding.
Installation Connecting Measurement Devices To Measure Low Resistance When you measure a low resistance, high current flows through the DUT. This high current increases the measurement error caused by the residual resistance of cables. To cancel the effect of this resistance, you can use Kelvin connections (4-wire, remote sensing), which means the force and sense lines are extended separately to the DUT.
Installation Connecting Measurement Devices Kelvin Connection (Remote Sensing) Kelvin connections give good measurement results when you force high-current. The following figure shows the equivalent circuits for Kelvin and non-Kelvin connections. • For the non-Kelvin connection, the voltmeter measures the voltage drop of resistances rF1, RDUT, and rF2. • For the Kelvin connection, the voltmeter measures the voltage drop of resistance RDUT only.
Installation Capacitance Compensation When Using Switching Matrix Capacitance Compensation When Using Switching Matrix When the capacitance/conductance measurement is performed through Agilent B2200A/B2201A/E5250A switching matrix, Agilent B1500A measures the capacitance/ conductance of the path including a DUT (device under test), matrix switches, extension cables and so on. So, the data measured by the B1500A is far from the DUT’s capacitance/conductance.
Installation Capacitance Compensation When Using Switching Matrix Required Conditions The following conditions must be satisfied to use the capacitance compensation function. For the instrument connections, see Figure 3-22. • Setting of the MFCMU • Range of the measurement frequency: 1 kHz to 5 MHz • Measurement function: Cp-G, Cp-D, Cs-Rs, or Z-Th. There is no limitation. • Calibration Perform the MFCMU open calibration at the end of the measurement paths in front of the switching matrix inputs.
Installation Capacitance Compensation When Using Switching Matrix In Figure 3-22, C1 (DATA04), C2H (DATA05), C2L (DATA06), C3H (DATA07), C3L (DATA08) are the compensation coefficients defined in the compensation data file. where, CxH is for the path connected to the MFCMU Hc-Hp terminal, and CxL is for the path connected to the MFCMU Lc-Lp terminal. When Agilent B2220A probe card interface is used, obtain the coefficients for C3x, and create your compensation data file.
Installation Capacitance Compensation When Using Switching Matrix To Create Compensation Data File This section explains how to create the compensation data file. To perform the capacitance compensation, enter the file name of the compensation data file to the User Compensation Data File field of the Extended Configuration dialog box opened from the Switching Matrix tab screen of the Configuration window. 1. Create a text file (e.g. C:\temp\c_data.txt) that contains the information as shown below.
Installation Capacitance Compensation When Using Switching Matrix • For E5250A: # E5250A C Compensation coefficient data table # # CAUTION : Do not add or delete "REVISION" line and "DATAxx" line. # Change the value for R,L,C of DATA05,06,07 or 08. # REVISION A.03.00 # R [ohm] L [H] C [F] DATA00 74.65E-3 140.00E-9 58.44E-12 # Frame Path 1 DATA01 75.41E-3 90.00E-9 67.13E-12 # Frame Path 2 DATA02 231.41E-3 450.00E-9 178.85E-12 # Card Path High DATA03 177.56E-3 390.00E-9 135.45E-12 # Card Path Low DATA04 100.
Installation Capacitance Compensation When Using Switching Matrix 2. Measure the R, L, C values of the for C2H (DATA05), C2L (DATA06), C3H (DATA07), and C3L (DATA08) by using the MFCMU. See “To obtain compensation coefficients” on page 3-56. After the measurements, calculate the per meter value of the R, L, C, and record them into the following table. Compensation coefficients Explanation R () L (H) C (F) C2H (DATA05) C2L (DATA06) C3H (DATA07) C3L (DATA08) 3.
Installation Capacitance Compensation When Using Switching Matrix To obtain compensation coefficients Obtain the compensation coefficients as shown below. 1. Select the measurement frequency (Fmeas) used for the capacitance measurement of a device under test (DUT), and set it to the MFCMU. The coefficients must be measured at the same frequency. 2. Perform the MFCMU open calibration at the measurement terminal. Optionally, perform short calibration if you want. 3.
