Agilent 85225F Performance Modeling System Installation and User’s Guide Agilent Technologies
Notices © Agilent Technologies, Inc. 2005 Manual Part Number No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws. 85225-90023 Acknowledgments UNIX® is a registered trademark of the Open Group. Windows NT® is a U.S. registered trademark of Microsoft Corporation.
Safety and Regulatory Information Warnings, Cautions, and Notes This installation and user’s guide utilizes the following safety notations. Familiarize yourself with each notation and its meaning before operating the Agilent 85225F performance modeling system. WA RN ING A WARNING notice denotes a hazard. It calls attention to an operating procedure, practice, or the like that, if not correctly performed or adhered to, could result in personal injury or death.
Safety Symbols and Instrument Markings Symbols and markings in documentation and on instruments alert you to potential risks, provide information about conditions, and comply with international regulations. Table A defines the safety symbols and Table B on page 5 defines the instrument markings you may find in the documentation or on an instrument. Table A Symbols Safety Symbols Definition Warning: risk of electric shock. Warning: hot surface. Caution: refer to instrument documentation.
Table A Safety Symbols (continued) Symbols Definition Standby (supply). Units with this symbol are not completely disconnected from AC mains when this switch is in the standby position. To completely disconnect the unit from AC mains, either disconnect the power cord, or have a qualified/licensed electrician install an external switch. ON (supply). A switch with this symbol closes the instrument’s power supply circuit, connecting it to the mains supply. OFF (supply).
safety standards of design, manufacture, and intended use of the product. Agilent Technologies, Inc. assumes no liability for the customer’s failure to comply with these requirements. For additional safety precautions, including precautions for making device measurements in a floating ground configuration, see “To ensure your safety while using the system" on page 76. 6 WA RN ING This is a Safety Class 1 Product (provided with a protective earthing ground incorporated in the mains supply cord).
Mains power CAU TI O N The mains cable shall be permanently connected to the premise circuit breaker or connected using an agency approved twist-lock connector. Ground the system WA RN ING To minimize shock hazard, the rack cabinet must be connected to an electrical protective earth ground. The power distribution unit (PDU) must be connected to the AC power mains through a grounded power cable, with the ground wire firmly connected to an electrical ground (safety ground) at the power outlet.
CAU TI O N The front panel LINE switch disconnects the mains circuit from the mains supply. However, the mains supply to the power distribution unit remains energized. Fuses and breakers WA RN ING For continued protection against fire hazard, use only fuses with the required rated current, voltage, and specified type (normal blow, time delay). Do not use repaired fuses or short-circuited fuse holders. Replace only with an identical fuse.
Compliance with German Noise Requirements This is to declare that this instrument is in conformance with the German Regulation on Noise Declaration for Machines (Laermangabe nach der Maschinenlaermrerordnung - 3.GSGV Deutschland). Acoustic Noise Emission/Geraeuschemission LpA <70 dB LpA <70 dB Operator position am Arbeitsplatz Normal position normaler Betrieb per ISO 7779 nach DIN 45635 t.19 Compliance with Canadian EMC Requirements This ISM device complies with Canadian ICES- 001.
In This Guide... This guide provides instruction on installing, verifying, and servicing the system, as well as an introductory system overview and reference material. This information is presented for use by the customer or an Agilent Technologies field engineer. 1 Introducing the Agilent 85225F Performance Modeling System This chapter provides a description of the system, its components, integration, and characteristics.
D CV Subsystem Functional Verification Tests This appendix includes an Agilent 4284A precision LCR meter functional verification test that does not require the IC- CAP software. E Noise Subsystem Functional Verification Tests This appendix includes an Agilent 35670A dynamic signal analyzer functional verification test that does not require the IC- CAP software.
Typeface Conventions This guide uses the following typeface conventions to describe various aspects of a particular hardware or software user interface.
Contents 1 Introducing the Agilent 85225F Performance Modeling System Performance Modeling System Configuration Overview 18 RF and DC Measurement System Configuration 19 Figure 1. System Block Diagram 19 The RF Subsystem 20 The DC Subsystem 20 The Bias Networks 21 Component Integration 22 Figure 2. System Components 23 Table 3. Front Panel System Connections, with Agilent 4156C 24 Figure 3. Front Panel Connections with Agilent 4156C 25 Table 4.
1/f Noise, CV, RF, and DC Measurement System Configuration 45 Figure 16. System Block Diagram 46 Figure 17. 1/f Noise Measurement Block Diagram 47 Component Integration 48 Figure 18. System Components 49 Table 10. Front Panel System Connections 50 Figure 19. Front Panel Wiring Diagram 51 Table 11. Rear Panel System Connections 52 Figure 20. Rear Panel Wiring Diagram 53 Figure 21. DC/RF Cabling Diagram - DC and RF Configuration 54 Figure 22.
Precautions for Avoiding Electrostatic Discharge 79 To connect the bias networks 80 Agilent 4156C Systems 80 Agilent 4156C Systems with Agilent 41501B Expander Box Agilent E5260A/70B Systems 84 To switch on power to the system 82 87 To configure the LAN/GPIB gateway for functional verification 89 3 Verifying System Functionality To choose a verification process 92 Understanding the System Functional Verification Test Required Tools 94 Performing the System Functional Verification Test If you encoun
If you encounter a problem 122 C RF Subsystem Functional Verification Test Understanding the RF Subsystem Functional Verification Test Required Tools 124 Performing the RF Subsystem Functional Verification Test If you encounter a problem 127 124 125 D CV Subsystem Functional Verification Test Understanding the CV Subsystem Functional Verification Test Required Tools 130 Performing the CV Subsystem Functional Verification Test If you encounter a problem 132 130 131 E 1/f Noise Subsystem Functional Ve
Agilent 85225F Performance Modeling System Installation and User’s Guide 1 Introducing the Agilent 85225F Performance Modeling System Performance Modeling System Configuration Overview 18 RF and DC Measurement System Configuration 19 CV, RF, and DC Measurement System Configuration 33 1/f Noise, CV, RF, and DC Measurement System Configuration 45 The System Controller 59 Performance Characteristics and Specifications 61 Related Topics “Installing the System" on page 63 “Network Analyzer Performance Specific
1 Introducing the Agilent 85225F Performance Modeling System Performance Modeling System Configuration Overview The standard Agilent 85225F performance modeling system measures the DC and RF performance of active and passive devices. You may configure the Agilent 85225F performance modeling system to measure CV and 1/f noise with the addition of optional instrumentation and IC- CAP 1/f noise measurement modules.
