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Agilent Technologies

Agilent B1500A/B1505A

Device Analyzer Series

Programming Guide

Summary of content (598 pages)

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Agilent B1500A/B1505A Device Analyzer Series Programming Guide Agilent Technologies
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Notices © Agilent Technologies, Inc. 2005 - 2013 Warranty No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws. The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions.
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For B1500A Users Agilent B1500A supports the following measurement resources. For reading this manual, ignore the information about the other resources.
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In This Manual This manual provides the information to control the Agilent B1500 via GPIB interface using an external computer, and consists of the following chapters. • “Programming Basics” This chapter provides basic information to control the Agilent B1500. • “Remote Mode Functions” This chapter explains the functions of the Agilent B1500 in the remote mode. • “Programming Examples” This chapter lists the GPIB commands and explains the programming examples for each measurement mode or function.
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Contents 1. Programming Basics Before Starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 FlexGUI Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 Getting Started . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 To Reset the Agilent B1500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents Separator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24 Data Output Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25 Conventions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25 ASCII Data Output Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents Staircase Sweep Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8 Staircase Sweep with Pulsed Bias Measurements . . . . . . . . . . . . . . . . . . . . . . . . 2-10 Pulsed Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12 Multi Channel Sweep Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14 Multi Channel Pulsed Sweep Measurements . . . . . . . . . . . . . . . .
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Contents SMU/PG Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-66 Ultra High Current Expander/Fixture. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-67 HVSMU Current Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-69 Ultra High Voltage Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-70 Digital I/O Port .
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Contents Binary Search Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42 Multi Channel Sweep Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45 Multi Channel Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-49 Multi Channel Pulsed Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-52 Sampling Measurements . . . . . . . . . . . . . . . . . . .
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Contents Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 Command Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15 Command Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32 AAD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents BSVM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-56 CA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-56 *CAL? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-57 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents ERHPE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-81 ERHPE? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-81 ERHPL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-82 ERHPL? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents ERPFGR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-96 ERPFTEMP? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-97 ERPFUHCA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-97 ERPFUHCA?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents LSSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-123 LST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-124 LSTM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-125 LSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents PI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-151 PT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-152 PTDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-153 PV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents SOPC? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-175 SOVC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-175 SOVC? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-176 SPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents TGP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-196 TGPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-198 TGSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-199 TGSO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Contents WNU? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-222 WNX. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-222 WS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-225 WSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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1 Programming Basics
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Programming Basics This chapter describes basic information to control the Agilent B1500, and consists of the following sections. NOTE • “Before Starting” • “Getting Started” • “Command Input Format” • “Data Output Format” • “GPIB Interface Capability” • “Status Byte” • “Programming Tips” About command execution examples In this chapter, command execution examples are written in the HP BASIC language. See the following instructions for your guidance. 1.
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Programming Basics Before Starting Before Starting Before starting the programming using the Agilent FLEX command, perform following. 1. Terminate the Agilent EasyEXPERT software as follows. a. Select File > Exit on the EasyEXPERT main window. b. Click [x] at the upper right corner of the Start EasyEXPERT button. 2. Open the Agilent Connection Expert window by clicking Agilent IO Control icon on the Windows task bar and selecting Agilent Connection Expert. 3.
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Programming Basics Before Starting FlexGUI Window Once the Agilent B1500 receives a GPIB command, the Start EasyEXPERT button is minimized to the Windows task bar, and the FlexGUI window shown in Figure 1-1 is opened. The FlexGUI window is the status indicator of the B1500 in the GPIB remote state and provides the following GUI.
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Programming Basics Before Starting Model number and Shows the *IDN? command response. revision number Example: Agilent Technologies,B1500A,0,A.03.10.2007.1021 Interface name Shows the name of the B1500 internal GPIB interface. GPIB address Shows the GPIB address set to the B1500. GPIB Instrument Status Shows the B1500 remote status. Has the following indicators. RMT Turns green while the B1500 is in the GPIB remote state. LTN Turns green while the B1500 receives a GPIB command.
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Programming Basics Before Starting The right-click menu is available in the GPIB log display area. Copy Copies the highlighted data to the clipboard. Select All Highlights all of the displayed information. Save to File Saves the displayed information as the specified file which can be opened by using a text editor such as the Notepad. Clear All Deletes the displayed information. Settings... Available when the GPIB log display function is OFF. Opens the Settings dialog box.
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Programming Basics Getting Started Getting Started This section explains the following basic operations. In this section, the HP BASIC language is used for the examples.
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Programming Basics Getting Started To Reset the Agilent B1500 The B1500 returns to the initial settings by the *RST command. Example OUTPUT @B1500;"*RST" For the initial settings, see “Initial Settings” on page 2-87. To Read Query Response If you enter a query command such as the *TST?, ERR? and so on, the B1500 puts an ASCII format response to the query buffer that can store only one response. Read the response as soon as possible after entering a query command.
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Programming Basics Getting Started To Perform Diagnostics The B1500 starts the diagnostics by the DIAG? command, and returns the result. You must specify the diagnostics item by the command parameter. Available parameter values are: 1: Trigger In/Out diagnostics 3: High voltage LED diagnostics 4: Digital I/O diagnostics To perform diagnostics 1, connect a BNC cable between the Ext Trig In terminal and the Ext Trig Out terminal before starting the diagnostics.
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Programming Basics Getting Started Table 1-1 Measurement Mode Measurement Mode (measurement parameter) Example Mode No.
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Programming Basics Getting Started NOTE The Mode No. is not assigned for the high speed spot measurement. See “To Perform High Speed Spot Measurement” on page 1-21. The high speed spot measurement does not need the MM command. For the source output commands available for each measurement mode, see Table 1-2.
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Programming Basics Getting Started To Force Voltage/Current The commands listed in Table 1-3 is used to force voltage or current. These commands start to force the voltage or current immediately when the command is executed. They can be used regardless of the measurement mode. See Table 1-2 on page 1-11 for the commands available for each measurement mode. The commands just set the source channel condition, and the source channel starts the output by the start trigger, such as the XE command.
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Programming Basics Getting Started To Set the SMU Integration Time To adjust the balance of the SMU’s measurement accuracy and speed, change the integration time or the number of averaging samples of the A/D converter (ADC) by using the AV command. The AV command is compatible with the AV command of the Agilent 4142B. For accurate and reliable measurement, set the integration time longer or set the number of samples larger. For details about the integration time settings, see Chapter 4, “Command Reference.
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Programming Basics Getting Started To Set the Measurement Range To set the measurement range, send the following command: Command RI RV RC TI, TTI TV, TTV TIV, TTIV TC, TTC Description Sets the current measurement range. Available for the current measurements that use the XE command. Not available for the high speed spot measurement. Sets the voltage measurement range. Available for the voltage measurements that use the XE command. Not available for the high speed spot measurement.
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Programming Basics Getting Started To Pause Command Execution To pause command execution until the specified wait time elapses, send the PA command. Example OUTPUT @B1500;"PA 5" If this command is sent, the B1500 waits 5 seconds before executing the next command. To Start Measurement To start measurement other than the high speed spot measurement, send the XE command. Example OUTPUT @B1500;"XE" This starts the measurement specified by the MM command.
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Programming Basics Getting Started To Disable Source/Measurement Channels To disable the channels, send the CL command. The B1500 opens the output switch of the specified channels. Opening the output switch disables the channel. Example OUTPUT @B1500;"CL 1" This example disables channel 1 (the module installed in slot 1 of the B1500). If you do not specify the channel, the CL command disables all channels. To Control ASU This function is available for Agilent B1500A.
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Programming Basics Getting Started To Control SCUU This function is available for Agilent B1500A. SCUU (SMU CMU unify unit) can be used with one capacitance measurement unit (CMU) and two SMUs (MPSMU or HRSMU). The SCUU cannot be used with the HPSMU or when only one SMU is connected. The SCUU input to output connection can be controlled by the following commands. When the B1500 is turned on, the SCUU input to output connection is not made (open).
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Programming Basics Getting Started To Read Error Code/Message If any error occurs, the B1500 will not put the measurement data into the data output buffer. Hence, confirm that no error has occurred before reading the measurement data. To read the error code and the error message, enter the ERRX? command.
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Programming Basics Getting Started To Read Sweep Measurement Data For the sweep measurements, the measurement data will be put into the data output buffer after every step measurement. You can read the data as shown below. The examples use the VISA COM library and Microsoft Visual Basic .NET language. For the data output format, see “Data Output Format” on page 1-25.
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Programming Basics Getting Started To Read Time Stamp Data NOTE This function is not available for the quasi-pulsed spot measurement (MM 9), search measurement (MM 14 or 15), and the 4 byte binary data output (FMT 3 or 4). To read the time data with the best resolution (100 μs), clear the timer every 100 s or less (for FMT 1, 2, or 5), or 1000 s or less (for FMT 11, 12, 15, 21, 22, or 25). The time stamp function records the time from timer reset (Time=0 s) to the start of measurement.
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Programming Basics Getting Started To Perform High Speed Spot Measurement The high speed spot measurement does not need the MM and XE commands to set the measurement mode and start measurement. To start and perform the high speed spot measurement immediately, send the TI/TTI/TV/TTV/TIV/TTIV command to a SMU for the DC current or voltage measurement, or the TC/TTC command to the CMU for the impedance measurement.
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Programming Basics Command Input Format Command Input Format Agilent FLEX commands (GPIB commands for the Agilent B1500) are composed of a header, numeric data, and terminator, as shown in the following syntax diagram. B1500 Control Command Syntax Diagram ; , Header Separator Numeric Data SP SP Terminator SP SP : Space NOTE Terminator Terminator is necessary to enter the command to the Agilent B1500. For the available terminators, see “Terminator” and “Special Terminator” on page 1-24.
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Programming Basics Command Input Format Numeric Data Numeric data are the command parameters. You can enter numeric data directly after the header or insert spaces between the header and numeric data. Some parameters require integer data. The following figure shows the syntax diagram for numeric data. Numeric Data Syntax Diagram Integer Data Fixed Point Data Floating Point Data The following 3 figures show the syntax diagrams for integer, fixed point, and floating point data, respectively.
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Programming Basics Command Input Format Terminator The terminator completes the GPIB command entry and starts command execution. The following figure shows the terminator syntax diagram. Terminator Syntax Diagram ^ EOI CR LF LF ^ EOI Special Terminator If a semicolon (;) is inserted before the terminator, as shown in the following figure, the preceding commands are not executed until the next command line is input and another terminator is input, without a preceding semicolon.
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Programming Basics Data Output Format Data Output Format Agilent B1500 provides the following data output formats: • “ASCII Data Output Format” The B1500 supports the ASCII data format that is the common format for the instruments that support the Agilent FLEX command mode. • “Binary Data Output Format” The B1500 supports the 4 bytes binary data format that is the common format for the instruments that support the Agilent FLEX command mode. The B1500 also supports the dedicated 8 bytes binary format.
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Programming Basics Data Output Format ASCII Data Output Format This section describes the ASCII data output format, and the elements of the data. • “Time Stamp” • “Data Format” • “Data Elements” Time Stamp The B1500 can record the time when the measurement is started, and sends the time data (Time). This function is enabled by the TSC command. The time data will be sent just before the measurement data. For example, in the staircase sweep measurements, the data will be as shown below.
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Programming Basics Data Output Format Data Format The data output format depends on the measurement mode as shown below. High speed spot Data (by TI, TV, TMACV, or TMDCV command) Time,Data (by TTI or TTV command) Para1,Para2 (by TIV or TC command) Time,Para1,Para2 (by TTIV or TTC command) Data is the value measured by the channel you specify in the command. Time is the time from timer reset to the start of measurement.
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Programming Basics Data Output Format Staircase sweep, Multi channel sweep, Multi channel pulsed sweep, CV (DC bias) sweep Block1 [,Block2] . . . . Block1 is the block of data measured at the first sweep point. Block2 is the block of data measured at the second sweep point. where Block consists of the following data: Data1 [,Data2] . . . . [,Source_data] DataN (N: integer) is the value measured by a channel. The order of Data is defined by the MM command.
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Programming Basics Data Output Format Sampling, C-t sampling Block1 [,Block2] . . . . Block1 is the block of the data measured at the first sampling point. Block2 is the block of the data measured at the second sampling point. where Block consists of the following data: [Sampling_no,] Data1 [,Data2] . . . . Sampling_no is the sampling point index, and is returned by entering the FMT command with mode<>0. This value depends on the sampling interval setting and the measurement time.
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Programming Basics Data Output Format Data Elements The data (Data, Source_data, Time, Sampling_no, Data_search, Data_sense, Osc_level, and Dc_bias) are the string as shown in Table 1-6. The data elements depends on the FMT command setting. Details of the elements are described on the following pages. Table 1-6 A: Status. One character. B: Channel number. One character. C: Data type. One character. D: Data. Twelve digits or 13 digits. E: Status. Three digits. F: Channel number. One character.
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Programming Basics Data Output Format A Status. One character. • Status for Source_data: See Table 1-7 on page 1-32. Severity of a status is W
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Programming Basics Data Output Format F Channel number of the source/measurement module. One character. See Table 1-11 on page 1-34. G Data type. One character. Also see Table 1-12 on page 1-35. Table 1-7 Source Data Status A or EEE Table 1-8 Explanation W Data is for the first or intermediate sweep step. E Data is for the last sweep step. SMU Status EEE Table 1-9 Explanation 1 A/D converter overflowed. 2 Oscillation or force saturation occurred.
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Programming Basics Data Output Format Table 1-10 Status for Measurement Data A Explanation N No status error occurred. T Another channel reached its compliance setting. C This channel reached its compliance setting. V Measurement data is over the measurement range. Or the sweep measurement was aborted by the automatic stop function or power compliance. D will be 199.999E+99 (no meaning). X One or more channels are oscillating. Or source output did not settle before measurement.
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Programming Basics Data Output Format Table 1-11 Channel Number Explanationa B or F A Subchannel 1 of the module installed in the slot 1 B Subchannel 1 of the module installed in the slot 2 C Subchannel 1 of the module installed in the slot 3 D Subchannel 1 of the module installed in the slot 4 E Subchannel 1 of the module installed in the slot 5 F Subchannel 1 of the module installed in the slot 6 G Subchannel 1 of the module installed in the slot 7 H Subchannel 1 of the module installed i
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Programming Basics Data Output Format Table 1-12 Data Type C Explanation V Voltage (V) I Current (A) F Frequency (Hz) C or G Explanation Z Impedance, resistance, or reactance (Ω) Y Admittance, conductance, or susceptance (S) C Capacitance (F) L Inductance (H) R Phase (radian) P Phase (degree) D Dissipation factor Q Quality factor X Sampling index T Time (second) G Explanation V Voltage measurement value (V) I Current measurement value (A) v Voltage output value (V) i
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Programming Basics Data Output Format Binary Data Output Format This section describes the binary data output format, and the elements of the data. • “Time Stamp” • “Data Resolution” • “Data Format” • “4 Bytes Data Elements” • “8 Bytes Data Elements” Time Stamp The B1500 can record the time when the measurement is started, and sends the time data (Time). This function is enabled by the TSC command. The time data will be sent just before the measurement data.
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Programming Basics Data Output Format Data Resolution The 4 bytes binary data format provides the following data resolution. To use this data format, enter the FMT3 or FMT4 command. The resolution of the SMU measurement value will be larger than the measurement resolution of the B1500’s high resolution A/D converter. For Range value, see “4 Bytes Data Elements” on page 1-41.
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Programming Basics Data Output Format Data Format The data output format depends on the measurement mode as shown below. High speed spot Data (by TI, TV, TMACV, or TMDCV command) Time Data (by TTI or TTV command) Para1 Para2 (by TIV / TC command) Time Para1 Para2 (by TTIV / TTC command) Data is the value measured by the channel you specify in the command. Time is the time from timer reset to the start of measurement.
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Programming Basics Data Output Format Linear search, Binary search Data_search [Data_sense] Staircase sweep, Multi channel sweep, Multi channel pulsed sweep, CV (DC bias) sweep Block1 [Block2] . . . . This is the data at the measurement point closest to the search target. Data_search is the value forced by the search output channel. Data_sense is the value measured by the search monitor channel.
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Programming Basics Data Output Format Sampling, C-t sampling Available for the 8 bytes binary data format (FMT13 or FMT14). Block1 [Block2] . . . . Block1 is the block of the data measured at the first sampling point. Block2 is the block of the data measured at the second sampling point. where Block consists of the following data. [Sampling_no] Data1 [Data2] . . . . Sampling_no is the sampling point index, and is returned by entering the FMT command with mode<>0.
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Programming Basics Data Output Format 4 Bytes Data Elements To use the 4 bytes binary data format, enter the FMT3 or FMT4 command. The data (Data, Source_data, Sampling_no, Data_search, Data_sense, Osc_level, and Dc_bias) will be sent as the binary value shown in Figure 1-2. Figure 1-2 4 Bytes Binary Data Output Format Byte 1 Byte 2 Byte 3 Byte 4 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 A B C D E F A: Type. One bit. B: Parameter. One bit. C: Range. Five bits.
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Programming Basics Data Output Format C Range. Five bits. Range value used to calculate the data. for SMU data for CMU data C C V I C DC F 01000 (8) 0.5 V 1 pA 1 pF 00000 (0) 1Ω 01001 (9) 5V 10 pA 10 pF 00001 (1) 10 Ω 01010 (10) 0.
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Programming Basics Data Output Format D (SMU data) Data count. This value is expressed in 17-bit binary data. The measurement data and the source data can be calculated by the following formula. Measurement data = Count × Range / 50000 Source data = Count × Range / 20000 where, Count is the D value, and Range is the measurement range or output range given by C. If the top bit of D is 0, Count is positive and equal to the value given by the following 16 bits. If the top bit of D is 1, Count is negative.
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Programming Basics Data Output Format D (CMU data) Data count. This value is expressed in 17-bit binary data. The measurement data and the output data can be calculated by the following formula.
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Programming Basics Data Output Format E Status. Three bits. • Status for Source_data: Severity of a status is 001<010. E • Explanation 001 Data is for the first or intermediate sweep step. 010 Data is for the last sweep step. Status for measurement data. See Table 1-13 on page 1-46. For SMU, the severity of a status is as follows: F • For the quasi-pulsed spot measurement: 0<1<2<3<4<6 or 7 • For other measurement: 0<6<7<1<2<3<4 Channel number of the measurement/source channel. Five bits.
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Programming Basics Data Output Format Table 1-13 Status for Measurement Data E Explanation 000 (0) No status error occurred. 001 (1) For SMU: Another channel reached its compliance setting. For CMU: CMU is in the NULL loop unbalance condition. 010 (2) For SMU: This channel reached its compliance setting. For CMU: CMU is in the IV amplifier saturation condition. 011 (3) Measurement data is over the measurement range.
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Programming Basics Data Output Format Table 1-14 Channel Number Explanationa F 00001 (1) Subchannel 1 of the module installed in the slot 1 00010 (2) Subchannel 1 of the module installed in the slot 2 00011 (3) Subchannel 1 of the module installed in the slot 3 00100 (4) Subchannel 1 of the module installed in the slot 4 00101 (5) Subchannel 1 of the module installed in the slot 5 00110 (6) Subchannel 1 of the module installed in the slot 6 00111 (7) Subchannel 1 of the module installed in th
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Programming Basics Data Output Format 8 Bytes Data Elements To use the 8 bytes binary data format, enter the FMT13 or FMT14 command. The data (Data, Source_data, Sampling_no, Data_search, Data_sense, Osc_level, and Dc_bias) will be sent as the binary value shown in Figure 1-3. The format of the time data (Time) will be different from the others.
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Programming Basics Data Output Format A Type. One bit. A B Explanation 0 Data other than measurement data. 1 Measurement data. Parameter. Seven bits.
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Programming Basics Data Output Format C Range. One byte. Range value used to calculate the data. C for SMU data V I for CMU data C Z AC DC F 8V 1 kHz 00000000 (0) 1Ω 00000001 (1) 10 Ω 00000010 (2) 100 Ω 00000011 (3) 1 kΩ 00000100 (4) 10 kΩ 16 mV 12 V 10 kHz 00000101 (5) 100 kΩ 32 mV 25 V 100 kHz 00000110 (6) 1 MΩ 64 mV 00000111 (7) 10 MΩ 125 mV 250 mV 00001000 (8) 0.5 V 1 pA 1 pF 100 MΩ 00001001 (9) 5V 10 pA 10 pF 1 GΩ 00001010 (10) 0.
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Programming Basics Data Output Format D Data count. This value is expressed in 4 bytes binary data. The measurement data and the output data can be calculated by the following formula. Resistance or reactance = Count × Range / 224 Conductance or susceptance = Count / (224 × Range) DC bias output value = Count / 1000 Data other than the above parameters = Count × Range / 1000000 where, Count is the D value, and Range is the measurement range or output range given by C.
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Programming Basics Data Output Format E Status. One byte. Meaningless for the Time data. • Status for Source_data: Severity of a status is 001<010. E • Explanation 00000001 Data is for the first or intermediate sweep step. 00000010 Data is for the last sweep step. Status for measurement data. See Table 1-15.
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Programming Basics Data Output Format H Data count for the time data. This value is expressed in 6 bytes binary data. The time data can be calculated by the following formula. Time = Count / 1000000 where, Count is the decimal value of H. If the top bit of H is 0, Count is positive and equal to the value given by the following 47 bits. If the top bit of H is 1, Count is negative.
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Programming Basics Data Output Format Table 1-15 Status for Measurement Data E Explanation 00000000 (0) No status error occurred. 00000001 (1) Measurement data is over the measurement range. Or the sweep measurement was aborted by the automatic stop function or power compliance. Meaningless value will be returned to D. 00000010 (2) For SMU: One or more channels are oscillating. Or source output did not settle before measurement.a For CMU: CMU is in the NULL loop unbalance condition.
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Programming Basics GPIB Interface Capability GPIB Interface Capability The following table lists the GPIB capabilities and functions of the Agilent B1500. These functions provide the means for an instrument to receive, process, and transmit, commands, data, and status over the GPIB bus.
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Programming Basics Status Byte Status Byte Status byte bits are turned off or on (0 or 1) to represent the instrument operation status. When you execute a serial poll, an external computer (controller) reads the contents of the status byte, and responds accordingly. When an unmasked status bit is set to “1”, the instrument sends an SRQ to the controller, causing the controller to perform an interrupt service routine.
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Programming Basics Status Byte Bit Decimal Value 4 16 Description Set ready If the B1500 receives a GPIB command or a trigger signal, this bit is set to “0”. It is set to “1” when its operation is completed. This bit is also set to “0” when the self-test or calibration is started by front panel operation, and set to “1” when it is completed. 5 32 Error Indicates whether any error has occurred. If an error occurred, this bit is set to “1”.
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Programming Basics Programming Tips Programming Tips This section provides the following additional information on creating measurement programs. It is useful for checking the operation status, improving the measurement speed, and so on.
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Programming Basics Programming Tips To Confirm the Operation To complete the measurement program, you can insert statements to check the B1500 operation status as shown below. This example starts the measurement, checks the status caused by the statements before the ERRX? command, reads and displays the measurement data without errors, or displays an error message when an error occurs.
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Programming Basics Programming Tips To Optimize the Measurement Range The most effective way to improve measurement speed is to reduce the number of range changes. The limited auto ranging mode is more effective than the auto ranging mode. The fixed range mode is the most effective. Check the typical value of the measurement data, select the optimum range, and perform measurement using the fixed range mode.
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Programming Basics Programming Tips To Optimize the Source/Measurement Wait Time If measurement speed is given top priority or is more important than reliability, set the wait time shorter by using the WAT command. The source wait time is the time the source channel always waits before changing the source output value. The measurement wait time is the time the measurement channel always waits before starting measurement.
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Programming Basics Programming Tips To Use the Internal Program Memory If your program repeats the setup and measurement for a number of devices, use the internal program memory. For these measurements, using the internal program memory reduces the command transfer time, and improves the program execution speed. You can enter a maximum of 2,000 programs (total 40,000 commands) into the internal program memory. See Chapter 2, “Remote Mode Functions.
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Programming Basics Programming Tips To Perform Quasi-Sampling Measurement The following setup enables to perform a quasi-sampling measurement. Then the sampling interval will be sum of delay time and step delay time. • Sets the sweep measurement mode (MM 2 or MM 16). • Sweep start value = Sweep stop value (for WI, WV, or WNX). • Sets hold time, delay time, and step delay time (WT).
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Programming Basics Programming Tips To Use Programs for Agilent 4142B Agilent B1500 supports most of the commands and the data output format supported by the Agilent 4142B Modular DC Source/Monitor. To reuse the programs created for the Agilent 4142B, confirm the following and modify the programs if necessary. • To remove all unsupported commands Some commands are not supported owing to differences in the modules supported by each instrument.
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Programming Basics Programming Tips To Use Programs for Agilent 4155/4156 Agilent B1500 supports commands similar to the FLEX command of the Agilent 4155B/4156B/4155C/4156C Parameter Analyzer. However, not all command sets are fully compatible. To reuse the programs created for the Agilent 4155/4156, the following modifications are required. • To remove all unsupported commands Table 1-18 shows the commands not supported by the B1500. You cannot use these commands.
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Programming Basics Programming Tips • Table 1-18 If you reuse the built-in IBASIC programs: • Change the GPIB address. • Remove the statements to use the built-in flexible disk drive.
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Programming Basics Programming Tips To Use Programs for Agilent E5260/E5270 Agilent B1500 supports most of the commands and the data output format supported by the Agilent E5260/E5270 Series of Parametric Measurement Solutions. To reuse the programs created for the Agilent E5260/E5270, confirm the following and modify the programs if necessary. • To remove all unsupported commands Some commands are not supported owing to differences in the mainframe.
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Programming Basics Programming Tips 1-68 Agilent B1500A/B1505A Programming Guide, Edition 11
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2 Remote Mode Functions
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Remote Mode Functions This chapter describes the functions of the Agilent B1500 in the remote mode, and the initial settings.
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Remote Mode Functions Measurement Modes Measurement Modes The Agilent B1500 provides the following measurement modes.
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Remote Mode Functions Measurement Modes Spot Measurements Spot measurement is performed as shown below. The measurement channel performs one point measurement. Figure 2-1 Spot Measurements Voltage or current : Measurement Channel 1 output Setup value Previous value Measurement time Voltage or current Channel 2 output Setup value Previous value DV/DI DV/DI Measurement trigger (e.g. XE) Time 1. The source channel starts output by the DV or DI command. Multiple channels can be set. 2.
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Remote Mode Functions Measurement Modes Pulsed Spot Measurements Pulsed spot measurement is performed as shown below. The measurement channel performs one point measurement while the source channel is forcing a pulse. Figure 2-2 Pulsed Spot Measurements Voltage or current : Measurement PT/PV/PI Trigger (e.g. XE) Measurement time (set by AIT 2) Peak value Trigger Previous value Base value Time Hold time Pulse width Hold time Pulse period Pulse period 1.
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Remote Mode Functions Measurement Modes NOTE The PT command sets the pulse timing parameters, such as pulse width and pulse period. The PV command sets voltage pulse, and the PI command sets current pulse. The base and peak values must have the same polarity for the current pulse. Multi Channel Pulsed Spot Measurements Multi channel pulsed spot measurement is performed as shown below. The measurement channels perform one point measurement while a source channel is forcing a pulse.
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Remote Mode Functions Measurement Modes 6. After the pulse width, the pulse source channels apply the pulse base value, and keep it. If the next trigger occurs within the pulse period, pulse output is as follows if the trigger interval is longer than several 10 ms. • If the rest of the pulse period is longer than the hold time as shown in Figure 2-3, the pulse source waits for the rest, then starts the pulse output.
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Remote Mode Functions Measurement Modes Staircase Sweep Measurements Staircase sweep measurement is performed as shown below. The source channel forces staircase sweep voltage or current, and the measurement channel performs one point measurement at each sweep step. Figure 2-4 Staircase Sweep Measurements Voltage or current Stop value Step delay time : Measurement WT/WM/WV/WI Trigger (e.g. XE) Step delay time Previous value Delay time Start value Hold time Delay time Time 1.