Installation Capacitance Compensation When Using Switching Matrix Table 3-11 Template Compensation Data Files for B2200A/B2201A Measurement environment that template targets File namea \b2210a\pcif\triax\3m.data Switch module Cableb DUT interfacec Coefficients to be modified B2210A 16494A-002 B2220A C3H and C3L 16495F/G C2H, C2L, C3H, and C3L B2220A C3H and C3L 16495F/G C2H, C2L, C3H, and C3L \b2210a\pcif\triax\4m.data 16494A-005 \b2210a\pcif\kelvin\3m.
Installation Maintenance Maintenance Maintenance should be performed periodically to keep the instrument in good condition. Cleaning Before performing cleaning, turn off the instrument, and disconnect power cable from the rear panel. Use a dry cloth to clean the external case parts. To prevent electrical shock, do not perform cleaning when the instrument is turned on, and do not use a wet cloth. Self-test and Diagnostics This instrument provides the following functions to check the operation.
Installation About Plug-in Modules About Plug-in Modules This section describes the following notices about plug-in modules. • “Module Type and Locations” • “To Interconnect SPGUs” • “To Interconnect WGFMUs” • “About Module Installation” Module Type and Locations Module locations when the B1500A is shipped from the factory are shown in Table 3-12. This table shows the relative locations by the module types. If the SPGUs are installed, the SPGUs must be installed in the slots from the slot number 1.
Installation About Plug-in Modules To Interconnect SPGUs If multiple SPGUs have been installed, connect the SPGUs by using the following parts furnished with the SPGU. See Figure 3-24. Figure 3-24 • SPGU Sync cable, 16493Q-001, (number of SPGUs -1)2 ea. • RF connector cap, 1253-7431, 4 ea.
Installation About Plug-in Modules To Interconnect WGFMUs If multiple WGFMUs have been installed, connect the WGFMUs by using the following cable furnished with the WGFMU. See Figure 3-25. • Figure 3-25 WGFMU Sync cable, 16493R-803, number of WGFMUs -1 ea. WGFMU Module Connection Example, Four Modules WGFMU Sync cable open Slave WGFMU open Master WGFMU Trig Out Ch 1 Sync Out Sync In Ch 2 If multiple WGFMUs have been installed, connect the WGFMUs as shown in Figure 3-25.
Installation About Plug-in Modules About Module Installation Module installation must be carried out at an Agilent Technologies service center. Contact Agilent Technologies for the module installation. Then send the following equipment and accessories to Agilent Technologies.
4 Specifications
Specifications This chapter describes the specifications and supplemental characteristics for Agilent B1500A Semiconductor Device Analyzer and its associated modules. The specifications are the standards against which the B1500A and its associated modules are tested. When the B1500A and any of its associated modules are shipped from the factory, they meet the specifications.
Specifications Hardware Hardware Specification Conditions The measurement and output accuracy are specified at the rear panel connector terminals when referenced to the Zero Check terminal. The B1530A WGFMU measurement and output accuracy are specified at the output terminal of the RSU. Accuracy is specified under the following conditions: 1. Temperature: 23 C ± 5 C 2. Humidity: 20 % to 60 % 3. After 40 minutes warm-up followed by self-calibration 4.
Specifications Hardware Supported Plug-in Modules The B1500A supports ten slots for the following plug-in modules. B1510A High power source/monitor unit (HPSMU).
Specifications Hardware • Spot, sweep, and more measurement capabilities • Sampling (time domain) measurement from 100 s • Pulse measurement from 500 s pulse width • Accurate Quasi-Static Capacitance Voltage (QSCV) measurement with leakage current compensation B1514A Medium current source/monitor unit (MCSMU). • Slots occupied: 1 • Range up to 30 V/1 A pulsed (0.
Specifications Hardware • Ultra-fast IV measurement capability for the pulsed IV and transient IV such as NBTI/PBTI, RTN, etc. • Waveform generation with 10 ns programmable resolution • Simultaneous high-speed IV measurement capability (200 MSa/s, 5 ns sampling rate) • 10 V peak-to-peak output • No load line effect accurate pulsed IV measurement by dynamic SMU technology Maximum Module Configuration The B1500A can contain any combination of the following module.
Specifications Hardware Ground Unit (GNDU) The GNDU is furnished standard with the mainframe. • Output voltage: 0 V ± 100 V • Maximum sink current: ± 4.2 A • Output terminal/connection: Triaxial connector, Kelvin (remote sensing) • Load capacitance: 1 F, supplemental characteristics • Cable resistance: supplemental characteristics Terminal Cable resistance Sense 10 Force < 1 (Is 1.6 A) < 0.7 (1.6 A < Is 2.0 A) < 0.35 (2.0 A < Is 4.