1 Introducing the Agilent 85225F Performance Modeling System RF and DC Measurement System Configuration In conjunction with a compatible controller running 85190- Series IC- CAP software, the Agilent 85225F performance modeling system measures the DC and RF performance of active and passive devices. The IC- CAP software then extracts the device parameters and displays the results.
1 Introducing the Agilent 85225F Performance Modeling System The RF Subsystem S- parameter device characterization is provided by the RF subsystem. The RF subsystem contains the Agilent E8364B PNA Series vector network analyzer. Its integrated synthesizer supplies a swept or CW RF source signal from 10 MHz* to 50 GHz. The integrated test set separates the RF source signal into reference and test signals, and provides RF connection via cables and adapters to the external bias networks.
1 Introducing the Agilent 85225F Performance Modeling System Agilent E5270B 8-Slot Precision Parametric Measurement Mainframe The Agilent E5270B provides DC force (supply) and sense (measure) capability from its plug- in source/monitor units. The Agilent E5280A plug- in high power source/monitor unit provides up to 200 volts of potential and 1 amp of current to the device under test.
1 Introducing the Agilent 85225F Performance Modeling System Component Integration System component integration is performed at the Agilent Technologies factory. The individual components are placed into the rack, and the required cabling is connected between the instruments. After factory integration, the system is tested to verify functional performance.
Introducing the Agilent 85225F Performance Modeling System Figure 2 1 System Components Installation and User’s Guide 23
1 Introducing the Agilent 85225F Performance Modeling System Table 3 Front Panel System Connections, with Agilent 4156C Component Information Connection Information Designator Model Number Description 1 16494A Option 002 2 From Instrument Connector Labeled To Connector On Labeled Instrument Triaxial cable Triax BNC 4156C HRSMU1 SENSE DC SENSE 11612V K11 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU1 FORCE DC FORCE 11612V K11 3 16494A Option 002 Triaxial cable Triax BNC
Introducing the Agilent 85225F Performance Modeling System Figure 3 1 Front Panel Connections with Agilent 4156C Installation and User’s Guide 25
1 Introducing the Agilent 85225F Performance Modeling System Table 4 Front Panel System Connections, with Agilent E5260A or E5270B Component Information Connection Information Designator Model Number Description 1 16494A Option 002 Triaxial cable Triax BNC E5260A/70B SENSE HPSMU1 DC SENSE 11612V K21 2 16494A Option 002 Triaxial cable Triax BNC E5260A/70B FORCE HPSMU1 DC FORCE 11612V K21 3 16494A Option 002 Triaxial cable Triax BNC E5260A/70B FORCE MPSMU3 DC FORCE 11612V K11 4 164
Introducing the Agilent 85225F Performance Modeling System Figure 4 1 Front Panel Wiring Diagram with Agilent E5260A or E5270B Installation and User’s Guide 27
1 Introducing the Agilent 85225F Performance Modeling System Table 5 Rear Panel System Connections with Agilent 4156C Component Information Connection Information Designator Model Number Description 1 16494A Option 002 2 From Instrument Connector Labeled To Connector Labeled On Instrument Triaxial cable Triax BNC 4156C HRSMU2 FORCE DC FORCE 11612V K21 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU2 SENSE DC SENSE 11612V K21 3 16494A Option 002 Triaxial cable Triax BNC 41
Introducing the Agilent 85225F Performance Modeling System Figure 5 1 Rear Panel Wiring Diagram with Agilent 4156C Installation and User’s Guide 29
1 Introducing the Agilent 85225F Performance Modeling System CV, RF, and DC Measurement System Configuration Table 6 Rear Panel System Connections with Agilent E5260A or E5270B Component Information Connection Information Designator Model Number Description Connector Type From Instrument Connector Labeled To Connector On Labeled Instrument 1 10833A GPIB cable GPIB 4156C GPIB GPIB E8364B 2 10833C GPIB cable GPIB E8364B GPIB GPIB Controller 30 Installation and User’s Guide
Introducing the Agilent 85225F Performance Modeling System Figure 6 1 Rear Panel Wiring with Agilent E5260A or E5270B Installation and User’s Guide 31
1 Introducing the Agilent 85225F Performance Modeling System Figure 7 DC/RF Cabling Diagram - DC and RF Configuration Systems with Agilent 4156C Systems with Agilent E5260A or E5270B 32 Installation and User’s Guide
1 Introducing the Agilent 85225F Performance Modeling System CV, RF, and DC Measurement System Configuration With the addition of a precision LCR meter, the Agilent 85225F performance modeling system measures the DC, RF, and CV performance of active and passive devices. The IC- CAP software then extracts the device parameters and displays the results.
1 Introducing the Agilent 85225F Performance Modeling System The CV Subsystem The Agilent 4284A precision LCR meter provides a wide 20 Hz to 1 MHz test frequency range and superior test- signal performance, allowing CV testing to the most commonly- used test standards, such as IEC/MIL, and under conditions that simulate the intended application. Optionally, the system can be configured with the Agilent E5250A low leakage switch mainframe. The Agilent E5250A is used for precise parametric test.
Introducing the Agilent 85225F Performance Modeling System Figure 9 1 System Components Installation and User’s Guide 35
1 Introducing the Agilent 85225F Performance Modeling System Table 7 Front Panel System Connections Component Information Connection Information Designator Model Number Description 1 16494A Option 002 2 From Connector Instrument Labeled To Connector Labeled On Instrument Triaxial cable Triax BNC 4156C HRSMU1 FORCE DC FORCE 11612V K11 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU1 SENSE DC SENSE 11612V K11 3 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU2 FORCE
Introducing the Agilent 85225F Performance Modeling System 1 Figure 10 Front Panel Wiring Diagram Installation and User’s Guide 37
1 Introducing the Agilent 85225F Performance Modeling System Table 8 Rear Panel System Connections Component Information Connection Information Designator Model Number Description 1 16494A Option 002 2 From Instrument Connector Labeled To Connector On Labeled Instrument Triaxial cable Triax BNC 4156C HRSMU1 FORCE DC FORCE 11612V K11 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU1 SENSE DC SENSE 11612V K11 3 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU2 FORCE
Introducing the Agilent 85225F Performance Modeling System 1 Figure 11 Rear Panel Wiring Diagram Installation and User’s Guide 39
1 Introducing the Agilent 85225F Performance Modeling System Figure 12 DC/RF Cabling Diagram - DC and RF Configuration 40 Installation and User’s Guide
Introducing the Agilent 85225F Performance Modeling System 1 Figure 13 DC/RF Cabling Diagram - Parametric Configuration Installation and User’s Guide 41
1 Introducing the Agilent 85225F Performance Modeling System The Low Leakage Switch Mainframe The Agilent E5250A is used for precise parametric test. It improves measurement efficiency by eliminating the need to manually change the probe positions on a manual probe station. The E5250A is used to route signals from the 4156C and the 4284A to the probe card cable, and on to probe card and probe station.
