Product specifications

• Measurement Circuit Mode
If your device has large resistance
in series, it may be necessary to
convert measured parallel capaci-
tance (Cp) and conductance (G)
values obtained by E5250A capaci-
tance compensation to the capaci-
tance (Cs) and resistance (Rs)
values of a series equivalent
circuit. Calculate as follows:
where
measurement frequency.
• Noise Reduction
If your test room is electrically
noisy, do the following:
–Surround your wafer prober with
complete shield to prevent outside
electrical noise from going in, and
use shorter measurement cables.
–Use longer integration time to
average measurement errors.
Using higher test signal (oscilla-
tion) level is also effective because
signal-noise ratio will be higher.
Set them appropriately in 4284A
Setup dialog box (Figure 10)
in ICS.
Conclusion
By using Agilent E5250A’s Matrix
Switch Modules with capacitance
compensation for the Agilent 4284A
LCR Meter, you can perform accurate
capacitance measurements. Combining
with Agilent 4155C/4156C Parameter
Analyzer and Agilent ICS enables you
to integrate a low cost automatic
parametric test system for efficient
and accurate characterization and
evaluation of multiple devices.
Note: The information contained in
this application note is also applica-
ble to the Agilent 4155A/4156A and
Agilent 4155B/4156B.
Table 1. Ordering Example
For more information about Agilent
Technologies semiconductor test products,
applications, and services, visit our website:
www.agilent.com/go/semiconductor
or you can call one of the centers listed
and ask to speak with a semiconductor
test sales representative.
For more information about other Agilent
test and measurement products, go to
www.agilent.com
United States:
1 800 452 4844
Canada:
1 877 894 4414
Europe:
(31 20) 547 2000
Japan:
(81) 426 56 7832
Fax: [phone]
Latin America:
[phone]
Fax: [phone]
Australia/New Zealand:
1 800 629 485 (Australia)
Fax: [phone]
0 800 738 378 (New Zealand)
Fax: [phone]
Asia Pacific:
(852) 2599 7889
Fax: [phone]
Taiwan:
(886 2) 717 9524
Fax: [phone]
Korea:
[phone]
Fax: [phone]
Singapore:
(65) 1 800 292 8100
Fax: [phone]
Product specifications and descriptions in this
document subject to change without notice.
Copyright © 2000 Agilent Technologies
Printed in U.S.A. 11/00
5965-5658E
Cs = (1 + D
2
) Cp
D2 1
Rs = –––––– × ––
1 = D
2 G
G
D = ––––– , ω = 2πf, and f is
ωCp
E5250A (*) Low Leakage Switch Mainframe 1
001 10 x 12 Matrix Switch Card (E5252A) 4+
301 Relay Function Test Adapter 1
16494A Triaxial Cable 52+
001 Triaxial Cable (1.5 m) 48+
003 Triaxial Cable (80 cm) 4
4284A (*) Precision LCR Meter 1
001 Power Amplifier/ DC Bias 1
006 Compensation for 2 m /4 m Cable 1
4156A (*) Precision Semi. Para. Analyzer 1
010 Delete Kelvin Triaxial Cable Set 1
16495B Connector Plate 2+
002 Connector to contacts to soldering 2+
8120-4461 Low noise coaxial cable 2m x 48 +
16048E BNC Test Cable for 4284A (4 m) 1
1250-2405 BNC T-Connector for 16048E Cable 2
42091A Standalone Short Termination 1
10833A GPIB Cable (1 m) 2
10833B GPIB Cable (2 m) 1
E5230B Interactive Characterization Software 1
E5231B IV Driver Library 1
E5232B CV Driver Library 1
E5233B Switch Driver Library 1
* Select appropriate power line and localization options.
+ Decide appropriate numbers upon usage
A PC with supported GPIB interface is needed for ICS operation.