Specifications Hardware MPSMU/HRSMU MPSMU: Medium Power Source/Monitor Unit HRSMU: High Resolution Source/Monitor Unit • Voltage range, resolution, and accuracy See Table 4-1 for high resolution ADC and Table 4-3 for high speed ADC. • Current range, resolution, and accuracy See Table 4-2 for high resolution ADC and Table 4-4 for high speed ADC. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
Specifications Hardware Table 4-1 Voltage range, resolution, and accuracy (high resolution ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±0.5 V 25 V 0.5 V ±(0.018 + 0.15) ±(0.01 + 0.12) 100 mA ±2 V 100 V 2 V ±(0.018 + 0.4) ±(0.01 + 0.14) 100 mA ±5 V 250 V 5 V ±(0.018 + 0.75) ±(0.009 + 0.25) 100 mA ±20 V 1 mV 20 V ±(0.018 + 3) ±(0.009 + 0.9) 100 mA ±40 V 2 mV 40 V ±(0.018 + 6) ±(0.
Specifications Hardware Table 4-3 Voltage range, resolution, and accuracy (high speed ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±0.5 V 25 V 25 V ±(0.018 + 0.15) ±(0.01 + 0.25) 100 mA ±2 V 100 V 100 V ±(0.018 + 0.4) ±(0.01 + 0.7) 100 mA ±5 V 250 V 250 V ±(0.018 + 0.75) ±(0.01 + 2) 100 mA ±20 V 1 mV 1 mV ±(0.018 + 3) ±(0.01 + 4) 100 mA ±40 V 2 mV 2 mV ±(0.018 + 6) ±(0.
Specifications Hardware ASU ASU: Atto Sense and Switch Unit • Maximum voltage, AUX path 100 V (AUX input to AUX common) 100 V (AUX input to circuit common) 42 V (AUX common to circuit common) • Maximum current, AUX path 0.
Specifications Hardware HPSMU HPSMU: High Power Source/Monitor Unit • Voltage range, resolution, and accuracy See Table 4-5 for high resolution ADC and Table 4-7 for high speed ADC. • Current range, resolution, and accuracy See Table 4-6 for high resolution ADC and Table 4-8 for high speed ADC. Specified measurement resolution is limited by fundamental noise limits.
Specifications Hardware Table 4-5 Voltage range, resolution, and accuracy (high resolution ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±2 V 100 V 2 V ±(0.018 + 0.4) ±(0.01 + 0.14) 1A ±20 V 1 mV 20 V ±(0.018 + 3) ±(0.009 + 0.9) 1A ±40 V 2 mV 40 V ±(0.018 + 6) ±(0.01 + 1) 500 mA ±100 V 5 mV 100 V ±(0.018 + 15) ±(0.012 + 2.5) 125 mA ±200 V 10 mV 200 V ±(0.018 + 30) ±(0.014 + 2.8) 50 mA a.
Specifications Hardware Table 4-7 Voltage range, resolution, and accuracy (high speed ADC) Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV)a Maximum current ±2 V 100 V 100 V ±(0.018 + 0.4) ±(0.01 + 0.7) 1A ±20 V 1 mV 1 mV ±(0.018 + 3) ±(0.01 + 4) 1A ±40 V 2 mV 2 mV ±(0.018 + 6) ±(0.015 + 8) 500 mA ±100 V 5 mV 5 mV ±(0.018 + 15) ±(0.02 + 20) 125 mA ±200 V 10 mV 10 mV ±(0.018 + 30) ±(0.035 + 40) 50 mA a.
Specifications Hardware MCSMU Medium Current Source/Monitor Unit • Voltage range, resolution, and accuracy See Table 4-9. • Current range, resolution, and accuracy See Table 4-10. • Power consumption Voltage source mode: Voltage range (V) Power consumptiona (W) 0.2 Ic 40 2 Ic 40 40 Ic 40 a. Ic is the current compliance setting. Current source mode: Voltage compliancea (V) Power consumptionb (W) Vc 0.2 Io 40 0.2 < Vc 2 Io 40 2 < Vc 40 Io 40 a.