Introducing the Agilent 85225F Performance Modeling System 1 Figure 14 Rear Panel Wiring Diagram including Low Leakage Switch Mainframe Installation and User’s Guide 43
1 Introducing the Agilent 85225F Performance Modeling System Figure 15 DC/RF Cabling Diagram - Parametric Configuration with Low Leakage Switch Mainframe 44 Installation and User’s Guide
1 Introducing the Agilent 85225F Performance Modeling System 1/f Noise, CV, RF, and DC Measurement System Configuration With the addition of a dynamic signal analyzer and a precision LCR meter, the Agilent 85225F performance modeling system measures the DC, RF, CV, and 1/f noise performance of active and passive devices. The IC- CAP software then extracts the device parameters and displays the results.
1 Introducing the Agilent 85225F Performance Modeling System Figure 16 System Block Diagram The 1/f Noise Subsystem The Agilent 35670A dynamic signal analyzer (in conjunction with a customer- furnished Stanford Model SR570 low noise amplifier) measures the flicker noise (1/f noise) of active devices. Controlled by IC- CAP device modeling software, the dynamic signal analyzer generates reliable 1/f noise measurement data, which are analyzed and extracted in IC- CAP.
Introducing the Agilent 85225F Performance Modeling System 1 Figure 17 1/f Noise Measurement Block Diagram Installation and User’s Guide 47
1 Introducing the Agilent 85225F Performance Modeling System Component Integration System component integration is performed at the Agilent Technologies factory. The individual components are placed into the rack, and the required cabling is connected between the instruments. After factory integration, the system is tested to verify functional performance.
Introducing the Agilent 85225F Performance Modeling System 1 Figure 18 System Components Installation and User’s Guide 49
1 Introducing the Agilent 85225F Performance Modeling System Table 10 Front Panel System Connections Component Information Connection Information Designator Model Number Description 1 16494A Option 002 2 From Connector Instrument Labeled To Connector Labeled On Instrument Triaxial cable Triax BNC 41501B HPSMU FORCE DC FORCE 11612V K11 16494A Option 002 Triaxial cable Triax BNC 41501B HPSMU SENSE DC SENSE 11612V K11 3 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU1 FORCE
Introducing the Agilent 85225F Performance Modeling System 1 Figure 19 Front Panel Wiring Diagram Installation and User’s Guide 51
1 Introducing the Agilent 85225F Performance Modeling System Table 11 Rear Panel System Connections Component Information Connection Information Designator Model Number Description 1 16494A Option 002 2 From Instrument Connector Labeled To Connector Labeled On Instrument Triaxial cable Triax BNC 4156C HRSMU1 FORCE DC FORCE 11612V K11 16494A Option 002 Triaxial cable Triax BNC 4156C HRSMU1 SENSE DC SENSE 11612V K11 3 16494A Option 002 Triaxial cable Triax BNC 41501B HPSMU FORCE D
Introducing the Agilent 85225F Performance Modeling System 1 Figure 20 Rear Panel Wiring Diagram Installation and User’s Guide 53
1 Introducing the Agilent 85225F Performance Modeling System Figure 21 DC/RF Cabling Diagram - DC and RF Configuration 54 Installation and User’s Guide
Introducing the Agilent 85225F Performance Modeling System 1 Figure 22 DC/RF Cabling Diagram - Parametric Configuration Installation and User’s Guide 55
1 Introducing the Agilent 85225F Performance Modeling System Instrument Control Interface Instrument control interface is provided by a General Purpose Interface Bus (GPIB) or LAN/GPIB gateway. GPIB addresses for programmable system components are listed in Table 12.
Introducing the Agilent 85225F Performance Modeling System 1 The LAN/GPIB Gateway The Agilent E5810A LAN/GPIB gateway provides access to the system’s GPIB instrumentation over an existing local area network. It allows the use of SICL- or VISA- based applications designed for GPIB over the LAN without modifying the application beyond a simple address change. The gateway is a combination of hardware and SICL/VISA software.
1 Introducing the Agilent 85225F Performance Modeling System Figure 23 Rear Panel Wiring Diagram for LAN/GPIB Gateway 58 Installation and User’s Guide
1 Introducing the Agilent 85225F Performance Modeling System The System Controller A customer- furnished UNIX workstation or personal computer running Agilent IC- CAP software controls the hardware via GPIB while making device measurements, then stores, simulates, and optimizes device parameters, using predefined or user- defined device models. Table 13 on page 59 lists the personal computer requirements. Table 14 on page 59 lists the UNIX workstation requirements.
1 Introducing the Agilent 85225F Performance Modeling System The Rack Cabinet The system is housed in a 1.6 meter rack cabinet. The cabinet provides line power access, ventilation, mobility, and protection to the system instrumentation. A rack- mounted work surface is included for maximum flexibility and convenience in making in- fixture or coaxial measurements. The work surface can be removed to facilitate on- wafer measurements using a probe station.
1 Introducing the Agilent 85225F Performance Modeling System Performance Characteristics and Specifications Supplemental characteristics are not specifications, but are provided in Table 15 for your convenience. Table 15 Supplemental System Characteristics Characteristic Value Line voltage 115 volts nominal (90 volts to 132 volts) or 220 volts nominal (210 volts to 250 volts) Line frequency 48 Hz to 66 Hz Circuit breaker amperage rating 6 amps (115 volts), 3.