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Remote Mode Functions Measurement Modes NOTE The WT command sets the hold time, delay time, and step delay time. The WM command sets the automatic abort function and the output after measurement. The WV command sets the sweep voltage, and the WI command sets the sweep current. The start and stop values must have the same polarity for log sweep. To Use Synchronous Sweep Source One more channel can be set up as a staircase sweep source that has the output synchronized with the staircase sweep.
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Remote Mode Functions Measurement Modes Staircase Sweep with Pulsed Bias Measurements Staircase sweep with pulsed bias measurement is performed as shown below. The source channel forces staircase sweep voltage or current, the pulse channel forces pulsed bias, and the measurement channel performs one point measurement at each sweep step. Figure 2-6 Staircase Sweep with Pulsed Bias Measurements Voltage or current Stop value WM/WV/WI Trigger (e.g.
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Remote Mode Functions Measurement Modes 7. After the sweep measurement, the pulsed source forces the pulse base value, and the sweep source forces the start or stop value, as specified by the WM command, and keeps it. For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V. NOTE The WM command sets the automatic abort function and the output after measurement.
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Remote Mode Functions Measurement Modes Pulsed Sweep Measurements Pulsed sweep measurement is performed as shown below. The source channel forces pulsed sweep voltage or current, and the measurement channel performs one point measurement at each sweep step. Figure 2-7 Pulsed Sweep Measurements Voltage or current Stop value PT/WM/PWV/PWI Trigger (e.g.
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Remote Mode Functions Measurement Modes NOTE The PT command sets the hold time, pulse width, and pulse period. The WM command sets the automatic abort function. The PWV sets the pulsed sweep voltage, and the PWI sets the pulsed sweep current. The base, start, and stop values must have the same polarity for current pulse or log sweep. To Use Synchronous Sweep Source One more channel can be set up as a staircase sweep source that has the output synchronized with the pulsed sweep.
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Remote Mode Functions Measurement Modes Multi Channel Sweep Measurements Multi channel sweep measurement is performed as shown below. The source channels apply the staircase sweep or DC bias output, and the measurement channels perform one point measurement at each sweep step. Up to ten channels can be used for both sweep output and measurement. Both voltage output mode and current output mode are available for the source channels.
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Remote Mode Functions Measurement Modes 6. The B1500 repeats 4 and 5 for all sweep steps. 7. After the sweep measurement, the sweep sources force the start or stop value, as specified by the WM command, and keep it. For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V. NOTE The WT command sets the hold time, delay time, and step delay time. The WM command sets the automatic abort function and the output after measurement.
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Remote Mode Functions Measurement Modes Multi Channel Pulsed Sweep Measurements Multi channel pulsed sweep measurement is performed as shown below. The source channels apply the pulsed sweep, staircase sweep, pulsed bias, or DC bias output, and the measurement channels perform one point measurement at each sweep step. Up to ten channels can be used for both pulsed sweep output and measurement. Both voltage output mode and current output mode are available for the source channels.
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Remote Mode Functions Measurement Modes 2. The pulsed sweep source is set by the MCPNT and MCPWNX commands with the source identification number N (N=1 to 10). 3. The staircase sweep source is set by the WM and WNX commands with the source identification number N (N=1 to 10). 4. The pulsed bias source is set by the MCPNT and MCPNX commands with the source identification number N (N=1 to 10). 5. The DC bias output is started by the DV/DI command. 6.
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Remote Mode Functions Measurement Modes To Stop Sweep Output An automatic abort function is available. Refer to “Automatic Abort Function” on page 2-46. Even if the automatic abort function is disabled, the B1500 automatically stops measurement if power compliance is enabled for the sweep source and the power compliance or an automatic abort condition is detected. Quasi-Pulsed Spot Measurements Quasi-pulsed spot measurement is performed as shown below.
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Remote Mode Functions Measurement Modes NOTE • When the quasi-pulse source applies voltage close to the stop value. • When the quasi-pulse source reaches its current compliance due to the breakdown condition of the device under test. If the slew rate was too slow when settling detection started or if the settling detection time was too long, an error occurs and the source returns its output to the start value immediately. See “BDM” on page 4-45. 4.
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Remote Mode Functions Measurement Modes Binary Search Measurements Binary search measurement is performed as shown below. The source channel forces voltage or current, and the measurement channel performs one point measurement. The B1500 repeats this until the search stop condition is satisfied, and returns the source’s last output value. The last measurement data is also returned if it is set by the BSVM command.
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Remote Mode Functions Measurement Modes 5. The B1500 repeats measurement and 4 until the search stop condition is satisfied. The search stop condition is one of the following conditions selected by the BGI or BGV command. • Measured value = Search target value ± limit • Number of measurement points > limit 6. After the search measurement, the search source forces the start value, the stop value, or the last output value, as specified by the BSM command, and keeps it.
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Remote Mode Functions Measurement Modes Linear Search Measurements Linear search measurement is performed as shown below. The source channel sweeps voltage or current, and the measurement channel performs one point measurement at each sweep step. The B1500 stops sweep and measurement when the search stop condition is satisfied, and returns the source’s last output value. The last measurement data is also returned if it is set by the LSVM command.
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Remote Mode Functions Measurement Modes NOTE The LSM command sets the automatic abort function and the output after search. The LSTM command sets the hold time and delay time. The LSV/LSI command sets the search output, and the LGI/LGV command sets the measurement channel. To Use Synchronous Output Channel You can use the synchronous output channel that provides output synchronized with the search source. Refer to “Synchronous Output” on page 2-44.
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Remote Mode Functions Measurement Modes Sampling Measurements Sampling measurement is performed as shown below. The sampling operation is performed in the specified time interval until the number of measurement result data reaches to the specified number of samples.
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Remote Mode Functions Measurement Modes 6. After the base hold time, the synchronous source channels force the bias value or the peak value as follows. The SMUs start output simultaneously, and then the SPGUs start output in the order from lower to higher slot number. However the SPGU pulse outputs are started simultaneously. The channels keep the output until the end of the sampling measurement. 7. And after the bias hold time, the measurement channels start measurement for the first sampling point.
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Remote Mode Functions Measurement Modes For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V. The index data (max. 9999999) and the time data returned with the measurement data will be as shown in the following formula. However, long measurement or busy status may cause unexpected time and index data.
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Remote Mode Functions Measurement Modes Quasi-static CV Measurements Quasi-static CV (QSCV) measurement is performed as shown. The specified SMU performs the measurement at the sweep steps except for the sweep start voltage and stop voltage. At each sweep step, current and voltage are measured during the voltage transition from Nth step voltage-cvoltage/2 to Nth step voltage+cvoltage/2, and capacitance is calculated by using the measured values. Where, cvoltage is the capacitance measurement voltage.
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Remote Mode Functions Measurement Modes The operation of the quasi-static CV measurements is explained below. This is the case of start < stop. 1. Measurement trigger enables the sweep source output. The sweep source forces 1st step voltage-Vq, and waits for hold time. where Vq=cvoltage/2. 2. Repeats 3 and 4 for the Nth sweep step. where N is integer, 1 to step. step is the number of sweep steps given by step = |start-stop| / |step voltage| -1. 3.
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Remote Mode Functions Measurement Modes Capacitance Data Capacitance data is given by the calculation. The calculation depends on the operation mode set by the QSC command. There is two operation modes, Normal and 4155C/4156C compatible. Normal Mode Normal operation mode for the B1500A • Capacitance Data At each sweep step, the capacitance data is calculated by using the following formula.
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Remote Mode Functions Measurement Modes Spot C Measurements Spot capacitance measurement is performed as shown below. The CMU (capacitance measurement unit) applies DC bias with AC signal, and performs one point measurement. Before performing the measurement, select the measurement parameters by using the IMP command. And select the output data by using the LMN command.
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Remote Mode Functions Measurement Modes Pulsed Spot C Measurements Pulsed spot C measurement is performed as shown below. The CMU (capacitance measurement unit) applies pulsed DC bias with AC signal, and performs one point measurement. Before performing the measurement, select the measurement parameters by using the IMP command. And select the output data by using the LMN command. Figure 2-19 Pulsed Spot C Measurements DC bias : Measurement PTDCV/PDCV/FC/ACV Trigger (e.g.
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Remote Mode Functions Measurement Modes If the hold time, pulse period, and trigger interval are very short, pulse settling time may be shown. For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the CMU output to 0 V for both AC and DC. NOTE The PTDCV command sets the pulse timing parameters, such as pulse width and pulse period. The PDCV command sets pulsed DC bias (voltage) with AC signal. The FC command sets the AC signal frequency.
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Remote Mode Functions Measurement Modes CV (DC bias) Sweep Measurements CV (DC bias) sweep measurement is performed as shown below. The CMU (capacitance measurement unit) applies DC bias with AC signal, and performs one point measurement at each step of DC bias sweep. While the sweep measurement, the AC signal level and frequency are constant. Before performing the measurement, select the measurement parameters by using the IMP command. And select the output data by using the LMN command.
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Remote Mode Functions Measurement Modes NOTE The WTDCV command sets the hold time, delay time, and step delay time. The WMDCV command sets the automatic abort function and the output after measurement. The WDCV command sets the DC bias sweep voltage. The start and stop values must have the same polarity for log sweep. The FC command sets the AC signal frequency. The ACV command specifies the oscillator level, and applies the AC signal.
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Remote Mode Functions Measurement Modes Figure 2-22 shows an example to use a SMU for the DC bias sweep source. This example uses the CMU for the constant voltage output and the capacitance measurement, the SMU1 for the constant voltage output and the current or voltage measurement, and the SMU2 for the DC bias sweep output and the current or voltage measurement. To perform this measurement, a bias-tee is required. And the CMU and the SMU2 must be connected as shown below.
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Remote Mode Functions Measurement Modes Pulsed Sweep CV Measurements Pulsed sweep CV measurement is performed as shown below. The CMU (capacitance measurement unit) applies pulsed DC bias with AC signal, and performs one point measurement at each step of pulsed DC bias sweep. While the sweep measurement, the AC signal level and frequency are constant. Before performing the measurement, select the measurement parameters by using the IMP command. And select the output data by using the LMN command.
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Remote Mode Functions Measurement Modes NOTE The PTDCV command sets the pulse timing parameters, such as pulse width and pulse period. The WMDCV command sets the automatic abort function. The PWDCV command sets the pulsed bias sweep voltage. The base, start, and stop values must have the same polarity for log sweep. The FC command sets the AC signal frequency. The ACV command specifies the oscillator level, and applies the AC signal.
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Remote Mode Functions Measurement Modes C-f Sweep Measurements C-f sweep measurement is performed as shown below. The CMU (capacitance measurement unit) applies AC signal with DC bias, and performs one point measurement at each step of AC signal frequency sweep. While the sweep measurement, the AC signal level and the DC bias are constant. Before performing the measurement, select the measurement parameters by using the IMP command. And select the output data by using the LMN command.
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Remote Mode Functions Measurement Modes NOTE The WTFC command sets the hold time, delay time, and step delay time. The WMFC command sets the automatic abort function and the output after measurement. The WFC command sets the AC signal frequency sweep output. The ACV command specifies the oscillator level, and applies the AC signal. The DCV command applies the specified DC bias.
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Remote Mode Functions Measurement Modes CV (AC level) Sweep Measurements CV (AC level) sweep measurement is performed as shown below. The CMU (capacitance measurement unit) applies AC signal with DC bias, and performs one point measurement at each step of AC signal level sweep. While the sweep measurement, the AC signal frequency and the DC bias are constant. Before performing the measurement, select the measurement parameters by using the IMP command. And select the output data by using the LMN command.
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Remote Mode Functions Measurement Modes NOTE The WTACV command sets the hold time, delay time, and step delay time. The WMACV command sets the automatic abort function and the output after measurement. The WACV command sets the AC signal level sweep output. The FC command sets the AC signal frequency. The DCV command applies the specified DC bias. If the SCUU (SMU CMU Unify Unit) is connected to the CMU and two MP/HRSMU modules correctly, the source module is automatically selected by the DC bias setting.
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Remote Mode Functions Measurement Modes C-t Sampling Measurements C-t sampling measurement is performed as shown below. The sampling operation is performed in the specified time interval until when the total sampling time runs over Bias hold time + Sampling interval × number of samples. Before performing the measurement, select the measurement parameters by using the IMP command. And select the output data by using the LMN command.
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Remote Mode Functions Measurement Modes This operation is repeated until when the total sampling time runs over Bias hold time + Sampling interval × number of samples. The sampling measurement will be stopped even if the number of measurement result data is less than number. 9. After the sampling measurement, the CMU forces the base or bias value specified by the MDCV command. The source channel set by the DV or DI command continues the source output.
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Remote Mode Functions Synchronous Output Synchronous Output You can use synchronous output that will be synchronized to the output of the primary sweep or search source. See Figure 2-27 and Figure 2-28.
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Remote Mode Functions Synchronous Output Figure 2-27 Synchronous Sweep Output Example for Staircase Sweep Voltage or current Stop value WT/WM/WV/WI Trigger (e.g. XE) Previous value Primary sweep Start value Voltage or current Stop value WSV/WSI Previous value Synchronous sweep Start value Figure 2-28 Time Synchronous Output Example for Binary Search Voltage or current BSM, BST, and BSV/BSSV or BSI/BSSI Trigger (e.g.
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Remote Mode Functions Automatic Abort Function Automatic Abort Function The automatic abort function stops measurement (increasing or decreasing source output value) when one of the following conditions occurs. This function is useful to reduce sweep time and to prevent damage to the device during measurement.
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Remote Mode Functions Automatic Abort Function Exceptions: NOTE • For the sampling measurement, the SPGU output value can be set by the MSP command, not the MSC command. • For the C-t sampling measurement, the MFCMU output value can be set by the MDCV command, not the MSC command. • This function is not effective for the pulsed sweep measurement and the pulsed sweep CV measurement.
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Remote Mode Functions Parallel Measurement Function Parallel Measurement Function The following measurement modes allow to use the multiple measurement channels. • Spot measurement (MM 1,chnum,chnum, . . . ,chnum) • Staircase sweep measurement (MM 2,chnum,chnum, . . . ,chnum) • Sampling measurement (MM 10,chnum,chnum, . . . ,chnum) • Multi channel sweep measurement (MM 16,chnum,chnum, . . .
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Remote Mode Functions Program Memory Program Memory The program memory is a volatile memory that is used to store command strings temporarily. The Agilent B1500 has a built-in program memory that can store 2,000 programs maximum, and a total of 40,000 commands. The program memory can eliminate several processes in the program execution, such as transferring commands, checking command syntax, and converting commands to the internal codes. Thus, using the program memory speeds up program execution.
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Remote Mode Functions Program Memory To call programs from a memory program A memory program can invoke another memory program by storing the DO or RU command in the memory program. Up to eight levels of nesting are available. The first level is always the DO or RU command sent by the external computer. To execute programs Send the RU or DO command to execute the memory program. • OUTPUT @B1500;"RU 1,5" This example executes the programs numbered 1 through 5 sequentially.
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Remote Mode Functions Program Memory Table 2-1 Invalid Commands for Program Memory Category GPIB Command Reset *RST Diagnostics DIAG? Self-test *TST? Self Calibration CA, *CAL?, CM Abort AB Channel Control RCV, WZ? Program Memory ST, END, SCR, VAR?, LST? SPGU Control ALS, ALS?, ALW, ALW? CORRSER?, ODSW?, SER?, SIM?, SPM?, SPPER?, SPRM?, SPST?, SPT?, SPV?, STGP? SMU/PGU Selector Control ERMOD?, ERSSP? 16 bit Control Port ERS? Query ERRX?, ERR?, EMG?, *IDN?, LOP?, *LRN?, NUB?, *OPC?, U
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Remote Mode Functions Dual HCSMU Dual HCSMU This function is available when two HCSMU modules are installed in the B1505A and connected to the 16493S-020 Dual HCSMU Kelvin combination adapter or the 16493S-021 Dual HCSMU combination adapter. Two HCSMU modules can perform the dual HCSMU operation which supports ± 40 A (pulse), ± 2 A (DC). The dual HCSMU operation is enabled by the following command.
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Remote Mode Functions SPGU Module SPGU Module SPGU is the pulse generator module designed for the semiconductor parametric test application and provides the following key functions.
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Remote Mode Functions SPGU Module NOTE SPGU DC bias output The SPGU offers the additional functionality of serving as a DC voltage source. However, it is not suitable for applications requiring an accurate DC bias voltage because of 50 Ω output impedance. For these applications, use the SMU. NOTE SPGU Channel Status The SPGU status can be read with the SPST? command. The channel output will be active (SPST? response is 1) while the channel performs the pulse output or the ALWG sequence output.
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Remote Mode Functions SPGU Module PG Operation Mode In the PG mode (pulse generator operation mode), the SPGU outputs normal 2- or 3-level pulse voltage or DC bias voltage. To set the PG mode, execute the SIM 0 command and use the commands listed in Table 2-2 to output pulse voltage or DC bias voltage. See Figure 2-30 for information on control commands and output timing.
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Remote Mode Functions SPGU Module Table 2-2 SPGU Control Commands for PG Mode Command Description SIM 0 Sets the PG mode for all channels. SPRM Selects the output operation mode for all channels, free run (pulse output continues until SPP), pulse count, or duration. SPPER Sets the pulse period for all channels. SPM Selects the output mode of the channel, DC voltage, 2-level pulse using source 1, 2-level pulse using source 2, or 3-level pulse using sources 1 and 2.
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Remote Mode Functions SPGU Module Figure 2-31 Pulse Setup Parameters SRP V/10 Leading time Pulse peak V/10 V: Pulse level Delay time V/10 Pulse width Pulseperiod Td-sw State hold time Pulse switch Normally open Figure 2-32 Close Trailing time Pulse base V/10 Delay time Td-sw: Delay time for switching Open Close Trigger Output in PG Mode STGP 801,1 Pulse period/2 (maximum 5 s), TTL level Trigger Output 0 V (chassis common) Pulse period SPGU 801 base Delay time base SPGU 802 base SPUPD
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Remote Mode Functions SPGU Module Figure 2-33 3-Level Pulse Output Examples Output of 2-Level pulse source 1 1V Pulseperiod 1V 0V Width1 Delay1 Pulseperiod 0V Delay2 Width2 0V -1 V 3-Level pulse output Output of 2-Level pulse source 2 -1 V Output of 2-Level pulse source 1 3V Pulseperiod 2V 4V Width1 Delay1 Pulseperiod 3V Output of 2-Level pulse source 2 1V 2V 3-Level pulse output 0V Delay2 Width2 The SPGU output channels can be setup to be a 3-level pulse generator by using the SP
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Remote Mode Functions SPGU Module ALWG Operation Mode The SPGU can output an arbitrary linear waveform voltage in the ALWG mode (arbitrary linear waveform generator operation mode). The waveform can be a voltage pattern sequence specified by both pattern data (Table 2-4) and sequence data (Table 2-5). You may specify a complicated pattern sequence or a simple pattern as shown in Figure 2-34. To set the ALWG mode, execute the SIM 1 command.
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Remote Mode Functions SPGU Module NOTE Setup delay time and output voltage between the different patterns When the pattern is changed to the pattern of the different index, 50 ns setup delay is always inserted. There are no delay between the patterns of the same index. During the pattern change, the channel keeps the last output voltage of the previous pattern.
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Remote Mode Functions SPGU Module Table 2-3 SPGU Control Commands for ALWG Mode Command Description SIM 1 Sets the ALWG mode for all channels. SPRM Selects the operation mode, free run (output continues until SPP), sequence count, or duration for all channels. ALW Sets the ALWG pattern data (binary format, big endian) for each channel. See Table 2-4. ALS Sets the ALWG sequence data (binary format, big endian) for the B1500A mainframe. See Table 2-5.
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Remote Mode Functions SPGU Module Table 2-4 ALWG Pattern Data (binary format, big endian) Data Header Pattern data Initial data Vector data Data length Module type (ex: 0) 1 byte Data format revision (ex: 0) 1 byte Number of patterns a (ex: x) 2 bytes Others (0 for all bit. Do not change.
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Remote Mode Functions SPGU Module Table 2-5 ALWG Sequence Data (binary format, big endian) Data Header Sequence data Pattern cycle data Data length Byte length Module type (ex: 0) 1 byte 20 bytes Data format revision (ex: 0) 1 byte Number of pattern cycles a (ex: x) 2 bytes Others (0 for all bit. Do not change.) 16 bytes Pattern index (ex: 1 for Pattern1) 2 bytes Repeat count b (ex: 5) 4 bytes 6× i bytes, i=1 to x : Pattern cycle data can be repeated until the x-th pattern cycle.
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Remote Mode Functions Module Selector Module Selector The Agilent N1258A Module Selector is used to switch the measurement resources (HP/MPSMU, HC/DHCSMU, and HVSMU/HVMCU) connected to DUT (device under test). The Input ports must be connected to the HP/MPSMU, HC/DHCSMU, HVSMU/HVMCU, and GNDU. And the Output port must be connected to the DUT interface. For the packaged devices, use the Agilent N1259A test fixture which can install the module selector.
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Remote Mode Functions Module Selector External Relay Control Output The External Relay Control Output connector is designed for controlling an external relay switching. Use the ERHPE and ERHPR commands to use the external relay control. The ERHPE command enables the external relay control function. The ERHPR command controls the logical state of the Relay control output pin.
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Remote Mode Functions SMU/PG Selector SMU/PG Selector The Agilent 16440A SMU/PGU Selector (B1500A-A04) is used to switch the measurement resources connected to DUT (device under test). The Input ports must be connected to the measurement resources, an SMU and an SPGU or others, and the Output port must be connected to the DUT interface. For the SMU connection, connect the Force terminal only. The Sense terminal must be open. Use the ERMOD and ERSSP commands to control the 16440A selector.
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Remote Mode Functions Ultra High Current Expander/Fixture Ultra High Current Expander/Fixture The Agilent N1265A is a test fixture which contains the current expander to enable 500 A or 1500 A (option N1265A-015) output and measurement, and contains the selector to switch the measurement resource connected to the DUT. The current expander is used to configure the ultra high current unit (UHCU). The selector is used to switch the measurement resource connected to the DUT.
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Remote Mode Functions Ultra High Current Expander/Fixture Figure 2-41 N1265A Built-in Selector Simplified Internal Connections Gate Low High Sense Low Force Sense High F: Force Force S: Sense 0W 10 W 100 W or 1 kW P.A: Protection adapter 100 kW P.A S S S MCSMU F F GNDU HVSMU force is connected to High sense line. F UHCU V-control I-control S MCSMU MCSMU SMU F F HVSMU To specify the selector input connections, use the following commands.
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Remote Mode Functions HVSMU Current Expander HVSMU Current Expander The Agilent N1266A is a current expander for HVSMU. The N1266A is used to configure the high voltage medium current unit (HVMCU) with the HVSMU module and two MC/HCSMU modules as shown in Figure 2-42. Selector is initially installed for switching the HVSMU or the HVMCU connected to the DUT. To configure HVMCU, use the following command. • ERHVCA: Specifies the modules connected to the V Control, I Control, and HVSMU inputs.
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Remote Mode Functions Ultra High Voltage Expander Ultra High Voltage Expander The Agilent N1268A is a voltage expander to enable 10 kV output and measurement. The N1268A is used to configure the ultra high voltage unit (UHVU) with two MC/HCSMU modules as shown in Figure 2-43. To configure UHVU, use the following command. • Figure 2-43 ERUHVA: Specifies the MC/HCSMU modules connected to the control terminals (V Control and I Control).
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Remote Mode Functions Digital I/O Port Digital I/O Port The digital I/O port is used for the trigger input/output terminals or an interface to control an external relay circuit and so on. For the trigger input/output, refer to “Trigger Function”. For another usage, the following commands are available: ERM Changes the digital I/O port assignments. ERS? Returns the digital I/O port status. ERC Changes the output status of the digital I/O port Connector type of the digital I/O port is D-Sub 25-pin.
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Remote Mode Functions Digital I/O Port Accessories The following accessories are available to connect the Digital I/O port. • Agilent 16493G Digital I/O connection cable Used to connect the Digital I/O port to a D-Sub (f) 25-pin connector. This cable should be connected between two B1500s, or between the B1500 and the N1253A-200 BNC box. Cable length depends on the following option items: 16493G-001: Approx. 1.5 m 16493G-002: Approx.
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Remote Mode Functions Digital I/O Port Digital I/O Internal Circuit The following figure shows the input/output circuits internally connected to each port/pin of the Digital I/O connector. Figure 2-45 Digital I/O Internal Circuit Vcc R1 R2 to input control to DSUB pins from output control Q1 Vcc=5 V R1=1 kohm R2=100 ohm Q1: Vce(sat)=0.
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Remote Mode Functions Trigger Function Trigger Function The Agilent B1500 can be synchronized with other equipment, such as capacitance meters, voltmeters, ammeters, probers, handlers and so on, by using the following terminals: • Ext Trig In BNC connector. Only for trigger input (to receive trigger). • Ext Trig Out BNC connector. Only for trigger output (to send trigger). • Digital I/O D-Sub 25-pin connector. Sixteen paths are available for the trigger port.
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Remote Mode Functions Trigger Function Trigger Input A trigger input operation example is shown in Figure 2-47. Measurement or source output can be started by the input trigger sent through the port specified by the TGP command. See Table 2-7.
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Remote Mode Functions Trigger Function PA/PAX/WS/WSX Commands The commands put the B1500 in the trigger wait state. The B1500 can recover from the wait state if an external trigger is sent to a trigger input port. You can use the commands regardless of the trigger type. If you use the PA or PAX command to put the B1500 in the trigger wait state, send the TM3 command before the PA or PAX command.
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Remote Mode Functions Trigger Function Trigger Output A trigger output operation example is shown in Figure 2-48. When the measurement or source output setup is completed, the output trigger is sent through the port specified by the TGP command. See Table 2-8.
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Remote Mode Functions Trigger Function Figure 2-49 Output Trigger for Staircase, Multi Channel, CV(DC)/CV(AC)/C-f Sweep Operation start or OS or OSX Operation complete or OS or OSX High (Approx. 2.4 V) Gate trigger Low (Approx. 0.8 V) Edge trigger Negative logic Source Trigger Delay High (Approx. 2.4 V) Approx. 10us Positive logic Low (Approx. 0.
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Remote Mode Functions Trigger Function Table 2-8 Type of Trigger Output Commanda Type Timing of Trigger Output by B1500 1 When the measurement specified by the MM command is completed. TGP t,2,p,1 TGXO m TM3 2 Available for the staircase sweep, multi channel sweep, pulsed spot, pulsed sweep, staircase sweep with pulsed bias, multi channel pulsed spot, multi channel pulsed sweep, and CV(DC)/CV(AC)/C-f sweep measurements.
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Remote Mode Functions Trigger Function Using Trigger Function • “To Make Wait State Using PA/PAX” • “To Make Wait State Using WS/WSX” • “To Send Trigger Using OS/OSX” • “To Receive Measurement Trigger” • “To Specify Trigger Port and Receive Trigger” • “To Control Measurement Timing Using External Trigger” To Make Wait State Using PA/PAX The PA or PAX command puts the B1500 into a wait state.
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Remote Mode Functions Trigger Function To Make Wait State Using WS/WSX The WS or WSX command puts the B1500 into a wait state. The B1500 can be recovered from the wait state by an external trigger. Then the B1500 executes the commands following the WS/WSX command. The external trigger only releases the wait state set by the WS/WSX command. • WS waits for a trigger sent to the Ext Trig In terminal. • WSX waits for a trigger sent to the specified terminal.
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Remote Mode Functions Trigger Function To Receive Measurement Trigger To use an external trigger just for starting measurement, instead of the XE command, perform the next step. This is not effective for the high speed spot measurement. 1. Connect a BNC cable between the Ext Trig In connector and a trigger output connector of an external device. 2. Create a control program.