Specifications Hardware Table 4-9 MCSMU voltage range, resolution, and accuracy Range Force resolution Measurement resolution Force accuracy ±(%+mV)a Measurement accuracy ±(%+mV+mV)a Maximum current ±0.2 V 200 nV 200 nV ±(0.06+0.14) ±(0.06+0.14+Io0.05) 1A ±2 V 2 V 2 V ±(0.06+0.6) ±(0.06+0.6+Io0.5) 1A ±20 V 20 V 20 V ±(0.06+3) ±(0.06+3+Io5) 1A ±40 Vb 40 V 40 V ±(0.06+3) ±(0.06+3+Io10) 1A a.
Specifications Hardware SMU Common Specifications • Output terminal/connection Dual triaxial connector, Kelvin (remote sensing) • Voltage/current compliance (limiting) The SMU can limit output voltage or current to prevent damaging the device under test.
Specifications Hardware For MCSMU • Width: 10 s to 100 ms (1 A range), 10 s to 2 s (10 A to 100 mA ranges), 2 s resolution Recommended pulse width: 50 s (time to reach within 1 % of the final value at resistive load 50 , 10 V step voltage, and 1 A compliance, supplemental characteristics) • Period: 5 ms to 5 s, 100 s resolution • Pulse duty: For 1 A range: 5 % For 10 A to 100 mA ranges: Period Width+Delay+2 ms (when Width+Delay 100 ms) Period Width+Delay+10 ms (when Width+Delay > 1
Specifications Hardware SMU Supplemental Characteristics • Current compliance setting accuracy (for opposite polarity) For HPSMU, MPSMU, HRSMU ± (setting accuracy + 12 % of range), for 1 pA to 10 nA ranges ± (setting accuracy + 2.5 % of range), for 100 nA to 1 A ranges For MCSMU ± (setting accuracy + 2.5 % of range) • SMU pulse setting accuracy (fixed measurement range) For HPSMU, MPSMU, HRSMU Width: ± (0.5 % + 50 s) Period: ± (0.5 % + 100 s) For MCSMU Width: ± (0.1 % + 2 s) Period: ± (0.
Specifications Hardware • Maximum allowable cable resistance (Kelvin connection) For HPSMU, MPSMU, HRSMU: 10 (Sense), 10 (Force, 100 mA), 1.
Specifications Hardware • Overshoot (filter ON) For HPSMU, MPSMU, HRSMU Voltage source: 0.03 % of V range Current source: 1 % of I range For MCSMU Voltage/Current source: 10 % of range • Range switching transient noise Voltage ranging: 250 mV Current ranging: 70 mV Condition: filter ON for HPSMU, MPSMU, and HRSMU • Maximum guard offset voltage ± 1 mV (HPSMU) ± 3 mV (MPSMU, HRSMU) ± 4.2 mV (HRSMU/MPSMU with ASU, Iout 100 A) • Maximum slew rate 0.
Specifications Hardware MFCMU MFCMU: Multi Frequency Capacitance Measurement Unit • • Measurement functions • Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D, Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-, Y- • Ranging: Auto or fixed • Measurement terminal: Four-terminal pair configuration, four BNC (female) connectors • Cable length: 1.
Specifications Hardware • DC bias function • DC bias Range: 0 to ± 25 V Resolution: 1 mV Accuracy: ± (0.5 % + 5.0 mV) at the measurement port of the MFCMU or the MFCMU cable (1.5 m or 3.
Specifications Hardware • Measurement accuracy Measurement accuracy at the measurement port of the MFCMU or the MFCMU cable (1.5 m or 3.0 m) • |Z| accuracy: ± E (%) • accuracy: ± E/100 (radian) • C accuracy: ± E (%) at Dx 0.1 ± E(1+Dx2)1/2 (%) at Dx > 0.1 • D accuracy: ± E/100 at Dx 0.1 ± E(1+Dx)/100 at Dx > 0.1 • G accuracy: ± E/Dx (%) at Dx 0.1 ± E(1+Dx2)1/2/Dx (%) at Dx > 0.
Specifications Hardware Table 4-11 Parameters EPOSC, ZOSC Oscillator level Vosc mV EPOSC % ZOSC m 125 < Vosc 250 0.03(250/Vosc-1) 5(250/Vosc-1) 64 < Vosc 125 0.03(125/Vosc-1) 5(125/Vosc-1) 32 < Vosc 64 0.03(64/Vosc-1) 5(64/Vosc-1) Vosc 32 0.03(32/Vosc-1) 5(64/Vosc-1) Vosc is oscillator level in mV. Table 4-12 Parameters EPL, YOL, ZSL Cable length EPL % YOL nS ZSL m 1.5 m 0.02+3f/100 750f/100 5.0 3m 0.02+5f/100 1500f/100 5.0 f is frequency in MHz.