1 Introducing the Agilent 85225F Performance Modeling System RF Subsystem Performance Specifications The overall performance of a network analyzer is dependent on the individual instruments, system configuration, user- defined operating conditions, measurement calibration, and cables. For a specification summary, refer to Appendix G, “Network Analyzer Performance Specification Summary,” starting on page 141. In any high- frequency measurement, residual errors contribute uncertainties to the results.
Agilent 85225F Performance Modeling System Installation and User’s Guide 2 Installing the System To prepare the installation site 64 Environmental Requirements 64 Electrical Requirements 64 To receive the system 65 To unpack the shipment crate containing the rack cabinet 66 To verify the shipment 68 To install the work surface 74 To ensure your safety while using the system 76 Precautions for Performing Floating-Ground Measurements 78 Precautions for Avoiding Electrostatic Discharge 79 To connect the bias
2 Installing the System To prepare the installation site CAU TI O N This product is designed for indoor use in Installation Category II and Pollution Degree 2 per IEC 61010-1 and 664 respectively. Follow these steps to prepare the site for system installation. To prepare the installation site Step Notes 1 Ensure that your installation site meets the environmental requirements. • Environmental requirements (temperature, 2 Ensure that your installation site meets the electrical requirements.
Installing the System 2 To receive the system Follow these steps to store, inspect, and confirm the system shipment. To receive the system Step Action Notes 1 Store and inspect the shipment. a Keep the shipping containers together, unopened, located in one area. b Inspect the shipping containers for damage. • If the shipment is damaged, continue to step 2. • If the shipment is verified undamaged, continue to the next section, “To unpack the shipment crate containing the rack cabinet" on page 66.
2 Installing the System To unpack the shipment crate containing the rack cabinet The racked system is shipped upright secured to a pallet. Other system components are shipped separately. Follow these instructions to unpack and inspect the rack cabinet and the racked system components. Required Tools • 9/16 inch wrench or adjustable end wrench • Prying tool to remove packaging clamps WA RN ING Always wear safety glasses when removing the clamps and other packing materials from the crate.
Installing the System 2 To unpack the shipment crate containing the rack cabinet (continued) Step Action 3 Unload the system a Remove the two brace bolts attaching the side brace assembly to the bottom pallet. b Remove the side brace assembly. c Lift the hinged slat and remove the ramp anchor bolt. d Place one end of the ramp on the pallet ramp ledge. e Insert the ramp anchor bolt and fold down the hinged slat. f Fold down the ramp’s end flap.
2 Installing the System To verify the shipment Use Table 18 “System Receiving Checklist and Replaceable Parts” to: • confirm the completeness of the shipment • provide component part and model numbers required to order replacement parts All replacement items are available from Agilent Technologies. Part numbers for replacement instrument subassemblies are listed in their individual service manuals. The majority of the system components are shipped preconfigured in the system rack cabinet.
Installing the System 2 To verify the shipment (continued) Step Action Notes 2 Complete the receiving checklist. a Compare the Bill of Materials to the system • Refer to the Bill of Materials included components received in the shipment. with the shipment. b Verify the shipment is complete. • If the shipment is confirmed incomplete, go to step 3. • If you have confirmed the presence of all system components, the receiving process is complete.
2 Installing the System Table 18 Replaceable Parts (continued) 70 Part or Model Number Description 16494A Option 001 Triaxial cable, 1.5 meter 16494A Option 002 Triaxial cable, 3 meter 16494B Option 001 Kelvin triaxial cable, 1.
Installing the System 2 Table 18 Replaceable Parts (continued) Part or Model Number Description 5063-9221 Rack mount kit with handles, 3-EIA 5063-9222 Rack mount kit with handles, 4-EIA 5063-9223 Rack mount kit with handles, 5-EIA 5063-9224 Rack mount and handle kit, 6-EIA 5063-9225 Rack mount and handle kit, 7-EIA 8120-1396 Line power cord, 220V 8120-1839 Cable, BNC, 50 ohm, 24 inch 8120-1405 Line power cord, 120V 8120-1840 Cable, BNC, 48 inch 8120-2582 Cable 8120-5068 Cable 8490D
2 Installing the System Table 18 Replaceable Parts (continued) 72 Part or Model Number Description E5252A 10 x 12 switch matrix E5260A 8-slot high speed parametric measurement mainframe E5260A Option 050 50 Hz line power frequency E5260A Option 060 60 Hz line power frequency E5260A Option ABA English documentation E5260A Option ABJ Japanese documentation E5290A High speed high power source monitor unit E5291A High speed medium power source monitor unit E5270B 8-slot parametric measure
Installing the System 2 Table 18 Replaceable Parts (continued) Part or Model Number Description E8364B Option 022 Extended memory E8364B Option 080 Frequency offset E8364B Option 081 Reference receiver switch E8364B Option 083 Frequency converter measurement application E8364B Option 1CP Rack mount kit with handles E8364B Option H08 Pulsed RF measurement capability E8364B Option H11 IF access E8364B Option UNL Extended power range Installation and User’s Guide 73
2 Installing the System To install the work surface If the system will not be used with a probe station, install the work surface to facilitate in- fixture or coaxial measurements. The work surface is designed to fit onto the rack below the network analyzer. When the following procedure is performed properly, the work surface maintains a path to chassis ground through the support rails and the rack cabinet. Follow these instructions to install the work surface.
Installing the System 2 To install the work surface (continued) Step Action 3 Attach the work surface to the support rails. a Slide the work surface onto the support rails. b Slide the work surface all the way back on the rails until it comes to rest against the front of the rack cabinet. c Use 1/2 inch long 10-32 screws to secure the work surface to the rails from the beneath.
2 Installing the System To ensure your safety while using the system This product has been designed and tested in accordance with international standards. Bias current and voltage are supplied to the DUT from the DC subsystem. This instrument can force dangerous voltages to the FORCE, SENSE, and GUARD connectors. DC subsystem is connected to the device through the bias networks and test fixture or probe station.
Installing the System 2 To ensure your safety while using the system (continued) Step Action Notes 4 Be aware of potential shock hazards during floating-ground measurements. a Do not touch any of the DC subsystem output connectors when the shorting bar is disconnected and a floating-ground measurement is in progress. b Warn others working in the system’s vicinity of the potential shock hazards.
2 Installing the System Precautions for Performing Floating-Ground Measurements IC- CAP measurements can be performed with the device in a floating- ground configuration. This prevents ground- loop noise and, in the case of a bipolar junction transistor, damage to the device under test. A floating- ground configuration is created by removing the shorting bar that connects the CIRCUIT COMMON and CHASSIS GROUND terminals.