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Remote Mode Functions Trigger Function To Specify Trigger Port and Receive Trigger To use an external trigger just for starting measurement, instead of the XE command, perform the next step. This is not effective for the high speed spot measurement. This example specifies the trigger input/output ports and uses the gate trigger for the output trigger. 1. Connect a BNC cable between the Ext Trig In connector and a trigger output connector of an external device. 2. Create a control program.
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Remote Mode Functions Trigger Function To Control Measurement Timing Using External Trigger Multiple trigger terminals will be used to control measurement timing. Refer to the following example that controls the staircase sweep measurement timing.
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Remote Mode Functions Trigger Function Figure 2-50 Trigger Input/Output Example, Staircase Sweep, Negative Logic Start Measurement Start Step Measurement Start Step Output Setup (Case1) Step delay time or more Delay time or more Hold time : Measurement Measurement trigger delay Measurement Completion Step Measurement Completion Source trigger delay Step Output Setup Completion The B1500 sets the measurement conditions, sets the trigger ports, and waits for a Start Measurement trigger.
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Remote Mode Functions Trigger Function Trig In/Out Internal Circuit The following figures show the trigger input/output circuits internally connected to the Trig In/Out connectors.
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Remote Mode Functions Initial Settings Initial Settings Agilent B1500 is initialized by turning the B1500 on, the *RST command, or the device clear. Initial settings of the B1500 are shown in the following tables.
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Remote Mode Functions Initial Settings Table 2-10 SMU Settings Setup Item Initial Setting Commands Output switch open CN, CL Filter off FL Series resistor off SSR ASU path/1 pA auto range/indicator SMU side/disable/enable SAP/SAR/SAL Current measurement range with pulse compliance range RI without pulse auto with pulse compliance range without pulse auto Voltage measurement range RV A/D converter high speed ADC AAD ADC integration time high speed ADC: auto, non parallel AIT,
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Remote Mode Functions Initial Settings Setup Item Initial Setting Commands Quasi-pulse settling detection interval short BDM Sampling source cleared MI, MV Sampling interval, sampling point 2 ms, 1000 points MT Automatic abort function off Output after measurement start value (bias value for MSC) WM, BSM, LSM, MSC Hold time 0s Delay time 0s Step delay time 0s WT Trigger delay time 0s WT, PT Pulse width 0.001 s PT Pulse period 0.
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Remote Mode Functions Initial Settings Table 2-11 CMU Settings Setup Item Initial Setting Commands SCUU path/indicator open/enable SSP/SSL Measurement parameter Cp-G IMP Measurement range auto RC ADC integration time auto ACT Open/short/load correction off OPEN/SHOR/LOAD Phase compensation mode auto ADJ AC signal 0 V, 1 kHz ACV, FC Sweep source parameters cleared WDCV Automatic abort function off WMDCV Output after measurement start value WMDCV Hold time 0s WTDCV Delay t
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Remote Mode Functions Initial Settings Table 2-12 SPGU Settings Setup Item Initial Setting Commands Operation mode PG mode SIM Pulse period 1.0 μs SPPER Channel output operation mode Free run SPRM Channel output mode Pulse source 1, 2-level pulse output SPM DC source setup 0V SPV Pulse source setup Delay: 0 s, Width 100 ns, Leading: 20 ns, Trailing: 20 ns, Base: -0.5 V, Peak: 0.
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Remote Mode Functions Initial Settings Table 2-13 Initial Settings of Mainframe, SMU, and CMU Setup Item Initial Setting Auto calibration SMU output switch SMU filter/series resistor ASU path/1 pA auto range/indicator SCUU path/indicator SMU current measurement range off open off/off SMU side/disable/enable open/enable with pulse compliance range without pulse auto SMU voltage measurement range with pulse compliance range without pulse auto SMU A/D converter high speed ADC SMU ADC Integration time high
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3 Programming Examples
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Programming Examples This chapter provides the following sections which show and explain programming example. • “Programming Basics for Visual Basic .
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Programming Examples • “Reading Binary Output Data” • “Using Programs for 4142B” • “Using Programs for 4155B/4156B/4155C/4156C” Refer to Chapter 4, “Command Reference,” for the command syntax and descriptions of the Agilent B1500 FLEX commands. The following command conventions are used in this chapter. NOTE command Required command for measurement execution. [command] Optional command for measurement execution. parameter Required command parameter. A value or variable must be specified.
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Programming Examples Programming Basics for Visual Basic .NET Users Programming Basics for Visual Basic .NET Users This section provides the basic information for programming of the automatic measurement using the Agilent B1500, Agilent IO Library, and Microsoft Visual Basic .NET.
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Programming Examples Programming Basics for Visual Basic .NET Users To Create Measurement Program Create the measurement program as shown below. The following procedure needs your project template. If the procedure does not fit your programming environment, arrange it to suit your environment. Step 1. Plan the automatic measurements. Then decide the following items: • Measurement devices Discrete, packaged, on-wafer, and so on.
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Programming Examples Programming Basics for Visual Basic .NET Users Table 3-1 Example Template Program Code for Visual Basic .NET Imports Ivi.visa.interop Module Module1 Sub Main() Dim B1500 As IResourceManager Dim session As IMessage B1500 = New ResourceManager session = B1500.Open("GPIB0::17::INSTR") session.WriteString("*RST" & vbLf) MsgBox("Click OK to start measurement.", vbOKOnly, "") Console.WriteLine("Measurement in progress. . .
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Programming Examples Programming Basics for Visual Basic .NET Users Sub perform_meas(ByVal session As IMessage, ByVal t() As Integer) Dim i As Integer = 0 : Dim j As Integer = 0 Dim nop1 As Integer = 1 : Dim nop2 As Integer = 1 Dim data(nop2 - 1, nop1 - 1) As String Dim value As String = "Enter data header" Dim fname As String = "C:\enter_file_name.txt" Dim title As String = "Measurement Result" Dim msg As String = "No error." : Dim err As Integer = 0 ’25 ’ insert measurement program code 34 session.
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Programming Examples Programming Basics for Visual Basic .NET Users Sub save_data(ByVal fname As String, ByVal title As String, ByVal value As String, ByVal data(,) As String, ByVal nop1 As Integer, ByVal nop2 As Integer, ByVal session As IMessage, ByVal t() As Integer) ’48 Dim i As Integer = 0 Dim j As Integer = 0 FileOpen(1, fname, OpenMode.Output, OpenAccess.Write, OpenShare.
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Programming Examples High-Speed Spot Measurements High-Speed Spot Measurements To perform high-speed spot measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples High-Speed Spot Measurements A program example of a high-speed spot measurement is shown below. This example measures MOSFET drain current. This program uses the TTI command to measure the current and read the time stamp data.
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Programming Examples High-Speed Spot Measurements session.WriteString("TSR" & vbLf) ’30 session.WriteString("TTI " & t(0) & "," & mrng & vbLf) session.WriteString("TSQ" & vbLf) Dim mret As String = session.ReadString(16 + 17) ’data+comma+data+terminator Dim tret As String = session.
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Programming Examples Spot Measurements Spot Measurements To perform spot measurements, use the following commands. Function NOTE Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples Spot Measurements A program example of a spot measurement is shown below. This example measures MOSFET drain current.
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Programming Examples Spot Measurements session.WriteString("TSR" & vbLf) session.WriteString("XE" & vbLf) session.WriteString("TSQ" & vbLf) Dim mret As String = session.ReadString(16 + 17) Dim tret As String = session.
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Programming Examples Pulsed Spot Measurements Pulsed Spot Measurements To perform pulsed spot measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Pulsed Spot Measurements A program example of a pulsed spot measurement is shown below. This example measures MOSFET drain current.
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Programming Examples Pulsed Spot Measurements session.WriteString("TSR" & vbLf) session.WriteString("XE" & vbLf) session.WriteString("TSQ" & vbLf) Dim mret As String = session.ReadString(16 + 17) Dim tret As String = session.
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Programming Examples Staircase Sweep Measurements Staircase Sweep Measurements To perform staircase sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples Staircase Sweep Measurements A program example of a staircase sweep measurement is shown below. This example measures MOSFET Id-Vd characteristics.
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Programming Examples Staircase Sweep Measurements session.WriteString("MM 2," & t(0) & vbLf) ’2: staircase sweep measurement session.WriteString("CMM " & t(0) & ",1" & vbLf) ’1: current measurement session.WriteString("RI " & t(0) & ",0" & vbLf) ’0: auto ranging session.WriteString("WT " & hold & "," & delay & "," & s_delay & vbLf) ’41 session.WriteString("WM 2,1" & vbLf) ’stops any abnormal session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) If err <> 0 Then session.
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Programming Examples Staircase Sweep Measurements Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "") End Sub Line ’71 ’76 Description 71 to 74 Displays a message box to show an error message if the error is detected.
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Programming Examples Staircase Sweep Measurements The following program performs the same measurement as the previous program (Table 3-5). This program starts to read measurement data before the sweep measurement is completed.
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Programming Examples Staircase Sweep Measurements Dim ret_val As String : Dim status As String : Dim chan As String Dim type As String : Dim rdata As Double : Dim tdata As Double Dim sdata As Double : Dim mdata As Double : Dim mstat As String Dim disp_data As String : Dim k As Integer = 0 session.TerminationCharacter = 44 ’terminator=comma session.TerminationCharacterEnabled = True ’41 ’45 For j = 0 To nop2 - 1 ’48 session.
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Programming Examples Staircase Sweep Measurements session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") End Sub ’76 ’80 Line Description 76 to 78 Applies 0 V from all channels. And transfers the data stored in the data variable to the save_data subprogram (see Table 3-1).
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Programming Examples Staircase Sweep Measurements The following program example executes the synchronous sweep measurement using two sweep sources. This example measures MOSFET Id-Vg characteristics.
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Programming Examples Staircase Sweep Measurements session.WriteString("MM 2," & t(0) & vbLf) ’2: staircase sweep measurement session.WriteString("CMM " & t(0) & ",1" & vbLf) ’1: current measurement session.WriteString("RI " & t(0) & ",0" & vbLf) ’0: auto ranging session.WriteString("WT " & hold & "," & delay & "," & s_delay & vbLf) ’40 session.WriteString("WM 2,1" & vbLf) ’stops any abnormal session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) If err <> 0 Then session.
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Programming Examples Staircase Sweep Measurements Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "") End Sub Line ’68 ’73 Description 68 to 70 Displays a message box to show an error message if the error is detected.
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Programming Examples Pulsed Sweep Measurements Pulsed Sweep Measurements To perform pulsed sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Pulsed Sweep Measurements A program example of a pulsed sweep measurement is shown below. This example measures the bipolar transistor Ic-Vc characteristics.
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Programming Examples Pulsed Sweep Measurements session.WriteString("DV " & t(0) & ",0,0,0.1" & vbLf) ’out=0 V, comp=0.1 A ’38 Dim b_pt As String = "0.1,0.01,0.02" ’hold, width, period in sec session.WriteString("PT " & b_pt & vbLf) session.WriteString("MM 4," & t(2) & vbLf) ’4: pulsed sweep measurement session.WriteString("CMM " & t(2) & ",1" & vbLf) session.WriteString("RI " & t(2) & ",0" & vbLf) session.WriteString("WT " & hold & "," & delay & "," & s_delay & vbLf) session.
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Programming Examples Pulsed Sweep Measurements session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "") End Sub ’71 ’75 ’80 Line Description 71 to 72 Applies 0 V from all channels.
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Programming Examples Staircase Sweep with Pulsed Bias Measurements Staircase Sweep with Pulsed Bias Measurements To perform staircase sweep with pulsed bias measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Staircase Sweep with Pulsed Bias Measurements A program example of a staircase sweep with pulsed bias measurement is shown below. This example measures the bipolar transistor Ic-Vc characteristics.
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Programming Examples Staircase Sweep with Pulsed Bias Measurements session.WriteString("DV " & t(0) & ",0,0,0.1" & vbLf) ’37 Dim b_pt As String = "0.1,0.01,0.02" ’hold, width, period in sec session.WriteString("PT " & b_pt & vbLf) session.WriteString("MM 5," & t(2) & vbLf) ’5: staircase sweep w/pulsed bias session.WriteString("CMM " & t(2) & ",1" & vbLf) session.WriteString("RI " & t(2) & ",0" & vbLf) session.WriteString("WT " & hold & "," & delay & "," & s_delay & vbLf) session.
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Programming Examples Staircase Sweep with Pulsed Bias Measurements session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 3 & ")", vbOKOnly, "") End Sub ’70 ’75 ’80 Line Description 70 to 72 Applies 0 V from all channels.
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Programming Examples Quasi Pulsed Spot Measurements Quasi Pulsed Spot Measurements To perform quasi-pulsed spot measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples Quasi Pulsed Spot Measurements A program example of a spot measurement is shown below. This measures the breakdown voltage of bipolar transistor.
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Programming Examples Quasi Pulsed Spot Measurements Dim data1 As String = session.ReadString(17) Dim status As String = Left(data1, 3) data1 = Mid(data1, 4, 12) Dim meas As Double = Val(data1) data(j, i) = Chr(13) & Chr(10) & meas & ", " & status ’33 session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub ’39 Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.
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Programming Examples Linear Search Measurements Linear Search Measurements To perform linear search measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples Linear Search Measurements A program example of a linear search measurement is shown below. This example measures the MOSFET threshold voltage.
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Programming Examples Linear Search Measurements session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) ’36 If err <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err session.WriteString("DV " & t(3) & ",0,0,0.1" & vbLf) ’out= 0 V, comp= 0.1 A session.WriteString("DV " & t(2) & ",0,0,0.1" & vbLf) session.WriteString("XE" & vbLf) ’40 Dim mret As String = session.
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Programming Examples Binary Search Measurements Binary Search Measurements To perform binary search measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples Binary Search Measurements A program example of a binary search measurement is shown below. This example measures the MOSFET threshold voltage.
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Programming Examples Binary Search Measurements session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) ’36 If err <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err session.WriteString("DV " & t(3) & ",0,0,0.1" & vbLf) ’out= 0 V, comp= 0.1 A session.WriteString("DV " & t(2) & ",0,0,0.1" & vbLf) ’out= 0 V, comp= 0.1 A session.WriteString("XE" & vbLf) ’40 Dim mret As String = session.
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Programming Examples Multi Channel Sweep Measurements Multi Channel Sweep Measurements To perform multi channel sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples Multi Channel Sweep Measurements NOTE Sweep sources simultaneously start output by a trigger such as the XE command. However, if a sweep source sets power compliance or forces logarithmic sweep current, the sweep sources start output in the order specified by the WNX’s N value. Then the first output is forced by the channel set by the WI or WV command.
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Programming Examples Multi Channel Sweep Measurements session.WriteString("FMT 1,1" & vbLf)’ASCII,,w/sweep source data ’31 session.WriteString("TSC 1" & vbLf) ’enables time stamp output session.WriteString("FL 1" & vbLf) ’sets filter on session.WriteString("AV 10,1" & vbLf)’sets number of samples for 1 data session.WriteString("MM 16," & t(1) & "," & t(2) & vbLf) ’16: m-ch sweep session.WriteString("CMM" & t(1) & ",1" & vbLf) session.WriteString("CMM" & t(2) & ",1" & vbLf) session.
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Programming Examples Multi Channel Sweep Measurements For i = 0 To nop1 - 1 ’58 tm1(i) = Val(Mid(mret, 4 + 16 * 5 * i, 12)) st1(i) = Mid(mret, 17 + 16 * 5 * i, 3) md1(i) = Val(Mid(mret, 20 + 16 * 5 * i, 12)) tm2(i) = Val(Mid(mret, 36 + 16 * 5 * i, 12)) st2(i) = Mid(mret, 49 + 16 * 5 * i, 3) md2(i) = Val(Mid(mret, 52 + 16 * 5 * i, 12)) sc(i) = Val(Mid(mret, 68 + 16 * 5 * i, 12)) data(j, i) = Chr(13) & Chr(10) & sc(i) & ", " & md1(i) * 1000 & ", " & tm1(i) & ", " & st1(i) & ", " & md2(i) * 1000 & ", " & tm2(
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Programming Examples Multi Channel Pulsed Spot Measurements Multi Channel Pulsed Spot Measurements To perform multi channel pulsed spot measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Multi Channel Pulsed Spot Measurements A program example of a multi channel pulsed spot measurement is shown below. This example measures MOSFET drain current and gate current simultaneously.
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Programming Examples Multi Channel Pulsed Spot Measurements session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) If err <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err session.WriteString("TSR" & vbLf) session.WriteString("XE" & vbLf) Dim mret As String = session.ReadString(16 + 16) Dim mret1 As String = session.
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Programming Examples Multi Channel Pulsed Sweep Measurements Multi Channel Pulsed Sweep Measurements To perform multi channel pulsed sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Multi Channel Pulsed Sweep Measurements NOTE By a trigger such as the XE command, the source channels set by the WNX commands start output in the order specified by the N value, and then the source channels set by the MCPNX and MCPWNX commands start output simultaneously. If you use multiple measurement channels, all measurement channels start measurement simultaneously. A program example of a multi channel pulsed sweep measurement is shown below.
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Programming Examples Multi Channel Pulsed Sweep Measurements session.WriteString("FMT 1,1" & vbLf)’ASCII,,w/sweep source data ’31 session.WriteString("TSC 1" & vbLf) ’enables time stamp output session.WriteString("FL 0" & vbLf) ’sets filter off session.WriteString("AIT 2,3," & mtm & vbLf) ’sets measurement time session.WriteString("MCPT " & pcom & vbLf) session.WriteString("MCPNT " & t(1) & b_pt & vbLf) session.WriteString("MCPNT " & t(2) & c_pt & vbLf) session.
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Programming Examples Multi Channel Pulsed Sweep Measurements For i = 0 To nop1 - 1 ’61 tm1(i) = Val(Mid(mret, 4 + 16 * 5 * i, 12)) st1(i) = Mid(mret, 17 + 16 * 5 * i, 3) md1(i) = Val(Mid(mret, 20 + 16 * 5 * i, 12)) tm2(i) = Val(Mid(mret, 36 + 16 * 5 * i, 12)) st2(i) = Mid(mret, 49 + 16 * 5 * i, 3) md2(i) = Val(Mid(mret, 52 + 16 * 5 * i, 12)) sc(i) = Val(Mid(mret, 68 + 16 * 5 * i, 12)) data(j, i) = Chr(13) & Chr(10) & sc(i) & ", " & md1(i) * 1000 & ", " & tm1(i) & ", " & st1(i) & ", " & md2(i) * 1000 & ", "
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Programming Examples Sampling Measurements Sampling Measurements To make sampling measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ... ] Sets series resistor ON/OFF [SSR] chnum,mode Sets integration time (Agilent B1500 can use AAD/AIT instead of AV.
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Programming Examples Sampling Measurements Table 3-16 explains example subprogram that performs linear sampling measurement. This example measures current that flows to resistors R1 and R2, and then calculates the resistance.
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Programming Examples Sampling Measurements session.WriteString("AAD " & t(1) & ", 1" & vbLf) ’sets HR ADC for t(1) ’36 session.WriteString("AAD " & t(2) & ", 1" & vbLf) ’sets HR ADC for t(2) session.WriteString("AIT 1,1,2" & vbLf) ’number of averaging samples for 1 data session.WriteString("AZ 0" & vbLf) ’sets auto zero off ’39 session.WriteString("MT " & bias_h & "," & interval & "," & nop1 & "," & base_h & vbLf) session.WriteString("MV " & t(1) & ",0," & base & "," & bias & "," & icomp & vbLf) session.
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Programming Examples Sampling Measurements mret = session.ReadString(16 * 3 * nop1 + 1) ’59 For i = 0 To nop1 - 1 id(i) = Val(Mid(mret, 4 + 16 * 3 * i, 12)) d1(i) = Val(Mid(mret, 16 + 4 + 16 * 3 * i, 12)) d2(i) = Val(Mid(mret, 16 * 2 + 4 + 16 * 3 * i, 12)) s1(i) = Mid(mret, 16 + 1 + 16 * 3 * i, 3) s2(i) = Mid(mret, 16 * 2 + 1 + 16 * 3 * i, 3) r1(i) = Math.Round(bias / d1(i), 3) r2(i) = Math.
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Programming Examples Sampling Measurements Measurement Result Example Index, I1 (mA), R1 (ohm), St1, I2 (mA), R2 (ohm), St2 1, 69.17, 1.446, NDI, 66, 1.515, NCI 2, 69.18, 1.446, NDI, 66.03, 1.514, NCI 3, 69.18, 1.446, NDI, 66.03, 1.514, NCI 4, 69.15, 1.446, NDI, 66.02, 1.515, NCI 5, 69.16, 1.446, NDI, 66, 1.515, NCI 6, 69.16, 1.446, NDI, 66.01, 1.515, NCI 7, 69.16, 1.446, NDI, 66.02, 1.515, NCI 8, 69.19, 1.445, NDI, 66.01, 1.515, NCI 9, 69.16, 1.446, NDI, 66.03, 1.514, NCI 10, 69.15, 1.446, NDI, 66.02, 1.
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Programming Examples Quasi-static CV Measurements Quasi-static CV Measurements To make quasi-static CV measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Quasi-static CV Measurements A program example of quasi-static CV measurement is shown below. This example measures the gate capacitance of MOSFET. This program example uses three SMUs directly connected to the DUT and a SMU connected to the DUT through the SMU/CMU unify unit (SCUU).
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Programming Examples Quasi-static CV Measurements session.Timeout = 60000 ’timeout = 60 seconds session.WriteString("FMT 1,1" & vbLf) session.WriteString("TSC 1" & vbLf) ’enables time stamp output ’36 session.WriteString("MM 13," & t(1) & vbLf) ’QSCV measurement ’41 session.WriteString("QSC 0" & vbLf) ’Normal QSCV operation session.WriteString("QSL 1,1" & vbLf) ’Ileak DataOn, CompenOn session.WriteString("QSM 2,1" & vbLf) ’AbortOn, StartValue session.WriteString("QSR " & range & vbLf) session.
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Programming Examples Quasi-static CV Measurements MsgBox("Connect DUT. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . ." & Chr(10)) session.WriteString("DV " & t(0) & ",0,0,0.1,0" & vbLf) session.WriteString("DV " & t(2) & ",0,0,0.1,0" & vbLf) session.WriteString("DV " & t(3) & ",0,0,0.1,0" & vbLf) session.WriteString("TSR" & vbLf) session.WriteString("XE" & vbLf) ’69 ’Drain ’Source ’Substrate session.WriteString("*OPC?" & vbLf) : rep = session.ReadString(1 + 2) session.
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Programming Examples Quasi-static CV Measurements Measurement Result Example Vg (V), Cgb (pF), C-status, Ileak (pA), I-status, Time (sec) 3, 2.3085, NCC, -0.259, NCI, 5.10526 2.8, 3.1277, NCC, 0.298, NCI, 5.41159 2.6, 3.1034, NCC, 0.241, NCI, 5.71947 2.4, 3.1334, NCC, 0.278, NCI, 6.02741 2.2, 3.1314, NCC, 0.255, NCI, 6.33532 2, 3.116, NCC, 0.232, NCI, 6.64316 1.8, 3.1193, NCC, 0.215, NCI, 6.95102 1.6, 3.1218, NCC, 0.222, NCI, 7.25891 1.4, 3.106, NCC, 0.18, NCI, 7.56681 1.2, 3.1303, NCC, 0.171, NCI, 7.
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Programming Examples High-Speed Spot C Measurements High-Speed Spot C Measurements To perform high-speed spot C measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets SMU filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples High-Speed Spot C Measurements The following program performs a high-speed spot capacitance measurement by using the TTC command. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples High-Speed Spot C Measurements Dim rbx As Integer ’33 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . ." & Chr(10)) session.WriteString("ADJ " & t(1) & ",1" & vbLf) session.WriteString("ADJ? " & t(1) & vbLf) : err = session.ReadString(1 + 2) If err <> 0 Then session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) : session.
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Programming Examples High-Speed Spot C Measurements session.WriteString("IMP 100" & vbLf) session.WriteString("LMN 1" & vbLf) session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) If err <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err session.WriteString("DCV " & t(1) & "," & dc_bias & vbLf) session.WriteString("TSR" & vbLf) session.WriteString("TTC " & t(1) & "," & range & vbLf) session.WriteString("TSQ" & vbLf) ’60 Dim mret As String = session.
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Programming Examples High-Speed Spot C Measurements Measurement Result Example Cp (pF), C_st, G (uS), G_st, OSC (mV), Osc_st, DC (V), Dc_st, Time (s) 4.96641,NJC,26.1348,NJY,28.7814,NJV,4.7239,NJV,0.0146 Data save completed.
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Programming Examples High-Speed Spot C Measurements Data Correction Table 3-19 lists the Agilent B1500A FLEX commands used for the phase compensation and the open/short/load correction. Before performing the capacitance (impedance) measurement, perform the phase compensation to adjust the phase zero, and perform the corrections you desire. NOTE Before executing CORR? command • Execute DCORR command to set the calibration value or reference value of the open/short/load standard.
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Programming Examples Spot C Measurements Spot C Measurements To perform capacitance spot measurements, use the following commands. Function Measurement Result Example Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets SMU filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Spot C Measurements The following program performs a spot capacitance measurement. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples Spot C Measurements Dim rbx As Integer ’33 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . ." & Chr(10)) session.WriteString("ADJ " & t(1) & ",1" & vbLf) session.WriteString("ADJ? " & t(1) & vbLf) : err = session.ReadString(1 + 2) If err <> 0 Then session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) : session.
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Programming Examples Spot C Measurements session.WriteString("MM 17," & t(1) & vbLf) session.WriteString("IMP 100" & vbLf) session.WriteString("LMN 1" & vbLf) session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) If err <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err session.WriteString("DCV " & t(1) & "," & dc_bias & vbLf) session.WriteString("TSR" & vbLf) session.WriteString("XE" & vbLf) ’60 session.WriteString("*OPC?" & vbLf) : rep = session.ReadString(1 + 2) session.
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Programming Examples CV (DC Bias) Sweep Measurements CV (DC Bias) Sweep Measurements To perform capacitance-voltage (DC bias) sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets SMU filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples CV (DC Bias) Sweep Measurements The following program performs a capacitance vs voltage measurement by the DC bias sweep. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples CV (DC Bias) Sweep Measurements session.WriteString("SSP " & t(1) & ", 4" & vbLf) session.WriteString("ACT 2, 4" & vbLf) ’CMU to SCUU output ’CMU integration, 4 PLC ’37 Dim rbx As Integer ’40 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . ." & Chr(10)) session.WriteString("ADJ " & t(1) & ",1" & vbLf) session.
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Programming Examples CV (DC Bias) Sweep Measurements session.WriteString("WMDCV 2, 1" & vbLf) ’68 session.WriteString("WTDCV " & hold & "," & delay & "," & s_delay & vbLf) session.WriteString("WDCV " & t(1) & ",1," & vg1 & "," & vg2 & "," & nop1 & vbLf) session.WriteString("MM 18," & t(1) & vbLf) session.WriteString("IMP 100" & vbLf) session.WriteString("LMN 1" & vbLf) session.WriteString("RC " & t(1) & "," & range & vbLf) session.WriteString("ERR? 1" & vbLf) : err = session.
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Programming Examples CV (DC Bias) Sweep Measurements session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub ’103 Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub ’107 Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 6 & ")", vbOKOnly, "") End Sub ’112 Line Description 103 to 105 Applies 0 V from all channels.
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Programming Examples Pulsed Spot C Measurements Pulsed Spot C Measurements To perform capacitance pulsed spot measurement, use the following commands. Function Measurement Result Example Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets SMU filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Pulsed Spot C Measurements The following program performs a pulsed spot capacitance measurement. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples Pulsed Spot C Measurements Dim rbx As Integer ’31 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . ." & Chr(10)) session.WriteString("ADJ " & t(1) & ",1" & vbLf) session.WriteString("ADJ? " & t(1) & vbLf) : err = session.ReadString(1 + 2) If err <> 0 Then session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) : session.