Specifications Hardware Table 4-14 Example of calculated C/G measurement accuracy Frequency Measured Capacitance C Accuracy a Measured Conductance G Accuracy a 5 MHz 1 pF ± 0.61 % 3 S ± 192 nS 10 pF ± 0.32 % 31 S ± 990 nS 100 pF ± 0.29 % 314 S ± 9 S 1 nF ± 0.32 % 3 mS ± 99 S 1 pF ± 0.26 % 628 nS ± 16 nS 10 pF ± 0.11 % 6 S ± 71 nS 100 pF ± 0.10 % 63 S ± 624 nS 1 nF ± 0.10 % 628 S ± 7 S 10 pF ± 0.18 % 628 nS ± 11 nS 100 pF ± 0.
Specifications Hardware SCUU/GSWU SCUU: SMU CMU Unify Unit GSWU: Guard Switch Unit The SCUU multiplexes the outputs from two SMUs (MPSMUs and/or HRSMUs) and the CMU. The SCUU outputs are two sets of Kelvin triaxial ports (Force and Sense). The SCUU also allows the SMUs to act as DC bias sources in conjunction with the CMU. Special cables are available to connect the SMUs and CMU with the SCUU, and an auto-detect feature automatically compensates for the cable length going to the SCUU.
Specifications Hardware • SCUU supplemental characteristics • SMU path Offset current: < 20 fA Offset voltage: < 100 V at 300 sec Closed channel residual resistance: < 200 m Channel isolation resistance: > 1015 • CMU path • Test signal • Signal output level additional errors (CMU bias, open load): ± 2 % (direct docking) ± 7 % (indirect docking) • Signal output level additional errors (SMU bias, open load): ± 5 % (direct docking, 10 kHz) ± 10 % (indirect docking, 10 kHz) • Output impedance:
Specifications Hardware Additional errors (for SMU voltage output accuracy): ± 100 V (open load) • DC bias monitor additional errors (open load): ± 20 mV, direct docking ± 30 mV, indirect docking • • Output impedance: 50 , typical • DC output resistance: 50 (CMU bias), 130 (SMU bias) Measurement accuracy Impedance measurement error is given by adding the following additional error Ee to the MFCMU measurement error.
Specifications Hardware HV-SPGU HV-SPGU: High Voltage Semiconductor Pulse Generator Unit • Number of output channels: 2 channels per module • Modes: pulse, constant, and free run • Standard pulse mode • Two level pulse • Three level pulse per one channel • Pulse period: 30 ns to 10 s • Delay range: 0 s to 9.99 s • Delay resolution: minimum 2.
Specifications Hardware Table 4-15 Pulse range and pulse parameter Value a Item Frequency range 0.1 Hz to 33 MHz Pulse period Pulse width Programmable range 30 ns to 10 s Resolution 10 ns Minimum 100 ns (Vamp 10 V) Accuracy ± 1 % (± 0.01 % b ) Programmable range 10 ns to (period -10 ns) Resolution 2.
Specifications Hardware Table 4-16 Pulse/DC output voltage and accuracy Item Value Condition -20 V to +20 V 50 load -40 V to +40 V open load Accuracy a ± (0.5 % + 50 mV) open load Amplitude resolution 0.2 mV (± 10 V range) 50 load Output voltage (Vout) 0.8 mV (± 40 V range) 0.4 mV (± 10 V range) open load 1.
Specifications Hardware • • Programmable timing range: 10 ns to 671.088630 ms, 10 ns resolution SPGU supplemental characteristics • Pulse width jitter: 0.001 % + 150 ps • Pulse period jitter: 0.001 % + 150 ps • Maximum slew rate: 1000 V/s (50 load) • Noise: 10 mVrms (at DC output) • Advanced feature: Voltage monitor: The HV-SPGU has a voltage monitor function to measure the voltage at the DUT terminal. Measurement accuracy (open load): ± (0.