Installing the System 2 Precautions for Avoiding Electrostatic Discharge Never operate the system without taking precautions to avoid electrostatic discharge that could damage the system or the device under test. CAU TI O N Even relatively small currents resulting from electrostatic discharge undetectable to the system operator can damage current-sensitive devices and system components. To take precautions against electrostatic discharge Step 1 Wear an antistatic wrist strap.
2 Installing the System To connect the bias networks Follow these steps to connect the bias networks to the system, and the device under test to the bias networks. Agilent 4156C Systems To connect the bias networks Step Action Notes a Connect the triaxial cables from the 4156C HRSMU1 FORCE and SENSE connectors to the DC FORCE and DC SENSE connectors on the port 1 bias network.
Installing the System 2 To connect the bias networks (continued) Step Action 3 Connect and route the triaxial cable from 4156C HRSMU3 FORCE connector to the port 2 bias network. a From the rear of the system, connect one • The triaxial cable model number is end of the triaxial cable to the HRSMU3 16494A Option 002. FORCE connector on the 4156C rear panel. • Leave the GNDU connector on the port b From the rear of the system, route the cable 1 bias network open. through the upper feedthrough panel.
2 Installing the System Agilent 4156C Systems with Agilent 41501B Expander Box To connect the bias networks Step Action Notes a Connect the triaxial cables from the 4156C HRSMU1 FORCE and SENSE connectors to the DC FORCE and DC SENSE connectors on the port 1 bias network. b Connect the triaxial cables from the 41501B HPSMU FORCE and SENSE connectors to the DC FORCE and DC SENSE connectors on the port 2 bias network.
Installing the System 2 To connect the bias networks (continued) Step Action 4 Connect the Agilent E8364B test ports to the bias networks. a Connect one end of the port 1 test port • The test port cables model number is cable to the Agilent E8364B test port 1. 85133F. b Connect the other end of the test port 1 test • The 2.4 mm female-to-male adapter port cable to the 2.4 mm female-to-male model number is 11900C. Without this adapter.
2 Installing the System Agilent E5260A/70B Systems To connect the bias networks Step Action Notes 1 For Agilent E5260A/70B systems, refer to the following figure. 2 Connect the triaxial a From the front of the system rack, connect cables to the E5260A/70B triaxial cables to the front panel high power SMUs.* SMU FORCE and SENSE outputs on the E5260A/70B. b Connect a triaxial cable to the front panel medium power SMU FORCE and SENSE outputs on the E5260A/70B.
Installing the System 2 To connect the bias networks (continued) Step Action Notes 3 Connect the triaxial cables from the E5260A/70B SMUs to the bias networks. a Connect the triaxial cable from the E5260A/70B medium power SMU to the DC FORCE and DC SENSE connectors on the port 1 bias network. b Connect the triaxial cable from the E5260A/70B high power SMU to the DC FORCE and DC SENSE connectors on the port 2 bias network. • The medium power SMU is the Agilent E5281A.
2 Installing the System To connect the bias networks (continued) Step Action Notes 6 Connect the bias networks to the device under test. a Connect one semi-rigid cable to the RF/DC OUT connector of the port 1 bias network. b Connect the other semi-rigid cable to the RF/DC OUT connector of the port 2 bias network. c Connect the device under test to the semi-rigid cable attached to the port 1 bias network. d Connect the device under test to the semi-rigid cable attached to the port 2 bias network.
2 Installing the System To switch on power to the system NO TE Proper system operation is dependent on the sequence in which the system components are switched on. To switch on power to the system Step Notes 1 Ensure that the individual instruments are configured to match the available line power source.* • For information regarding line power settings, refer to the individual instrument manuals. 2 Ensure that all component line power switches are set to the OFF position.
2 Installing the System To switch on power to the system Step Notes 13 On the 4156C, press System > [MISCELLANEOUS], highlight the 4156C value in the GPIB ADDRESS field, and press 19 > Enter. • This sets the correct system GPIB address 14 On the E5260A/70B, move the cursor to CONFIG, press Enter, move the cursor to ADDRESS, press Enter. Use the arrow keys to set the address to 19 and press Enter. • This sets the correct system GPIB address (19) for the 4156C. (19) for the E5260A/70B.
2 Installing the System To configure the LAN/GPIB gateway for functional verification If your system includes an Agilent E5810A LAN/GPIB gateway, follow these steps to configure the LAN/GPIB gateway in order to verify the functionality of the performance modeling system. NO TE This procedure explains how to configure IC-CAP to use the default LAN/GPIB gateway server IP address in order to verify the functionality of the performance modeling system.
2 90 Installing the System Installation and User’s Guide
Agilent 85225F Performance Modeling System Installation and User’s Guide 3 Verifying System Functionality To choose a verification process 92 Understanding the System Functional Verification Test 94 Performing the System Functional Verification Test 95 Related Topics “To enhance measurement accuracy" on page 112 “Performing a Coaxial System Measurement Calibration" on page 115 “Performing the DC Subsystem Functional Verification Test" on page 121 “Performing the RF Subsystem Functional Verification Test"
3 Verifying System Functionality To choose a verification process System functionality can be verified using several different processes, depending on the level (system or subsystem) of functional verification required and the available tools. The procedure provided in “Performing the System Functional Verification Test" on page 95 verifies that all of the system instruments interface correctly, and that the system can make software- driven measurements using a controller running the IC- CAP software.
Verifying System Functionality 3 To choose a system verification process (continued) Situation Action 2 If you would like to manually check the functionality of the Agilent E8364B PNA Series vector network analyzer without using the GPIB interface... Complete the steps listed in “Performing the RF Subsystem Functional Verification Test" on page 125. 3 If you would like to manually check the functionality of the Agilent 4156C precision semiconductor parameter analyzer without using the GPIB interface..
3 Verifying System Functionality Understanding the System Functional Verification Test The system functional verification test is a standard IC- CAP measurement and simulation procedure. The system performs DC and S- parameter extraction, optimization, and simulation using a fixed 10 dB attenuator as the device under test (DUT).
Verifying System Functionality 3 Performing the System Functional Verification Test Complete the following steps to verify system functionality using the supplied Agilent 8490D 10 dB fixed RF attenuator as the device under test. To perform the system functional verification test Step Action Notes 1 Switch on power to the system. a Complete the steps listed in “To switch on power to the system" on page 87. • Proper system function is dependent 2 Connect the device under test to the bias networks.