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Programming Examples Pulsed Spot C Measurements session.WriteString("MM 19," & t(1) & vbLf) session.WriteString("IMP 100" & vbLf) session.WriteString("RC " & t(1) & "," & range & vbLf) session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) If err <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err session.WriteString("TSR" & vbLf) session.WriteString("XE" & vbLf) session.WriteString("*OPC?" & vbLf) : err = session.ReadString(1 + 2) session.
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Programming Examples Pulsed Sweep CV Measurements Pulsed Sweep CV Measurements To perform capacitance-voltage pulsed sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets SMU filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples Pulsed Sweep CV Measurements The following program performs a capacitance vs voltage measurement by the pulsed bias sweep. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples Pulsed Sweep CV Measurements Dim rbx As Integer ’34 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . ." & Chr(10)) session.WriteString("ADJ " & t(1) & ",1" & vbLf) session.WriteString("ADJ? " & t(1) & vbLf) : err = session.ReadString(1 + 2) If err <> 0 Then session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) : session.
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Programming Examples Pulsed Sweep CV Measurements Dim g_pt As String = "0.5, 0.1, 0.2" ’hold, width, period in sec ’61 Dim v0 As Double = 0 ’0 V: pulse base voltage session.WriteString("WMDCV 2, 1" & vbLf) session.WriteString("PTDCV " & g_pt & vbLf) session.WriteString("PWDCV " & t(1) & ",1," & v0 & "," & vg1 & "," & vg2 & "," & nop1 & vbLf) session.WriteString("MM 20," & t(1) & vbLf) session.WriteString("IMP 100" & vbLf) session.WriteString("LMN 1" & vbLf) session.
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Programming Examples Pulsed Sweep CV Measurements session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 4 & ")", vbOKOnly, "") End Sub ’92 ’96 ’101 Line Description 92 to 94 Applies 0 V from all channels.
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Programming Examples CV (AC Level) Sweep Measurements CV (AC Level) Sweep Measurements To perform capacitance-voltage (AC level) sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets SMU filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples CV (AC Level) Sweep Measurements The following program performs a capacitance vs voltage measurement by the AC level sweep. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples CV (AC Level) Sweep Measurements session.WriteString("DV " & t(0) & ",0,0,0.1,0" & vbLf) session.WriteString("DV " & t(2) & ",0,0,0.1,0" & vbLf) session.WriteString("SSP " & t(1) & ", 4" & vbLf) ’CMU to SCUU output session.WriteString("ACT 0, 2" & vbLf) ’auto, 2 samples ’35 Dim rbx As Integer ’40 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.
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Programming Examples CV (AC Level) Sweep Measurements session.WriteString("WMACV 2, 1" & vbLf) ’68 session.WriteString("WTACV " & hold & "," & delay & "," & s_delay & vbLf) session.WriteString("WACV " & t(1) & ",1," & v1 & "," & v2 & "," & nop1 & vbLf) session.WriteString("MM 23," & t(1) & vbLf) session.WriteString("IMP 100" & vbLf) session.WriteString("LMN 1" & vbLf) session.WriteString("RC " & t(1) & "," & range & vbLf) session.WriteString("ERR? 1" & vbLf) : err = session.
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Programming Examples CV (AC Level) Sweep Measurements session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub ’104 Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub ’108 Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 6 & ")", vbOKOnly, "") End Sub ’113 Line Description 104 to 106 Applies 0 V from all channels.
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Programming Examples C-f Sweep Measurements C-f Sweep Measurements To perform capacitance-frequency sweep measurements, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ... ] Sets SMU filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples C-f Sweep Measurements The following program performs a capacitance vs frequency sweep measurement. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples C-f Sweep Measurements session.WriteString("DV " & t(0) & ",0,0,0.1,0" & vbLf) session.WriteString("DV " & t(2) & ",0,0,0.1,0" & vbLf) session.WriteString("SSP " & t(1) & ", 4" & vbLf) ’CMU to SCUU output session.WriteString("ACT 0, 2" & vbLf) ’auto, 2 samples ’35 Dim rbx As Integer ’40 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . .
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Programming Examples C-f Sweep Measurements MsgBox("Connect DUT. Then click OK.", vbOKOnly, "") ’71 session.WriteString("WMFC 2, 1" & vbLf) session.WriteString("WTFC " & hold & "," & delay & "," & s_delay & vbLf) session.WriteString("WFC " & t(1) & ",1," & f1 & "," & f2 & "," & nop1 & vbLf) session.WriteString("MM 22," & t(1) & vbLf) ’Sets measurement mode session.WriteString("IMP 100" & vbLf) session.WriteString("LMN 1" & vbLf) session.WriteString("RC " & t(1) & "," & range & vbLf) session.
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Programming Examples C-f Sweep Measurements session.WriteString("DZ" & vbLf) save_data(fname, title, value, data, nop1, nop2, session, t) Exit Sub ’110 Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub ’114 Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 6 & ")", vbOKOnly, "") End Sub ’119 Line Description 110 to 112 Applies 0 V from all channels.
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Programming Examples C-t Sampling Measurements C-t Sampling Measurements To perform C-t sampling measurements, use the following commands. Function Command Parameters Enables Measurement Units CN [chnum ... [,chnum] ... ] Disables Measurement Units CL [chnum ... [,chnum] ... ] Sets Filter ON/OFF [FL] mode[,chnum ... [,chnum] ...
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Programming Examples C-t Sampling Measurements The following program performs sampling measurement which repeats capacitance measurement in the specified time interval when a constant voltage is applied to the DUT. This example uses the multi frequency capacitance measurement unit (MFCMU) and the SMU/CMU unify unit (SCUU). Before performing the capacitance (impedance) measurement, you need to perform the phase compensation and data correction. See “Data Correction” on page 3-71.
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Programming Examples C-t Sampling Measurements session.WriteString("DV " & t(0) & ",0,0,0.1,0" & vbLf) session.WriteString("DV " & t(2) & ",0,0,0.1,0" & vbLf) session.WriteString("SSP " & t(1) & ", 4" & vbLf) ’CMU to SCUU output session.WriteString("ACT 0, 2" & vbLf) ’auto, 2 samples ’32 Dim rbx As Integer ’37 rbx = MsgBox("Do you want to perform Phase compensation?", vbYesNo, "") If rbx = vbYes Then MsgBox("Open measurement terminal. Then click OK.", vbOKOnly, "") Console.WriteLine("Wait a minute . . .
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Programming Examples C-t Sampling Measurements MsgBox("Connect DUT. Then click OK.", vbOKOnly, "") ’63 session.WriteString("MTDCV " & bias_h & "," & interval & "," & nop1 & "," & base_h & vbLf) session.WriteString("MDCV " & t(1) & "," & base & "," & bias & ",0" & vbLf) session.WriteString("MM 26," & t(1) & vbLf) session.WriteString("IMP 100" & vbLf) session.WriteString("RC " & t(1) & "," & range & vbLf) session.WriteString("ERR? 1" & vbLf) : err = session.ReadString(4 + 2) If err <> 0 Then session.
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Programming Examples C-t Sampling Measurements Check_err: session.WriteString("EMG? " & err & vbLf) : msg = session.ReadString(256) MsgBox("Instrument error: " & err & Chr(10) & msg, vbOKOnly, "") Exit Sub ’94 Check_nop: MsgBox("No. of data: " & rep & " (not " & nop1 * 4 & ")", vbOKOnly, "") End Sub ’99 Line Description 94 to 97 Displays a message box to show an error message if the error is detected.
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Programming Examples SPGU Pulse Output and Voltage Measurement SPGU Pulse Output and Voltage Measurement To control the SPGU channel, use the following commands. Function Command Parameters Enables channels CN [chnum ... [,chnum] ... ] Disables channels CL [chnum ... [,chnum] ...
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Programming Examples SPGU Pulse Output and Voltage Measurement The following program controls a SPGU to output 2-level pulse from the channel 1 and 3-level pulse from the channel 2. This program can run without the project template (Table 3-1). Table 3-27 SPGU Pulse Output Example Imports Ivi.visa.interop ’1 Module Module1 Sub Main() Dim B1500 As IResourceManager Dim session As IMessage B1500 = New ResourceManager session = B1500.Open("GPIB0::17::INSTR") session.
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Programming Examples SPGU Pulse Output and Voltage Measurement Dim msg As String = "No error." Dim err As Integer = 0 ’34 session.WriteString("CN " & sp_ch(0) & "," & sp_ch(1) & vbLf) ’SPGU ch on ’37 session.WriteString("SIM 0" & vbLf) ’PG mode session.WriteString("SPRM 2," & duration & vbLf) ’Duration mode session.WriteString("ODSW " & sp_ch(0) & ", 0" & vbLf) ’Disables pulse switch ’40 session.WriteString("ODSW " & sp_ch(1) & ", 0" & vbLf) session.
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Programming Examples SPGU Pulse Output and Voltage Measurement session.WriteString("ERRX? 0" & vbLf) : msg = session.ReadString(256) err = Val(Left(msg, 2)) If err <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err ’55 session.WriteString("SRP" & vbLf) ’starts pulse output Console.Write("SPGU output in progress") ’59 Spgu_stat: Console.Write(".") session.WriteString("SPST?" & vbLf) : p_stat = session.
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Programming Examples SPGU Pulse Output and Voltage Measurement The following program controls a SPGU to measure the terminal voltage, calculate the load impedance, set it for the automatic output level adjustment, and output 2-level pulse voltage. This program can run without the project template (Table 3-1). Table 3-28 SPGU Voltage Measurement and Pulse Output Example Imports Ivi.visa.
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Programming Examples SPGU Pulse Output and Voltage Measurement Dim msg As String = "No error." Dim err As Integer = 0 ’34 session.WriteString("CN " & sp_ch(0) & vbLf) ’37 session.WriteString("SIM 0" & vbLf) ’ PG mode session.WriteString("SPRM 2," & duration & vbLf) ’ Duration mode session.WriteString("ODSW " & sp_ch(0) & ", 0" & vbLf) ’ Disables pulse switch session.WriteString("SPPER " & period & vbLf) ’ Pulse period session.WriteString("SPM " & sp_ch(0) & ",1" & vbLf) ’ 2-level pulse setup session.
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Programming Examples SPGU Pulse Output and Voltage Measurement Dim i, n As Integer ’64 session.WriteString("CORRSER? " & sp_ch(0) & ", 0," & delay & "," & interval & "," & count & vbLf) rval = session.ReadString() n = Len(rval) i = InStr(rval, ",") loadz = Val(Left(rval, i - 1)) measv = Val(Right(rval, n - i)) Console.WriteLine(Chr(10) & Chr(10) & "After SPGU output:") Console.WriteLine("Load impedance = " & loadz & " ohm") Console.
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Programming Examples Using Program Memory Using Program Memory The program memory can store approximately 2,000 programs or 40,000 commands. Storing programs and executing them will improve the program execution speed. The following commands are available to use program memory. Command ST and END Function and Syntax Stores the program in the memory. ST pnum;command[ ... [;command] ..];END or ST pnum [command] : [command] END [SCR] Scratches the program.
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Programming Examples Using Program Memory Table 3-29 and Table 3-30 show the example program that uses the internal program memory, and does the following: • stores a high-speed spot measurement program in the memory 1, and displays it. • stores a pulsed spot measurement program in the memory 2, and displays it. • executes the internal memory program 1 and 2. • displays the measurement results on the console window.
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Programming Examples Using Program Memory Table 3-29 Program Memory Programming Example 1 Imports Ivi.visa.interop ’1 Module Module1 Sub Main() Dim B1500 As IResourceManager ’5 Dim session As IMessage B1500 = New ResourceManager session = B1500.Open("GPIB0::17::INSTR") session.WriteString("*RST" & vbLf) Dim fmt As Integer = 1 : session.WriteString("FMT" & fmt & vbLf) Dim t() As Integer = {5, 4, 3, 1} ’Drain, Gate, Source, Substrate Dim v0 As Double = 0 : Dim vd As Double = 1 : Dim idcomp As Double = 0.
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Programming Examples Using Program Memory Dim term As String = t(0) & "," & t(1) & "," & t(2) & "," & t(3) ’40 session.WriteString("CN" & term & vbLf) Dim i As Integer : Dim ret As Integer : Dim msg As String Dim value As String : Dim status As String : Dim meas As Double For i = 1 To 2 session.WriteString("DO" & i & vbLf) session.WriteString("*OPC?" & vbLf) : ret = session.ReadString(1 + 2) session.WriteString("ERR? 1" & vbLf) : ret = session.ReadString(4 + 2) If ret <> 0 Then session.
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Programming Examples Using Program Memory Table 3-30 Program Memory Programming Example 2 session.WriteString("VAR0,0," & t(0) & vbLf) session.WriteString("VAR0,1," & t(1) & vbLf) session.WriteString("VAR0,2," & t(2) & vbLf) session.WriteString("VAR0,3," & t(3) & vbLf) session.WriteString("VAR0,4,0" & vbLf) session.WriteString("VAR0,5,0" & vbLf) session.WriteString("VAR1,0,1" & vbLf) session.WriteString("VAR1,1,0.8" & vbLf) session.WriteString("VAR1,2,0.1" & vbLf) session.WriteString("VAR1,3,0.
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Programming Examples Using Program Memory ’changes vd and vg and performs measurement again ’39 session.WriteString("VAR1,0,3" & vbLf) ’%R0=vd For i = 1 To 2 session.WriteString("DO" & i & vbLf) session.WriteString("*OPC?" & vbLf) : ret = session.ReadString(1 + 2) session.WriteString("ERR? 1" & vbLf) : ret = session.ReadString(4 + 2) If ret <> 0 Then session.WriteString("DZ" & vbLf) : GoTo Check_err value = session.
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Programming Examples Using Trigger Function Using Trigger Function The Agilent B1500 can be equipped with eight trigger ports that will be used for different purpose individually. The Agilent B1500 can synchronize the operation with other equipment by using the trigger function. For details about the trigger input/output operation, see “Trigger Function” on page 2-74. The following commands are available for the trigger function.
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Programming Examples Using Trigger Function The following commands are also available to send a trigger or wait for an external trigger input. Refer to “Using Trigger Function” on page 2-80. Command OS Function and Syntax Causes the Agilent B1500 to send a trigger signal from the Ext Trig Out terminal. OS OSX a Causes the Agilent B1500 to send a trigger signal from the specified port.
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Programming Examples Using Trigger Function Programming examples using the trigger function are explained below. The examples use a couple within the available couples of the Agilent B1500A and the Agilent E5260/E5270 series. In this section, they are assigned as Unit1 (address 717) and Unit2 (address 722). NOTE To run the programs shown in this section, you do not need the example code shown in Table 3-1 (template of a project). The following program performs a MOSFET drain current measurement.
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Programming Examples Using Trigger Function unit1.WriteString("CL" & vbLf) unit2.WriteString("CL" & vbLf) unit1.Close() unit2.Close() MsgBox("Click OK to stop the program.", vbOKOnly, "") Console.WriteLine("Measurement completed.
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Programming Examples Using Trigger Function unit1.WriteString("WS 2" & vbLf) unit1.WriteString("XE" & vbLf) unit2.WriteString("OS" & vbLf) ’55 ’unit1.WriteString("TM 3" & vbLf) ’unit1.WriteString("*OPC?" & vbLf) : ret = unit1.ReadString(1 + 2) ’unit2.WriteString("OS" & vbLf) ’unit1.WriteString("PA" & vbLf) ’unit2.WriteString("OS" & vbLf) ’unit1.WriteString("XE" & vbLf) ’59 unit1.WriteString("*OPC?" & vbLf) : ret = unit1.ReadString(1 + 2) unit1.WriteString("ERR? 1" & vbLf) : err = unit1.
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Programming Examples Using Trigger Function Check_err: unit1.WriteString("EMG? " & err & vbLf) : msg = unit1.
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Programming Examples Using Trigger Function The following program controls two units and performs I-V measurement of two-terminal devices. Each unit measures a different device and performs one point measurement alternately at each sweep step. Before running the program, connect a BNC cable between the following terminals. • Unit1’s Ext Trig Out to Unit2’s Ext Trig In • Unit2’s Ext Trig Out to Unit1’s Ext Trig In NOTE The program needs the example code shown in Table 3-31 to run.
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Programming Examples Using Trigger Function unit1.WriteString("DV" & t(1) & ",0," & vs & "," & icomp & vbLf) ’22 unit1.WriteString("WV" & t(0) & ",1,0," & v1 & "," & v2 & "," & nop1 & "," & icomp & vbLf) unit1.WriteString("MM 2," & t(0) & vbLf) unit1.WriteString("TSC 1" & vbLf) unit2.WriteString("FMT 1" & vbLf) ’27 unit2.WriteString("AV -1" & vbLf) unit2.WriteString("WT 0, 0.01" & vbLf) unit2.WriteString("TM 3" & vbLf) ’30 unit2.WriteString("TGP -2, 2, 2, 1" & vbLf) unit2.
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Programming Examples Using Trigger Function Dim mret1 As String = unit1.ReadString(16 * 2 * Dim mret2 As String = unit2.
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Programming Examples Using Trigger Function This is a program written in the HP BASIC language, and performs the following. 1. Sets the Agilent B1500 for the bipolar transistor Ib-Ic measurement 2. Triggers a sweep measurement 3. Performs a step measurement and sends the Step Measurement Completion output gate trigger 4. Waits for the Start Step Output Setup input trigger 5. Displays a measurement data (Ic) 6. Repeats 3 to 5 the number of times specified by Ib_num 7.
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Programming Examples Using Trigger Function 170 180 190 200 210 220 230 240 250 260 270 280 290 300 310 OUTPUT @B1500;"FMT 5" ! ASCII w/header<,> OUTPUT @B1500;"AV -1" ! Averaging=1PLC OUTPUT @B1500;"WT 0,.
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Programming Examples Using Trigger Function 320 330 340 350 360 370 380 390 400 410 420 430 440 450 460 470 480 490 500 510 520 530 540 550 OUTPUT @B1500;"XE" ! !B1500 starts measurement. Then B1500 sends negative gate !trigger to the other instrument. !Then the instrument should start measurement. ! FOR I=1 TO Ib_num ENTER @B1500 USING "#,3X,12D,X";Ic PRINT "Ic= ";Ic*1000;" [mA]" ! !Measurement data of the other instrument should be read. !And the data should be displayed.
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Programming Examples Reading Time Stamp Data Reading Time Stamp Data Time stamp function outputs a time data with a measurement result data. For example of reading the time stamp data, see programs in the previous sections. NOTE This function is not available for binary data output format (FMT 3 and 4). This function is not available for the quasi-pulsed spot measurement (MM 9) and the search measurement (MM 14 and 15).
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Programming Examples Reading Binary Output Data Reading Binary Output Data This section provides the example to read binary data. The following program example: 1. executes high-speed spot measurements 2. reads the measurement data in binary data format 3. rearranges the data and calculates the measured data 4. prints the measured data on the screen NOTE Data resolution The resolution of binary data is as shown below.
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Programming Examples Reading Binary Output Data Table 3-33 High-Speed Spot Measurement Example to read binary data Sub perform_meas(ByVal session As IMessage, ByVal t() As Integer) Dim i As Integer = 0 ’t(0): Drain Dim j As Integer = 0 ’t(1): Gate Dim nop1 As Integer = 1 ’t(2): Source Dim nop2 As Integer = 1 ’t(3): Substrate Dim data(nop2 - 1, nop1 - 1) As String Dim value As String = "Id (mA), Status" Dim fname As String = "C:\Agilent\prog_ex\data16.
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Programming Examples Reading Binary Output Data Dim range As Double If mode = 1 Then ’ current range If rng < 21 Then range = 10 ^ (rng - 20) If rng = 21 Then range = 2 If rng = 22 Then range = 20 If rng = 23 Then range = 40 Else ’ voltage range If rng = 8 Then range = 0.5 If rng = 9 Then range = 5 If rng = 10 Then range = 0.
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Programming Examples Using Programs for 4142B Using Programs for 4142B This section describes the program modification example to use a program created for the Agilent 4142B Modular DC Source/Monitor. To use the program: 1. change the GPIB address, if necessary. 2. enter the ACH command to translate the channel numbers, if necessary. 3. remove the unsupported command, or replace it with the command supported by the B1500. For more information, refer to “To Use Programs for Agilent 4142B” on page 1-64.
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Programming Examples Using Programs for 4142B The program modified to control the B1500: 10 20 21 30 40 50 60 70 80 81 82 83 84 85 90 100 110 120 130 140 150 160 170 180 ASSIGN @Hp4142 TO 717 !<<<< INTEGER G_ch,D_ch,S_ch INTEGER Sub !<<<< ! ! !Source: GNDU G_ch=2 !Gate: HPSMU (SLOT2) D_ch=3 !Drain: MPSMU (SLOT3) S_ch=4 !Substrate: MPSMU (SLOT4) ! Sub=5 !<<<< OUTPUT @Hp4142;"ACH";Sub,S_ch !<<<< OUTPUT @Hp4142;"*OPC?" !<<<< ENTER @Hp4142;A !<<<< ! OUTPUT @Hp4142;"FMT5" OUTPUT @Hp4142;"CN";D_ch,G_ch,S_ch OUTP
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Programming Examples Using Programs for 4155B/4156B/4155C/4156C Using Programs for 4155B/4156B/4155C/4156C This section describes the program modification example to use a FLEX command program created for the Agilent 4155B/4156B/4155C/4156C Parameter Analyzer. To use the program: 1. change the GPIB address, if necessary. 2. enter the ACH command to translate the channel numbers, if necessary. 3.
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Programming Examples Using Programs for 4155B/4156B/4155C/4156C The original 4156C program: 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 200 210 ASSIGN @Hp415x TO 717 INTEGER G_ch,D_ch,S_ch,B_ch ! S_ch G_ch=2 D_ch=3 B_ch=4 !Source: !Gate: !Drain: !Substrate: SMU1 SMU2 SMU3 SMU4 ! OUTPUT @Hp415x;"US" OUTPUT @Hp415x;"FMT 5" OUTPUT @Hp415x;"CN ";D_ch,G_ch,S_ch,B_ch OUTPUT @Hp415x;"DV ";S_ch;",0,0,.1" OUTPUT @Hp415x;"DV ";B_ch;",0,0,.1" OUTPUT @Hp415x;"DV ";G_ch;",0,3,.
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Programming Examples Using Programs for 4155B/4156B/4155C/4156C The program modified to control the B1500: 10 20 21 30 40 50 60 70 80 81 82 83 90 100 110 120 130 140 150 160 170 180 190 200 210 ASSIGN @Hp415x TO 717 INTEGER G_ch,D_ch,S_ch,B_ch INTEGER Sub !<<<< !<<<< ! ! S_ch=1 !Source: SMU1 <<<< replaced with GNDU G_ch=2 !Gate: SMU2 D_ch=3 !Drain: SMU3 B_ch=4 !Substrate: SMU4 ! Sub=5 !<<<< OUTPUT @Hp415x;"ACH ";Sub,B_ch !<<<< ! ! OUTPUT @Hp415x;"US" <<<< OUTPUT @Hp415x;"FMT 25" !<<<< OUTPUT @Hp415x;"CN
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4 Command Reference
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Command Reference This chapter is the complete reference of the GPIB commands of the Agilent B1500: Abbreviations in this chapter • “Command Summary” • “Command Parameters” • “Command Reference” ASU Atto Sense and Switch Unit (E5288A) CMU, MFCMU Multi Frequency Capacitance Measurement Unit (B1520A) DHC, DHCSMU Dual HCSMU HC, HCSMU High Current SMU (B1512A) HP, HPSMU High Power SMU (B1510A) HR, HRSMU High Resolution SMU (B1517A) HV, HVSMU High Voltage SMU (B1513A or B1513B) HVMC, HVMCU H
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Command Reference Command Summary The following table summarizes the Agilent B1500 GPIB commands. Category Command Summary Reset *RST Resets the B1500 to the initial settings. Diagnostics DIAG? Performs diagnostics, and returns the result. Self-test *TST? Performs the self-test, and returns the result. RCV Enables the channels that fail self-test. CA Performs self-calibration. *CAL? Performs self-calibration, and returns the result. CM Sets SMU auto-calibration ON or OFF.
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Command Reference Category Command Summary Timer Clear TSR Clears the timer count. Time Stamp TSC Enables the time stamp function. This function is not available for the 4 bytes binary data format (FMT3 or FMT4), the high speed spot, quasi-pulsed spot (MM9), and search (MM14 and MM15) measurements. TSQ Returns the time data from timer reset (TSR) to this command. SAL Disables the connection status indicator of the ASU. SAP Controls the input-output path of the ASU.
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Command Reference Category SMU Integration Time and Averaging High Speed Spot Measurement Command Summary AV Sets the number of samples for averaging of the high-speed ADC (A/D converter). Not effective for the high-resolution ADC. AAD Selects the type of A/D converter. AIT Sets the operation mode and the setup parameter of the ADC. AITM/AITM? Sets/returns the PLC operation mode of the high-resolution ADC only for the current measurement of HRSMU. AZ Enables or disables the ADC zero function.
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Command Reference Category MFCMU Setup Command Summary FC Sets the output signal frequency of the MFCMU. ACV Sets the output signal level of the MFCMU, and starts AC voltage output. ACT Sets the A/D converter of the MFCMU. IMP Specifies the impedance measurement parameters. For the ASCII data output. Not available for FMT 3/4/13/14. LMN Enables or disables data output of the OSC level/DC bias monitor values. Measurement Mode MM Sets the measurement mode and measurement channels.
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Command Reference Category Output Comparison Command Summary For the HVMCU, UHCU, or UHVU SOPC/SOPC? Enables the output power comparison function, and returns the comparison reference value set by the SOPC command. SOVC/SOVC? Enables the output voltage comparison function, and returns the comparison reference value set by the SOVC command. Synchronous Sweep Source Setup WSI Sets the synchronous current sweep source used with the WI or PWI command.
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Command Reference Category Sampling Measurement /Source Setup Binary Search Measurement /Source Setup Linear Search Measurement /Source Setup Command Summary MCC Clears the settings of the constant sources defined by MI, MV, or MSP. MI Sets the current source synchronized with the sampling measurement. MSC Sets the automatic abort function. ML Sets the sampling mode, linear or logarithm. MT Sets the timing parameters. MV Sets the voltage source synchronized with the sampling measurement.
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Command Reference Category Command Summary QSC Sets the QSCV measurement operation. QSO Enables or disables the QSCV smart operation. QSM Sets the automatic abort function and the post measurement condition. QSL Enables or disables the data output and compensation for the leakage current. QSZ Enables or disables the capacitance offset cancel function. Or executes the capacitance offset measurement. QST Sets the integration time, hold time, and delay time.
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Command Reference Category Command Summary MSC Sets the automatic abort function. MTDCV Sets the timing parameters. MDCV Sets the voltage source synchronized with the sampling measurement. SIM/SIM? Sets/returns the SPGU operation mode, PG or ALWG. SPRM/SPRM? Sets/returns the output operating mode (free run, duration, count). SRP Starts the SPGU output. SPP Stops all channel outputs and all trigger outputs of the SPGU. SPUPD Applies the setup of the specified SPGU channels.
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Command Reference Category External Trigger Digital I/O port SMU/PGU Selector Control Command Summary TGP Enables the trigger function for a terminal. TGPC Clears the trigger setting of the specified ports. TGSI Selects the sweep step first or last that ignores the Start Step Output Setup trigger input set by the TGP port,1,polarity,2 command. TGSO Selects the trigger type, edge or gate, for the Step Output Setup Completion trigger output set by the TGP port,2,polarity,2 command.
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Command Reference Category N1258A/ N1259A Module Selector Control N1265A Ultra High Current Expander/ Fixture Control Command Summary ERHPA/ ERHPA? Specifies/returns the module connected to the module selector input. ERHPL/ ERHPL? Sets/returns the LED status indicator operation status. ERHPS/ ERHPS? Sets/returns the connection status of the series resistor on the HVSMU path. ERHPP/ ERHPP? Sets/returns the connection status of the input-to-output path.