Specifications Hardware Selector Agilent 16440A (B1500A-A04) SMU/pulse generator selector switches either a SMU or PGU to the associated output port. You can expand to four channels by adding an additional selector. The PGU port on channel 1 provides a “PGU OPEN” function, which can disconnect the PGU by opening a semiconductor relay. Agilent B1500A and 16445A are required to use the selector. The following specifications data is specified at 23 C ± 5 C (73 F ± 9 F) and 50 % relative humidity.
Specifications Hardware WGFMU/RSU WGFMU: Waveform Generator/Fast Measurement Unit RSU: Remote-sense and Switch Unit The WGFMU is a self-contained module offering the combination of arbitrary linear waveform generation (ALWG) with synchronized fast current or voltage (IV) measurement. The ALWG function allows you to generate not only DC, but also various types of AC waveforms.
Specifications Hardware The V Monitor terminal outputs a buffered signal equal to 1/10 of the Output terminal voltage (into a 50 load). • WGFMU to RSU cable length The WGFMU and RSU are connected by a special composite cable. The following configurations are available. • 3m • 5m • 1.5 m • 2.4 m + connector adapter + 0.6 m • 4.4 m + connector adapter + 0.6 m Note: The connector adapter is used when routing the cable through the prober’s connector panel. • ALWG function: See Table 4-21.
Specifications Hardware • WGFMU supplemental data • RSU SMU path Leakage current: < 100 pA Residual resistance: < 300 m • Jitter: < 1 ns • Skew between channels: < 3 ns, under no electrostatic discharge condition • Trigger output skew: < 3 ns • Current range change time: < 150 s This is the time until the measured current settles within ± 0.3 % of the final result value after the range change. Table 4-17 • Minimum timing parameters for current measurement: See Table 4-22.
Specifications Hardware Table 4-18 Voltage force accuracy, resolution, and timing V force (Fast IV mode) -5 V to +5 V, -10 V to 0 V, 0 V to +10 V V force (PG mode) -5 V to +5 V, open load -2.5 V to +2.5 V, 50 load Accuracy ± 0.1 % of setting ± 0.1 % of range a Resolution b 96 V (-3 V to +3 V) 160 V (all ranges except for -3 V to +3 V) Overshoot/undershoot ± (5 % + 20 mV) c Noise Maximum 0.
Specifications Hardware Table 4-19 Voltage measurement accuracy, resolution, and noise Accuracy ± (0.1 % of reading + 0.1 % of range) a Resolution b 680 V, -5 V to +5 V range 1.4 mV, -10 V to +10 V range Noise c Maximum 4 mVrms (-5 V to +5 V range) a. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000 averaging samples for 10 A range and above; 100,000 averaging samples for the 1 A range b. Display resolution.
Specifications Hardware Table 4-22 Minimum timing parameters for current measurement1 Voltage applied to DUT Current applied to DUT 10 V 100 nA 1 A 10 A 100 A 1 mA 10 mA Applied voltage condition Recommended minimum pulse widtha 47 s 38.7 s 6.8 s 950 ns 240 ns 145 ns Current measurement condition Measurement Range 1 A 1 A 10 A 100 A 1 mA 10 mA Recommended minimum measurement window 10 s 1.64 s 1 s 130 ns 40 ns 20 ns Settling timeb 37 s 37 s 5.
Specifications Hardware Table 4-23 Minimum timing parameters for voltage measurement1 Voltage applied to DUT 5V 10 V 105 ns 130 ns 5V 10 V Recommended minimum measurement window 20 ns 20 ns Settling timeb 85 ns 110 ns Noise (rms)c 1.4 mV 1.4 mV Applied voltage condition Recommended minimum pulse widtha Voltage measurement condition Measurement Range a. Recommended minimum pulse width = settling time + recommended minimum measurement window. b.
Specifications EasyEXPERT Software EasyEXPERT Software Operation mode • Application test mode Realizes application oriented point-and-click test setup and execution. You can select a test definition from library by device type and measurement item, and execute the test after changing setup parameter values as needed. Also see “Application library”. • Classic test mode Realizes function oriented test setup and execution with the same look, feel, and terminology of Agilent 4155/4156 user interface.
