Specifications

TheAgilentB1500Asemiconductor
device analyzer is a modular instru-
ment with a ten-slot configuration
that supports both IV and CV mea-
surements and also fast high-voltage
pulsing. Its familiar, Microsoft®
Windows® user interface supports
Agilent’sEasyEXPERTsoftware,
which provides a new, more intuitive
task-oriented approach to device
characterization.Becauseofits
extremely low-current, low-voltage,
and integrated capacitance mea-
surement capabilities, the Agilent
B1500Acanbeusedforawiderange
of semiconductor device character-
ization needs (IC-CAP supports
theB1500A).Itisalsoanexcellent
solution for non-volatile memory
cell characterization and high-speed
device characterization (including
advancedNBTImeasurement).
Key features and benefits:
• Superior IV measurement
performance: 0.1 fA/0.5 V
measurement resolution
• Optional, integrated capacitance
module supports CV measure-
ments up to 5 MHz
• Over 230 predefined application
tests to get you up and running
quickly
• EasyEXPERTsoftwareprovides
an innovative, task-based
approach to parametric test
Application Specific DC Power Supplies tailored solutions for specific needs
More detailed specifications at www.agilent.com/find/B1500A
154
PC-based instrument with Windows
®
XP Professional OS
Single-box solution for current-voltage (IV), capacitance-voltage (CV),
pulse generation, fast IV, and time-domain measurement
Ten module slots for source monitor units (SMUs) and other module types
(MFCMU, HV-SPGU and WGFMU)
Offline data analysis and application test development via Desktop
EasyEXPERT software
B1500A
Device Analyzer/Curve Tracers
B1500A Semiconductor Device Analyzer
Mainframe
Characteristics
B1500A Semiconductor Device Analyzer
Available slots 10
Ground unit (GNDU) sink capability 4.2 A
USB ports 2 front and 2 rear
Instrument control GPIB
Networking 100BASE-TX/10BASE-T LAN Port
External trigger inputs/outputs 1 BNC trigger in; 1 BNC trigger out; 8 programmable trigger in/out
Module
Selection Guide
Required slot Main specification
B1510A HPSMU 2 Up to 200 V, 1 A force. 10 fA current resolution
B1511A MPSMU 1 Up to 100 V, 100 mA force, 10 fA current resolution
B1517A HRSMU 1 Up to 100 V, 100 mA force, 1 fA current resolution
E5288A ASU NA Up to 100 V, 100 mA force, 100 Aa current resolution
B1520A MFCMU 1 1 kHz to 5 MHz, up to 100 V DC bias with SMU
B1525A HV-SPGU 1 Min 12.5 ns pulse width, 10 ns transition time,
up to 40 V with 3 level pulse
B1530A WGFMU 1 Min 100 ns pulse width, 10 V peak-to-peak output,
5 ns current or voltage measurement sampling speed