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Command Reference Category Command Summary ERHVCA/ ERHVCA? Specifies/returns the modules connected to the V Control, I Control, and HVSMU inputs of the N1266A. ERHVCTST? Executes the self-test of the N1266A and returns the result. ERHVP/ ERHVP? Sets/returns the connection status of the input-to-output path. ERHVS/ ERHVS? Sets/returns the connection status of the series resistor on the HVSMU path. ERHVPV Sets the operation mode for the performance verification.
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Command Reference Category Query Status Byte Command Summary *IDN? Returns the instrument model number and the ROM version number. LOP? Returns the operation status of all modules. *LRN? Returns channel settings or the B1500 command parameter settings. NUB? Returns the number of measurement data items in the output data buffer. *OPC? Starts to monitor pending operations, or asks the OPC bit setting. UNT? Returns the model and revision numbers of all modules.
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Command Reference Command Parameters The parameters used by several commands are explained in this section.
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Command Reference Table 4-1 Channel Number chnum ab Description 101 or 1 Subchannel 1 of the module installed in slot 1 201 or 2 Subchannel 1 of the module installed in slot 2 301 or 3 Subchannel 1 of the module installed in slot 3 401 or 4 Subchannel 1 of the module installed in slot 4 501 or 5 Subchannel 1 of the module installed in slot 5 601 or 6 Subchannel 1 of the module installed in slot 6 701 or 7 Subchannel 1 of the module installed in slot 7 801 or 8 Subchannel 1 of the module i
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Command Reference Table 4-2 Voltage Measurement Ranging Type 0 Ranging typeb Measurement resource type range a HR MP HP MC HC DHC HV Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes 2 without pulse Auto ranging 0.2 V limited auto 5 Yes Yes 20 or 11 Yes Yes 50 Yes Yes 200 or 12 Yes Yes Yes Yes Yes Yes 20 V limited auto 400 or 13 Yes Yes Yes Yes Yes Yes 40 V limited auto 1000 or 14 Yes Yes Yes 2000 or 15 0.
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Command Reference Measurement resource type range Ranging type UHCU HVMCU UHVU 0 Yes Yes Yes 1000, -1000, 14, or -14 Yes 30000 or -30000 NOTE 100 V range fixed Yes 103 or -103 Auto ranging 3000 V range fixed Yes 10 kV range fixed Measurement ranging (auto and limited auto) The instrument automatically selects the minimum range that covers the measurement value, and performs the measurement by using the range.
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Command Reference Table 4-3 range a 0 8, for ASU 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 -8, for ASU -9 -10 -11 -12 -13 -14 -15 -16 -17 -18 -19 -20 -21 -22 -23 Current Measurement Ranging Type Ranging typeb Measurement resource type HR MP HP MC HC DHC Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yesc Yesc Yesc Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Ye
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Command Reference Ranging typea Resource type range 0 UHCUb HVMCU Yes Compliance range 19 Yes Yes 21 Yes Measurement channel uses the minimum range that covers the compliance value. -19 Yes 100 mA range fixed -21 Yes 2 A range fixed 26 Yes 28 Yes -26 Yes 500 A range fixed -28 Yes 2000 A range fixed a. If you specify the fixed range larger than the compliance value, the channel uses the compliance range. b.
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Command Reference Table 4-4 Voltage Output Ranging Type Measurement resource type range or vrange HR MP HP MC HC DHC HV 0 Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes 2 Ranging type Auto ranging 0.2 V limited auto ranging 5 Yes Yes 20 or 11 Yes Yes 50 Yes Yes 200 or 12 Yes Yes Yes Yes Yes Yes 20 V limited auto ranging 400 or 13 Yes Yes Yes Yes Yes Yes 40 V limited auto ranging 1000 or 14 Yes Yes Yes 2000 or 15 0.
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Command Reference Table 4-5 Current Output Ranging Type Measurement resource type range or irange HR MP HP MC HC DHC HV 0 Yes Yes Yes Yes Yes Yes Yes 8, for ASU Yes Yes a 1 pA limited auto ranging 9 Yes Yes a 10 pA limited auto ranging 10 Yes Yes a 100 pA limited auto ranging 11 Yes Yes Yes Yes 1 nA limited auto ranging 12 Yes Yes Yes Yes 10 nA limited auto ranging 13 Yes Yes Yes Yes 100 nA limited auto ranging Ranging type Auto ranging 14 Yes Yes Yes Ye
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Command Reference Table 4-6 Output range (actually used) HR/MP/HPSMU Current Source Setup Parameters1 a Setting resolution in A 1 pA 1E-15 10 pA current, start, stop, base, bias, or pulse in A Maximum Vcomp value in V HRSMU MPSMU HPSMU 0 to ± 1.15 E-12 ±100 NA NA 5E-15 0 to ± 11.5 E-12 ±100 100 pA 5E-15 0 to ± 115 E-12 ±100 1 nA 50E-15 0 to ± 1.15 E-9 ±100 ±100 ±200 10 nA 500E-15 0 to ± 11.
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Command Reference Table 4-7 HR/MP/HPSMU Voltage Source Setup Parameters1 Output range (actually used) Setting resolution in V voltage, start, stop, base, bias, or pulse in V 0.5 V HRSMU MPSMU HPSMU 25E-6 0 to ± 0.
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Command Reference Table 4-8 MC/HC/DHCSMU Current Source Setup Parameters1 Output range (actually used) a Setting resolution in A current, start, stop, base, bias, or pulse in A 10 μA 1E-11 0 to ± 11.5E-6 100 μA 1E-10 0 to ± 115E-6 ± 100 μA 1 mA 1E-9 0 to ± 1.15E-3 ± 1 mA 10 mA 1E-8 0 to ± 11.5E-3 ± 10 mA 100 mA 1E-7 0 to ± 115E-3 b ± 100 mA 1 Ac 1E-6 0 to ± 1.15 d ±1 Ae 2A 2E-6 0 to ± 2.
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Command Reference MC/HC/DHCSMU Voltage Source Setup Parameters1 Table 4-9 Output range (actually used) Setting resolution in V voltage, start, stop, base, bias, or pulse in V 0.2 V 2E-7 0 to ± 0.2 2V 2E-6 0 to ± 2 20 V 2E-5 0 to ± 20 40 V 4E-5 0 to ± 40 b Maximum Icomp value in Aa Maximum pulse base value MC SMU HC SMU DHC SMU ± 0.1 for DC, ± 1 for pulse ± 1 for DC, ± 20 for pulse ± 2 for DC, ± 40 for pulse ± 0.2 V ±2V ± 20 V ±1 ±2 ± 40 Vb a.
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Command Reference Table 4-11 HVSMU Current Source Setup Parameters1 current, start, stop, base, bias, or pulse in A Output range (actually used) a Setting resolution in A 1 nA 1E-14 0 to ± 1.15E-9 10 nA 1E-13 0 to ± 11.5E-9 100 nA 1E-13 0 to ± 115E-9 1 μA 1E-12 0 to ± 1.15E-6 10 μA 1E-11 0 to ± 11.5E-6 100 μA 1E-10 0 to ± 115E-6 1 mA 1E-9 0 to ± 1.
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Command Reference Table 4-13 UHCU Pulsed Current Source Setup Parameters1 Output range (actually used) Setting resolution in A current, start, stop, base, bias, or pulse in A a Maximum Vcomp value in V 500 A 1E-3 0 to ± 500 ± 63 2000 Ab 4E-3 0 to ± 1500 a. 0 A is valid for the pulse base value. b. Only for the N1265A-015.
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Command Reference Table 4-16 MFCMU Measurement Parameters mode Primary Parameter Secondary Parameter 1 R (resistance, Ω) X (reactance, Ω) 2 G (conductance, S) B (susceptance, S) 10 Z (impedance, Ω) θ (phase, radian) 11 Z (impedance, Ω) θ (phase, degree) 20 Y (admittance, S) θ (phase, radian) 21 Y (admittance, S) θ (phase, degree) 100 Cp (parallel capacitance, F) G (conductance, S) 101 Cp (parallel capacitance, F) D (dissipation factor) 102 Cp (parallel capacitance, F) Q (quali
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Command Reference Table 4-17 MFCMU Measurement Range for Fixed Ranging Mode Measurement range (impedance range) a range 1 kHz ≤ f ≤ 200 kHz 200 kHz < f ≤ 2 MHz 2 MHz < f ≤ 5 MHz 0 ≤ range < 100 50 Ω 50 Ω 50 Ω 100 ≤ range < 300 100 Ω 100 Ω 100 Ω 300 ≤ range < 1000 300 Ω 300 Ω 300 Ω 1000 ≤ range < 3000 1 kΩ 1 kΩ 1 kΩ 3000 ≤ range < 10000 3 kΩ 3 kΩ 3 kΩ 10000 ≤ range < 30000 10 kΩ 10 kΩ 30000 ≤ range < 100000 30 kΩ 30 kΩ 100000 ≤ range < 300000 100 kΩ 300000 ≤ range 300 kΩ
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Command Reference Table 4-20 MFCMU DC Bias Measurement Range range a 8 Maximum measurement value, absolute value 100 V (SMU) 8 V (MFCMU) 12 12 V (MFCMU) 25 25 V (MFCMU) 100 a. SMU (MPSMU or HRSMU) connected to the SCUU (SMU CMU Unify Unit) always performs the 100 V limited auto ranging operation. The MFCMU uses the 25V range even if range=100 is specified. Figure 4-1 Impedance vs.
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Command Reference Command Reference This section contains detailed descriptions of all GPIB commands. The commands are listed in alphabetical order. Each entry: 1. Defines one GPIB command 2. Describes the execution conditions, if any exist 3. Describes the syntax 4. Lists the parameters 5. Shows the query response after command execution, if there is a query command 6. Explains any additional information 7. Provides examples The following conventions are used in this section.
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Command Reference AAD AAD This command is used to specify the type of the A/D converter (ADC) for each measurement channel. Execution Conditions Enter the AIT command to set up the ADC. Syntax AAD chnum,type Parameters chnum : SMU measurement channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. type : Type of the A/D converter. Integer expression. 0, 1, or 2. 0: High-speed ADC for high speed DC measurement. Initial setting. 1: High-resolution ADC.
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Command Reference AB Remarks If you start an operation that you may want to abort, do not send any command after the command or command string that starts the operation. If you do, the AB command cannot enter the command input buffer until the intervening command execution starts, so the operation cannot be aborted. In this case, use the device clear (HP BASIC CLEAR command) to end the operation. If the AB command is entered in a command string, the other commands in the string are not executed.
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Command Reference ACH ACH The ACH command translates the specified program channel number to the specified actual channel number at the program execution. This command is useful when you use a control program created for an instrument, such as the 4142B, 4155B/4155C/4156B/4156C/E5260/E5270, and B1500, that has a module configuration different from the B1500 actually you use. After the ACH command, enter the *OPC? command to confirm that the command execution is completed.
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Command Reference ACT ACT This command sets the number of averaging samples or the averaging time set to the A/D converter of the MFCMU. Syntax ACT mode[,N] Parameters mode : Averaging mode. Integer expression. 0 (initial setting) or 2. • 0: Auto mode. Defines the number of averaging samples given by the following formula. Then initial averaging is the number of averaging samples automatically set by the B1500 and you cannot change.
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Command Reference ADJ 0 mV (initial setting) to 250 mV, 1 mV step. Example Statements OUTPUT @B1500;"ACV 7,0.01" ADJ This command selects the MFCMU phase compensation mode. This command initializes the MFCMU. Syntax ADJ chnum,mode Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : Phase compensation mode. Integer expression. 0 or 1. 0: Auto mode. Initial setting. 1: Manual mode.
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Command Reference AIT 1: Perform the phase compensation data measurement. If the mode parameter is not set, mode=1 is set. Query Response results results returns the following value. results Meaning 0 Phase compensation measurement was normally completed. 1 Phase compensation measurement failed. 2 Phase compensation measurement was aborted. 3 Phase compensation measurement has not been performed. If the phase compensation measurement has never been performed, result=3 is returned.
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Command Reference AIT 2: Power line cycle (PLC) mode 3: Measurement time mode. Not available for the high-resolution ADC. N: Coefficient used to define the integration time or the number of averaging samples, integer expression, for mode=0, 1, and 2. Or the actual measurement time, numeric expression, for mode=3. See Table 4-21.
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Command Reference AIT type mode 1 0 N Value that defines the integration time given by the following formula. N=1 to 127. Default setting is 6. Integration time = N × initial integration time where initial integration time is the integration time automatically set by Agilent B1500 and you cannot change. 1 Value that defines the integration time given by the following formula. N=1 to 127. Default setting is 3.
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Command Reference AITM Example Statements OUTPUT @B1500;"AIT 2,3,.001" AITM This command is valid for the current measurement by HRSMU. This command sets the operation mode of the high-resolution ADC that is set to the power line cycle (PLC) mode by the AIT 1, 2, N command. The mode setting is cleared by the *RST or a device clear (HP BASIC CLEAR) command. Syntax AITM mode Parameters mode : Operation mode. Integer expression. 0 or 1. 0: B1500 standard operation mode. Initial setting.
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Command Reference ALS? Execution Conditions The SPGU operating mode must be set to ALWG with the SIM 1 command. Syntax ALS chnum,bytes block Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1. bytes : Total number of bytes of the ALWG sequence data. Numeric expression. block : ALWG sequence data (binary format, big endian). ALS? This query command returns the ALWG sequence data of the specified SPGU channel.
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Command Reference ALW? Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1. bytes : Total number of bytes of the ALWG pattern data. Numeric expression. block : ALWG pattern data (binary format, big endian). ALW? This query command returns the ALWG pattern data of the specified SPGU channel. Syntax ALW? chnum Parameters chnum : Query Response block<^EOI> SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1.
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Command Reference AZ Number of samples = number where initial number means the number of samples the Agilent B1500 automatically sets and you cannot change. For voltage measurement, initial number=1. For current measurement, see Table 4-22. If you select the manual mode, number must be initial number or more to satisfy the specifications. Table 4-22 Initial Number for Current Measurement Voltage Output Range a Current Measurement Range to 40 V 100 V 200 V to 10 μA 4 10 25 100 μA to 1 A 1 1 1 a.
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Command Reference BC Remarks Set the function to OFF in cases that the measurement speed is more important than the measurement accuracy. This roughly halves the integration time. Example Statements OUTPUT @B1500;"AZ 0" BC The BC command clears the output data buffer that stores measurement data and query command response data. This command does not change the measurement settings. NOTE Multi command statement is not allowed for this command.
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Command Reference BDT Example Statements OUTPUT @B1500;"BDM 0,1" BDT The BDT command specifies the hold time and delay time for the quasi-pulsed measurements. Syntax BDT hold,delay Parameters hold : Hold time (in sec). Numeric expression. 0 to 655.35 s, 0.01 s resolution. Initial setting is 0. delay : Delay time (in sec). Numeric expression. 0 to 6.5535 s, 0.0001 s resolution. Initial setting is 0. Example Statements OUTPUT @B1500;"BDT 0.
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Command Reference BGI The compliance polarity is automatically set to the same polarity as the stop value, regardless of the specified Icomp value. If stop=0, the polarity is positive. Remarks Example Statements The time forcing the stop value will be approximately 1.5 ms to 1.8 ms with the following settings: • BDM, BDT command parameters: interval=0, mode=0, delay=0 • AV or AAD/AIT command parameters: initial setting OUTPUT @B1500;"BDV 1,0,0,100,0.
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Command Reference BGV target : Search target current (in A). Numeric expression. 0 to ±0.1 A (MPSMU/HRSMU/MCSMU) 0 to ±1 A (HPSMU/HCSMU) 0 to ±2 A (DHCSMU) 0 to ±0.008 A (HVSMU) Remarks In the limit search mode, if search cannot find the search target and the following two conditions are satisfied, the B1500 repeats the binary search between the last source value and the source start value. • target is between the data at source start value and the last measurement data.
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Command Reference BGV mode, condition : Search mode (0: limit mode or 1: repeat mode) and search stop condition. The meaning of condition depends on the mode setting. mode condition 0 Limit value for the search target (target). The search stops when the monitor data reaches target ± condition. Numeric expression. Positive value. in V. Setting resolution: range/20000. where range means the measurement range actually used for the measurement. 1 Repeat count.
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Command Reference BSI Example Statements OUTPUT @B1500;"BGV 1,0,0.1,12,5" See Also “BSM” BSI The BSI command sets the current search source for the binary search measurement (MM15). After search stops, the search channel forces the value specified by the BSM command. This command clears the BSV, BSSI, and BSSV command settings. This command setting is cleared by the BSV command. If Vcomp value is greater than the allowable voltage for the interlock open condition, the interlock circuit must be shorted.
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Command Reference BSM BSM The BSM command specifies the search source control mode in the binary search measurement (MM15), and enables or disables the automatic abort function. The automatic abort function stops the search operation when one of the following conditions occurs: • Compliance on the measurement channel • Compliance on the non-measurement channel • Overflow on the AD converter • Oscillation on any channel This command also sets the post search condition for the binary search sources.
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Command Reference BSM 2. The source channel forces the Stop value, and the monitor channel executes a measurement. If the search target value is out of the range between the measured value at the Start value and the measured value at the Stop value, the search stops. 3. The source channel forces the Stop-D/2 value (or Stop+D/2 if Start>Stop), and the monitor channel executes a measurement.
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Command Reference BSSI Cautious mode The operation of the cautious mode is explained below: 1. The source channel forces the Start value, and the monitor channel executes a measurement. 2. The source channel forces the Start+D/2 value (or Start-D/2 if Start>Stop), and the monitor channel executes a measurement. If the search stop condition is not satisfied, the measured data is used to decide the direction (+ or –) of the next output change. The value of the change is always half of the previous change. 3.
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Command Reference BSSV Both primary and synchronous search sources will use the same output range. So check the output range set to the BSI command to determine the synchronous source outputs. Vcomp : Voltage compliance value (in V). Numeric expression. If you do not specify Vcomp, the previous value is set.
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Command Reference BST Icomp : Current compliance value (in A). Numeric expression. If you do not specify Icomp, the previous value is set. Zero amps (0 A) is not a valid value for the Icomp parameter. Example Statements OUTPUT @B1500;"BSSV 1,0,5,1E-6" See Also For the source output value, output range, and the available compliance values, see Table 4-7 on page 4-24, Table 4-9 on page 4-26, Table 4-12 on page 4-27, or Table 4-15 on page 4-28 for each measurement resource type.
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Command Reference BSVM Syntax BSV chnum,range,start,stop[,Icomp] Parameters chnum : SMU search source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. range : Output ranging type. Integer expression. The output range will be set to the minimum range that covers both start and stop values. For the limited auto ranging, the instrument never uses the range less than the specified range. See Table 4-4 on page 4-21. start, stop : Search start or stop voltage (in V).
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Command Reference *CAL? The *OPC? command should be entered after this command to confirm the completion of the self-calibration. Module condition after this command is the same as the condition by the CL command. Execution Conditions No SMU may be in the high voltage state (forcing more than the allowable voltage for the interlock open condition, or voltage compliance set to more than it). Before starting the calibration, open the measurement terminals.
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Command Reference *CAL? Execution Conditions No SMU may be in the high voltage state (forcing more than the allowable voltage for the interlock open condition, or voltage compliance set to more than it). Before starting the calibration, open the measurement terminals. Syntax *CAL? [slot] Parameters slot : Slot number where the module under self-calibration has been installed. 1 to 10. Or 0 or 11. Integer expression. 0: All modules and mainframe. Default setting. 11: Mainframe.
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Command Reference CL CL The CL command disables the specified channels. Execution Conditions No channel may be in the high voltage state (forcing more than the allowable voltage for the interlock open condition, or voltage compliance set to more than it). However, if you do not specify chnum for CL command, there are no restrictions on the execution conditions. Syntax CL [chnum[,chnum...[,chnum]...]] A maximum of 15 channels can be set. Parameters chnum : Channel number. Integer expression.
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Command Reference CLCORR CLCORR This command disables the MFCMU open/short/load correction function and clears the frequency list for the correction data measurement. This command also clears the correction data. Syntax CLCORR chnum,mode Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : Command option. Integer expression. 1 or 2. 1: Just clears the frequency list.
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Command Reference CMM CMM The CMM command sets the SMU measurement operation mode. This command is not available for the high speed spot measurement. Syntax CMM chnum,mode Parameters chnum : SMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : SMU measurement operation mode. Integer expression. 0 to 4. mode=4 is not available for HPSMU, MPSMU, and HRSMU. 0: Compliance side measurement. Initial setting.
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Command Reference CN/CNX Syntax CN [chnum[,chnum...[,chnum]...]] CNX [chnum[,chnum...[,chnum]...]] A maximum of 15 channels can be set. Parameters chnum : Channel number. Integer expression. See Table 4-1 on page 4-16. If the output switch of the specified SMU is already set to ON, no action is performed by this command. If you specify multiple chnums, the channels will be enabled in the specified order. If you do not specify chnum, this command enables all SMU, all SPGU, and CMU in this order.
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Command Reference CORR? Remarks The CN/CNX command sets the specified module to the following conditions: SMU setup parameter Value MFCMU setup parameter Value Output switch Source mode Output voltage V range I compliance I range Filter Series resistor ON Voltage 0V 20 V 100 μA 100 μA Not changed Not changed DC bias AC level Output signal frequency Measurement range SPGU setup parameter Output switch Output mode Output voltage 0V 0V 1 kHz 50 Ω Value ON DC 0V After this command, there is no addition
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Command Reference CORRDT Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. corr : Correction data to measure. Integer expression. 1, 2, or 3. 1: Open correction data 2: Short correction data 3: Load correction data Query Response result 0: Correction data measurement completed successfully. 1: Correction data measurement failed. 2: Correction data measurement aborted.
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Command Reference CORRDT? Example Statements OUTPUT @B1500;"CORRDT 9,3000000,0,0,0,0,0,0" CORRDT? This command returns the MFCMU open/short/load correction data. Syntax CORRDT? chnum,index Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. index : Index number of the list. Integer expression. Query Response Example Statements freq,open_r,open_i,short_r,short_i,load_r,load_i freq : Frequency of the correction data.
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Command Reference CORRL? Example Statements OUTPUT @B1500;"CORRL 9,3000000" CORRL? This command returns the frequency stored in the frequency list for the MFCMU correction data measurement. Syntax CORRL? chnum[,index] Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. index : Index number of the list. Integer expression.
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Command Reference CORRSER? The voltage must be measured in the first pulse or ALWG sequence output. In the PG mode, the pulse period must be more than delay + interval × count value. Set the command parameters properly. The voltage must be measured at the output timing of the voltage effective for the automatic adjustment of the SPGU output voltage. Syntax CORRSER? chnum,mode,delay,interval,count Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002.
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Command Reference CORRST OUTPUT @B1500;"SPV 101,1,-0.5,0.5" OUTPUT @B1500;"CORRSER? 101,1,1E-7,1E-8,10" ENTER @B1500;A,B In this example, the voltage measurement data is returned to the variable B, and the load impedance calculation data is returned to the variable A. See Also “SER”, “SER?” NOTE Terminal voltage measurement and load impedance calculation SPGU performs voltage measurement and impedance calculation by executing the CORRSER? command.
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Command Reference CORRST? The correction function is set to OFF by turning off power or by the CORRST or *RST command. The correction data is cleared by turning off power or by the CLCORR, CORRL, or DCORR command. If the correction function is set to ON after the *RST command, the correction function uses the memorized correction data. Syntax CORRST chnum,corr,state Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. corr : Correction mode.
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Command Reference DCORR DCORR This command disables the MFCMU open/short/load correction function and sets the open/short/load standard calibration value or reference value to the B1500. This command also clears the correction data. The reference values set by this command are cleared by turning off power. Syntax DCORR chnum,corr,mode,primary,secondary Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. corr : Correction mode.
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Command Reference DCV corr : Correction mode. Integer expression. 1, 2, or 3. 1: Open correction 2: Short correction 3: Load correction Query Response mode,primary,secondary mode : Measurement mode. Integer expression. 100 or 400. 100: Cp-G (for open correction) 400: Ls-Rs (for short or load correction) primary : Primary reference value of the standard. Numeric expression. Cp value for the open standard. in F. Ls value for the short or load standard. in H.
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Command Reference DI Parameters chnum : MFCMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. voltage : DC voltage (in V). Numeric expression. 0 (initial setting) to ± 25 V (MFCMU) or ± 100 V (with SCUU) With the SCUU, the source module is automatically selected by the setting value. The MFCMU is used if voltage is below ± 25 V (setting resolution: 0.001 V), or the SMU is used if voltage is greater than ± 25 V (setting resolution: 0.005 V).
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Command Reference DIAG? 0: Auto mode (default setting). The compliance polarity is automatically set to the same polarity as current, regardless of the specified Vcomp. If current=0 A, the polarity is set to positive. 1: Manual mode. Uses the polarity of Vcomp you specified. vrange : Example Statements Voltage compliance ranging type. Integer expression. The compliance range will be set to the minimum range that covers Vcomp value.
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Command Reference DO Remarks • Before executing DIAG? 1, connect a BNC cable between the Ext Trig In and Out connectors. • After executing DIAG? 3, confirm the status of LED. Then enter the AB command. result returns 2. If the LED does not blink, the B1500 must be repaired. Example Statements • Before executing DIAG? 4, disconnect any cable from the digital I/O port. • Before executing DIAG? 6, open interlock circuit. • Before executing DIAG? 7, close interlock circuit.
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Command Reference DSMPLFLUSH Parameters chnum : SMU channel number. Integer expression. 1 to 10. See Table 4-1 on page 4-16. type : Event type. Integer expression. 1: Start of pulse output count : Example Statements Number of events. Integer expression. 0 disables the signal monitor. If the following command is executed, the channel 5 starts the signal monitor when the 10th pulse output starts.
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Command Reference DSMPLSETUP If there is no monitor data, a dummy data is returned. Example Statements OUTPUT @B1500;"DSMPLFLUSH 5" DSMPLSETUP Available for HVSMU, HCSMU, MCSMU, DHCSMU, UHCU, HVMCU, and UHVU. The DSMPLSETUP command sets the signal monitor function for the specified channel. This function is used to monitor the channel input/output during the measurement specified by the MM command.
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Command Reference DZ If the output voltage is greater than the allowable voltage for the interlock open condition, the interlock circuit must be shorted. Syntax DV chnum,vrange,voltage[,Icomp[,comp_polarity[,irange]] Parameters chnum : SMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. vrange : Ranging type for voltage output. Integer expression. The output range will be set to the minimum range that covers voltage value.
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Command Reference EMG? Syntax DZ [chnum[,chnum...[,chnum]...]] A maximum of 15 channels can be set. Parameters chnum : Channel number. Integer expression. See Table 4-1 on page 4-16. If you specify multiple chnums, the channel outputs will be set to 0 V in the specified order. If you do not specify chnum, all SMU, all SPGU, and CMU with the output switch ON will be set to 0 V in this order.
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Command Reference END If unsupported error is detected, 999 is returned by the ERR? command. The EMG? 999 command returns the message associated with the last error. Syntax EMG? errcode Parameters errcode : Query Response error_message Error code returned by the ERR? command. Numeric expression. See Chapter 5, “Error Messages” for the error codes and error messages.
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Command Reference ERHPA value : Decimal value of the output status bit pattern. Integer expression. 0 to 65535. The bit pattern must comply with the following rule: Bit value 0: TTL high level (approx. 2.4 V) Bit value 1: TTL low level (approx. 0.8 V) rule : Example Statements Place holder to keep the same syntax as the ERC command of the Agilent 4142B. Input value is ignored. If you want to set TTL low level for the output ports of the digital I/O port bit 0 to 7, enter the following command.
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Command Reference ERHPA? ERHPA? The ERHPA? command returns the channel numbers of the measurement resources connected to the input ports of Agilent N1258A/N1259A module selector. Syntax ERHPA? Query Response hvsmu,hcsmu,hpsmu hvsmu : Channel number of HVSMU connected to the HVSMU port directly or via the N1266A expander.