Specifications EasyEXPERT Software Category CMOS BJT Test items Id-Vg, Id-Vd, Vth, breakdown, capacitance, QSCV, etc. Ic-Vc, diode, Gummel plot, breakdown, hfe, capacitance, etc. Discrete Id-Vg, Id-Vd, Ic-Vc, diode, etc. Memory Vth, capacitance, endurance test, etc. PwrDevice Pulsed Id-Vg, pulsed Id-Vd, breakdown, etc. NanoTech Resistance, Id-Vg, Id-Vd, Ic-Vc, etc. Reliability NBTI/PBTI, charge pumping, electromigration, hot carrier injection, J-Ramp, TDDB, etc.
Specifications EasyEXPERT Software Measurement modes Supports the following measurement modes. • IV measurement Spot Staircase sweep Pulsed spot Pulsed sweep Staircase sweep with pulsed bias Sampling Multi-channel sweep Multi-channel pulsed sweep List sweep Linear search (*1) Binary search (*1) • C measurement Spot C CV (DC bias) sweep Pulsed spot C (*1) Pulsed sweep CV (*1) C-t sampling (*1) C-f sweep (*1) CV (AC level) sweep (*1) Quasi-static CV (QSCV) (*1) (*1) Direct Control classic test is used.
Specifications EasyEXPERT Software Step delay time: 0 to 1 s, 100 s resolution Step output trigger delay time: 0 to (delay time) s, 100 s resolution Step measurement trigger delay time: 0 to 65.535 s, 100 s resolution Sampling (time domain) measurement Performs the voltage/current measurement in the specified time interval and plots the measured data versus time.
Specifications EasyEXPERT Software • Current offset cancel This function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data. This function is used to compensate the error factor (offset current) caused by the measurement path such as the measurement cables, manipulators, or probe card. • Time stamp Time stamp function utilizing an internal quartz clock. Resolution: 100 s Data display • X-Y graph plot X-axis and up to eight Y-axes.
Specifications EasyEXPERT Software Automatic analysis function On a graphics plot, the markers and lines can be automatically located using the auto analysis setup. Parameters can be automatically determined using automatic analysis, user function, and read out functions. • Analysis functions Up to 20 user-defined analysis functions can be defined using arithmetic expressions. Measured data, pre-defined variables, and read out functions can be used in the computation.
Specifications EasyEXPERT Software Workspace and data management • Workspace Separate work environment for EasyEXPERT. Every workspace supports the following features.
Specifications Program and interface capabilities Program and interface capabilities • Data storage Hard disk drive, DVD-R drive • Interfaces GPIB, interlock, USB (USB 2.0, 2 ea. on front, 2 ea. on rear), LAN (1000BASE-T/100BASE-TX/10BASE-T), trigger in/out, digital I/O, VGA video output • Remote control capabilities FLEX commands (GPIB) EasyEXPERT remote control function (LAN) • Trigger I/O Only available using GPIB FLEX commands.
Specifications Desktop EasyEXPERT Software NOTE For the latest system requirements, go to www.agilent.com and type in B1500A in the Search field at the top of the page. Desktop EasyEXPERT Software Provides almost the same capability, look and feel of EasyEXPERT on a PC. • Execution mode Online and offline • Supported instruments • B1500A • B1505A • 4155B, 4156B, 4155C, and 4156C Firmware: • • HOSTC: 03.08 or later • SMUC: 04.
Specifications General Specifications General Specifications • Temperature range Operating: +5 C to +40 C Storage: -20 C to +60 C • Humidity Operating: 20 % to 70 %RH, non-condensing Storage: 10 % to 90 %RH, non-condensing • Altitude Operating: 0 to 2,000 m (6,561 ft.) Storage: 0 to 4,600 m (15,092 ft.
Specifications General Specifications 16440A Selector: 250 mm (W) 50 mm (H) 275 mm (D) 16445A Selector adapter: 250 mm (W) 50 mm (H) 260 mm (D) • Weight B1500A (empty): 20 kg B1510A: 2.0 kg B1511B: 1.0 kg B1514A: 1.3 kg B1517A: 1.2 kg B1520A: 1.5 kg B1525A: 1.3 kg B1530A: 1.3 kg B1531A: 0.13 kg E5288A: 0.5 kg N1255A: 0.7 kg N1301A-100: 0.8 kg N1301A-200: 0.1 kg 16440A: 1.1 kg 16445A: 1.
