Product specifications

2
Solution Using the Agilent E5250A
Low Leakage Switch Mainframe
The Agilent E5250A Low Leakage
Switch Mainframe provides the
solutions to those problems. There
are two types of plug-in modules:
Option 001 10 × 12 Matrix Switch
Module and Option 501 24-channel
Multiplexer Module.
The 10 × 12 Matrix Switch Module can
be used for precise parametric test.
It improves measurement efficiency
by eliminating the need to manually
change the probing positions on a
manual probe station. Figure 2 shows
the block diagram of Matrix Switch
Module. The Agilent E5250A has four
slots, so you can configure a 10-input
and 48-output matrix switch by using
four modules. There are six SMU input
terminals. The SMU1 and SMU2 inputs
are specially designed for low current
measurements. Using with the Agilent
4156C, you can measure sub pA level
current accurately. The CV1 and CV2
inputs are designed to be used with
capacitance measurement instruments
such as Agilent 4284A Precision
LCR Meter.
The Agilent E5250A Matrix Switch
Module has special capacitance com-
pensation routine for accurate meas-
urements, which can be used with the
Agilent 4284A. It is available as an
Agilent IBASIC subroutine or with
Agilent E5230B Interactive Character-
ization Software (Agilent ICS). By
using the Agilent E5250A with
Agilent ICS, you can easily automate
switching measurement instruments
and test devices.
Instrument Connection
Figure 3 shows an example connection
of Agilent 4284A, E5250A, 16495A/B
Connector Plate, and a probing sta-
tion. The Agilent 4284A is connected
to the input terminals CV1 and
CV2 of E5250A by using the Agilent
16048D/E 4-terminal pair test lead.
The high potential and high current
terminals are connected together
using a T-connector. The low poten-
tial and low current terminals are
also connected together. This means
4-terminal pair connection is termi-
nated at the input of E5250A and
2-terminal pair connection is used
after the matrix switch. Though
2-terminal pair connection has a
slightly narrower coverage of meas-
urement impedance range than
4-terminal pair, it makes the device
probing easier.
For the output of the matrix switch,
the Agilent 16494A Triaxial Cables
are used to connect to the Agilent
16495A/B connector plate. The con-
nector plate should be fixed to the wall
of shield box that surrounds probing
station. From the connector plate
to the probe card or probe needles,
Agilent P/N 8120-4461 low noise
coaxial cable is used. Note that the
triaxial and coaxial cables should
have same length for high and low
terminal for capacitance compensa-
tion. In general, using shorter cables
improves measurement accuracy.
1 2 3 4 5 6 7 8 9 10 11 12
OUTPUT
INPUT
Low Leakage Path
C-V Path
SMU 1
SMU 2
SMU 3
SMU 4
SMU 5
HF 1
HF 2
CV 1
CV 2
SMU 6
Figure 2. E5250A Matrix Switch block diagram
4284A 20Hz - 1MHz
PRECISION LCR METER
Agilent E5250A Matrix Switch Agilent 16495F/G Connector Plate (Fixed to Shield Box)
Probing Station
Agilent 16494A
Opt 001/002
1.5/3 m Triax Cable
P/N 8120-4461
Coax Cable < 2 m
P/N 1250-2405
Agilent 16048D/E
Test Lead
Agilent 4284A
LCR Meter
Male to Female
E5250A to 16048X
Female
to 16048X
Figure 3. Instruments connection for capacitance measurement