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Command Reference ERHPL 1 (enable) or 0 (disable). Integer expression. Example Statements OUTPUT @B1500;"ERHPE?" ENTER @B1500;A ERHPL The ERHPL command enables or disables the LED status indicator of Agilent N1258A/N1259A module selector. Execution Conditions Digital I/O port must be set to the N1258A/N1259A control mode using the ERMOD 2 command. Syntax ERHPL onoff Parameters onoff : Example Statements OUTPUT @B1500;"ERHPL 0" 1 (enable, initial setting) or 0 (disable, always off).
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Command Reference ERHPP? 0: Open, no module is connected, initial setting 1: Connects to HVSMU port 2: Connects to HCSMU port 3: Connects to HPSMU port 4: Connects to HVSMU port, also connects the series resistor Example Statements OUTPUT @B1500;"ERHPP 3" ERHPP? The ERHPP? command returns the input-to-output connection path of Agilent N1258A/N1259A module selector. Syntax ERHPP? Query Response path Input-to-output connection path. Integer expression. 0, 1, 2, 3, or 4.
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Command Reference ERHPR? Parameters pin : Relay control output pin number. Integer expression. 1 to 6. state : Logical state. Integer expression. 0 or 1. 0: OFF (0 V, circuit common), initial setting 1: ON (12 V) Example Statements OUTPUT @B1500;"ERHPR 1,1" OUTPUT @B1500;"ERHPR 2,1" ERHPR? Only for the N1258A module selector users. This command returns the logical state set to the specified relay control output pin.
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Command Reference ERHPS? ERHPS? The ERHPS? command returns the connection status for the series resistor on the HVSMU path of Agilent N1258A/N1259A module selector. Syntax ERHPS? Query Response onoff Connection status of the series resistor on the HVSMU path. 1 (connect) or 0 (disconnect). Integer expression.
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Command Reference ERHVCA? ERHVCA? This query command returns the slot numbers for the modules connected to the V Control, I Control, and HVSMU inputs of Agilent N1266A HVSMU current expander. Syntax ERHVCA? Query Response vsmu,ismu,hvsmu Example Statements vsmu : Slot number for the MC/HCSMU connected to the V Control input. ismu : Slot number for the MC/HCSMU connected to the I Control input. hvsmu : Slot number for the HVSMU connected to the HVSMU input.
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Command Reference ERHVP? Digital I/O port must be set to the N1266A control mode using the ERMOD 8 command. Syntax ERHVP state Parameters state : Connection status of the input-to-output path. Integer expression. 0, 1,or 2. 0: Open, initial setting. 1: Connects to HVSMU 2: Connects to HVMCU Example Statements OUTPUT @B1500;"ERHVP 2" ERHVP? This query command returns the connection status for the input-to-output path of Agilent N1266A HVSMU current expander.
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Command Reference ERHVS 0: Normal mode, initial setting 1: HVMCU DC output mode 2: Capacitance charge mode Example Statements OUTPUT @B1500;"ERHVPV 2" ERHVS This command sets the connection status for the series resistor on the HVSMU path of Agilent N1266A HVSMU current expander. Execution Conditions Digital I/O port must be set to the N1266A control mode using the ERMOD 8 command. The ERHVP 0 command has been already executed.
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Command Reference ERM ERM The ERM command changes the input/output assignments of the digital I/O port (total 16 paths). This command does not change the trigger port assignments and settings. The *RST command or the device clear sets the digital I/O port to the output port, and sets the port output level to TTL high. Execution Conditions The digital I/O control mode must be the direct control (ERMOD 0). Syntax ERM iport Parameters iport : Decimal value of the port setting. Integer expression.
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Command Reference ERMOD 1: 16440A SMU/PGU selector (B1500A-A04) control mode 2: N1258A/N1259A control mode 4: N1265A control mode 8: N1266A control mode 16: N1268A control mode option : Disable/ enable the specified mode. Integer expression. 0 or 1. 0: Disabling the specified mode. 1: Enabling the specified mode, initial setting. The 16440A control mode offers easy control over the 16440A selector (B1500A-A04) connected to the digital I/O port via the Agilent 16445A selector adapter. Use ERSSP and ERSSP?.
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Command Reference ERMOD? ERMOD? This query command returns the control mode for the digital I/O ports. Syntax ERMOD? Query Response mode 0: General purpose control mode 1: 16440A SMU/PGU selector (B1500A-A04) control mode 2: N1258A/N1259A control mode 4: N1265A control mode 8: N1266A control mode 16: N1268A control mode Remarks If some control modes are enabled, the ERMOD? command returns sum of mode values.
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Command Reference ERPFDA? Effective slot numbers are 1 to 10. Integer expression. Use the smaller slot number for the module which occupies two slots, such as HVSMU and HPSMU. Enter 0 to cancel the assignment. Example Statements OUTPUT @B1500;"ERPFDA 6,0" ERPFDA? This query command returns the slot numbers for the measurement resources connected to the Selector Input of Agilent N1265A ultra high current expander/fixture.
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Command Reference ERPFDP? 1: Connects the Low terminal to UHCU Low, and the High terminal to the UHCU High. 2: Connects the Low terminal to the GNDU, and the High terminal to the HVSMU/HVMCU. 3: Connects the Low terminal to the GNDU, and the High terminal to the MP/HPSMU. 4: Connects the Low terminal to the GNDU, and opens the High terminal.
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Command Reference ERPFDS? 0: Disable the series resistor connection, initial setting. 1: Enable the series resistor connection. Example Statements OUTPUT @B1500;"ERPFDS 1" ERPFDS? This query command returns the connection status for the series resistor on the HVSMU path of Agilent N1265A ultra high current expander/fixture. Syntax ERPFDS? Query Response state Connection status of the series resistor on the HVSMU path. 0 (disconnect) or 1 (connect).
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Command Reference ERPFGA? Pulse: 1 A, maximum duty ratio is 5 %. Example Statements OUTPUT @B1500;"ERPFGA 5" ERPFGA? This query command returns the slot number for the MC/HCSMU module connected to the Gate input of Agilent N1265A ultra high current expander/fixture. Syntax ERPFGA? Query Response gsmu gsmu : Example Statements Slot number for the MC/HCSMU connected to the Gate input.
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Command Reference ERPFGR Query Response state Connection status. 0 (open) or 1 (connect). Example Statements OUTPUT @B1500;"ERPFGP?" ENTER @B1500;gpathUHC ERPFGR This command sets the connection status for the series resistor on the Gate path of Agilent N1265A ultra high current expander/fixture. Execution Conditions Digital I/O port must be set to the N1265A control mode using the ERMOD 4 command. The ERPFGP 0 command has been already executed.
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Command Reference ERPFTEMP? ERPFTEMP? This query command returns the temperature measured by using the thermocouples (N1265A-041) connected to the K Thermocouple 1 and 2 terminals of Agilent N1265A ultra high current expander/fixture. Execution Conditions Digital I/O port must be set to the N1265A control mode using the ERMOD 4 command. Syntax ERPFTEMP? chnum Parameters chnum : Query Response value Terminal number of the K thermocouple; 1 or 2. Measured temperature in degrees C.
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Command Reference ERPFUHCA? Example Statements OUTPUT @B1500;"ERPFUHCA 3,4" ERPFUHCA? This query command returns the slot numbers for the MC/HCSMU modules connected to the V Control and I Control inputs of Agilent N1265A ultra high current expander/fixture. Syntax ERPFUHCA? Query Response vsmu,ismu Example Statements vsmu : Slot number for the MC/HCSMU connected to the V Control input. ismu : Slot number for the MC/HCSMU connected to the I Control input.
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Command Reference ERPFUHCTST? Execution Conditions Digital I/O port must be set to the N1265A control mode using the ERMOD 4 command. Syntax ERPFUHCMAX? Query Response imax If the N1265A has the 1500 A option (N1265A-015), 1500 is returned. If not, 500 is returned. Example Statements OUTPUT @B1500;"ERPFUHCMAX?" ENTER @B1500;maxUHC ERPFUHCTST? This query command performs the self-test of Agilent N1265A ultra high current expander/fixture, and returns the execution results.
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Command Reference ERRX? 1: Reads one error code from the head of the error queue and removes that code from the queue. This returns one error code. Query Response error_code,error_code,error_code,error_code or error_code Response of the ERR? 1 command is one of the followings. • 0: No error. Normal condition. • XYZ: Error XYZ (100 to 999) occurs. • aXYZ: Error XYZ (100 to 999) occurs on the slot a (1 to 9). • 10XYZ: Error XYZ (100 to 999) occurs on the slot 10.
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Command Reference ERS? 1: Returns the error code only. Query response error_code,message or error_code message contains an error message similar to the EMG? response and a custom message containing additional information such as the slot number. They are separated by a semicolon (;). For example, if the error 305 occurs on the slot 1, this command returns the following response. 305,"Excess current in HPSMU.; SLOT1" If no error occurred, this command returns 0,"No Error.
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Command Reference ERSSP Example Statements OUTPUT @B1500;"ERS?" ENTER @B1500;A PRINT "Port Status=";A For example, 255 (0000000011111111) is returned when the port 0 to 7 have been set to the TTL low level and the port 8 to 15 have been set to the TTL high level. See Also “ERMOD”, “ERC”, “ERM” ERSSP This command sets the connection state of the I/O path for the Agilent 16440A SMU/PGU selector (B1500A-A04). Set for each output port on the selector.
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Command Reference ERSSP? ERSSP? This query command returns the connection state of the I/O path for the Agilent 16440A SMU/PGU selector (B1500A-A04). Syntax ERSSP? port Parameters port: Output port of SMU/PG selector. Integer expression. 0: Output 1 on selector of first module 1: Output 2 on selector of first module 2: Output 1 on selector of second module 3: Output 2 on selector of second module Query Response status 0: Open. Normally open mechanical relay contact. 1: SMU connect.
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Command Reference ERUHVA? Parameters vsmu : Slot number for the MC/HCSMU connected to the V Control input. ismu : Slot number for the MC/HCSMU connected to the I Control input. Effective slot numbers are 1 to 10. Integer expression. Use the smaller slot number for the HCSMU which occupies two slots. Enter 0 to cancel the assignment.
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Command Reference FL FL This command sets the connection mode of a SMU filter for each channel. A filter is mounted on the SMU. It assures clean source output with no spikes or overshooting. Syntax FL mode[,chnum[,chnum...[,chnum]...]] A maximum of ten channels can be set. Parameters mode : Status of the filter. Integer expression. 0: Disconnect (initial setting). 1: Connect. chnum : SMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16.
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Command Reference FMT Example Statements OUTPUT @B1500;"FMT 1" OUTPUT @B1500;"FMT 2,1" Table 4-24 FMT format parameter format Data format Terminator 1a ASCII (12 digits data with header) 2a ASCII (12 digits data without header) 3a 4 byte binary 4a 4 byte binary <^EOI> 5a ASCII (12 digits data with header) , 11 ASCII (13 digits data with header) 12 ASCII (13 digits data without header) b 13 8 byte binary 14
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Command Reference *IDN? Table 4-25 FMT mode parameter mode Source data returned with measurement data 0 None (default setting). Only the measurement data is returned. 1 Source output data of the primary sweep source. 2 For MM2 and MM5: Source output data of the synchronous sweep source set by the WSI/WSV command. 1 to 10 For MM16, MM27, and MM28: Source output data of the sweep source set by the WNX, MCPNX, or MCPWNX command. The mode value must be the source number (1 to 10) you want to get data.
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Command Reference IN Execution Conditions • TC command • TTC command • Spot C measurement (MM17) • CV (DC bias) sweep measurement (MM18) • Pulsed spot C measurement (MM19) • Pulsed sweep CV measurement (MM20) • C-f sweep measurement (MM22) • CV (AC level) sweep measurement (MM23) • C-t sampling measurement (MM26) This command is not effective for the binary data output format (FMT3, FMT4, FMT13, and FMT14). Then one of the following couples will be measured.
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Command Reference INTLKVTH If you do not specify chnum, all SMU, all SPGU, and CMU will be set to 0 V in this order. Then, SMU will be set to 0 V in the order from higher to lower output range and SPGU will be set to 0 V in the order from higher to lower setup voltage.
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Command Reference LGI Syntax INTLKVTH? Query Response voltage This value returns 0 (maximum 0 V) or 42 (maximum ±42 V). Example Statements OUTPUT @B1500;"INTLKVTH?" ENTER @B1500;Vintlk LGI The LGI command sets the current monitor channel for the linear search measurement (MM14). This command setting clears, and is cleared by, the LGV command setting. This command ignores the RI command setting. Syntax LGI chnum,mode,range,target Parameters chnum : SMU search monitor channel number.
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Command Reference LIM This command ignores the RV command setting. Syntax LGV chnum,mode,range,target Parameters chnum : SMU search monitor channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : Search mode. Integer expression. 0 : If the measured value ≤ target, it is the search result data. 1 : If the measured value ≥ target, it is the search result data. range : Measurement ranging type. Integer expression.
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Command Reference LIM? Example Statements OUTPUT @B1500;"LIM 1,1500" LIM? This query command returns the voltage or current maximum output limit value of SMU. Syntax LIM? mode Parameters mode : Type of the output limit value to read. 1 or 2. Integer expression. 1: Voltage limit value 2: Current limit value Query Response limit This value returns the voltage output limit (V) or current output limit (A).
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Command Reference LOP? Syntax LOP? Query Response LOP stat1,stat2,stat3,stat4,stat5,stat6,stat7,stat8,stat 9,stat10 The variables stat1 to stat10 will indicate the status of the module installed in the slot 1 to 10 respectively, and will be the two-digit status code shown in Table 4-26. Table 4-26 LOP? Response Status code Description 00 No module is installed, or the output switch is OFF. 01 SMU forces voltage, and does not reach current compliance.
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Command Reference *LRN? *LRN? The *LRN? (learn) query command returns the B1500 command parameter settings. Syntax *LRN? type Example Statements DIM A$[200] OUTPUT @B1500;"*LRN? 1" ENTER @B1500;A$ Parameters and Query Response type : This parameter selects the type of query response. Available values are 0 to 110, but some numbers are not used. See below. Integer expression. A description and the query response of each type is described below.
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Command Reference *LRN? For the SPGU, the query response is: CNX chnum[,chnum][;CL chnum] or CL chnum[,chnum][;CNX chnum] where chnum of CNX is the channel number for the channel whose output switch is set to ON, and chnum of CL is the channel number for the channel whose output switch is set to OFF. 30 : Returns the filter ON/OFF status: FL0 [off ch[,off ch . . . [,off ch] . . . ]; FL1 [on ch[,on ch . . . [,on ch] . .
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Command Reference *LRN? PT hold time,pulse width[,pulse period[,trig delay]] [;PV chnum,output range,base voltage,pulse voltage [,Icomp]] or [;PI chnum,output range,base current,pulse current [,Vcomp]] [;PWV chnum,mode,range,base,start,stop,nop[,Icomp]] or [;PWI chnum,mode,range,base,start,stop,nop[,Vcomp]] 37 : Returns the quasi-pulsed source settings: BDM detection interval[,mode]; BDT hold time,delay time [;BDV chnum,range,start,stop[,Icomp]] 38 : Returns the digital I/O port inf
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Command Reference *LRN? [;QSV chnum,mode,range,start,stop,cvoltage,step[,Icomp]] : 50 : Returns the linear search measurement settings: LSM abort,post;LSTM hold,delay;LSVM mode [;LGI chnum,mode,Irange,Itarget] or [;LGV chnum,mode,Vrange,Vtarget] [;LSV chnum,range,start,stop,step[,Icomp]] or [;LSI chnum,range,start,stop,step[,Vcomp]] [;LSSV chnum,polarity,offset[,Icomp]] or [;LSSI chnum,polarity,offset[,Vcomp]] 51 : Returns the binary search measurement settings: BSM mode,past;BST
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Command Reference *LRN? 58 : Returns the trigger settings: [TGP port,terminal,polarity,type] [;TGP port,terminal,polarity,type] . . . . [;TGP port,terminal,polarity,type] TGSI mode;TGXO mode;TGSO mode;TGMO mode 59 : Returns the multi channel sweep source settings: WNX n,chnum,mode,range,start,stop[,comp[,pcomp]] [;WNX n,chnum,mode,range,start,stop[,comp[,pcomp]]] . . . .
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Command Reference *LRN? 71 : Returns the MFCMU data output mode: LMN mode 72 : Returns the MFCMU’s ADC setting: ACT mode, number 73 : Returns the MFCMU measurement range: RC chnum,mode,range 80 : Returns the operation mode of the SCUU connection status indicator: SSL chnum,mode 81 : Returns the SCUU connection path: SSP chnum,mode 90 : Returns the MFCMU adjustment mode setting: ADJ chnum,mode 100 : Returns the CV (DC bias) sweep
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Command Reference LSI 105 : Returns the multi channel pulsed spot measurement settings: MCPT hold,period,Mdelay,average[[;MCPNT chnum,delay,width] . . . . [;MCPNX n,chnum,mode,range,base,peak[,comp]]] . . . . 106 : Returns the multi channel pulsed sweep measurement settings: MCPT hold,period,Mdelay,average;MCPWS mode,numOfStep[ [;MCPNT chnum,delay,width] . . . . [;WNX n,chnum,mode,range,start,stop[,comp[,pcomp]]] . . . . [;MCPNX n,chnum,mode,range,base,peak[,comp]] . . . .
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Command Reference LSM If start < stop, step must be positive, and if start > stop, step must be negative. Maximum number of search steps is 1001. Vcomp: Example Statements Voltage compliance value (in V). Numeric expression. See Table 4-6 on page 4-23, Table 4-8 on page 4-25, or Table 4-11 on page 4-27 for each measurement resource type. If you do not specify Vcomp, the previous value is set.
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Command Reference LSSI Example Statements OUTPUT @B1500;"LSM 2" OUTPUT @B1500;"LSM 2,3" LSSI The LSSI command sets the synchronous current source for the linear search measurement (MM14). The synchronous source output will be: Synchronous source output = polarity × LSI source output + offset where the LSI source output is the output set by the LSI command. This command setting is cleared by the LSV/LSI command. Execution Conditions The LSI command must be entered before this command.
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Command Reference LSSV LSSV The LSSV command sets the synchronous voltage source for the linear search measurement (MM14). The synchronous source output will be: Synchronous source output = polarity × LSV source output + offset where the LSV source output is the value set by the LSV command. This command setting is cleared by the LSI/LSV command. Execution Conditions The LSV command must be entered before this command.
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Command Reference LST? LST? The LST? query command stores a catalog of internal memory programs or a specific program listing in the output data buffer (query buffer) of the B1500. Syntax LST? [pnum[,index[,size]]] Parameters pnum : Memory program number. Numeric expression. 0 to 2000. If you do not specify the value, 0 is set. LST? 0 returns the catalog of the memory programs. This is same as the LST? command results. Then index and size are not required.
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Command Reference LSTM stored command (ST pnum) to the 3000th stored command. If the number of commands are less than 3000, the LST? command reads the commands from ST to END. See Example Statements that show an HP BASIC programming example.
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Command Reference LSV Parameters hold : Hold time (in seconds) that is the wait time after starting the search measurement and before starting the delay time for the first search point. Numeric expression. 0 to 655.35 sec. 0.01 sec resolution. delay : Delay time (in seconds) that is the wait time after starting to force a step output value and before starting a step measurement. Numeric expression. 0 to 65.535 sec. 0.0001 sec resolution. Example Statements OUTPUT @B1500;"LSTM 5,0.
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Command Reference LSVM Icomp: Example Statements Current compliance value (in A). Numeric expression. See Table 4-7 on page 4-24, Table 4-9 on page 4-26, Table 4-12 on page 4-27, or Table 4-15 on page 4-28 for each measurement resource type. If you do not specify Icomp, the previous value is set. Zero amps (0 A) is not allowed for Icomp. OUTPUT @B1500;"LSV 1,0,0,20,.5,1E-6" LSVM The LSVM command selects the data output mode for the linear search measurement (MM14).
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Command Reference MCPNT Example Statements OUTPUT @B1500;"MCC" OUTPUT @B1500;"MCC 1,2,3" MCPNT The MCPNT command sets the delay time and the pulse width of the pulse output channels. This command is effective for the multi channel pulsed spot or sweep measurement set by MM 27 or MM 28. Syntax MCPNT chnum,delay,width Parameters chnum : SMU pulsed source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16.
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Command Reference MCPNX For HR/MP/HPSMU, available delay time value is 0. Also, the pulse width value must be the same. If a different value is entered, the longest value is set. MCPNX The MCPNX command specifies the pulsed bias source and its parameters. This command is effective for the multi channel pulsed spot or sweep measurement set by MM 27 or MM 28. To set the timing of output pulse and measurement, use the MCPT, MCPNT, and AIT commands.
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Command Reference MCPT • comp : For current source (mode=2): See Table 4-6 on page 4-23, Table 4-8 on page 4-25, Table 4-11 on page 4-27, or Table 4-13 on page 4-28 for each measurement resource type. base and peak must have the same polarity. Compliance (in A or V). Numeric expression. If you do not set comp, the previous value is used.
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Command Reference MCPWS Parameters hold : Hold time (in seconds). Numeric expression. 0 to 655.35 sec. 10 ms resolution. Initial setting = 0. period : Pulse period (in seconds). Numeric expression. 0, -1, or 5 ms to 5.0 s. 0.1 ms resolution. For using UHVU, minimum pulse period is 10 ms. Initial setting = 10 ms. Default setting = 0. t0 = delay + width, where delay and width are the parameters set by the MCPNT command.
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Command Reference MCPWNX 3: Linear sweep (double stair, start to stop to start.) 4: Log sweep (double stair, start to stop to start.) step : Number of sweep steps. Numeric expression. 1 to 10001. MCPWNX The MCPWNX command specifies the pulsed sweep source and its parameters. This command is effective for the multi channel pulsed sweep measurement set by MM 28. To set the timing of output pulse and measurement, use the MCPT, MCPNT, and AIT commands.
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Command Reference MCPWNX measurement resource type. For the log sweep or using 3000 V range of HVSMU, base, start, and stop must have the same polarity. For using UHVU, base and peak must have the same polarity. • comp : For current source (mode=2): See Table 4-6 on page 4-23, Table 4-8 on page 4-25, Table 4-11 on page 4-27, or Table 4-13 on page 4-28 for each measurement resource type. base, start, and stop must have the same polarity. Compliance (in A or V). Numeric expression.
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Command Reference MDCV Source channels set by the WNX commands start output in the order specified by the N value, and then the source channels set by the MCPNX and MCPWNX commands start output simultaneously. If you use multiple measurement channels, all measurement channels start measurement simultaneously.
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Command Reference MI 0 to ± 25 V (MFCMU) or ± 100 V (with SCUU) Example Statements OUTPUT @B1500;"MDCV 9,0,5" NOTE With the SCUU, the source module is automatically selected by the setting value. The MFCMU is used if the base, bias, and post values are below ± 25 V (setting resolution: 0.001 V), or the SMU is used if they are greater than ± 25 V (setting resolution: 0.005 V). The SMU will operate with the 100 V limited auto ranging and 20 mA compliance settings.
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Command Reference ML Vcomp : Voltage compliance value (in V). Numeric expression. See Table 4-6 on page 4-23, Table 4-8 on page 4-25, or Table 4-11 on page 4-27 for each measurement resource type. If you do not specify this parameter, Vcomp is set to the previous setting. Example Statements OUTPUT @B1500;"MI 1,18,0,5E-5,10" See Also “MT”, “MCC”, “MSC” ML The ML command sets the sampling mode, linear or logarithmic.
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Command Reference MM MM mode,chnum[,chnum[,chnum...[,chnum]...]] A maximum of ten channels can be set. For mode=18, the first chnum must be MFCMU. • mode= 3, 4, 5, 17, 19, 20, 22, 23, or 26: MM mode,chnum • mode= 9 or 13: MM mode[,chnum] • mode= 14 or 15: MM mode Parameters Remarks mode : Measurement mode. Integer expression. 1 to 28. See Table 4-28. chnum: Measurement channel number. Integer expression. See Table 4-1 on page 4-16. The SMU operation mode is defined by the CMM command.
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Command Reference MM Table 4-28 Measurement Mode SMU mode Measurement mode 1 2 Spot Staircase sweep 3 4 Pulsed spot Pulsed sweep 5 9 10 Staircase sweep with pulsed bias Quasi-pulsed spot Sampling 13 14 Quasi-static CV Linear search 15 Binary search 16 Multi channel sweep 17 18 Spot C CV (DC bias) sweep 19 20 22 Pulsed spot C Pulsed sweep CV C-f sweep 23 CV (AC level) sweep C-t sampling Multi channel pulsed spot Multi channel pulsed sweep 26 27 28 4-138 HV MCU Related source setup co
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Command Reference MSC a. Pulse current output or pulse voltage output b. Pulse voltage output c. DC voltage output or pulse voltage output MSC The MSC command enables or disables the automatic abort function for the sampling measurement (MM10 and MM26).
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Command Reference MSP Output Data The B1500 returns the data measured before any abort condition is detected. Dummy data 199.999E+99 will be returned for the data after abort. Example Statements OUTPUT @B1500;"MSC 2" OUTPUT @B1500;"MSC 2,2" MSP The MSP command specifies the SPGU channel synchronized with the sampling measurements (MM10), and the channel output after the sampling measurement.
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Command Reference MT Example Statements OUTPUT @B1500;"MSP 101,0,0" OUTPUT @B1500;"MSP 1,0" See Also “SPT”, “SPV”, “SPM” MT This command sets the timing parameters of the sampling measurement (MM10). NOTE If you set interval < 0.002 s Sampling mode must be linear. This setting is not permitted for the log sampling. Also SPGU is not available. The following conditions are automatically set to the all measurement channels. And the all channels start measurement simultaneously.
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Command Reference MT For the linear sampling: 100001 / (number of measurement channels) For the log sampling: 1 + (number of data for 11 decades) h_base Sampling Operation Hold time of the base value output until the bias value output. Numeric expression. in seconds. 0 (initial setting) to 655.35 s, resolution 0.01 s. Sampling measurement will be started by a measurement trigger such as the XE command or an external trigger, and performed as shown below.
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Command Reference MTDCV Where, t is the time of the sampling measurement time origin, and is the time when the output value is changed from base to bias. Example Statements OUTPUT @B1500;"MT 0,0.0001,5000,0" OUTPUT @B1500;"MT 0.01,0.001,101,0.1" MTDCV This command sets the timing parameters of the C-t sampling measurement (MM26). Syntax MTDCV h_bias,interval,number[,h_base] Parameters h_bias : Time since the bias value output until the first sampling point. Numeric expression. in seconds.
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Command Reference NUB? Execution Conditions If the output voltage is greater than the allowable voltage for the interlock open condition, the interlock circuit must be shorted. Syntax MV chnum,vrange,base,bias[,Icomp] Parameters chnum : SMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. vrange : Ranging type. Integer expression. The output range will be set to the minimum range that covers both base and bias values.
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Command Reference ODSW? Syntax ODSW chnum,state[,normal,[delay,width]] Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1. state : 0: pulse switch disabled (initial setting) 1: pulse switch enabled normal: 0: normally open (switch is normally open, initial setting) 1: normally closed (switch is normally closed) delay: Only for the PG mode. Delay time (seconds) from start of pulse output to changeover of pulse switch. Numeric expression.
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Command Reference *OPC? Example Statements OUTPUT @B1500;"ODSW? 101" ENTER @B1500;A,B,C,D *OPC? The *OPC? command monitors the pending operations, and places ASCII character 1 into the output queue when all pending operations are completed. Also this command sets/clears the operation complete (OPC) bit in the standard event status register as follows: • If there are no pending operations, sets the OPC bit to 1. • If there are any pending operations, sets the OPC bit to 0.
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Command Reference PA 1 to 16: Port 1 to 16 of the digital I/O terminal. To use a digital I/O port, send the TGP command. The port value must be same as the port value set to the TGP command. level : Trigger output level. Integer expression. 0, 1, or 2. 0: Logical low. 1: Logical high. 2: Edge trigger (default setting). If level is not specified, the B1500 sends the edge trigger. For the gate trigger output, send OSX port,1 when starting trigger output, and send OSX port,0 when stopping trigger output.
