Product specifications

5
Capacitance Measurement
Using Agilent ICS
To measure capacitance using Agilent
ICS, perform the following steps. The
C-V driver (Agilent E5232B) and Matrix
Switch driver (Agilent E5233B) must
be installed with Agilent ICS.
• Agilent 4284A Configuration Setup
Set the Agilent 4284A configura-
tion as shown in Figure 8. Specify
appropriate GPIB address, and
select Option 001 for dc bias and
Option 006 for 2 m/4 m cable length
in the Agilent 4284A Configuration
dialog box. If using the 16048D,
specify 2 m in Cable Length field.
In case of 16048E, specify 4 m.
• Measurement Algorithm
Figure 9 is an example Setup
Editor setting for C-V measure-
ment of MOSFET gate oxide capac-
itor. Connect CMH (High terminal)
and CML (Low terminal) to sub-
strate and gate, respectively. This
connection minimizes the noise
effect at wafer chuck.
Click CMH icon to open the Agilent
4284A Setup dialog box, which is
shown in Figure 10. In this example,
substrate voltage is swept from
+5 V to –5 V with step –0.5 V. Note
that we apply reverse bias to the
substrate. In this dialog box, you
can specify oscillation level, meas-
urement frequency and integration
time too. These are very important
settings for accurate measurement,
which is discussed on page 7. Note
that if you enable capacitance
compensation (next step), parallel
circuit mode is used, so capacitance
and conductance are measured in
parallel mode.
• Capacitance Compensation
Click Agilent E5250A Compensation
button. A dialog opens as shown
in Figure 11. Enable capacitance
compensation. Then specify the
triaxial cable length (Agilent E5252
Output) and coaxial cable length
(After Connector Plate) in meters.
In this example, they are 1.5 m
and 1.0 m, respectively. You need
to measure your cables and use
the correct lengths.
Figure 10. Agilent 4284A Setup dialog box
Figure 9. Setup editor
Figure 12. Matrix Switch setupFigure 11. Agilent E5250A Capacitance
Compensation dialog