5 Accessories and Options
Accessories and Options Furnished accessories, available accessories, and available options of Agilent B1500A Semiconductor Device Analyzer are described in this chapter. Table 5-1 Furnished Accessories Description Quantity USB keyboard 1 USB mouse 1 Stylus pen 1 Interlock cable, 1.5 m or 3.0 m 1 GNDU cable, 1.5 m or 3.0 m 1 GNDU Kelvin adaptera 1 Triaxial cablea, 1.5 m or 3.
Accessories and Options Table 5-2 Options Option Item Description B1500A-015 1.5 m length of bundled cables B1500A-030 3.
Accessories and Options Table 5-3 B1500A-A04 Basic Flash Memory Cell Package Description Table 5-4 Quantity Medium power source/monitor unit (MPSMU) 2 High resolution source/monitor unit (HRSMU) 2 High voltage semiconductor pulse generator unit (HVSPGU) 1 SPGU cable, 1.5 m or 3.0 m 2 16440A SMU/PGU pulse generator selector 1 16445A selector adapter for 16440A 1 Control cable, 1.5 m, between B1500A and 16445A 1 Control cable, 40 cm, between 16445A and 16440A 1 Triaxial cable, 1.
Accessories and Options Table 5-5 B1500A-A3P WGFMU Probe Cable Kit Description Table 5-6 Quantity 16493R-101 SSMC short-open cable for current return path, 50 mm 2 16493R-102 SSMC short-open cable for current return path, 75 mm 2 16493R-202 SMA-SSMC cable between RSU and DC probe, 200 mm 2 16493R-302 SMA-SMA cable between RSU and RF probe, 200 mm 2 B1500A-A5F1 Test Fixture for Package Device Measurement Description Quantity 16442B test fixture 1 Accessory case 1 Blank PTFE board for DUT s
Accessories and Options Table 5-7 Model Number Available Accessories Option Item 16440A Description SMU/PGU pulse generator selector 16440A-001 Control cable, 1.5 m 16440A-002 Control cable, 3.0 m 16440A-003 Control cable, 40 cm for second selector 16442B Test fixture 16442B-010 Add triaxial cables, 1.5 m, 4 ea. 16442B-011 Add triaxial cables, 3 m, 4 ea. 16442B-800 Extra blank PTFE board 16442B-801 Universal socket module, 0.
Accessories and Options Model Number Option Item 16445A Description Selector adapter for 16440A 16445A-001 Control cable (B1500 to 16445A), 1.5 m 16445A-002 Control cable (B1500 to 16445A), 3.0 m 16493G Digital I/O connection cable 16493G-001 1.5 m length 16493G-002 3 m length 16493J Interlock cable 16493J-001 1.5 m length 16493J-002 3 m length 16493J-003 5 m length 16493K Kelvin triaxial cable (B1500 to B1500) 16493K-001 1.
Accessories and Options Model Number Option Item 16493Q Description SPGU-SPGU connection cable (SMA to SMA) 16493Q-001 16493R 8 cm length WGFMU Cables and Accessories 16493R-001 WGFMU-to-RSU cable, 0.6 m 16493R-002 WGFMU-to-RSU cable, 2.4 m 16493R-003 WGFMU-to-RSU cable, 3 m 16493R-004 WGFMU-to-RSU cable, 5 m 16493R-005 WGFMU-to-RSU cable, 4.4 m 16493R-006 WGFMU-to-RSU cable, 1.
Accessories and Options Model Number Option Item 16495F Description Connector plate w/ 12triax., Interlock, GNDU 16495F-001 Bulkhead feedthrough connectors (female to female) 16495F-002 Connectors to contacts for soldering 16495G Connector plate w/ 24triax., Interlock, GNDU 16495G-001 Bulkhead feedthrough connectors (female to female) 16495G-002 Connectors to contacts for soldering 16495H Connector plate w/ 6triax., 6coax.
Accessories and Options Model Number Option Item E5288A Description Atto Sense and Switch Unit (ASU) E5288A-001 Add triaxial and D-sub cables, 1.5 m E5288A-002 Add triaxial and D-sub cables, 3 m N1253A Accessories for Digital I/O N1253A-100 Digital I/O T-cable N1253A-200 Digital I/O BNC Box N1254A Accessories N1254A-100 GNDU Kelvin Adapter N1254A-108 ASU Magnetic Stand N1255A 2 Channels Connection Box for MCSMU N1300A CMU cable N1300A-001 1.