3 Verifying System Functionality To perform the system functional verification test (continued) Step Action Notes 3 Start the IC-CAP software.* PC version: a Select Start > Programs > IC-CAP 2004 > IC-CAP. UNIX version: a Open a UNIX terminal window. b At the prompt, type iccap. c Press Enter. • This starts IC-CAP and opens the 4 Add the system interface and components to the IC-CAP Hardware Setup. a From the IC-CAP/Main window menu bar, choose Tools > Hardware Setup... .
Verifying System Functionality 3 To perform the system functional verification test (continued) Step Action Notes 7 Open the attenuator test model in IC-CAP. a From the IC-CAP/Main window menu bar, choose File > Examples... . b In the Directories list of the File Open dialog box, double-click on the directory .../examples/model_files. c In the Directories list of the File Open dialog box, double-click on the directory .../model_files/misc.
3 Verifying System Functionality To perform the system functional verification test (continued) Step Action 10 Configure the instrument state for calibration. a Disconnect the attenuator from the semi-rigid cables. b In the Utility key group on the network • This removes the instrument from GPIB analyzer front panel, press Macro/Local > control, activates the front panel Preset. interface, and returns the instrument to its factory preset condition. c In the Channel menu, click Power... .
Verifying System Functionality 3 To perform the system functional verification test (continued) Step Action Notes 13 Make the DC and RF measurements in IC-CAP. a Reconnect the attenuator. b In the Atten model window, click the Macros tab. c In the Select Macro: list, select Test_atten and click Execute. d When prompted to ensure you have calibrated the network analyzer, enter Y and click OK. e When prompted to enter a cal set number use the default (1) and click OK.
3 Verifying System Functionality To perform the system functional verification test (continued) Step Action Notes 15 For systems with the Agilent 4284A precision LCR meter, open the junction capacitance model (juncap.mdl) in IC-CAP. a From the IC-CAP/Main window menu bar, choose File > Examples... . b In the Directories list of the File Open dialog box, double-click on the directory .../examples/model_files. c In the Directories list of the File Open dialog box, double-click on the directory ...
3 Verifying System Functionality If you encounter a problem ✔ Check the system connections and settings: 1 system connections to the DUT 2 system interconnections 3 GPIB cabling 4 GPIB address settings ✔ Perform the DC subsystem self- test in Appendix B, “DC Subsystem Functional Verification Test,” starting on page 119. ✔ Perform the Agilent E8364B PNA Series vector network analyzer operator’s check in Appendix C, “RF Subsystem Functional Verification Test,” starting on page 123.
3 102 Verifying System Functionality Installation and User’s Guide
Agilent 85225F Performance Modeling System Installation and User’s Guide 4 Servicing the System To troubleshoot the system 104 To remove or replace a system component 105 To order replacement parts 106 To receive additional assistance 107 Contacting Agilent Technologies 107 To package the system for transport 108 Related Topics “Performing the System Functional Verification Test" on page 95 “Component Integration" on page 48 Use this chapter to solve problems.
4 Servicing the System To troubleshoot the system Most system problems are caused by faulty cabling or switch configurations.
4 Servicing the System To remove or replace a system component Follow these steps to remove a system component for periodic component calibration, service, or repair. WA RN ING These servicing instructions are provided for use by qualified personnel only. To avoid electrical shock, do not perform any servicing unless you are qualified to do so. WA RN ING The opening of covers or removal of parts is likely to expose dangerous voltages.
4 Servicing the System Following the replacement of a system component, complete the procedure in “Performing the System Functional Verification Test" on page 95. To order replacement parts To find the part or model number of a replaceable system component, refer to Table 18, “Replaceable Parts,” on page 69. To order, contact Agilent Technologies by calling the telephone number listed in Table 19 on page 107 appropriate to the location of the modeling system.
4 Servicing the System To receive additional assistance If you would like assistance, visit the online assistance web site, or call the telephone number listed in Table 19 appropriate to the location of modeling system. Table 19 Contacting Agilent Technologies Online assistance: http://eesof.tm.agilent.
4 Servicing the System To package the system for transport Follow these instruction to package the system in a shipping crate. To package the system for transport Step Note 1 Place the packaging base in an unobstructed work area. 2 Remove the lag bolt from one side of the retaining piece. 3 Swing unbolted end of retaining piece outward. 4 Attach loading ramp. 5 Roll rack cabinet up ramp face first until it is fully seated on base. 6 Remove ramp. 7 Swing retaining piece back to original position.
Servicing the System 4 To package the system for transport (continued) Step Note 17 Add tip indicators and appropriate labeling 18 Secure crate to packaging base using band straps Installation and User’s Guide 109
4 110 Servicing the System Installation and User’s Guide
Agilent 85225F Performance Modeling System Installation and User’s Guide A Enhancing Measurement Accuracy To enhance measurement accuracy 112 Understanding System Measurement Calibration 114 Performing a Coaxial System Measurement Calibration 115 If you encounter a problem 116 Periodic System Component Calibration 117 Related Topics “Performing the System Functional Verification Test" on page 95 “Performing the RF Subsystem Functional Verification Test" on page 125 Use the procedures in this appendix to
A Enhancing Measurement Accuracy To enhance measurement accuracy Follow these instructions to enhance the accuracy of your measurements. To enhance measurement accuracy Step Action Notes 1 Inspect device connections for foreign materials or connector damage. a Prior to connecting the DUT, inspect the bias network and semi-rigid RF cable connectors for foreign materials or damage. b Replace any damaged connectors. • Before using connectors for a critical 2 Clean the connectors.
A Enhancing Measurement Accuracy To enhance measurement accuracy (continued) Step Action Notes 5 Always perform a measurement calibration on the network analyzer prior to making device measurements. a Prior to making device measurements, complete the steps listed in “Performing a Coaxial System Measurement Calibration" on page 115. b Ensure that the calibration kit elements are seated correctly and firmly in the test set cable connectors.
A Enhancing Measurement Accuracy Understanding System Measurement Calibration Measurement accuracy is degraded by the effects of three different types of measurement errors: systemic, drift, and random. Systemic errors are caused by imperfection in the test equipment and test setup. Drift errors occur when a test system’s performance changes after a calibration has been performed. Drift errors are caused primarily by variations in the ambient temperature of the measurement environment.