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Command Reference PAD OUTPUT @B1500;"CN";1 OUTPUT @B1500;"WAT";1,0,1E-3 !Source Wait Time =1ms OUTPUT @B1500;"WAT";2,0,1E-3 !Meas Wait Time =1ms OUTPUT @B1500;"DV";1,0,5,1E-2 OUTPUT @B1500;"PA";1E-3 !Wait Time =1ms OUTPUT @B1500;"TI";1 ENTER @B1500 USING "#,3X,13D,X";Idata Example Statements OUTPUT @B1500;"PA 10" See Also “TM” PAD Enables or disables parallel measurements by the multiple channels (SMU).
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Command Reference PCH 1 to 16: Port 1 to 16 of the digital I/O terminal. To use a digital I/O port, send the TGP command. The port value must be same as the port value set to the TGP command. wait time : -99.9999 to 99.9999 seconds, with 100 μsec resolution. Numeric expression. If wait time is not specified or negative wait time is set, the paused status is kept until receiving an event specified by the TM command.
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Command Reference PCH? Syntax PCH master,slave Parameters master : Channel number of HCSMU used as the dual HCSMU master channel slave : Channel number of HCSMU used as the dual HCSMU slave channel Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. Example Statements OUTPUT @B1500;"PCH 6,8" OUTPUT @B1500;"PCH 6" ENTER @B1500;Master,Slave PCH? PCH?, PCH? 0, and PCH? master commands return the master HCSMU channel number and the slave HCSMU channel number used for the dual HCSMU.
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Command Reference PI Parameters chnum : base, pulse: MFCMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. Pulse base voltage or pulse peak voltage (in V). Numeric expression. 0 (initial setting) to ± 100 V. With the SCUU, the source module is automatically selected by the setting value. The MFCMU is used if the base and pulse values are below ± 25 V (setting resolution: 0.001 V), or the SMU is used if they are greater than ± 25 V (setting resolution: 0.
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Command Reference PT base, pulse : Vcomp: Pulse base current or peak current (in A). Numeric expression. See Table 4-6 on page 4-23, Table 4-8 on page 4-25, Table 4-11 on page 4-27, or Table 4-13 on page 4-28 for each measurement resource type. base and pulse must have the same polarity. Voltage compliance value (in V). Numeric expression. See Table 4-6 on page 4-23, Table 4-8 on page 4-25, Table 4-11 on page 4-27, or Table 4-13 on page 4-28 for each measurement resource type.
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Command Reference PTDCV UHCU: 10 μs to 1 ms and duty ratio maximum 0.4 % for 500 A range, 10 μs to 500 μs and duty ratio maximum 0.1 % for 2000 A range, 2 μs resolution. UHVU: 100 μs to 1 ms for 100 mA range, 100 μs to 2 s for other range, 2 μs resolution. HVMCU: 10 μs to 1 ms for 100 mA range, 10 μs to 100 μs for 1 A/2 A range, 2 μs resolution. period : Tdelay : Pulse period (in seconds). Numeric expression. 0, -1, or 5 ms to 5.0 s. 0.1 ms resolution. For using UHVU, minimum pulse period is 10 ms.
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Command Reference PV Parameters hold : Hold time (in seconds). Numeric expression. 0 to 655.35 sec. 10 ms resolution. Initial setting = 0 sec. width : Pulse width (in seconds). Numeric expression. 8 ms to 655.35 sec. 0.1 ms resolution. Initial setting = 8 ms. period : Tdelay : • width ≥ 50 ms (for 1 kHz ≤ MFCMU frequency ≤ 10 kHz) • width ≥ 10 ms (for 10 kHz < MFCMU frequency ≤ 200 kHz) • width ≥ 8 ms (for 200 kHz < MFCMU frequency ≤ 5 MHz) Pulse period (in seconds). Numeric expression.
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Command Reference PWDCV vrange: base, pulse : Icomp: Ranging type for the pulsed voltage output. Integer expression. The output range will be set to the minimum range that covers both base and pulse values. For the limited auto ranging, the instrument never uses the range less than the specified range. See Table 4-4 on page 4-21. Pulse base voltage or pulse peak voltage (in V). Numeric expression.
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Command Reference PWI Syntax PWDCV chnum,mode,base,start,stop,step Parameters chnum : MFCMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : Sweep mode. Integer expression. 1 or 3. 1: Linear sweep (single stair, start to stop.) 3: Linear sweep (double stair, start to stop to start.) base, start, stop : Pulse base, start or stop voltage (in V). Numeric expression. 0 (initial setting) to ± 100 V.
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Command Reference PWI 3: Linear sweep (double stair, start to stop to start.) 4: Log sweep (double stair, start to stop to start.) range : Ranging type for pulsed current sweep. Integer expression. The output range will be set to the minimum range that covers base, start, and stop values. For the limited auto ranging, the instrument never uses the range less than the specified range. See Table 4-5 on page 4-22. base, start, stop : Pulse base, start, or stop current (in A). Numeric expression.
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Command Reference PWV PWV The PWV command specifies the pulsed voltage sweep source and its parameters. This command also clears the settings of the PWI, WSV and WSI commands. The settings specified by this command are cleared by the PWI command. To set the timing of output pulse and measurement, use the PT and AIT2 commands. Syntax PWV chnum,mode,range,base,start,stop,step[,Icomp[,Pcomp] ] Parameters chnum : SMU pulsed sweep source channel number. Integer expression. 1 to 10 or 101 to 1001.
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Command Reference QSC Compliance polarity is automatically set to the same polarity as the output value, regardless of the specified Icomp. If the output value is 0, the polarity is set to positive. Pcomp : Power compliance (in W). Numeric expression. Resolution: 0.001 W. If the Pcomp value is not entered, the power compliance is not set. The power compliance operation is based on the large one either pulse peak or base. This parameter is not available for HVSMU. 0.001 to 2 for MPSMU/HRSMU, 0.
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Command Reference QSM Parameters data : Leakage current data output. Integer expression. 0 or 1. 0 : Disables data output. Initial setting. 1: Enables data output. compen : Leakage current compensation. Integer expression. 0 or 1. 0 : Disables compensation. Initial setting. 1: Enables compensation. Example Statements OUTPUT @B1500;"QSL 0,0" If you send the above command, the leakage current is not measured during the quasi-static CV measurements.
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Command Reference QSO 2: Stop value. If this parameter is not set, the sweep sources force the start value. Output Data The B1500 returns the data measured before an abort condition is detected. Dummy data 199.999E+99 will be returned for the data after abort. Example Statements OUTPUT @B1500;"QSM 2" OUTPUT @B1500;"QSM 2,2" QSO This command enables or disables the QSCV smart operation for the quasi-static CV measurement (MM13). Execution Conditions The QSCV measurement operation must be Normal (QSC 0).
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Command Reference QSR QSR This command sets the current measurement range used for the quasi-static CV measurement (MM13). Syntax QSR range Parameters range : Current measurement range. Integer expression. -9 to -14. -9: 10 pA range fixed. -10: 100 pA range fixed. -11: 1 nA range fixed. Initial setting. -12: 10 nA range fixed. -13: 100 nA range fixed. -14: 1 μA range fixed. Remarks The range set by this command is used for both the leakage current measurement and the capacitance measurement.
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Command Reference QSV linteg : Integration time for the leakage current measurement, in seconds. Numeric expression. The available values are 0.02 to 2 s for a 50 Hz line frequency, and 0.016667 to 1.6667 s for 60 Hz. But the value is rounded as follows: linteg = n / selected line frequency (n : integer. 1 to 100.) The initial setting is 5/ selected line frequency. So this value is 0.1 s for a 50 Hz line frequency, and approx. 0.083 s for 60 Hz. hold : Hold time (in seconds). Numeric expression.
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Command Reference QSV Parameters chnum : SMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : Sweep mode. Integer expression. 1 or 3. 1: Linear sweep (single stair, start to stop.) 3: Linear sweep (double stair, start to stop to start.) vrange : Ranging type. Integer expression. The output range will be set to the minimum range that covers both start and stop values.
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Command Reference QSZ The current compliance polarity is automatically set to the same polarity value as the output voltage, regardless of polarity of the specified Icomp. Example Statements OUTPUT @B1500;"QSV 1,1,0,0,5,1,4,0.1" This example sets the following parameter values: start=0 V, stop=5 V, cvoltage=1 V, step=4 This sets the sweep step voltage to 1 V. And the capacitance measurement is then executed over the following voltage ranges: 1st sweep step: 0.5 to 1.5 V 2nd sweep step: 1.5 to 2.
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Command Reference RC 0: Disables the function. Initial setting. 1: Enables the function. 2: Performs a capacitance offset measurement, and returns the result. The QSZ 2 command does not enable the capacitance offset cancel function. Example Statements OUTPUT @B1500;"QSZ 2" OUTPUT @B1500;"*OPC?" ENTER @B1500;A ENTER @B1500 USING "#,3X,13D,X";Offset OUTPUT @B1500;"QSZ 1" RC The RC command specifies the measurement range or the measurement ranging type of the MFCMU.
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Command Reference RI This command should only be used for servicing the B1500. Syntax RCV [slot] Parameters slot : Slot number where the failed module to enable has been installed. 1 to 10. Or 0 or 11. Integer expression. 0: All failed modules. Default setting. 11: Mainframe. If slot specifies the slot that installs no module, this command causes an error.
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Command Reference *RST Syntax RM chnum,mode[,rate] where the rate parameter is available for mode=2 or 3. Parameters chnum : SMU current measurement channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : Range changing operation mode. Integer expression. 1, 2 or 3. mode Description 1 Initial setting. If you set mode=1, do not set rate. 2 If measured data ≥ current1, the range changes up after measurement.
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Command Reference RU Example Statement • Program memory setup data • Self-calibration data • MFCMU phase compensation data • MFCMU open/short/load correction data OUTPUT @B1500;"*RST" RU The RU command sequentially executes the internal memory programs. Execution Conditions The specified programs have been stored by using the ST and END commands, from the start program number through the stop program number. Syntax RU start,stop Parameters start : Start program number. Numeric expression.
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Command Reference RZ range : Measurement range or ranging type. Integer expression. See Table 4-2 on page 4-17. If you select the fixed range, the instrument performs measurement by using the specified range. For the auto or limited auto ranging, the measurement range will be set to the minimum range that covers the measured values. However, the instrument never uses the range less than the specified range for the limited auto ranging.
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Command Reference SAL SAL This function is available for the Agilent B1500 installed with the atto sense and switch unit (ASU). Disables or enables the connection status indicator (LED) of the ASU. This command is effective for the specified channel. Syntax SAL chnum,mode Parameters chnum : Channel number of the SMU connected to the ASU. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : 0: Disables the indicator. 1: Enables the indicator. Default setting.
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Command Reference SAR Syntax SAP chnum,path Parameters chnum : Channel number of the SMU connected to the ASU. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. path : 0: The ASU output will be connected to the SMU connector side. 1: The ASU output will be connected to the AUX connector side. Example Statements OUTPUT @B1500;"SAP 1,1" SAR This function is available for the Agilent B1500 installed with the atto sense and switch unit (ASU).
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Command Reference SER SER This command sets the load impedance connected to the specified SPGU channel. Set for each channel. This load impedance value is used for automatic adjustment of the SPGU output voltage. Setting the correct value will make the voltage applied to the DUT close to the voltage set with the SPV command. To automatically set the load impedance, execute the CORRSER? command. Syntax SER chnum,loadZ Parameters mode : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002.
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Command Reference SIM Example Statements OUTPUT @B1500;"SER? 101" ENTER @B1500;A SIM The SIM command sets the SPGU operation mode, PG or ALWG. The setting is effective for the all SPGU modules installed in the B1500. This command also triggers 0 V output of the SPGU channels which output switch has been ON. Syntax SIM mode Parameters mode : SPGU operation mode. Integer expression. 0 or 1.
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Command Reference SOPC? If the automatic abort function for sweep source is enabled by the WM command, the sweep measurement is automatically stopped by detecting “compliance”. Syntax SOPC chnum,power Parameters chnum : Channel number assigned to the measurement resource. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1. power : Comparison reference value (in W). Numeric expression. Resolution: 0.001 W. 0.001 to 22500 for UHCU, 0.001 to 100 for UHVU (DC), 0.001 to 200 for UHVU (pulse), 0.
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Command Reference SOVC? If the automatic abort function for sweep source is enabled by the WM command, the sweep measurement is automatically stopped by detecting “compliance”. Syntax SOVC chnum,voltage Parameters chnum : Channel number assigned to the measurement resource. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1. voltage : Comparison reference value (in V). Numeric expression. The effective values and resolution depend on the measurement resource.
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Command Reference SPM? 0: DC voltage output mode. 1: 2-level pulse output mode using pulse signal source 1. 2: 2-level pulse output mode using pulse signal source 2. 3: 3-level pulse output mode using pulse signal source 1 and 2. Example Statements OUTPUT @B1500;"SPM 101,3" SPM? This query command returns the output mode of the specified SPGU channel. Syntax SPM? chnum Parameters chnum : Query Response mode SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1.
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Command Reference SPPER SPPER This command sets the pulse period for the SPGU channel. This setting applies to all SPGU modules installed in the B1500. See “SPGU Module” on page 2-53. Syntax SPPER period Parameters period : Example Statements OUTPUT @B1500;"SPPER 20E-6" Pulse period. Numeric expression. 2E-8 to 10 seconds, setting resolution 1E-8 seconds. Initial setting 1E-6 seconds. SPPER? This query command returns the pulse period for the SPGU channel.
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Command Reference SPRM? condition : Number of pulses or sequences to output, or output duration (seconds). Numeric expression. The following values are valid for the condition parameter. When mode = 1, 1 (initial value) to 1,000,000 times. When mode = 2, IE-6 (initial setting) to 31,556,926 seconds (1 year), setting resolution 1E-8 seconds. Example Statements OUTPUT @B1500;"SPRM 1,300" SPRM? This query command returns the operating mode and settings of the SPGU channel output.
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Command Reference SPT 1: Pulse output active or ALWG sequence active Example Statements OUTPUT @B1500;"SPST?" ENTER @B1500;A SPT This command sets the pulse timing parameter for the specified SPGU channel. Set for each channel. For the parameters, see Figure 2-31 on page 2-57. Execution Conditions The SPGU operating mode must be set to PG with the SIM 0 command. Syntax SPT chnum,src,delay,width,leading[,trailing] Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002.
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Command Reference SPT? If no value is set for trailing, the leading value will be used for both parameters. Example Statements OUTPUT @B1500;"SPT 101,1,0,5E-7,20E-9" SPT? This query command returns the pulse timing parameter of the specified SPGU channel signal source. Syntax SPT? chnum,src Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1. src : Channel signal source. Integer expression.
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Command Reference SPV Syntax SPUPD chnum[,chnum...[,chnum[,chnum]]...] A maximum of ten channels can be set. Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. If multiple chnums are specified, all outputs are started in the specified order. The channel numbers 1 to 10 correspond to the channel numbers 101 to 1001 respectively. See Table 4-1 on page 4-16.
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Command Reference SPV? SPV? This query command returns the voltage parameter of the specified SPGU channel signal source. Syntax SPV? chnum,src Parameters chnum : SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1. src : Channel signal source. Integer expression.
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Command Reference *SRE? Table 4-29 Status Byte Register Decimal Value Bit Number Description 1 Bit 0 data ready 2 Bit 1 wait 4 Bit 2 not used 8 Bit 3 interlock open 16 Bit 4 set ready 32 Bit 5 error 64 Bit 6 RQS 128 Bit 7 not used *SRE? The *SRE? query command returns information about which bits of the status byte register are enabled for the SRQ (service requests), and stores the results in the output data buffer (query buffer).
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Command Reference SSL Example Statements OUTPUT @B1500;"SRP" SSL This function is available for the Agilent B1500 installed with the multi frequency capacitance measurement unit (MFCMU) and the SMU CMU unify unit (SCUU). To use the SCUU, connect it to the MFCMU and two SMUs (MPSMU or HRSMU) correctly. The SCUU cannot be used with the HPSMU or when only one SMU is connected. Disables or enables the connection status indicator (LED) of the SCUU.
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Command Reference SSP Syntax SSP chnum,path Parameters chnum : MFCMU channel number. Integer expression. 3 to 10 or 301 to 1001. See Table 4-1 on page 4-16. path : Path connected to the SCUU output. 1 to 4. See Table 4-30. Example Statements OUTPUT @B1500;"SSP 9,4" Remarks When the connection is changed from SMU to MFCMU, the SMU output will be set as follows. The other setup parameters are not changed.
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Command Reference SSR Force2/Sense2 is connected to the SMU installed in the slot numbered slot-2. where, slot is the slot number given by chnum. NOTE To use SCUU Before turn the Agilent B1500 on, connect the SCUU to the MFCMU and two MPSMU/HRSMUs properly. The SCUU is used to switch the module (SMU or MFCMU) connected to the DUT. SSR This command sets the connection mode of a SMU series resistor (approx. 1 MΩ) for each channel.
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Command Reference ST ST The ST command is used with the END command to store a program in the internal program memory that can store 2,000 programs maximum, and a total of 40,000 commands. The ST command indicates the start of the program, and assigns the program number. If the assigned program number already exists, the B1500 deletes the old program, and stores the new one. The END command indicates the end of the program.
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Command Reference *STB? *STB? The *STB? query command stores the decimal representation of the status byte in the output data buffer (query buffer). The *STB? command is functionally identical to the SPOLL command of BASIC, however this command does not clear the status byte (the SPOLL command clears the status byte).
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Command Reference STGP? STGP? This query command returns the trigger output state of the specified SPGU channel. Syntax STGP? chnum Parameters chnum : Query Response state Example Statements SPGU channel number. Integer expression. 1 to 10 or 101 to 1002. See Table 4-1. 0 Trigger output disabled. 1 Output trigger signals synchronized to the pulses (PG mode), or to the start of the ALWG sequence. 2 Output a trigger when the ALWG pattern changes, or at start of the first pattern.
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Command Reference TC Example Statements OUTPUT @B1500;"TACV 7,0.01" ENTER @B1500 USING "#,3X,13D,X";Time TC The TC command performs the high speed spot measurement by using the MFCMU, and returns the measurement data. The command starts a measurement regardless of the trigger mode (TM command) and the measurement mode (MM command). The MFCMU measures the primary parameter and the secondary parameter (for example, Cp and G). Use the IMP command to select the measurement parameters. See “IMP” on page 4-107.
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Command Reference TDI This command is not effective for the 4 byte binary data output format (FMT3 and FMT4). Syntax TDCV chnum,voltage Parameters chnum : MFCMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. voltage : DC voltage (in V). Numeric expression. 0 (initial setting) to ± 100 V. Source module is automatically selected by the setting value. The MFCMU is selected if voltage is ± 25 V or less (setting resolution: 0.
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Command Reference TDV irange: Ranging type for current output. Integer expression. The output range will be set to the minimum range that covers current value. For the limited auto ranging, the instrument never uses the range less than the specified range. See Table 4-5 on page 4-22. current: Output current (in A). Numeric expression. See Table 4-6 on page 4-23, Table 4-8 on page 4-25, or Table 4-11 on page 4-27 for each measurement resource type. Vcomp: Voltage compliance value (in V).
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Command Reference TDV Parameters chnum : SMU source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. vrange: Ranging type for voltage output. Integer expression. The output range will be set to the minimum range that covers voltage value. For the limited auto ranging, the instrument never uses the range less than the specified range. See Table 4-4 on page 4-21. voltage: Output voltage (V). Numeric expression.
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Command Reference TGMO TGMO The TGMO command selects the edge trigger or the gate trigger for the Step Measurement Completion trigger output set by the TGP port,2,polarity,3 command. See Figure 4-4. This command is available for the staircase sweep, multi channel sweep, and MFCMU DC/AC/frequency sweep measurements.
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Command Reference TGP TGP The TGP command enables the trigger function for the terminal specified by the port parameter. For the trigger function, refer to “Trigger Function” on page 2-74. Syntax TGP port,terminal,polarity[,type] Parameters port : Trigger port number. Integer expression. -1, -2, or 1 to 16. -1: Ext Trig In terminal. -2: Ext Trig Out terminal. 1 to 16: Port 1 to 16 of the digital I/O terminal. terminal : Terminal type. Integer expression. 1 or 2. 1: Trigger input.
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Command Reference TGP Table 4-31 Trigger Type type terminal Description 0 1 When a trigger is received, the B1500 recovers from the wait state set by the PA, PAX, WS, or WSX command. 2 The B1500 sends a trigger by the OS or OSX command. 1 Start measurement trigger 1a When a trigger is received, the B1500 starts the measurement. 2 Measurement completion trigger The B1500 sends a trigger after measurement.
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Command Reference TGPC TGPC The TGPC command clears the trigger setting of the specified ports. Syntax TGPC [port[,port...[,port]...]] A maximum of 18 ports can be set. If no port is specified, the TGPC command clears the setting of all ports; Ext Trig In, Ext Trig Out, and digital I/O ports 1 to 16. Parameters port : Trigger port number. Integer expression. -1, -2, or 1 to 16. -1: Ext Trig In terminal. -2: Ext Trig Out terminal. 1 to 16: Port 1 to 16 of the digital I/O terminal.
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Command Reference TGSI TGSI The TGSI command selects Case 1 or Case 2 effective for the Start Step Output Setup trigger input set by the TGP port,1,polarity,2 command. This command is available for the staircase sweep, multi channel sweep, pulsed spot, pulsed sweep, staircase sweep with pulsed bias, multi channel pulsed spot, multi channel pulsed sweep, and MFCMU DC/AC/frequency sweep measurements. Syntax TGSI mode Parameters mode : Case 1 or Case 2. Integer expression. See Figure 4-5.
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Command Reference TGSO TGSO The TGSO command selects the edge trigger or the gate trigger for the Step Output Setup Completion trigger output set by the TGP port,2,polarity,2 command. See Figure 4-4 on page 4-195 This command is available for the staircase sweep, multi channel sweep, pulsed spot, pulsed sweep, staircase sweep with pulsed bias, multi channel pulsed spot, multi channel pulsed sweep, and MFCMU DC/AC/frequency sweep measurements.
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Command Reference TI TI The TI command performs the high speed spot measurement, and returns the measurement data. The command starts a current measurement regardless of the SMU operation mode, trigger mode (TM command), and measurement mode (MM command). Execution Conditions The CN/CNX command has been executed for the specified channel. Syntax TI chnum[,range] Parameters chnum : SMU measurement channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16.
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Command Reference TM irange : Current measurement range or ranging type. Integer expression. See Table 4-3 on page 4-19. vrange : Voltage measurement range or ranging type. Integer expression. See Table 4-2 on page 4-17. If you do not specify the irange and vrange parameters, the channel uses the minimum range that covers the compliance value and the minimum range that covers the output value.
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Command Reference TMACV Remarks In the TM3 event mode, if the B1500 is not in the wait status set by the PA, PAX, WS, or WSX command, the B1500 can start the measurement by an external trigger input. After measurement, the B1500 sends a trigger to a trigger output terminal. In the initial setting, you can use the Ext Trig In and Out terminals. To use the digital I/O port, enter the TGP command to set the trigger input or output terminal.
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Command Reference TSC Execution Conditions The CN/CNX command has been executed for the specified channel. If you want to apply DC voltage over ± 25 V, the SCUU must be connected correctly. The SCUU can be used with the MFCMU and two SMUs (MPSMU or HRSMU). The SCUU cannot be used if the HPSMU is connected to the SCUU or if the number of SMUs connected to the SCUU is only one. If the output voltage is greater than the allowable voltage for the interlock open condition, the interlock circuit must be shorted.
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Command Reference TSQ Parameters mode : Time stamp function mode. Integer expression. mode Description 0 Disables the time stamp function. Initial setting. 1 Enables the time stamp function. When the function is enabled, the B1500 returns the time data with the measurement data. The time data is the time from timer reset to the start of measurement. Refer to “Data Output Format” on page 1-25.
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Command Reference *TST? Parameters chnum : SMU or MFCMU channel number. Integer expression. 1 to 10. See Table 4-1 on page 4-16. If chnum is specified, this command clears the timer count once at the source output start by the DV, DI, or DCV command for the specified channel. The channel output switch of the specified channel must be ON when the timer count is cleared. This command setting is disabled by the CL command.
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Command Reference TTC The *TST? slot,0 command just returns the pass/fail result of the latest *TST?/CA/*CAL? command or the auto calibration. The *TST? 0,0 command returns the memorized latest pass/fail result of all modules. If slot specifies the slot that installs no module, this command causes an error. Remarks If a SMU connected to SCUU fails this command, the SCUU cannot be controlled. And the SSP and SSL commands are not available.
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Command Reference TTI The MFCMU measures the primary parameter and the secondary parameter (for example, Cp and G). Use the IMP command to select the measurement parameters. See “IMP” on page 4-107. Execution Conditions The CN/CNX command has been executed for the specified channel. The IMP command has been executed. This command is not effective for the 4 byte binary data output format (FMT3 and FMT4). Syntax TTC chnum,mode[,range] Parameters chnum : MFCMU measurement channel number.
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Command Reference TTIV Syntax TTI chnum[,range] Parameters chnum : SMU measurement channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. range : Measurement range or ranging type. Integer expression. See Table 4-3 on page 4-19. If you do not specify the range parameter for voltage output channels, the channel uses the minimum range that covers the compliance value.
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Command Reference TTV vrange : Voltage measurement range or ranging type. Integer expression. See Table 4-2 on page 4-17. If you do not specify the irange and vrange parameters, the channel uses the minimum range that covers the compliance value and the minimum range that covers the output value.
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Command Reference TV Example Statements OUTPUT @B1500;"TTV 1" ENTER @B1500 USING "#,3X,13D,X";Time ENTER @B1500 USING "#,3X,13D,X";Vdata PRINT "Data=";Vdata*1000;"mV, at";Time;"s" TV The TV command performs the high speed spot measurement, and returns the measurement data. The command starts a voltage measurement regardless of the SMU operation mode, trigger mode (TM), and measurement mode (MM). Execution Conditions The CN/CNX command has been executed for the specified channel.
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Command Reference VAR VAR This command defines the Agilent B1500 internal variable, and sets the value. The variable name is automatically assigned by using the parameters you specify. Syntax VAR type,n,value Parameters type : Variable type. Integer expression. 0 or 1. 0: Integer variable. Variable name will be %In. 1: Real variable. Variable name will be %Rn. n: Number n added to the variable name. Integer expression. 0 to 99. value : Value entered in the variable. Numeric value.
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Command Reference WACV WACV This command sets the AC level sweep source used for the CV (AC level) sweep measurement (MM23). The sweep source will be the MFCMU. Execution Conditions The CN/CNX command has been executed for the specified channel. Syntax WACV chnum,mode,start,stop,step Parameters chnum : MFCMU channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16. mode : Sweep mode. Integer expression. 1 to 4. 1: Linear sweep (single stair, start to stop.
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Command Reference WAT Figure 4-6 Source/Measurement Wait Time Measurement wait time Source wait time Delay time Hold time : Measurement Step delay time Time Syntax WAT type,N[,offset] Parameters type Type of the wait time. Integer expression. 1 or 2. 1: SMU source wait time (before changing the output value). 2: SMU measurement wait time (before starting the measurement). 3: MFCMU measurement wait time (before starting the measurement). N Coefficient for initial wait time. Numeric expression.
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Command Reference WDCV WDCV This command sets the DC bias sweep source used for the CV (DC bias) sweep measurement (MM18). The sweep source will be MFCMU or SMU. Execution Conditions The CN/CNX command has been executed for the specified channel. If you want to apply DC voltage over ± 25 V using the SCUU, the SCUU must be connected correctly. The SCUU can be used with the MFCMU and two SMUs (MPSMU or HRSMU).
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Command Reference WFC Icomp : Available only for SMU. An error occurs if the Icomp value is specified for the MFCMU. Current compliance (in A). Numeric expression. See Table 4-7 on page 4-24, Table 4-9 on page 4-26, or Table 4-12 on page 4-27 for each measurement resource type. If you do not set Icomp, the previous value is used. Compliance polarity is automatically set to the same polarity as the output value, regardless of the specified Icomp.
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Command Reference WI Example Statements OUTPUT @B1500;"WFC 9,1,100000,5000000,50" WI The WI command specifies the staircase sweep current source and its parameters. This command also clears the WV, WSV, WSI, and WNX command settings. This command setting is cleared by the WV command.
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Command Reference WM Vcomp : Voltage compliance (in V). Numeric expression. See Table 4-6 on page 4-23, Table 4-8 on page 4-25, or Table 4-11 on page 4-27 for each measurement resource type. If you do not set Vcomp, the previous value is used. If Vcomp value is greater than the allowable voltage for the interlock open condition, the interlock circuit must be shorted. Compliance polarity is automatically set to the same polarity as the output value, regardless of the specified Vcomp.
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Command Reference WMACV If the measurement is stopped by the automatic abort function, the staircase sweep sources force the start value, and the pulsed sweep source forces the pulse base value after sweep. Syntax WM abort[,post] Parameters abort : Automatic abort function. Integer expression. 1: Disables the function. Initial setting. 2: Enables the function. post : Source output value after the measurement is normally completed. Integer expression. 1: Start value. Initial setting. 2: Stop value.
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Command Reference WMDCV Parameters abort : Automatic abort function. Integer expression. 1 or 2. 1: Disables the function. Initial setting. 2: Enables the function. post : AC level value after the measurement is normally completed. Integer expression. 1 or 2. 1: Start value. Initial setting. 2: Stop value. If this parameter is not set, the MFCMU forces the start value. Output Data The B1500 returns the data measured before an abort condition is detected. Dummy data 199.
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Command Reference WMFC 2: Enables the function. post : Source output value after the measurement is normally completed. Integer expression. 1: Start value. Initial setting. 2: Stop value. If this parameter is not set, the MFCMU forces the start value. Output Data The B1500 returns the data measured before an abort condition is detected. Dummy data 199.999E+99 will be returned for the data after abort.
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Command Reference WNCC 2: Stop value. If this parameter is not set, the MFCMU forces the start value. Output Data The B1500 returns the data measured before an abort condition is detected. Dummy data 199.999E+99 will be returned for the data after abort. Example Statements OUTPUT @B1500;"WMFC 2" OUTPUT @B1500;"WMFC 2,2" WNCC The WNCC command clears the multi channel sweep setup. This command is effective for the measurement modes 16, 27, and 28, and clears the setup of the following commands.
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Command Reference WNX measurement. There is no restrictions for the output mode (voltage or current) of the sweep sources. This command is available for the multi channel sweep measurement (MM16 and MM28). For MM16, the primary sweep source is set by the WI or WV command. For MM28, the primary sweep source is set by the WNX or MCPWNX command defined with the parameter N=1. Sweep mode, linear or log, and the number of sweep steps are set by the WI or WV command for MM16, or the MCPWS command for MM28.
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Command Reference WNX For the linear sweep, the B1500 uses the minimum range that covers both start and stop values to force the staircase sweep current. For the log sweep, the B1500 changes the output range dynamically. For the limited auto ranging, the instrument never uses the range less than the specified range. start, stop : Start or stop value (in V or A). Numeric expression. Setting start=stop sets the SMU to a constant source. For the log sweep, start and stop must have the same polarity.
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Command Reference WS 0.001 to 2 for MPSMU/HRSMU, 0.001 to 20 for HPSMU, 0.001 to 40 for HCSMU, 0.001 to 80 for dual HCSMU, 0.001 to 3 for MCSMU, 0.001 to 100 for UHVU Remarks The N value and the chnum value set to the MCPNX, MCPWNX, and WNX commands must be unique for each command execution. If you set the value used to the previous command, the previous command setting is cleared, and the last command setting is effective.
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Command Reference WSI 2: In any condition, the B1500 immediately goes into a wait state for an external trigger. Remarks Example Statements The B1500 checks its trigger flag to confirm the present trigger status, received or none. To clear the trigger flag: • Enter the *RST or device clear command (HP BASIC CLEAR statement). • Enter the TM3 command. • Enter the TM1, TM2, or TM4 command to change the mode from TM3. • Enter the OS command.
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Command Reference WSV Sweep mode, linear or log, is set by the WI or PWI command. For the limited auto ranging, the instrument never uses the range less than the specified range. start, stop : Start or stop current (in A). Numeric expression. See Table 4-6 on page 4-23, Table 4-8 on page 4-25, or Table 4-11 on page 4-27 for each measurement resource type. start and stop must have the same polarity for log sweep. Sweep mode, linear or log, and the number of sweep steps are set by the WI or PWI command.
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Command Reference WSV Execution Conditions Available for the staircase sweep (MM 2), pulsed sweep (MM 4), or staircase sweep with pulsed bias (MM5) measurement. This command must be entered after the WV or PWV command that clears the WSV command setting. The WI and PWI command also clears the WSV setting. Syntax WSV chnum,range,start,stop[,Icomp[,Pcomp]] Parameters chnum : SMU synchronous sweep source channel number. Integer expression. 1 to 10 or 101 to 1001. See Table 4-1 on page 4-16.
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Command Reference WSX Pcomp : Power compliance (in W). Numeric expression. Resolution: 0.001 W. If the Pcomp value is not entered, the power compliance is not set. This parameter is not available for HVSMU. 0.001 to 2 for MPSMU/HRSMU, 0.001 to 20 for HPSMU, 0.001 to 40 for HCSMU, 0.001 to 80 for dual HCSMU, 0.001 to 3 for MCSMU, 0.001 to 100 for UHVU Example Statements OUTPUT @B1500;"WSV 1,0,1,100,0.
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Command Reference WT Example Statements • Enter the TM1, TM2, or TM4 command to change the mode from TM3. • Enter the OS command. • Trigger the B1500 to start measurement via the trigger input terminal. • Trigger the B1500 to recover from wait state set by the WS command via the trigger input terminal. OUTPUT @B1500;"WSX 2" WT The WT command sets the hold time, delay time, and step delay time for the staircase sweep or multi channel sweep measurement.
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Command Reference WTACV 0 to delay, with 0.1 ms resolution. Numeric expression. If this parameter is not set, Tdelay will be 0. Mdelay : Step measurement trigger delay time (in seconds) that is the wait time after receiving a start step measurement trigger and before starting a step measurement. 0 to 65.535, with 0.1 ms resolution. Numeric expression. If this parameter is not set, Mdelay will be 0. Example Statements OUTPUT @B1500;"WT 5,0.1,0.1,0.1,0.1" OUTPUT @B1500;"WT 5,0.
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Command Reference WTDCV Tdelay : Step source trigger delay time (in seconds) that is the wait time after completing a step output setup and before sending a step output setup completion trigger. 0 (initial setting) to delay or 65.535, with 0.1 ms resolution. Numeric expression. If this parameter is not set, Tdelay will be 0. Mdelay : Step measurement trigger delay time (in seconds) that is the wait time after receiving a start step measurement trigger and before starting a step measurement.
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Command Reference WTFC Tdelay : Step source trigger delay time (in seconds) that is the wait time after completing a step output setup and before sending a step output setup completion trigger. 0 to delay, with 0.1 ms resolution. Numeric expression. If this parameter is not set, Tdelay will be 0. Mdelay : Step measurement trigger delay time (in seconds) that is the wait time after receiving a start step measurement trigger and before starting a step measurement. 0 to 65.535, with 0.1 ms resolution.
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Command Reference WV 0 (initial setting) to 1, with 0.1 ms resolution. Numeric expression. If this parameter is not set, Sdelay will be 0. If Sdelay is shorter than the measurement time, the B1500 waits until the measurement completes, then forces the next step output. Tdelay : Step source trigger delay time (in seconds) that is the wait time after completing a step output setup and before sending a step output setup completion trigger. 0 (initial setting) to delay or 65.535, with 0.1 ms resolution.
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Command Reference WV 3: Linear sweep (double stair, start to stop to start.) 4: Log sweep (double stair, start to stop to start.) range : Ranging type for staircase sweep voltage output. Integer expression. See Table 4-4 on page 4-21. The B1500 usually uses the minimum range that covers both start and stop values to force the staircase sweep voltage.
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Command Reference WZ? WZ? This query command immediately confirms all channel output, and returns the status 0 if it is within ± 2 V or 1 if it is more than ± 2 V. Syntax WZ? [timeout] Parameters timeout : Timeout. Numeric expression. 0 to 655.35 sec, with 0.01 sec resolution. With timeout parameter, this command waits until all channel output becomes within ± 2 V or until the specified timeout elapses, and returns 0 or 1. The WZ? 0 command has the same effect as the WZ? command.
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Command Reference XE Table 4-33 • If any channel is set to the high voltage state (forcing more than the allowable voltage for the interlock open condition, or voltage compliance set to more than it) after the trigger (XE), the interlock terminal must be shorted. • The commands shown in Table 4-33 must be entered before the XE command.
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Command Reference XE 4-238 Agilent B1500A/B1505A Programming Guide, Edition 11
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5 Error Messages
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Error Messages This chapter lists the error code of the Agilent B1500. If error occurs, find solutions in this section and solve problems. However, if problems still remain, perform self-test. If the Agilent B1500 fails self-test, contact your nearest Agilent Technologies Service Center. If errors occur, error codes are stored in the error buffer. To read the error code and the error message, use the “ERRX?” command. The output of the error codes is in the order that they occurred.
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Error Messages Operation Error Operation Error 100 Undefined GPIB command. Send the correct command. 102 Incorrect numeric data syntax. Correct the data syntax. 103 Incorrect terminator position. Correct the command syntax. The number of parameters will be incorrect. 104 Incorrect serial data syntax. 120 Incorrect parameter value. Correct the parameter value. 121 Channel number must be 1 to 10. Correct the channel number. The channel number must be 1 to 10 for Agilent B1500.
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Error Messages Operation Error 130 Start and stop must be same polarity. For a log sweep, the polarity of the start and stop values must be the same in the WV, WI, WSV, WSI, or WNX command. Also, 0 is not allowed for the start and stop values. 140 Invalid setup Check the setup required for the specified function and set it properly. 150 Command input buffer is full. Agilent B1500 can receive 256 characters maximum including the terminator at one time. 151 This command is not allowed to this channel.
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Error Messages Operation Error 162 Incorrect command for program memory. Specified command cannot be stored in the program memory. For the incorrect commands, see “Program Memory” on page 2-49. 170 Incorrect usage of internal variable. The internal variable must be %In for integer data, or %Rn for real data. where n is an integer, 0 to 99. Use %In for the integer type command parameters; and use %Rn for the real type command parameters. For the internal variables, see “VAR” on page 4-212.
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Error Messages Operation Error 205 DZ must be sent before RZ. The RZ command is effective for the channels set to 0 V output by the DZ command. 206 Do not specify the channel recovered by RZ. Specify the channels that have not been recovered yet by the RZ command after the DZ command. The RZ command cannot be executed if the specified channels include a channel that has already been recovered by the RZ command. 210 Ext trigger could not start measurement.
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Error Messages Operation Error 220 Send WV or WI to set primary sweep source. Before triggering the staircase sweep measurement, triggering the staircase sweep with pulsed bias measurement, or sending the WSV, WSI, or WNX command to set the synchronous sweep source, send the WV or WI command to set the primary sweep source. 221 Send PWV or PWI to set pulse sweep source.
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Error Messages Operation Error 230 Pulse source must be set. To perform the pulsed spot measurement (MM3), send the PV or PI command to set the pulse source. 231 Compliance must be set correctly. Compliance was not set or an incorrect compliance value was set in the PV, PI, PWV, or PWI command. Set the correct compliance value effective for the pulse output. 232 Invalid pulse output setup Check the pulse output setup and set the correct value.
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Error Messages Operation Error 245 Specify a higher measurement range to QSR. Too large offset current was measured. Specify the next higher measurement range to the QSR command. 246 QSV mode value must be 1 or 3. The mode values available for the QSV command are 1 (single linear) and 3 (double linear). Set one of the available values. 247 Dedicated channel must be specified by QSO. Specify the dedicated channel to the QSO command.
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Error Messages Operation Error 273 Search and sync output modes must be the same. The primary search source channel and the synchronous source channel must be different, and they must be set to the same output mode (voltage or current). 274 Search sync source is overflow. Set the search sources so that the same output range is set to both primary and synchronous search sources. 275 Search target must be compliance value or less.
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Error Messages Operation Error 283 Set linear sweep for MM20. Only the linear sweep is available for the PWDCV command for the pulsed CV measurement (MM20). 284 Improper setting of CMU frequency and pulse width. Pulse width value is out of the range for the CMU output frequency. Set both frequency value and pulse width value properly. 290 Send WFC to set Cf sweep source. Before triggering the Cf sweep measurement, send the WFC command to set the frequency sweep source (oscillator).
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Error Messages Operation Error 320 Excess current in CMU. Current that exceeds maximum current at the present voltage range was detected by the CMU. The output switch was set to OFF. 321 This command is not available for CMU. CMU was specified for the SMU dedicated command. Specify SMU. 322 This command is not available for SMU. SMU was specified for the CMU dedicated command. Specify CMU. 323 Use SSP instead of CN for SCUU modules.
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Error Messages Operation Error 610 Quasi-pulse source channel must be set. Before triggering the quasi-pulsed spot measurement, send the BDV command to set the quasi-pulse source. 620 TGP specified incorrect I/O port. Specify trigger input for the Ext Trig In port, or trigger output for the Ext Trig Out port by the TGP command. See “TGP” on page 4-196. 621 Specify trigger input port for PAX/WSX. No trigger input port was specified for the PAX or WSX command.
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Error Messages Operation Error 632 Search measurement was aborted. Search measurement was aborted by the automatic abort function. 640 Search limits must be range/20000 or more. For the binary search measurement. The limit value for the search target must be range/20000 or more. where range means the measurement range actually used for the measurement. 650 Data format must be ASCII to get time data. The time stamp function is not available for the binary data output format.
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Error Messages Operation Error 671 SSP is not available for this channel. SSP command is available only for the CMU. Specify the slot number that the CMU has been installed. 680 CMU correction mode must be manual. To perform the CMU correction by using the ADJ? command, set the CMU correction mode to manual by using the ADJ command. 681 CMU correction mode must be off. 682 Invalid standard is specified as CMU correction. 683 Frequency index is not available for CMU correction.
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Error Messages Operation Error 696 HVSMU Current Expander control cable was disconnected. Connection cable was removed. Turn the instrument off and connect the cable. And then turn the instrument on again. 697 HVSMU Current Expander is not active. HVSMU current expander does not respond. The power switch may be off or the power code may be removed. 940 DIO control mode must be Ultra High Voltage Expander control mode (ERMOD 16).
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Error Messages Operation Error 1004 Illegal pulse base/peak polarity Check the pulse base and peak values, and set the polarity properly. 1005 Illegal sweep polarity Check the sweep start and stop values, and set the polarity properly. 1006 Application measurement setup is not sufficient. Check the setup required for the specified measurement and set it properly. 1007 Source channel must be set. Set the source output channel properly. 1008 Pulse output channel is required.
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Error Messages Operation Error 1016 Do not execute CN/CNX to the slave module set to PCH. Specify the master module in CN/CNX to enable the dual HCSMU channel. 1017 Specified module is already used for dual HCSMU. Specify a free HCSMU. 1018 Total setting current exceeds the capacity of main frame power supply. Reduce setting current. Set the current lower than the specified value. 2000 SPGU module does not exist. The SPGU channel number must be specified correctly. 2001 SPGU channel does not exist.
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Error Messages Operation Error 2101 Specified load impedance is out of absolute limits. Set the appropriate impedance value to SER. 2103 Specified period is out of absolute limits. Set the appropriate pulse period value to SPPER. 2104 Specified trigger count is out of absolute limits. Set the appropriate count value to SPRM. 2105 Specified load voltage is out of range. Set the appropriate voltage to SPV or ALW. 2106 Specified load voltage of added amplitude is out of range.
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Error Messages Operation Error 2122 Specified ODSW delay timing parameter out of absolute limits. Set the appropriate delay value to ODSW. 2123 Specified ODSW width timing parameter out of absolute limits. Set the appropriate width value to ODSW. 2131 Delay + Interval * N must be within Period value (ADC Timing). Set the appropriate value to CORRSER?. The period value must be more than delay+interval×count value. 2132 Specified delay for DUT impedance measurement out of absolute limits.
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Error Messages Operation Error 2156 Specified ALWG Pattern Data size is out of absolute limits. Set the appropriate pattern data to ALW. Too large data was specified. 2157 Specified interval time of ALWG Pattern is out of absolute limits. Set the appropriate pattern data to ALW. The incremental time value in the pattern data must be 10 ns to 671.088630 ms in 10 ns resolution. 2158 Specified output voltage of ALWG Pattern Data is out of absolute limits. Set the appropriate pattern data to ALW.
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Error Messages Operation Error 3052 Measurement range change request error. ALWG sequencer run time error. Measurement range cannot be changed because the range change interval is too short. 3201 ALWG Sequence Data is not ready. Sequence data must be set to the specified WGFMU channel. 3202 ALWG Waveform Data is not ready. Waveform data must be set to the specified WGFMU channel. 3301 Specified output voltage is out of absolute limits. Check the output voltage and set the correct value.
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Error Messages Operation Error 3310 Specified output voltage of ALWG Waveform Data is out of absolute limits. Check the output voltage and set the correct value. The value must be -3 V to +3 V for the 3 V range, -5 V to +5 V for the 5 V range, -10 V to 0 V for the -10 V range, or 0 V to +10 V for the + 10 V range. 3311 Specified interval time of ALWG Waveform is out of absolute limits. Check the incremental time (interval time) and set the correct value. The value must be 10 ns to 10995.
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Error Messages Operation Error 3320 Measurement delay is out of absolute limits. Check the measurement delay and set the correct value. The value must be -50 ns to 50 ns, in 625 ps resolution. 3321 VM/IM measurement mode is invalid. Check the measurement mode and set the correct value. 3322 Voltage measurement range is invalid. Check the voltage measurement range and set the correct value. 3323 Current measurement range is invalid. Check the current measurement range and set the correct value.
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Error Messages Operation Error 4404 HVSMU HVPS cannot power-off emergency occurred. 4405 HVSMU V ADC lost emergency occurred. 4406 HVSMU I ADC lost emergency occurred. 4407 HVSMU Float lost emergency occurred. 4408 HVSMU HVPS cannot power-on emergency occurred. 5301 Specified module is already assigned to voltage control, current control or gate control. Specify a free MCSMU/HCSMU. 5302 Voltage control module and current control module must be different. Specify a free MCSMU/HCSMU.
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Error Messages Operation Error 5309 CRC for N1265A EEPROM Vm correction segment failed. N1265A might be defective. Contact your nearest Agilent Technologies service center. 5310 CRC for N1265A EEPROM Im correction segment failed. N1265A might be defective. Contact your nearest Agilent Technologies service center. 5311 Specified module is already assigned to voltage control or current control of HVMCU. Specify a free MCSMU/HCSMU.
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Error Messages Operation Error 5319 Over voltage is detected in Selector Output High Sense terminal of N1265A. Remove the causes of overvoltage. 5320 Pulse width overrun is detected in N1265A. Check the assignment of control modules. 5321 Specified module is already assigned to voltage control or current control of UHVU. Specify a free MCSMU/HCSMU. 5322 Different module must be assigned to voltage control and current control of UHVU. Specify a free MCSMU/HCSMU.
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Error Messages Operation Error NOTE 5343 N1265A: Current pulse test failed. 5344 N1265A: Current measurement CMR test failed. 5345 N1265A: Offset voltage test failed. 5346 N1265A: Voltage measurement offset test failed. 5347 N1265A: Current measurement offset test failed. 5350 N1266A: Control modules are not assigned. Execute ERHVCA to assign control modules. 5351 N1265A: Voltage measurement offset calibration failed. 5352 N1265A: Current measurement offset calibration failed.
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Error Messages Operation Error NOTE 5411 HCSMU float lost emergency occurred. 5413 HCSMU should not apply low current to high impedance device. If one of the errors 6401 to 6413 occurs, the all module output is changed to 0 V and the all output switch is disconnected. 6401 MCSMU high force over voltage emergency occurred. 6402 MCSMU high sense over voltage emergency occurred. 6403 MCSMU low force over voltage emergency occurred. 6404 MCSMU low sense over voltage emergency occurred.
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Error Messages Self-test/Calibration Error Self-test/Calibration Error When the Agilent B1500 fails the self-test or self-calibration, the Agilent B1500 returns the following error code and error message. In the error code, N indicates the slot number. If the module is installed in slot 1, and it fails the function test, the error code will be 1760. 700 CPU failed NVRAM read/write test. 701 CPU failed FPGA read/write test. 702 CPU failed H-RESOLN ADC end signal test.
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Error Messages Self-test/Calibration Error 740 GNDU failed calibration. 935 CMU FPGA version mismatch. 2400 SPGU module is in TEST FAIL state. 2401 Digital H/W function test failed. 2402 CPLD access function test failed. 2403 CPLD version check test failed. 2404 CPLD revision check test failed. 2405 FPGA configuration test failed. 2406 FPGA access function test failed. 2407 FPGA version check test failed. 2408 FPGA revision check test failed. 2409 DCM function test failed.
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Error Messages Self-test/Calibration Error 2450 Internal ADC function test failed. 2451 0.5 Vref Internal ADC function test failed. 2452 4.5 Vref Internal ADC function test failed. 2453 Power Amp initial test failed. 2454 Filter & Amp test failed. 2455 Internal temperature test failed. 2456 Internal output resistance test failed. 2481 Invalid frame configuration. 2482 Frame has no modules. 2483 PLL not locked in slave module. 2484 Reference line is not connected.
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Error Messages Self-test/Calibration Error 3011 EEPROM CRC data of DAC skew calibration data is invalid. 3012 EEPROM CRC data of ADC skew calibration data is invalid. 3013 EEPROM CRC data of RSU calibration data is invalid. 3014 Invalid EEPROM type. 3400 WGFMU module is in TEST FAIL state. 3401 Digital H/W function test failed. 3402 CPLD access function test failed. 3403 FPGA configuration test failed. 3404 FPGA1 access function test failed. 3405 FPGA2 access function test failed.
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Error Messages Self-test/Calibration Error 3424 Channel 1 RSU EEPROM access function test failed. 3425 Channel 2 RSU EEPROM access function test failed. 3426 WGFMU EEPROM CRC data is invalid. 3427 WGFMU EEPROM CRC data of format revision data is invalid. 3428 WGFMU EEPROM CRC data of serial number data is invalid. 3429 WGFMU EEPROM CRC data of system timing data is invalid. 3430 WGFMU EEPROM CRC data of DAC DCM PS data is invalid. 3431 WGFMU EEPROM CRC data of ADC DCM PS data is invalid.
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Error Messages Self-test/Calibration Error NOTE 3481 Invalid frame configuration. 3482 Frame has no modules. 3483 PLL not locked in slave module. 3484 Reference line is not connected. 3485 Sync line is not connected. 3486 Sync Reserve line is not connected. 3487 Interrupt line is not available. 3488 Module service request assertion test failed. 3489 Module service request detection test failed. 3490 Emergency interrupt is not available. 3500 WGFMU calibration failed.
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Error Messages Self-test/Calibration Error 4509 ADC access test failed. 4510 EEPROM access function test failed. 4511 Float lost detection test failed. 4512 ADC lost detection test failed. 4513 HVPS control test failed. 4514 ADC control test failed. 4515 DAC switch test failed. 4516 DAC control test failed. 4517 CALBUS control test failed. 4520 V divider gain test failed. 4521 V loop control test failed. 4522 Voltage detector test failed. 4523 Oscillation detector test failed.
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Error Messages Self-test/Calibration Error NOTE 4615 IFIM gain measurement by I ADC failed. 4616 Calculation of IM correction data failed. 4617 Calculation of IF correction data failed. 4701 Non-feedback offset adjustment failed. Error codes 5501 to 5701 are for HCSMU. 5501 Digital H/W function test failed. 5502 CPLC access function test failed. 5503 FPGA access function test failed. 5505 Bus FPGA JTAG function test failed. 5506 Float FPGA JTAG function test failed.
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Error Messages Self-test/Calibration Error NOTE 5601 VM offset calibration failed. 5602 V CMR DAC calibration failed. 5603 VM gain calibration failed. 5604 IM offset calibration failed. 5605 I CMR DAC calibration failed. 5606 Iad gain calibration failed. 5701 Power AMP bias adjustment failed. Error codes 6501 to 6606 are for MCSMU. 6501 Digital H/W function test failed. 6502 CPLC access function test failed. 6503 FPGA access function test failed.
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Error Messages Self-test/Calibration Error 6564 High sense output relay test is failed. 6601 VM offset calibration is failed. 6602 V CMR DAC calibration is failed. 6603 VM gain calibration is failed. 6604 IM offset calibration is failed. 6605 I CMR DAC calibration is failed. 6606 Iad gain calibration is failed. N760 SMU failed function test. N761 SMU failed VF/VM function test. N762 SMU failed IF/IM function test. N763 SMU failed loop status test.
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Error Messages Self-test/Calibration Error N781 SMU failed IM gain calibration. N782 SMU failed IF offset calibration. N783 SMU failed IF gain calibration. N784 SMU failed IDAC filter offset calibration. N785 SMU failed oscillation detector test. N786 SMU failed I bias test. N787 SMU failed common mode rejection test. N789 SMU failed high voltage detector test. N790 SMU failed zero voltage detector test. N791 SMU failed V hold test. N792 SMU failed V switch test.
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Error Messages Self-test/Calibration Error N831 SCUU failed SCUU configuration test. N832 SCUU failed SMU configuration test. N833 SCUU failed CMU configuration test. N834 CMU failed digital function test. N835 CMU failed CPLD test. N836 CMU failed FPGA test. N837 CMU failed EEPROM test. N838 CMU failed PLL1/PLL2 test. N839 CMU failed PLL DET low state test. N840 CMU failed PLL DET high state test. N841 CMU failed PLL1 lock test N842 CMU failed PLL2 lock test.
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Error Messages Self-test/Calibration Error N859 CMU failed R_LPF2 f1 test. N860 CMU failed MODEM DAC test. N861 CMU failed N_II_DAC test. N862 CMU failed N_QI_DAC test. N863 CMU failed N_IQ_DAC test. N864 CMU failed N_QQ_DAC test. N865 CMU failed TRD normalizer test. N866 CMU failed NA1 test. N867 CMU failed NA2 test. N868 CMU failed NA3 test. N869 CMU failed N_LPF1 f2 test. N870 CMU failed N_LPF1 f3 test. N871 CMU failed N_LPF1 f4 test. N872 CMU failed N_LPF1 f5 test.
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Error Messages Self-test/Calibration Error N889 CMU failed IRM local 0deg test. N890 CMU failed IRM local 90deg test. N891 CMU failed S_LPF1 f1 120kHz test. N892 CMU failed S_LPF1 f2 500kHz test. N893 CMU failed S_LPF1 f3 2MHz test. N894 CMU failed S_LPF1 f4 5MHz test. N895 CMU failed TRD MODEM test. N896 CMU failed VG local 90deg test. N897 CMU failed VG local 0deg test. N898 CMU failed NA4 test. N899 CMU failed NA5 X1/4 test. N900 CMU failed NA5 X1/8 test.
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Error Messages Self-test/Calibration Error N917 CMU failed NA2 test. N918 CMU failed NA3 test. N919 CMU failed IV saturation detector test. N920 CMU failed normal status test. N921 CMU failed normal status test. N922 CMU failed IV saturation status test. N923 CMU failed IV saturation status test. N924 CMU failed unbalance detector test. N925 CMU failed normal status test. N926 CMU failed normal status test. N927 CMU failed unbalance status test. N928 CMU failed unbalance status test.