Enhancing Measurement Accuracy A Performing a Coaxial System Measurement Calibration Complete the following steps to perform a coaxial system measurement calibration and increase the accuracy of your device measurements. Modify these instructions as necessary to perform an in- fixture or on wafer measurement calibration. To perform the system measurement calibration Step Action 1 Preset the network analyzer. On the network analyzer, press Preset.
A Enhancing Measurement Accuracy To perform the system measurement calibration (continued) Step Action 5 Calibrate the network analyzer through the bias networks, cables, and adapters using the standard open, short, load, and through. a Follow the prompts to connect the standard open to the Port 1 bias network RF/DC OUTPUT. b Click Measure. c Follow the prompts to connect the standard short to the Port 1 bias network RF/DC OUTPUT. d Click Measure.
A Enhancing Measurement Accuracy Periodic System Component Calibration A complete calibration verifies that the system components meet their individual performance specifications. The calibration interval depends on the level of system use. Agilent Technologies recommends an initial cycle of 6 to 12 months. Thereafter, adjust the cycle based on the recalibration results.
A 118 Enhancing Measurement Accuracy Installation and User’s Guide
Agilent 85225F Performance Modeling System Installation and User’s Guide B DC Subsystem Functional Verification Test Understanding the DC Subsystem Functional Verification Test 120 Performing the DC Subsystem Functional Verification Test 121 If you encounter a problem 121 Related Topics “Performing the System Functional Verification Test" on page 95” “Performing the RF Subsystem Functional Verification Test" on page 125” “Performing the CV Subsystem Functional Verification Test" on page 131 “Performing th
B DC Subsystem Functional Verification Test Understanding the DC Subsystem Functional Verification Test Use this procedure to manually confirm the functionality of the DC subsystem.
B DC Subsystem Functional Verification Test Performing the DC Subsystem Functional Verification Test Complete these steps to run the self- test and verify the operation the DC subsystem. For Agilent 4156C subsystems: To perform the Agilent 4156C precision semiconductor parameter analyzer self-test Step Notes 1 Disconnect all cables from the measurement terminals on the 4156C rear panel. 2 Connect the 4156C to line power. 3 Switch on the instrument line power switch.
B DC Subsystem Functional Verification Test For Agilent E5260A/70B DC subsystems: To perform the Agilent E5260A/70B precision parametric measurement solution self-test Step Notes 1 Disconnect all cables from the measurement terminals on the E5260A/70B front panel. 2 Connect the E5260A/70B to line power. 3 Switch on the instrument line power switch. 4 Wait 1 hour before continuing to step 5. 5 Press Shift > Menu. 6 Move the cursor to SELFTEST and press Enter. Move the cursor to EXECUTE and press Enter.
Agilent 85225F Performance Modeling System Installation and User’s Guide C RF Subsystem Functional Verification Test Understanding the RF Subsystem Functional Verification Test 124 Performing the RF Subsystem Functional Verification Test 125 If you encounter a problem 127 Related Topics “Performing the System Functional Verification Test" on page 95 “Performing the DC Subsystem Functional Verification Test" on page 121 “Performing the CV Subsystem Functional Verification Test" on page 131 “Performing the
C RF Subsystem Functional Verification Test Understanding the RF Subsystem Functional Verification Test Use the procedure provided in “Performing the RF Subsystem Functional Verification Test” to manually confirm the functionality of the Agilent E8364B PNA Series vector network analyzer system. This procedure does not verify performance to specification.
C RF Subsystem Functional Verification Test Performing the RF Subsystem Functional Verification Test If the performance of the Agilent E8364B PNA Series vector network analyzer is in question, complete the following steps to verify operation. To perform the RF subsystem functional verification test Step Action 1 Activate the network analyzer. a Connect the network analyzer to line power. b Switch on the line power. 2 Warm-up the network analyzer for 1 hour. a Wait 1 hour before continuing to step 3.
C RF Subsystem Functional Verification Test To perform the RF subsystem functional verification test (continued) Step Action 5 Test the forward transmission mode for channel 1. a From the Trace drop down menu, point to Measure and click S21. b Inspect the trace shown on the display. It should be similar to the trace shown to the right. 6 Test the reverse transmission mode for channel 1. a From the Trace drop down menu, point to Measure and click S12. b Inspect the trace shown on the display.
RF Subsystem Functional Verification Test C If you encounter a problem ✔ Check the GPIB cable and connection. ✔ Check the GPIB address. ✔ Consult the “Troubleshooting” chapter of the Agilent E8364B PNA Series vector network analyzer service guide for troubleshooting information.
C 128 RF Subsystem Functional Verification Test Installation and User’s Guide
Agilent 85225F Performance Modeling System Installation and User’s Guide D CV Subsystem Functional Verification Test Understanding the CV Subsystem Functional Verification Test 130 Performing the CV Subsystem Functional Verification Test 131 If you encounter a problem 132 Related Topics “Performing the System Functional Verification Test" on page 95 “Performing the RF Subsystem Functional Verification Test" on page 125 “Performing the DC Subsystem Functional Verification Test" on page 121 Use the instruc
D CV Subsystem Functional Verification Test Understanding the CV Subsystem Functional Verification Test Use the procedure provided in “Performing the CV Subsystem Functional Verification Test” to manually confirm the functionality of the Agilent 4284A precision LCR meter. This procedure does not verify performance to specification.
CV Subsystem Functional Verification Test D Performing the CV Subsystem Functional Verification Test If the performance of the Agilent 4284A precision LCR meter is in question, complete the following steps to verify operation. To perform the RF subsystem functional verification test Step Action Notes 1 Activate the precision LCR a Connect the precision LCR meter to meter. line power. b Switch on the line power. 2 Warm-up the network analyzer for 1 hour. a Wait 1 hour before continuing to step 3.
D CV Subsystem Functional Verification Test If you encounter a problem ✔ Check the GPIB cable and connection. ✔ Check the GPIB address. ✔ Consult the Agilent 4284A precision LCR meter service guide for troubleshooting information.
Agilent 85225F Performance Modeling System Installation and User’s Guide E 1/f Noise Subsystem Functional Verification Test Understanding the 1/f Noise Subsystem Functional Verification Test 134 Performing the 1/f Noise Subsystem Functional Verification Test 135 If you encounter a problem 136 Related Topics “Performing the System Functional Verification Test" on page 95 “Performing the DC Subsystem Functional Verification Test" on page 121 “Performing the RF Subsystem Functional Verification Test" on page
E 1/f Noise Subsystem Functional Verification Test Understanding the 1/f Noise Subsystem Functional Verification Test Use the procedure provided in “Performing the 1/f Noise Subsystem Functional Verification Test” to manually confirm the functionality of the Agilent system. This procedure does not verify performance to specification. This procedure confirms that the network analyzer is ready for performance verification and/or operation.
E 1/f Noise Subsystem Functional Verification Test Performing the 1/f Noise Subsystem Functional Verification Test If the performance of the Agilent 35670A dynamic signal analyzer is in question, complete the following steps to verify operation. To perform the RF subsystem functional verification test Step Action Notes 1 Activate the dynamic signal analyzer. a Connect the dynamic signal analyzer to line power. b Switch on the line power. The instrument performs the self test during power-up.
E 1/f Noise Subsystem Functional Verification Test If you encounter a problem ✔ Check the GPIB cable and connection. ✔ Check the GPIB address. ✔ Consult the “Chapter 4. Troubleshooting the Analyzer” in the Agilent 35670A dynamic signal analyzer service guide for troubleshooting information.
Agilent 85225F Performance Modeling System Installation and User’s Guide F Understanding the Bias Networks Features 138 Characteristics 139 Operation 140 Bias Network Schematic 140 Related Topics “To connect the bias networks" on page 80 “Performing a Coaxial System Measurement Calibration" on page 115 Use this appendix to learn more about the bias networks.
F Understanding the Bias Networks Features Using the Agilent 11612V K11 and K21 bias networks, you can simultaneously supply DC bias and RF energy to the device under test (without the need to use patch cables or adapters) to make convenient and accurate DC and S- parameter measurements.
Understanding the Bias Networks F Characteristics Table 20 11612V Option K11/K21 Bias Network Characteristics Parameter 11612V Option K11 11612V Option K21 Test port Port 1 Port 2 Frequency range 45 MHz to 50 GHz 45 MHz to 50 GHz Test port connector 2.4 mm 2.4 mm Maximum current 0.5 amps 0.5 amps Maximum voltage 40 volts 40 volts Maximum RF power 2 watts (+33 dBm) 2 watts (+33 dBm) Height 50 mm (2 inches) 50 mm (2 inches) Width 105 mm (3.5 inches) 105 mm (3.
F Understanding the Bias Networks Operation Each bias network includes two bias tees, one for force and one for sense. The force bias tee includes a capacitor in the RF signal path that functions as a high- pass filter and DC block. The sense bias tee provides a through path for DC. Both force and sense tees include resistive- capacitive oscillation suppression circuitry to help prevent low frequency bias oscillation of the device under test. Refer to Figure 24.
Agilent 85225F Performance Modeling System Installation and User’s Guide G Network Analyzer Performance Specification Summary Network Analyzer System Performance 142 Dynamic Range 142 Measurement Uncertainty 143 Related Topics “RF and DC Measurement System Configuration" on page 19 “Performance Characteristics and Specifications" on page 61 Use this appendix to reference a summary of the network analyzer performance specifications.
G Network Analyzer Performance Specification Summary Network Analyzer System Performance The following specifications describe the system performance of the Agilent E8364B PNA Series vector network analyzer Option 014 and UNL configuration for measurements between 45 MHz and 50 GHz. Calibration Kit Cables Calibration Type Agilent 85056A, 2.4 mm precision, with sliding loads Agilent 85133F, 2.
Network Analyzer Performance Specification Summary G Measurement Port Characteristics Frequency Range (GHz) Residual 0.045 to 2.0 2.0 to 20.0 20.0 to 40.0 40.0 to 50.0 Directivity 42 dB 42 dB 38 dB 36 dB Source match 41 dB 38 dB 33 dB 31 dB Load match 42 dB 42 dB 37 dB 35 dB Reflection tracking ±(0.001 + 0.2 dB/°C) ±(0.008 + 0.2 dB/°C) ±(0.020 + 0.3 dB/°C) ±(0.027 + 0.4 dB/°C) Transmission tracking ±(0.019 + 0.2 dB/°C) ±(0.053 + 0.2 dB/°C) ±(0.114 + 0.3 dB/°C) ±(0.215 + 0.
G Network Analyzer Performance Specification Summary Transmission Measurements 144 Installation and User’s Guide
Index Numerics 11612V. See bias networks 2.4 mm (f-to-f) adapter, 69, 94 2.4 mm (f-to-m) adapter, 69, 81, 83, 85, 94 2.4 mm (m-to-f) adapter, 69 2.4 mm (m-to-m) adapter, 69, 81, 83, 85, 94 35670A. See dynamic signal analyzer 41501B. See expander, SMU PGU 4156C. See parameter analyzer 4284A. See LCR meter A accuracy, enhancing measurement, 112 activation procedure, system, 87 adapter, 2.4 mm (f-to-f), 69, 94 adapter, 2.4 mm (f-to-m), 69, 81, 83, 85, 94 adapter, 2.4 mm (m-to-f), 69 adapter, 2.
Index H handle kit, rack mount and, 70, 71, 105 hard disk requirements, controller, 59 hardware setup, IC-CAP, 89, 96 I IC-CAP software adding components, 89, 96 adding interface, 96 changing SMU names, 96 configuring the interface, 89 DC characterization, 99 opening attenuator test model, 97 saving the hardware configuration, 100 setting network analyzer options, 97 starting the program, 89, 96 user’s guide, 89, 100 inspection connector surfaces, 112 incoming shipment, 65, 68 installation procedure, 64 i
Index schematic diagrams DC/RF signal flow, 32, 40, 41, 54, 55 semi-rigid cables, 71 shipment reception procedure, 65 site preparation procedure, 64 SMU names, IC-CAP, 96 SMU triaxial cables, 69, 70 specifications, performance E8364B network analyzer, 142 parametric measurement solution, 62 standards, interference, 61 statement of compliance, 8 support, customer, 107 surge immunity test, compliance with, 9 swap space requirements, controller, 59 switch mainframe GPIB address, 56 overview, 42 troubleshootin
Index 148 Installation and User’s Guide
